摘要:
A method of fabricating an array of micro electrodes enabled to have customizable lengths. A substantially criss-cross pattern of channels on a top surface of the work-piece substrate (10) is formed using electrical discharge machining to form a plurality of shaped columns (20) having tapered profiles. The shaped columns have a tapering profile which extends at least 50% of the length of the columns. The plurality of shaped columns is etched to sharpen the tapered tips into needle tips forming the array of microelectrodes.
摘要:
A method of fabricating an array of micro electrodes enabled to have customizable lengths. A substantially criss-cross pattern of channels on a top surface of the work-piece substrate (10) is formed using electrical discharge machining to form a plurality of shaped columns (20) having tapered profiles. The shaped columns have a tapering profile which extends at least 50% of the length of the columns. The plurality of shaped columns is etched to sharpen the tapered tips into needle tips forming the array of microelectrodes.
摘要:
A hybrid optical-electrical neural interface is disclosed and described. The neural interface can include an array (100) having a plurality of micro-optrodes (HO). The micro-optrodes (110) are capable of optical and optionally electrical stimulation and recording, allowing bidirectional, multi-modal communication with neural tissue. At least a portion of the plurality of micro-optrodes (110) are independently optically addressable and include an optical waveguide along each micro-optrode (HO). Combining optical stimulation with electrical recording can allow artifact-free recording from nearby electrodes and in some cases even the same electrode, which is difficult to achieve with combined electrical recording and stimulation. The optical waveguide is configured to direct light towards a distal end (125) of the micro-optrode, allowing focal stimulation and recording. Penetrating micro-optrodes (110) can allow access to deep tissue, while non-penetrating micro-optrodes can be used for extraneural stimulation.
摘要:
A method for fabricating a photoelectric array device with an optical micro lens array (10) using a plurality of photovoltaic dies (12) so a lens (14) is aligned to each die (12) in the array device. A back surface (16) of a lens array substrate (10) is metallized with electrical conducting lines and interconnects (18). Fabricated photovoltaic dies are aligned to an alignment substrate using a fluidic capillary-driven alignment process. The plurality of aligned dies (12) is attached mechanically and electrically to the metallized lens array substrate (10), so the each die (12) aligns with a lens (14) in the lens array substrate (10). The alignment substrate is removed from the dies (12) attached to the lens array substrate (10). A back panel substrate (22) is coupled mechanically and electrically to the plurality of dies (12) attached to the lens array substrate (10).
摘要:
Interconnect metallization schemes and devices for flip chip bonding are disclosed and described. Metallization schemes include an adhesion layer, a diffusion barrier layer, a wetable layer, and a wetting stop layer. Various thicknesses and materials for use in the different layers are disclosed and are particularly useful for metallization in implantable electronic devices such as neural electrode arrays.
摘要:
Interconnect metallization schemes and devices for flip chip bonding are disclosed and described. Metallization schemes include an adhesion layer, a diffusion barrier layer, a wettable layer, and a wetting stop layer. Various thicknesses and materials for use in the different layers are disclosed and are particularly useful for metallization in implantable electronic devices such as neural electrode arrays.
摘要:
Methods for wafer-scale fabrication of needle arrays can include mechanically modifying a wafer to produce a plurality of vertically-extending columns. The columns are etched to round and reshape the columns into substantially uniformly shaped needles. Needle arrays having needle width non-uniformity of less than about 3% and length non-uniformity of less than about 2% can be produced.
摘要:
The present invention provides microelectrode array stabilizing devices and associated methods. A microelectrode array stabilizing device includes a first microelectrode array substrate having a plurality of first microelectrodes configured to penetrate tissue. A plurality of first interlocking structures are coupled to the first microelectrode array substrate, with each of the plurality of first interlocking structures including a first interlocking mechanism at a distal end. The device may further include a second microelectrode array substrate which optionally has a plurality of second microelectrodes configured to penetrate tissue. A plurality of second interlocking structures are coupled to the second microelectrode array substrate, each of the plurality of second interlocking structures including a second interlocking mechanism at a distal end. The second interlocking mechanism is complimentary to the first interlocking mechanism. The first microelectrode array and the second microelectrode array are configured to self-align and couple together with the first interlocking mechanism secured to the second interlocking mechanism.
摘要:
A method of fabricating a sub-millimeter scale curved surface on a substrate (10) includes cutting a plurality of trenches (12) of varying depth into the substrate (10). The depth of the trenches (12) corresponds to a desired surface profile. The substrate (10) is etched to remove material left (16) between the trenches to form the curved surface.
摘要:
A testing and analysis system for a pressure-sensitive device (42) that includes a testing stage (10) comprising a platform having a groove situated on an upper surface, an endless support gasket located in the endless groove, a pressure port located on the upper surface and interior to the endless groove, and a means for securing a substrate above the upper surface. The substrate (40) supports a pressure-sensitive device (42) to form a pressure chamber between the substrate (40) and the upper surface. A pressure source (32) is operatively connected to the pressure port to modify a pressure inside the pressure chamber and deflect the pressure-sensitive device (42). A surface profile measurement apparatus (104) is included for measuring a surface profile of the deflected pressure-sensitive device (42).