公开(公告)号：US07045864B2

公开(公告)日：2006-05-16

申请号：US10170432

申请日：2002-06-14

申请人： Kota Funayama ,  Yasuko Yoshida ,  Masaru Nakamichi ,  Akio Nishida

发明人： Kota Funayama ,  Yasuko Yoshida ,  Masaru Nakamichi ,  Akio Nishida

IPC分类号： H01L29/76

CPC分类号： H01L27/11 ,  H01L21/823814 ,  H01L21/823835 ,  H01L27/092 ,  H01L27/1104 ,  Y10S257/903 ,  Y10S257/904

摘要： A semiconductor integrated circuit device, e.g., a memory cell of an SRAM, is formed of a pair of inverters having their input and output points connected in a crisscross manner and being formed of drive n-channel MISFETs and load p-channel MISFETs. The n-channel MISFETs and p-channel MISFETs have their back gates supplied with power supply voltage and a ground voltage, respectively. The MISFETs are formed with a metal silicide layer on the gate electrodes G and source regions (hatched areas) and without the formation of a metal silicide layer on the drain regions, respectively, whereby the leakage current of the MISFETs due to a voltage difference between the drain regions and wells can be reduced, and, thus, the power consumption can be reduced.

摘要翻译： 诸如SRAM的存储单元的半导体集成电路器件由一对反相器形成，它们的输入和输出点以十字交叉的方式连接并且由驱动n沟道MISFET和负载p沟道MISFET形成。 n沟道MISFET和p沟道MISFET分别具有电源电压和接地电压的后门。 MISFET在栅极电极G和源极区域（阴影区域）上形成有金属硅化物层，并且在漏极区域上不形成金属硅化物层，由此由于MISFET的漏电流由于 可以减少漏区和阱，从而可以降低功耗。

公开(公告)号：US07666728B2

公开(公告)日：2010-02-23

申请号：US12028593

申请日：2008-02-08

申请人： Shuji Matsuo ,  Katsuhiro Uchimura ,  Yasuko Yoshida ,  Kota Funayama ,  Yutaka Takeshima

发明人： Shuji Matsuo ,  Katsuhiro Uchimura ,  Yasuko Yoshida ,  Kota Funayama ,  Yutaka Takeshima

IPC分类号： H01L21/336 ,  H01L21/8234 ,  H01L21/3205 ,  H01L21/4763 ,  H01L21/302

CPC分类号： H01L29/665 ,  H01L21/28518 ,  H01L21/76832 ,  H01L21/76834 ,  H01L21/823814 ,  H01L21/823835 ,  H01L21/823842 ,  H01L29/6656 ,  H01L29/6659 ,  H01L29/7833 ,  H01L29/7842

摘要： A method of manufacture of a semiconductor device includes forming a gate insulating film and gate electrode made of polycrystalline silicon over a semiconductor substrate; implanting ions into the semiconductor substrate to form a semiconductor region as a source or drain; forming a cobalt film and a titanium nitride film over the semiconductor substrate to cover the gate electrode; carrying out annealing to cause a reaction between Co and Si and the semiconductor region to form a CoSi layer; carrying out wet cleaning to remove the titanium nitride film and unreacted cobalt film to leave the CoSi layer over the gate electrode and semiconductor region; carrying out annealing to cause a reaction between the CoSi layer and the gate electrode and semiconductor region to form a CoSi2 layer; carrying out HPM cleaning; and forming over the semiconductor substrate a silicon nitride film by low-pressure CVD to cover the gate electrode.

摘要翻译： 半导体器件的制造方法包括在半导体衬底上形成栅极绝缘膜和由多晶硅制成的栅电极; 将离子注入到半导体衬底中以形成作为源极或漏极的半导体区域; 在所述半导体衬底上形成钴膜和氮化钛膜以覆盖所述栅电极; 进行退火以引起Co和Si之间的反应以及半导体区域以形成CoSi层; 进行湿式清洗以除去氮化钛膜和未反应的钴膜，使CoSi层离开栅电极和半导体区域; 进行退火以引起CoSi层与栅极电极和半导体区域之间的反应以形成CoSi 2层; 进行HPM清洗; 以及通过低压CVD在半导体衬底上形成氮化硅膜以覆盖栅电极。

公开(公告)号：US07348230B2

公开(公告)日：2008-03-25

申请号：US11008276

申请日：2004-12-10

申请人： Shuji Matsuo ,  Katsuhiro Uchimura ,  Yasuko Yoshida ,  Kota Funayama ,  Yutaka Takeshima

发明人： Shuji Matsuo ,  Katsuhiro Uchimura ,  Yasuko Yoshida ,  Kota Funayama ,  Yutaka Takeshima

IPC分类号： H01L21/336

CPC分类号： H01L29/665 ,  H01L21/28518 ,  H01L21/76832 ,  H01L21/76834 ,  H01L21/823814 ,  H01L21/823835 ,  H01L21/823842 ,  H01L29/6656 ,  H01L29/6659 ,  H01L29/7833 ,  H01L29/7842

摘要： A method of manufacture of a semiconductor device includes forming a gate insulating film and a gate electrode made of polycrystalline silicon over a semiconductor substrate; implanting ions into the semiconductor substrate to form a semiconductor region as a source or drain; forming a cobalt film and a titanium nitride film over the semiconductor substrate to cover the gate electrode; carrying out annealing to cause a reaction between Co and Si and the semiconductor region to form a CoSi layer; carrying out wet cleaning to remove the titanium nitride film and unreacted cobalt film to leave the CoSi layer over the gate electrode and semiconductor region; carrying out annealing to cause a reaction between the CoSi layer and the gate electrode and semiconductor region to form a CoSi2 layer; carrying out HPM cleaning; and forming over the semiconductor substrate a silicon nitride film by low-pressure CVD to cover the gate electrode.

摘要翻译： 一种制造半导体器件的方法包括在半导体衬底上形成栅极绝缘膜和由多晶硅制成的栅电极; 将离子注入到半导体衬底中以形成作为源极或漏极的半导体区域; 在所述半导体衬底上形成钴膜和氮化钛膜以覆盖所述栅电极; 进行退火以引起Co和Si之间的反应以及半导体区域以形成CoSi层; 进行湿式清洗以除去氮化钛膜和未反应的钴膜，使CoSi层离开栅极电极和半导体区域; 进行退火以引起CoSi层和栅极电极和半导体区域之间的反应以形成CoSi 2 O 3层; 进行HPM清洗; 以及通过低压CVD在半导体衬底上形成氮化硅膜以覆盖栅电极。

公开(公告)号：US06403446B1

公开(公告)日：2002-06-11

申请号：US09536447

申请日：2000-03-28

申请人： Norio Ishitsuka ,  Hideo Miura ,  Shuji Ikeda ,  Yasuko Yoshida ,  Norio Suzuki ,  Masayuki Kojima ,  Kota Funayama

发明人： Norio Ishitsuka ,  Hideo Miura ,  Shuji Ikeda ,  Yasuko Yoshida ,  Norio Suzuki ,  Masayuki Kojima ,  Kota Funayama

IPC分类号： H01L2176

CPC分类号： H01L21/76232 ,  Y10S148/05

摘要： Manufacturing a semiconductor device avoiding an increase of transistor leak current or reduction of the withstanding voltage characteristics is by at least one of: The pad oxide film is removed along the substrate surface from the upper edge of the groove over a distance ranging from 5 to 40 nm: The exposed surface of the semiconductor substrate undergoes removal by isotropic etching within 20 nm; and oxidizing a groove portion formed in a semiconductor substrate in an oxidation environment with a gas ratio of hydrogen (H2) to oxygen (O2) being less than or equal to 0.5, an increase of the curvature radius beyond 3nm is achieved without associating the risk of creation of any level difference on the substrate surface at or near the upper groove edge portions in a groove separation structure. This eliminates either an increase of transistor leak current or reduction of the withstanding voltage characteristics thereof otherwise occurring due to local electric field concentration near or around the terminate ends of a gate electrode film which in turn leads to an ability to improve electrical reliability of transistors used.

摘要翻译： 制造半导体器件避免晶体管泄漏电流的增加或耐压特性的降低是至少以下之一：衬垫氧化膜沿着衬底表面从沟槽的上边缘移除5至40的距离 nm：通过各向同性蚀刻在20nm内去除半导体衬底的暴露表面; 并且在氧（H2）与氧气（O2）的气体比小于或等于0.5的氧化环境中氧化形成在半导体衬底中的沟槽部分，实现曲率半径超过3nm的增加，而不会使风险 在槽分离结构中的上槽边缘部分处或附近在基板表面上产生任何水平差。 这消除了晶体管泄漏电流的增加或由于栅极电极膜的端部附近或周围的局部电场浓度而导致的耐压特性的降低，这进而导致提高使用的晶体管的电可靠性的能力 。

公开(公告)号：US6090684A

公开(公告)日：2000-07-18

申请号：US363184

申请日：1999-07-29

申请人： Norio Ishitsuka ,  Hideo Miura ,  Shuji Ikeda ,  Yasuko Yoshida ,  Norio Suzuki ,  Masayuki Kojima ,  Kota Funayama

发明人： Norio Ishitsuka ,  Hideo Miura ,  Shuji Ikeda ,  Yasuko Yoshida ,  Norio Suzuki ,  Masayuki Kojima ,  Kota Funayama

IPC分类号： H01L21/76 ,  H01L21/762 ,  H01L29/78

CPC分类号： H01L21/76232 ,  Y10S148/05

摘要： A shallow groove isolation structure (SGI) electrically insulates adjoining transistors on a semiconductor substrate. A pad oxide film is formed on the semiconductor substrate and an oxidation inhibition film is formed on the pad oxide film. Parts of the oxide inhibition film and pad oxide film are removed to form the groove. In particular, the pad oxide film is removed from an upper edge of the groove within a range of 5 to 40 nm. A region of the groove is oxidized in an oxidation environment with a cast ratio of hydrogen (H.sub.2) to oxygen (O.sub.2) being less than or equal to 0.5. At this ratio, the oxidizing progresses under low stress at the upper groove edges of the substrate thereby enabling rounding of the upper groove edges without creating a level difference at or near the upper groove edge on the substrate surface.

摘要翻译： 浅沟隔离结构（SGI）使半导体衬底上的相邻晶体管电绝缘。 在半导体基板上形成衬垫氧化膜，在衬垫氧化膜上形成氧化抑制膜。 除去氧化物抑制膜和垫氧化膜的一部分以形成槽。 特别地，在5〜40nm的范围内，从槽的上边缘去除衬垫氧化膜。 凹槽的区域在氢（H 2）与氧（O 2）的铸造比小于或等于0.5的氧化环境中被氧化。 在该比例下，在基板的上槽边缘处的低应力下氧化进行，从而能够在上槽边缘的四舍五入，而不会在基板表面上的上槽边缘处或附近产生水平差。

公开(公告)号：US20050145897A1

公开(公告)日：2005-07-07

申请号：US11008276

申请日：2004-12-10

申请人： Shuji Matsuo ,  Katsuhiro Uchimura ,  Yasuko Yoshida ,  Kota Funayama ,  Yutaka Takeshima

发明人： Shuji Matsuo ,  Katsuhiro Uchimura ,  Yasuko Yoshida ,  Kota Funayama ,  Yutaka Takeshima

IPC分类号： H01L21/28 ,  H01L21/285 ,  H01L21/304 ,  H01L21/318 ,  H01L21/336 ,  H01L21/768 ,  H01L21/8238 ,  H01L23/522 ,  H01L27/092 ,  H01L29/417 ,  H01L29/78 ,  H01L21/3205 ,  H01L29/76 ,  H01L31/062

CPC分类号： H01L29/665 ,  H01L21/28518 ,  H01L21/76832 ,  H01L21/76834 ,  H01L21/823814 ,  H01L21/823835 ,  H01L21/823842 ,  H01L29/6656 ,  H01L29/6659 ,  H01L29/7833 ,  H01L29/7842

摘要： A method of manufacture of a semiconductor device includes forming a gate insulating film and a gate electrode made of polycrystalline silicon over a semiconductor substrate; implanting ions into the semiconductor substrate to form a semiconductor region as a source or drain; forming a cobalt film and a titanium nitride film over the semiconductor substrate to cover the gate electrode; carrying out annealing to cause a reaction between Co and Si and the semiconductor region to form a CoSi layer; carrying out wet cleaning to remove the titanium nitride film and unreacted cobalt film to leave the CoSi layer over the gate electrode and semiconductor region; carrying out annealing to cause a reaction between the CoSi layer and the gate electrode and semiconductor region to form a CoSi2 layer; carrying out HPM cleaning; and forming over the semiconductor substrate a silicon nitride film by low-pressure CVD to cover the gate electrode.

摘要翻译： 一种制造半导体器件的方法包括在半导体衬底上形成栅极绝缘膜和由多晶硅制成的栅电极; 将离子注入到半导体衬底中以形成作为源极或漏极的半导体区域; 在所述半导体衬底上形成钴膜和氮化钛膜以覆盖所述栅电极; 进行退火以引起Co和Si之间的反应以及半导体区域以形成CoSi层; 进行湿式清洗以除去氮化钛膜和未反应的钴膜，使CoSi层离开栅电极和半导体区域; 进行退火以引起CoSi层和栅极电极和半导体区域之间的反应以形成CoSi 2 O 3层; 进行HPM清洗; 以及通过低压CVD在半导体衬底上形成氮化硅膜以覆盖栅电极。

公开(公告)号：US20080142901A1

公开(公告)日：2008-06-19

申请号：US12028593

申请日：2008-02-08

申请人： Shuji MATSUO ,  Katsuhiro Uchimura ,  Yasuko Yoshida ,  Kota Funayama ,  Yutaka Takeshima

发明人： Shuji MATSUO ,  Katsuhiro Uchimura ,  Yasuko Yoshida ,  Kota Funayama ,  Yutaka Takeshima

IPC分类号： H01L27/088

CPC分类号： H01L29/665 ,  H01L21/28518 ,  H01L21/76832 ,  H01L21/76834 ,  H01L21/823814 ,  H01L21/823835 ,  H01L21/823842 ,  H01L29/6656 ,  H01L29/6659 ,  H01L29/7833 ,  H01L29/7842

摘要： A method of manufacture of a semiconductor device includes forming a gate insulating film and gate electrode made of polycrystalline silicon over a semiconductor substrate; implanting ions into the semiconductor substrate to form a semiconductor region as a source or drain; forming a cobalt film and a titanium nitride film over the semiconductor substrate to cover the gate electrode; carrying out annealing to cause a reaction between Co and Si and the semiconductor region to form a CoSi layer; carrying out wet cleaning to remove the titanium nitride film and unreacted cobalt film to leave the CoSi layer over the gate electrode and semiconductor region; carrying out annealing to cause a reaction between the CoSi layer and the gate electrode and semiconductor region to form a CoSi2 layer; carrying out HPM cleaning; and forming over the semiconductor substrate a silicon nitride film by low-pressure CVD to cover the gate electrode.

摘要翻译： 半导体器件的制造方法包括在半导体衬底上形成栅极绝缘膜和由多晶硅制成的栅电极; 将离子注入到半导体衬底中以形成作为源极或漏极的半导体区域; 在所述半导体衬底上形成钴膜和氮化钛膜以覆盖所述栅电极; 进行退火以引起Co和Si之间的反应以及半导体区域以形成CoSi层; 进行湿式清洗以除去氮化钛膜和未反应的钴膜，使CoSi层离开栅电极和半导体区域; 进行退火以引起CoSi层与栅极电极和半导体区域之间的反应以形成CoSi 2层; 进行HPM清洗; 以及通过低压CVD在半导体衬底上形成氮化硅膜以覆盖栅电极。

公开(公告)号：US20060128094A1

公开(公告)日：2006-06-15

申请号：US11342695

申请日：2006-01-31

申请人： Akio Nishida ,  Yasuko Yoshida ,  Shuji Ikeda

发明人： Akio Nishida ,  Yasuko Yoshida ,  Shuji Ikeda

IPC分类号： H01L21/8242

CPC分类号： H01L27/11 ,  H01L27/1104

摘要： In order to provide a semiconductor integrated circuit device such as a high-performance semiconductor integrated circuit device capable of reducing a soft error developed in each memory cell of a SRAM, the surface of a wiring of a cross-connecting portion, of a SRAM memory cell having a pair of n-channel type MISFETs whose gate electrodes and drains are respectively cross-connected, is formed in a shape that protrudes from the surface of a silicon oxide film. A silicon nitride film used as a capacitive insulating film, and an upper electrode are formed on the wiring. A capacitance can be formed of the wiring, the silicon nitride film and the upper electrode.

摘要翻译： 为了提供一种半导体集成电路器件，例如能够减少在SRAM的每个存储单元中产生的软错误的高性能半导体集成电路器件，SRAM存储器的交叉连接部分的布线表面 其栅电极和漏极分别交叉连接的一对n沟道型MISFET形成为从氧化硅膜的表面突出的形状。 在布线上形成用作电容绝缘膜的氮化硅膜和上电极。 电容可以由布线，氮化硅膜和上电极形成。

公开(公告)号：US20090218608A1

公开(公告)日：2009-09-03

申请号：US12362995

申请日：2009-01-30

申请人： Akio NISHIDA ,  Yasuko Yoshida ,  Shuji Ikeda

发明人： Akio NISHIDA ,  Yasuko Yoshida ,  Shuji Ikeda

IPC分类号： H01L27/11

CPC分类号： H01L27/11 ,  H01L27/1104

摘要： In order to provide a semiconductor integrated circuit device such as a high-performance semiconductor integrated circuit device capable of reducing a soft error developed in each memory cell of a SRAM, the surface of a wiring of a cross-connecting portion, of a SRAM memory cell having a pair of n-channel type MISFETs whose gate electrodes and drains are respectively cross-connected, is formed in a shape that protrudes from the surface of a silicon oxide film. A silicon nitride film used as a capacitive insulating film, and an upper electrode are formed on the wiring. A capacitance can be formed of the wiring, the silicon nitride film and the upper electrode.

摘要翻译： 为了提供一种半导体集成电路器件，例如能够减少在SRAM的每个存储单元中产生的软错误的高性能半导体集成电路器件，SRAM存储器的交叉连接部分的布线表面 其栅电极和漏极分别交叉连接的一对n沟道型MISFET形成为从氧化硅膜的表面突出的形状。 在布线上形成用作电容绝缘膜的氮化硅膜和上电极。 电容可以由布线，氮化硅膜和上电极形成。

公开(公告)号：US06897499B2

公开(公告)日：2005-05-24

申请号：US10359678

申请日：2003-02-07

申请人： Akio Nishida ,  Noriyuki Yabuoshi ,  Yasuko Yoshida ,  Kazuhiro Komori ,  Sousuke Tsuji ,  Hideo Miwa ,  Mitsuhiro Higuchi ,  Koichi Imato

发明人： Akio Nishida ,  Noriyuki Yabuoshi ,  Yasuko Yoshida ,  Kazuhiro Komori ,  Sousuke Tsuji ,  Hideo Miwa ,  Mitsuhiro Higuchi ,  Koichi Imato

IPC分类号： H01L21/8234 ,  G11C11/412 ,  H01L21/335 ,  H01L21/8244 ,  H01L27/088 ,  H01L27/105 ,  H01L27/11 ,  H01L29/423 ,  H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

CPC分类号： H01L27/11 ,  G11C11/412 ,  H01L27/105 ,  H01L27/1104 ,  H01L27/1116 ,  H01L29/4238

摘要： A gate electrode of each MISFET is formed on a substrate in an active region whose periphery is defined by an element isolation trench, and crosses the active region so as to extend from one end thereof to the other end thereof. The gate electrode has a gate length in a boundary region defined between the active region and the element isolation trench which is greater than a gate length in a central portion of the active region. The gate electrode is configured in an H-type flat pattern. Further, the gate electrode covers the whole of one side extending along a gate-length direction, of the boundary region defined between the active region L and the element isolation trench, and parts of two sides thereof extending along a gate-width direction. The MISFETs are formed in electrically separated wells and are connected in series to constitute part of a reference voltage generating circuit.

摘要翻译： 每个MISFET的栅电极形成在其周围由元件隔离沟槽限定的有源区中的衬底上，并且穿过有源区从其一端延伸到另一端。 栅极电极在有源区域和元件隔离沟槽之间限定的边界区域中的栅极长度大于有源区域的中心部分中的栅极长度。 栅电极配置为H型平面图案。 此外，栅电极覆盖沿着栅极长度方向延伸的整个一侧，限定在有源区域L和元件隔离沟槽之间的边界区域以及沿栅极宽度方向延伸的两侧的部分。 MISFET形成在电分离的阱中并且串联连接以构成参考电压产生电路的一部分。