Liquid coating system
    1.
    发明授权
    Liquid coating system 失效
    液体涂层系统

    公开(公告)号:US5374312A

    公开(公告)日:1994-12-20

    申请号:US144492

    申请日:1993-11-01

    摘要: A liquid coating system according to the present invention comprises, a liquid supply source, a nozzle having an inlet communicating with the liquid supply source and a substantially linear liquid discharge portion, a pressure feed unit for feeding the liquid under pressure from the liquid supply source to the nozzle by means of compressed gas, a spin chuck for fixedly supporting a semiconductor wafer, an up-and-down cylinder for causing the liquid discharge portion of the nozzle to closely face the wafer on the spin chuck, and a rotating mechanism for rotating the spin chuck. The nozzle includes a liquid reservoir, in which the liquid supplied from the liquid supply source is collected, and a large number of small passages communicating with the liquid reservoir. The liquid coating system further comprises an air operation valve disposed in a communication passage between the inlet of the nozzle and the liquid supply source and used to reduce the pressure of the liquid fed under pressure to the liquid reservoir.

    摘要翻译: 根据本发明的液体涂覆系统包括:液体供应源,具有与液体供应源连通的入口和基本上线性的液体排出部分的喷嘴;压力供给单元,用于在液体供应源 通过压缩气体到喷嘴,用于固定地支撑半导体晶片的旋转卡盘,用于使喷嘴的液体排出部分紧密地面对旋转卡盘上的晶片的上下缸体,以及用于 旋转旋转卡盘。 喷嘴包括从液体供应源供应的液体被收集的液体储存器和与液体储存器连通的大量小通道。 液体涂布系统还包括设置在喷嘴入口和液体供应源之间的连通通道中的空气操作阀,用于将在压力下供给的液体的压力降低到液体储存器。

    Lamp reflector and method of manufacturing the same
    3.
    发明授权
    Lamp reflector and method of manufacturing the same 失效
    灯反射器及其制造方法

    公开(公告)号:US06472458B2

    公开(公告)日:2002-10-29

    申请号:US09749652

    申请日:2000-12-28

    IPC分类号: C08K300

    摘要: A lamp reflector having a substrate in which desired surface smoothness and rigidity are ensured, while the dimensional accuracy is high. Also, a method of manufacturing such a lamp reflector. In order to ensure surface smoothness, rigidity, and high dimensional accuracy, the lamp reflector is provided with a substrate made of a composition containing at least polyphenylene sulfide resin (PPS resin), synthetic calcium carbonate whiskers, and synthetic calcium carbonate (CaCO3). And the method for manufacturing this lamp reflector includes injection molding using high-pressure gas.

    摘要翻译: 具有确保所需表面平滑度和刚性的基板的灯反射器,而尺寸精度高。 另外,制造这种灯反射体的方法。 为了确保表面平滑性,刚性和高尺寸精度,灯反射器设置有由至少含有聚苯硫醚树脂(PPS树脂),合成碳酸钙晶须和合成碳酸钙(CaCO 3)组成的基板。 制造该灯反射体的方法包括使用高压气体的注射成型。

    Lighting device and illumination apparatus using same
    4.
    发明授权
    Lighting device and illumination apparatus using same 有权
    照明装置及照明装置

    公开(公告)号:US08669718B2

    公开(公告)日:2014-03-11

    申请号:US13541044

    申请日:2012-07-03

    IPC分类号: H05B37/02

    CPC分类号: H05B33/0842 H05B33/0815

    摘要: An LED lighting device includes: a power source unit for supplying the DC output voltage to a light-emitting diode; a control unit for adjusting the DC output voltage; and a control power source unit for supplying a control power to the control unit. The control power source unit generates the control power with the DC output voltage and has: a current-limiting resistor for limiting an electric current that flows from the power source unit to the control unit; a constant voltage unit for converting a voltage to be applied to the control unit through the current-limiting resistor unit to a constant voltage; and a switching unit for switching a resistance value of the current-limiting resistor unit among a plurality of resistance values.

    摘要翻译: 一种LED照明装置,包括:电源单元,用于将DC输出电压提供给发光二极管; 用于调整DC输出电压的控制单元; 以及用于向控制单元提供控制电力的控制电源单元。 所述控制电源单元利用所述直流输出电压生成所述控制电力,并具有限制从所述电源单元流向所述控制单元的电流的限流电阻; 用于将通过限流电阻器单元施加到控制单元的电压转换为恒定电压的恒压单元; 以及切换单元,用于在多个电阻值之间切换限流电阻器单元的电阻值。

    Substrate processing apparatus and information storage apparatus and method

    公开(公告)号:US06990380B2

    公开(公告)日:2006-01-24

    申请号:US10023898

    申请日:2001-12-21

    IPC分类号: G05B11/01

    摘要: An object of the present invention is to grasp easily a process history of a target object such as a semiconductor wafer. The processing apparatus of the present invention includes: a processing apparatus body which includes a plurality of process units for executing a prescribed process to a target object, and transport mechanism for transporting said target object between the process units; a first controller for controlling the processing apparatus as a whole; a second controller for controlling the process units; an information storage section for taking in a signal transmitted and received between the first and second controllers; and a host computer for monitoring operation states of the process units. The present invention is extended to a processing system including a plurality of the processing apparatuses connected with a host computer which is further connected with a monitor computer through a communication network.

    Processing apparatus and information storage apparatus and method

    公开(公告)号:US07031792B2

    公开(公告)日:2006-04-18

    申请号:US10114248

    申请日:2002-04-03

    IPC分类号: G06F19/00 H01L21/30

    CPC分类号: G11C29/006

    摘要: A processing apparatus comprises a process apparatus body equipped with a plurality of process sections for applying a predetermined processing to a target object and a transfer device for transferring the target object among the process sections, a first control section for controlling the entire process apparatus body including the transfer device, a second control section for controlling the plural process sections, an information storage section receiving the signal exchanged between the first control section and the second control section and storing a plurality of information including the information corresponding to the received signal, and an information storage selecting mechanism for selecting the storing frequency of the information to the information storage section in accordance with the kind of the information.

    Transportation-transfer device for an object of treatment
    9.
    发明授权
    Transportation-transfer device for an object of treatment 失效
    用于治疗对象的运输转运装置

    公开(公告)号:US5297910A

    公开(公告)日:1994-03-29

    申请号:US834819

    申请日:1992-02-13

    摘要: A device for transporting and transferring objects of treatment arranged in a down flow to a plurality of treatment sections for treating the objects comprises a transportation section movable between the treatment sections, a first drive mechanism for moving the transportation section, a first arm movably attached to the transportation section and used for those objects of treatment which are adjusted to a predetermined temperature in the treatment sections, a second arm movably attached to the transportation section and used for the other objects of treatment than the ones adjusted in temperature, and a second drive mechanism for separately moving the first and second arms.

    摘要翻译: 一种用于输送和传送处理物体的装置,用于将处理物体输送到多个用于处理物体的处理部分的处理部分包括可在处理部分之间移动的传送部分,用于移动传送部分的第一驱动机构,可移动地附接到 所述输送部用于在所述处理部中被调整为规定温度的所述处理对象物,所述第二臂可移动地安装于所述输送部并用于所述其他治疗对象,而不是温度调节对象的第二驱动 用于分别移动第一和第二臂的机构。