公开(公告)号：US20070269101A1

公开(公告)日：2007-11-22

申请号：US11782274

申请日：2007-07-24

申请人： Takashi HIROI ,  Masahiro WATANABE ,  Chie SHISHIDO ,  Aritoshi SUGIMOTO ,  Maki TANAKA ,  Hiroshi MIYAI ,  Asahiro KUNI ,  Yasuhiko NARA

发明人： Takashi HIROI ,  Masahiro WATANABE ,  Chie SHISHIDO ,  Aritoshi SUGIMOTO ,  Maki TANAKA ,  Hiroshi MIYAI ,  Asahiro KUNI ,  Yasuhiko NARA

IPC分类号： G06K9/00

CPC分类号： G01N21/9501 ,  G01N21/956 ,  G01N2021/8854 ,  G01N2021/8861 ,  G01N2021/8864 ,  G01R31/311 ,  G03F1/86 ,  G06T1/0007 ,  G06T7/0002 ,  G06T7/001 ,  G06T2200/24 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24592 ,  H01J2237/28

摘要： A pattern inspection apparatus including: an image detecting part for detecting a digital image of an object substrate; a display having a screen on which the digital image of the object substrate and/or a distribution of defect candidates in a map form are displayable; an input device for inputting information of a non-inspection region to be masked on the object substrate by defining a region on the screen on which said distribution of defect candidates is displayed in a map form; a memory part for storing coordinate data, pattern data or feature quantity data of the non-inspection region to be masked on the object substrate inputted on the screen by the input device; and a defect judging part in which the digital image detected by the image detecting part is examined in a state that a region matching with a condition stored in the memory part is masked and a defect is detected in a region other than said masked region.

摘要翻译： 一种图案检查装置，包括：图像检测部，用于检测对象基板的数字图像; 具有可以显示对象基板的数字图像的屏幕和/或以地图形式的缺陷候选的分布的显示器; 输入装置，用于通过在屏幕上定义要以掩模形式显示所述缺陷候选的分布的区域来输入要被掩蔽在对象基板上的不检查区域的信息; 用于存储由输入装置输入到屏幕上的待掩蔽的待检查区域的坐标数据，图案数据或特征量数据的存储部分; 以及缺陷判断部分，其中在与存储在存储器部分中的条件匹配的区域被屏蔽并且在除了所述屏蔽区域之外的区域中检测到缺陷的状态下，检查由图像检测部分检测到的数字图像。

公开(公告)号：US20080078933A1

公开(公告)日：2008-04-03

申请号：US11925142

申请日：2007-10-26

申请人： Masahiro WATANABE ,  Takashi Hiroi ,  Maki Tanaka ,  Hiroyuki Shinada ,  Yasutsugu Usami

发明人： Masahiro WATANABE ,  Takashi Hiroi ,  Maki Tanaka ,  Hiroyuki Shinada ,  Yasutsugu Usami

IPC分类号： G21K5/04

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/20 ,  H01J37/21 ,  H01J37/222 ,  H01J37/226 ,  H01J37/265 ,  H01J37/28 ,  H01J37/304 ,  H01J2237/20235 ,  H01J2237/20292 ,  H01J2237/216 ,  H01J2237/2445 ,  H01J2237/24578 ,  H01J2237/2482 ,  H01J2237/2487 ,  H01J2237/2814 ,  H01J2237/2817 ,  H01J2237/2826 ,  H01J2237/304 ,  H01J2237/3175

摘要： A method and apparatus for assessing a height of a specimen includes an electron beam unit having an electron beam source, lenses, a table for setting a specimen and controllable in a height direction, and a detector, and a height detection system for detecting height of the specimen set on the table while the specimen is irradiated by an electron beam. The height detection system further includes an illumination system, a collection system, first and second detectors, a device configured to receive output signals from the first and second detectors while the specimen is irradiated by the electron beam and to generate a comparison signal from the output signals, wherein the comparison signal is responsive to the height of the specimen.

摘要翻译： 用于评价试样的高度的方法和装置包括：电子束单元，具有电子束源，透镜，用于设置样本的台面并可在高度方向上控制;以及检测器，以及用于检测高度的高度检测系统 样本被放置在桌子上，而样品被电子束照射。 高度检测系统还包括照明系统，收集系统，第一和第二检测器，被配置为在样本被电子束照射的同时从第一和第二检测器接收输出信号并从输出产生比较信号的装置 信号，其中比较信号响应于样本的高度。

公开(公告)号：US20130048978A1

公开(公告)日：2013-02-28

申请号：US13592942

申请日：2012-08-23

申请人： Masahiro WATANABE ,  Mitsuo MASHIYAMA ,  Takuya HANDA ,  Kenichi OKAZAKI ,  Shunpei YAMAZAKI

发明人： Masahiro WATANABE ,  Mitsuo MASHIYAMA ,  Takuya HANDA ,  Kenichi OKAZAKI ,  Shunpei YAMAZAKI

IPC分类号： H01L29/22

CPC分类号： H01L29/7869 ,  H01L29/4908 ,  H01L29/66742 ,  H01L29/78696

摘要： Provided is a semiconductor device including an oxide semiconductor and having stable electrical characteristics. Specifically, a semiconductor device including an oxide semiconductor and including a gate insulating film with favorable characteristics is provided. Further, a method for manufacturing the semiconductor device is provided. The semiconductor device includes a gate electrode, a gate insulating film over the gate electrode, an oxide semiconductor film over the gate insulating film, and a source electrode and a drain electrode in contact with the oxide semiconductor film. The gate insulating film includes at least a silicon oxynitride film and an oxygen release type oxide film which is formed over the silicon oxynitride film. The oxide semiconductor film is formed on and in contact with the oxygen release type oxide film.

摘要翻译： 提供了包括氧化物半导体并且具有稳定的电特性的半导体器件。 具体地，提供了包括氧化物半导体并且包括具有有利特性的栅极绝缘膜的半导体器件。 此外，提供了一种用于制造半导体器件的方法。 半导体器件包括栅电极，栅电极上的栅极绝缘膜，栅极绝缘膜上的氧化物半导体膜，以及与氧化物半导体膜接触的源电极和漏电极。 栅极绝缘膜至少包括形成在氧氮化硅膜上的氮氧化硅膜和氧释放型氧化物膜。 氧化物半导体膜与氧释放型氧化物膜形成并接触。

公开(公告)号：US20100259751A1

公开(公告)日：2010-10-14

申请号：US12823510

申请日：2010-06-25

申请人： Sachio UTO ,  Minori NOGUCHI ,  Hidetoshi NISHIYAMA ,  Yoshimasa OHSHIMA ,  Akira HAMAMATSU ,  Takahiro JINGU ,  Toshihiko NAKATA ,  Masahiro WATANABE

发明人： Sachio UTO ,  Minori NOGUCHI ,  Hidetoshi NISHIYAMA ,  Yoshimasa OHSHIMA ,  Akira HAMAMATSU ,  Takahiro JINGU ,  Toshihiko NAKATA ,  Masahiro WATANABE

IPC分类号： G01N21/00

CPC分类号： G01N21/00 ,  G01N21/9501 ,  G06T7/0004 ,  G06T2207/30148

摘要： An inspecting apparatus and method including first and second illuminating units for illuminating a surface of a specimen to be inspected with different incident angles and first and second detecting optical units arranged at different elevation angle directions to the surface of the specimen for detecting images of the specimen illuminated by the first and second illuminating units.

摘要翻译： 一种检查装置和方法，包括：第一和第二照明单元，用于以不同的入射角照射待检查样本的表面;以及第一和第二检测光学单元，其以不同的仰角方向布置在样本的表面上，用于检测样本的图像 由第一和第二照明单元照亮。

公开(公告)号：US20130205454A1

公开(公告)日：2013-08-08

申请号：US13726764

申请日：2012-12-26

申请人： Shuichi BABA ,  Masahiro WATANABE ,  Toshihiko NAKATA ,  Yukio KEMBO ,  Toru KURENUMA ,  Takafumi MORIMOTO ,  Manabu EDAMURA ,  Satoshi SEKINO

发明人： Shuichi BABA ,  Masahiro WATANABE ,  Toshihiko NAKATA ,  Yukio KEMBO ,  Toru KURENUMA ,  Takafumi MORIMOTO ,  Manabu EDAMURA ,  Satoshi SEKINO

IPC分类号： G01Q10/00

CPC分类号： G01Q10/00 ,  B82Y35/00 ,  G01Q60/28 ,  G01Q60/34

摘要： In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.

摘要翻译： 在测量具有陡峭侧壁的图案的情况下，当接近图案侧壁时，探针通过作用在探针和侧壁之间的范德华力附着在侧壁上，并且在测量的轮廓中发生错误 侧壁部分。 当测量具有几乎等于探针直径的槽宽度的图案时，探针粘附到两个侧壁，探针不能到达凹槽底部，并且不能测量凹槽深度。 当使用细长的探针测量微观高纵横比图案时探头粘附到图案侧壁上时，通过检测探针与图案侧壁的粘附力使探针到达侧壁底部，并暂时增加 探针和样品之间的接触力。 此外，通过利用图案的形状数据获得悬臂的扭转量的数据，通过获得的扭转量的数据来校正侧壁部分的粘附的轮廓误差。

公开(公告)号：US20120063963A1

公开(公告)日：2012-03-15

申请号：US13278990

申请日：2011-10-21

申请人： Masahiro WATANABE ,  Hisao YAMASHITA ,  Kazutoshi HIGASHIYAMA ,  Toshihiro MIYAO ,  Aihua CHEN

发明人： Masahiro WATANABE ,  Hisao YAMASHITA ,  Kazutoshi HIGASHIYAMA ,  Toshihiro MIYAO ,  Aihua CHEN

IPC分类号： B01J23/755 ,  B01J23/89 ,  B01J7/00

CPC分类号： H01M8/0668 ,  B01J23/40 ,  B01J23/755 ,  B01J35/006 ,  B01J35/04 ,  B01J35/08 ,  B01J35/1019 ,  B01J35/1061 ,  B01J37/036 ,  B01J37/349 ,  C01B3/38 ,  C01B3/48 ,  C01B3/586 ,  C01B2203/0233 ,  C01B2203/0238 ,  C01B2203/0244 ,  C01B2203/025 ,  C01B2203/0283 ,  C01B2203/0445 ,  C01B2203/047 ,  C01B2203/066 ,  C01B2203/1241 ,  C01B2203/1258 ,  Y02E60/50 ,  Y02P20/52 ,  Y02P70/56

摘要： Provided is a new catalyst capable of removing carbon monoxide economically without adding particular reaction gas externally. Also provided are a process for producing and an apparatus using such a catalyst. Impregnation of a Ni—Al composite oxide precursor of a nonstoichiometric composition prepared by the solution-spray plasma technique with a ruthenium salt to be supported and performing reduction treatment allows CO methanation reaction to selectively proceed even in the high-temperature range in which CO2 methanation reaction and reverse water-gas-shift reaction proceed preferentially with conventional catalysts. Selective CO methanation reaction occurs reproducibly with another Ni—Al composite oxide precursor or an additive metallic species. Also, the low-temperature activity of CO methanation reaction can be improved through steps different from conventional catalyst production processes in producing such a catalyst material, whereby the temperature window the resulting catalyst material has can be utilized most effectively.

摘要翻译： 提供了能够经济地除去一氧化碳而不在外部添加特定反应气体的新型催化剂。 还提供了一种生产方法和使用这种催化剂的装置。 通过溶液喷射等离子体技术制备的非化学计量组合物的Ni-Al复合氧化物前体用待负载的钌盐进行还原处理，即使在CO 2甲烷化的高温范围内也可以选择性地进行CO甲烷化反应 反应和反向水煤气变换反应优先用常规催化剂进行。 选择性CO甲烷化反应与另一种Ni-Al复合氧化物前体或添加金属物质可再现发生。 此外，通过与生产这种催化剂材料的常规催化剂制备方法不同的步骤，可以提高CO甲烷化反应的低温活性，由此可以最有效地利用所得催化剂材料具有的温度窗口。

公开(公告)号：US20110114347A1

公开(公告)日：2011-05-19

申请号：US12945190

申请日：2010-11-12

申请人： Yoshihiro KASUYA ,  Masanori FURUSAWA ,  Hajime TAKEUCHI ,  Masahiro WATANABE

发明人： Yoshihiro KASUYA ,  Masanori FURUSAWA ,  Hajime TAKEUCHI ,  Masahiro WATANABE

IPC分类号： B25D17/00 ,  B23Q15/00 ,  B23Q5/027

CPC分类号： B25D17/043 ,  B25D11/005 ,  B25D2211/068 ,  B25D2250/101 ,  B25D2250/201 ,  B25D2250/205 ,  B25D2250/221 ,  B25F5/00

摘要： An effective technique for detecting several load conditions different in presence or absence and magnitude of load applied to a tool bit is provided in a hand-held tool. A hand-held tool 101 performs a predetermined operation while pressing a tool bit 119 mounted in a front end region of a tool body 103 against a workpiece. A plurality of detecting sensors 161 of different kinds detect several load conditions different in presence or absence and magnitude of load applied to the tool bit 119. The hand-held tool 101 includes at least one of an indicating device 171 which indicates the load conditions based on a result detected by the detecting sensors 161, and a driving control device 135 which controls driving of the tool bit 119 based on the detected result.

摘要翻译： 一种用于检测在施加到工具位上的负载存在或不存在和大小不同的多个负载条件的有效技术在手持工具中提供。 手持工具101在将安装在工具主体103的前端区域中的工具头119压靠在工件上的同时进行预定的操作。 多种不同种类的检测传感器161检测在施加到工具刀119的负载的存在或不存在和大小上不同的多个负载条件。手持工具101包括指示装置171中的至少一个，其指示基于负载条件 根据检测传感器161检测到的结果，以及基于检测结果控制工具位119的驱动的驱动控制装置135。

公开(公告)号：US20090104911A1

公开(公告)日：2009-04-23

申请号：US12253279

申请日：2008-10-17

申请人： Masahiro WATANABE ,  Makoto Yoshida

发明人： Masahiro WATANABE ,  Makoto Yoshida

IPC分类号： H04W36/00

CPC分类号： H04W36/30 ,  H04B7/15507 ,  H04W84/005 ,  H04W88/08

摘要： A communication control apparatus that is applied to a wireless communication system in which a mobile terminal can be connected to a fixed base station through a wireless connection to a relay station that is mounted on a moving body, wherein the communication control apparatus includes a detecting unit that detects a change, associated with movement of the moving body on which the relay station is mounted, of a communication environment between the mobile terminal and the relay station, a control unit that controls a handover of the mobile terminal according to the change, detected by the detecting unit, of communication environment between the mobile terminal and the relay station.

摘要翻译： 一种应用于无线通信系统的通信控制装置，其中移动终端可以通过无线连接与固定基站连接到安装在移动体上的中继站，其中通信控制装置包括检测单元 检测与所述移动终端与所述中继站之间的通信环境相关联的与所述中继站所在的移动体的移动相关联的变化，控制单元，其根据所述变化来控制所述移动终端的切换; 由检测单元检测移动终端与中继站之间的通信环境。

公开(公告)号：US20160378039A1

公开(公告)日：2016-12-29

申请号：US15177620

申请日：2016-06-09

申请人： Masahiro WATANABE ,  Tetsuro HIROTA

发明人： Masahiro WATANABE ,  Tetsuro HIROTA

IPC分类号： G03G15/08

CPC分类号： G03G15/556 ,  G03G15/0849 ,  G03G21/1652 ,  G03G21/1839

摘要： A developing device includes a developer bearer disposed opposite an image bearer and configured to rotate and carry developer to a latent image on the image bearer, a developer container to contain the developer, a detector including a detecting portion to detect a density of toner in the developer in the developer container, a wire connected to the detector, and a wire holder to hold the wire and determine a position of the wire relative to the detector.

摘要翻译： 显影装置包括与图像载体相对设置的显影剂载体，并被配置为使显影剂旋转并携带在图像载体上的潜像;显影剂容器，用于容纳显影剂;检测器，包括检测部分，以检测 显影剂容器中的显影剂，连接到检测器的电线和用于保持电线并且确定电线相对于检测器的位置的电线保持器。

公开(公告)号：US20160378021A1

公开(公告)日：2016-12-29

申请号：US15182088

申请日：2016-06-14

申请人： Masayuki YAMANE ,  Takeroh KURENUMA ,  Masahiro WATANABE

发明人： Masayuki YAMANE ,  Takeroh KURENUMA ,  Masahiro WATANABE

IPC分类号： G03G15/08

CPC分类号： G03G15/0865 ,  G03G15/0872

摘要： A powder container includes a rotatable powder storage to store powder for image formation, a conveyor to transport the powder inside the powder storage, and a scooping portion to scoop the powder inside the powder storage. The conveyor transports the powder in a powder conveyance direction parallel to a rotation axis of the powder storage toward an opening at one end of the powder storage. The scooping portion causes the powder to flow to the opening. The scooping portion includes a scooping face extending from an inner face of the powder storage toward the rotation axis of the powder storage, and a rim disposed along an inner end of the scooping face in a diameter direction of the powder storage, and at least a portion of the rim protruding downstream beyond the scooping face in a rotation direction of the powder storage.

摘要翻译： 粉末容器包括可转动的粉末储存器以存储用于图像形成的粉末，用于将粉末输送到粉末储存器内部的输送器，以及用于将粉末舀取在粉末储存器内的舀取部分。 输送机将粉末沿粉末输送方向平行于粉末储存器的旋转轴线朝向粉末储存器一端的开口输送。 舀取部分使粉末流入开口。 舀取部包括从粉末存储体的内表面朝向粉末存储体的旋转轴线延伸的舀取面，沿着粉末存储器的直径方向沿着舀取面的内端设置的边缘，并且至少一个 边缘的一部分在粉末储存器的旋转方向上向下突出到舀面的下方。