Processing system for semiconductor device manufacture of otherwise
    3.
    发明授权
    Processing system for semiconductor device manufacture of otherwise 失效
    用于其他半导体器件制造的加工系统

    公开(公告)号:US5871587A

    公开(公告)日:1999-02-16

    申请号:US625710

    申请日:1996-04-03

    摘要: A processing system includes a processing chamber, a circulating device for purifying an inside ambience gas of the processing chamber and for circulating the purified gas back into the processing chamber, a measuring device for measuring the purity of the ambience gas, and an adjusting device for adjusting the purification capacity of the purifying device in accordance with an output of the measuring device. In another form, a processing system includes a first processing chamber in which a first process is to be performed therein, a second processing chamber in which a second process is to be performed therein, and a device for introducing an ambience gas, having been used in said first processing chamber for the first process, into the second chamber for reuse thereof. The gas subsequently used in the second chamber is introduced back into the first chamber for reuse of the gas. At least a portion of the circulated gas is purified to improve its purity. A purity sensor detects the purity of gas discharged from the second chamber and, in accordance with the detection, the capacity of gas purification is adjusted.

    摘要翻译: 一种处理系统,包括处理室,用于净化处理室的室内气体并使纯化气体循环回处理室的循环装置,用于测量环境气体的纯度的测量装置,以及用于 根据测量装置的输出调节净化装置的净化能力。 在另一种形式中,处理系统包括其中要执行第一处理的第一处理室,要在其中执行第二处理的第二处理室,以及已经使用的环境气体引入装置 在用于第一工艺的所述第一处理室中,进入第二室以便重新使用。 随后在第二室中使用的气体被引回到第一室中,以重新利用气体。 循环气体的至少一部分被纯化以提高其纯度。 纯度传感器检测从第二室排出的气体的纯度,并且根据检测调整气体净化的容量。

    Sample supply device and sample inspection apparatus using the device
    5.
    发明授权
    Sample supply device and sample inspection apparatus using the device 失效
    样品供应装置和使用该装置的样品检查装置

    公开(公告)号:US5182617A

    公开(公告)日:1993-01-26

    申请号:US545589

    申请日:1990-06-29

    摘要: A sample supply device includes first and second sample supply means for independently receiving respective samples via a common channel and for supplying the samples to an inspection position. The device is controlled so that the second sample supply means performs a sample receiving operation and/or a washing operation with the channel, while the first sample supply means supplies the sample to the inspection position. A sample inspection apparatus inspects the sample at the inspection position principally using an optical method.

    摘要翻译: 样品供应装置包括第一和第二样品供应装置,用于经由公共通道独立地接收相应样品,并将样品供应到检查位置。 控制装置,使得第二样品供应装置在通道中进行样品接收操作和/或洗涤操作,而第一样品供应装置将样品供应到检查位置。 样本检查装置主要使用光学方法检查检查位置处的样品。

    Medical instrument control system
    6.
    发明授权
    Medical instrument control system 失效
    医疗仪器控制系统

    公开(公告)号:US06801913B2

    公开(公告)日:2004-10-05

    申请号:US09978212

    申请日:2001-10-17

    IPC分类号: G06F1730

    摘要: A medical-instrument service providing system receives an online order for a medical instrument via a communication network from a service utilizing terminal of a medical institution, accesses a stock control server controlled by a supplier of the medical instrument, to check whether or not the on-order medical instrument is in stock in the supplier. If the on-order medical instrument is in stock in the supplier, the system instructs to deliver the medical instrument to the medical institution. If the on-order medical instrument is insufficient in stock, the system accesses a stock control server, controlled by other institution than the medical instrument, to check whether or not the instrument is in stock, via the communication network. If the on-order medical instrument is in stock, the system instructs to supply the medical instrument to the medical institution from the other institution.

    摘要翻译: 医疗器械服务提供系统通过来自医疗机构的服务使用终端的通信网络接收医疗机构的在线订单,访问由医疗器械的供应商控制的库存控制服务器,以检查是否 在线订购医疗仪器在供应商库存。 如果订单中的医疗器械库存在供应商中,则系统指示将医疗器械交付给医疗机构。 如果订购医疗器械库存不足,则系统访问由医疗器械以外的机构控制的库存控制服务器,通过通信网络检查仪器是否库存。 如果订购的医疗器具库存,系统指示从其他机构向医疗机构提供医疗器械。

    Remote maintenance system
    9.
    发明授权
    Remote maintenance system 失效
    远程维护系统

    公开(公告)号:US07062343B2

    公开(公告)日:2006-06-13

    申请号:US11117455

    申请日:2005-04-29

    IPC分类号: G06F19/00

    摘要: Factories (102–104) have host computers (107) for monitoring industrial equipment (106). Each host computer (107) is connected to a management host computer (108) on a vendor (101) side through the internet (105). The host computer (107) on the factory side detects occurrence of a trouble of the industrial equipment (106) and notifies the vendor side of status information representing a trouble state. In response to this, the host computer (108) on the vendor side notifies the factory side of response information representing a countermeasure against the trouble state.

    摘要翻译: 工厂(102-104)拥有监控工业设备的主机(107)(106)。 每个主计算机(107)通过互联网(105)连接到供应商(101)侧的管理主机计算机(108)。 工厂侧的主计算机(107)检测工业设备(106)的故障的发生,并通知供应商侧表示故障状态的状态信息。 响应于此,供应方侧的主计算机(108)向工厂通知代表针对故障状态的对策的响应信息。