摘要:
A mask for exposing a wafer with radiation and its exposition method in which the radiation exposure mask is provided with at least two radiation exposure windows which each include a mask pattern of a smaller pattern area obtained by dividing a pattern area constituting an integrating circuit chip into a plurality of the areas, and a semiconductor wafer is exposed with radiation while the radiation exposure mask is intermittently moved by a distance of the size of the small pattern area.
摘要:
A focusing X-ray crystal monochromator in which one or more crystal layers having different spacings of lattice plane are stacked on a crystal base. Due to different spacings of lattice plane, the angle of reflection and diffraction of a diverging incident X-ray beam can be so changed that the beam takes a parallel or focusing direction for monochromatization. Thus, the monochromator of the present invention can be applied to the X-ray lithography for transferring a pattern of high resolution or the X-ray analysis such as the fine X-ray diffraction.
摘要:
There is disclosed a mask for X-ray lithography wherein a peroxopolytungsten compound is used as an absorber, and a process for producing the same. Since this compound has a sensitivity for electron beams and light and serves as an absorber for X-rays, a mask for X-ray lithorgraphy is made only by applying this compound to a substrate, exposing the same to light to form a transferred pattern, and effecting development. Thus, the step of etching the absorber which is essential in the conventional process, is not needed. Therefore, masks having a highly accurate pattern and few defects can be produced with a high production yield.
摘要:
A method of correcting a circuit pattern such as an X-ray mask, carried out by first preparing a circuit pattern structure where a circuit pattern on a conductive film is coated with a protective film, then forming a hole or a slit by irradiating a high-intensity focused ion beam to a dropout defective portion in the circuit pattern of the circuit pattern structure, and plating such hole or slit while utilizing the conductive film as a plating electrode, thereby forming a metal frame to correct the dropout defective portion.
摘要:
A cooling system that cools hot rolled long steel bar, provided with a plurality of chambers that are arranged along the longitudinal direction of the rolled steel bar. Each of the plurality of chambers is provided with a blow outlet that, facing from the chamber to the rolled steel bar, blows out compressed air for cooling that is introduced to the chamber from a gas inlet that is connected to the chamber; a nozzle plate having a plurality of nozzle holes that is provided at this blow outlet so as to face the rolled steel bar; a cooling water supply nozzle that supplies cooling water into the chamber; and a rectifying plate that is provided between the gas inlet and the cooling water supply nozzle, and that prevents the compressed gas for cooling that is introduced from the gas inlet from directly striking the nozzle plate. The cooling system of the present invention sprays a cooling medium that is produced by mixing the cooling water that is supplied from the cooling water supply nozzle and the compressed gas for cooling that is introduced from the gas inlet and rectified by the rectifying plate toward the rolled steel bar through the nozzle holes of the nozzle plate, and performs uniform cooling of the surfaces of the rolled steel bar.
摘要:
A vehicular vibration damping control apparatus calculates a correction torque to suppress vehicle body sprung vibration. In outputting a correction torque command to a driving/braking torque producing device, the control apparatus outputs a hunting time correction torque command smaller than a normal time correction toque command when a state in which amplitude of the correction torque is greater than or equal to a predetermined amplitude continues for a predetermined time length, and thereafter to return an output of the correction torque command from the hunting time correction torque command to the normal time correction torque command if a state in which the amplitude of the correction torque is smaller than or equal to the predetermined amplitude continues for a first predetermined time length. The frequency of performing the vibration damping control is increased by suppressing occurrence of hunting at the time of return to the normal vibration damping control.
摘要:
An electrical conductive member is provided with a base layer and a conductor. The base layer includes a first portion, a second portion extending at an angle relative to the first portion, and a curved portion connecting the first portion and the second portion. The conductor is arranged on a portion of the base layer.
摘要:
A measurement object holder that holds a measurement object in an optical measurement instrument, wherein the optical measurement instrument takes, as the measurement object, a living body in which isotropic scattering of light occurs inside and receives light emitted from the measurement object is disclosed. The measurement object holder includes a block that is formed in a predetermined outer shape by a material having optical properties in which the isotropic scattering of light occurs inside; and a cavity portion that is formed inside the block, that has an inner shape following the outer shape of the measurement object and in which the measurement object is accommodated.
摘要:
A vehicle driving assist system calculates a risk potential indicative of a degree of convergence between a host vehicle and a preceding obstacle. Then, the system performs a driver notification operation that produces a driver notification stimulus based on the risk potential such as decreasing the driving force exerted against the vehicle as the risk potential increases and increasing an actuation reaction force exerted on the accelerator pedal during its operation as the risk potential increases. If a failure is detected in a reaction force generating device serving to add a reaction force to the accelerator pedal in accordance with the risk potential, then the system corrects an engine torque characteristic such that the engine torque does not increase even if the accelerator pedal is depressed to suppress an odd feeling in the vehicle performance by the driver when a failure occurs in the reaction force generating device.
摘要:
Increase in power consumption and increase in power supply noise of a serial data input system are suppressed, while clock skew is more easily prevented. The serial data input system of this invention includes a shift register that takes in and shifts serially transferred display data in synchronization with a clock SCL, a clock counter that counts the number of clock pulses of the clock SCL and outputs each of clock count signals BIT08, BIT16 and BIT24 when the counted number of the clock pulses of the clock SCL reaches each of count numbers 8, 16 and 24 respectively, and registers into each of which the data stored in the shift register is transferred and stored collectively and in parallel in response to each of the clock count signals BIT08, BIP16 and BIT24 respectively.