摘要:
A liquid coating system according to the present invention comprises, a liquid supply source, a nozzle having an inlet communicating with the liquid supply source and a substantially linear liquid discharge portion, a pressure feed unit for feeding the liquid under pressure from the liquid supply source to the nozzle by means of compressed gas, a spin chuck for fixedly supporting a semiconductor wafer, an up-and-down cylinder for causing the liquid discharge portion of the nozzle to closely face the wafer on the spin chuck, and a rotating mechanism for rotating the spin chuck. The nozzle includes a liquid reservoir, in which the liquid supplied from the liquid supply source is collected, and a large number of small passages communicating with the liquid reservoir. The liquid coating system further comprises an air operation valve disposed in a communication passage between the inlet of the nozzle and the liquid supply source and used to reduce the pressure of the liquid fed under pressure to the liquid reservoir.
摘要:
Chopped strands having a sizing agent impregnated on glass fiber strands, to be used for a molded product of unsaturated polyester resin BMC, wherein the sizing agent comprises a urethane resin, a vinyl acetate resin and a silane coupling agent, and wherein the mass ratio of the urethane resin to the vinyl acetate resin is from 30:70 to 70:30.
摘要:
A lamp reflector having a substrate in which desired surface smoothness and rigidity are ensured, while the dimensional accuracy is high. Also, a method of manufacturing such a lamp reflector. In order to ensure surface smoothness, rigidity, and high dimensional accuracy, the lamp reflector is provided with a substrate made of a composition containing at least polyphenylene sulfide resin (PPS resin), synthetic calcium carbonate whiskers, and synthetic calcium carbonate (CaCO3). And the method for manufacturing this lamp reflector includes injection molding using high-pressure gas.
摘要:
An LED lighting device includes: a power source unit for supplying the DC output voltage to a light-emitting diode; a control unit for adjusting the DC output voltage; and a control power source unit for supplying a control power to the control unit. The control power source unit generates the control power with the DC output voltage and has: a current-limiting resistor for limiting an electric current that flows from the power source unit to the control unit; a constant voltage unit for converting a voltage to be applied to the control unit through the current-limiting resistor unit to a constant voltage; and a switching unit for switching a resistance value of the current-limiting resistor unit among a plurality of resistance values.
摘要:
An object of the present invention is to grasp easily a process history of a target object such as a semiconductor wafer. The processing apparatus of the present invention includes: a processing apparatus body which includes a plurality of process units for executing a prescribed process to a target object, and transport mechanism for transporting said target object between the process units; a first controller for controlling the processing apparatus as a whole; a second controller for controlling the process units; an information storage section for taking in a signal transmitted and received between the first and second controllers; and a host computer for monitoring operation states of the process units. The present invention is extended to a processing system including a plurality of the processing apparatuses connected with a host computer which is further connected with a monitor computer through a communication network.
摘要:
An apparatus for subjecting a plurality of wafers to coating and heating treatments, including a coating section for subjecting the wafers to a coating treatment one by one, a heating section for subjecting wafers which have undergone the coating treatment to a heating treatment all together, and an interface section arranged between the coating section and the heating section. The wafers are heat-treated in the heat treatment section while the wafers are stacked at intervals in a vertical direction in a boat. The wafers which have undergone the coating treatment are loaded into the boat by a conveying member in the interface section. The conveying member and the boat are surrounded by a surrounding space formed by a casing at the interface section. A circulation line is combined with an air supply and exhaust system, for circulating air in the surrounding space. A dehumidifier is arranged on the circulation line for dehumidifying air in the circulation line to provide localized dehumidification of the surrounding space formed by the casing.
摘要:
A processing apparatus comprises a process apparatus body equipped with a plurality of process sections for applying a predetermined processing to a target object and a transfer device for transferring the target object among the process sections, a first control section for controlling the entire process apparatus body including the transfer device, a second control section for controlling the plural process sections, an information storage section receiving the signal exchanged between the first control section and the second control section and storing a plurality of information including the information corresponding to the received signal, and an information storage selecting mechanism for selecting the storing frequency of the information to the information storage section in accordance with the kind of the information.
摘要:
A molding composition for a lamp reflector is disclosed, which comprises an unsaturated polyester resin, glass fiber, inorganic filler and a thermoplastic resin in an amount effective for preventing shrinkage of the molding composition during curing of the composition to form the lamp reflector; and a process for producing the lamp reflector and a lamp reflector produced by molding the molding composition are also disclosed.
摘要:
A device for transporting and transferring objects of treatment arranged in a down flow to a plurality of treatment sections for treating the objects comprises a transportation section movable between the treatment sections, a first drive mechanism for moving the transportation section, a first arm movably attached to the transportation section and used for those objects of treatment which are adjusted to a predetermined temperature in the treatment sections, a second arm movably attached to the transportation section and used for the other objects of treatment than the ones adjusted in temperature, and a second drive mechanism for separately moving the first and second arms.
摘要:
An unsaturated polyester resin composition containing 8 to 20% by weight of unsaturated polyester resin, 4 to 12% by weight of liquid thermoplastic resin, 8 to 20% by weight of glass fiber, and 50 to 75% by weight of inorganic filler, the unsaturated polyester resin containing 5.10 to 5.90 mmol/g of double bond group concentration, 1.50 to 2.50 mmol/g of ether linkage group concentration, 1.05 to 1.30 mmol/g of isopropylidene linkage group concentration, 2.50 to 3.50 mmol/g of ethylene linkage group concentration, and 3.20 to 3.60 mmol/g of methylene linkage group concentration per 1 g of unsaturated polyester.