PEELING DEVICE, PEELING SYSTEM AND PEELING METHOD
    1.
    发明申请
    PEELING DEVICE, PEELING SYSTEM AND PEELING METHOD 有权
    剥离装置,剥离系统和剥离方法

    公开(公告)号:US20130269879A1

    公开(公告)日:2013-10-17

    申请号:US13977134

    申请日:2011-12-16

    IPC分类号: B32B43/00

    摘要: A peeling device for peeling off a substrate to be processed and a support substrate from an overlapped substrate, the overlapped substrate being formed by bonding the substrate to be processed and the support substrate by an adhesive, which includes: a first holding unit configured to heat the substrate to be processed and configured to hold the substrate to be processed; a second holding unit configured to heat the support substrate and configured to hold the support substrate; a moving mechanism configured to horizontally move at least one of the first holding unit and the second holding unit relative to each other; and an inert gas supply mechanism configured to supply an inert gas onto a bonding surface of the substrate to be processed or a bonding surface of the support substrate.

    摘要翻译: 一种用于从重叠的基板剥离待处理的基板和支撑基板的剥离装置,所述重叠的基板通过粘合剂将待处理的基板和所述支撑基板接合而形成,所述粘合剂包括:第一保持单元, 被处理并被构造成保持待处理的基板的基板; 第二保持单元,被配置为加热所述支撑基板并且构造成保持所述支撑基板; 移动机构,被配置为相对于彼此水平移动所述第一保持单元和所述第二保持单元中的至少一个; 以及惰性气体供给机构,其构造成将惰性气体供给到被处理基板的接合面或支撑基板的接合面。

    BASE MEMBER WITH BINDING FILM, BONDING METHOD, AND BONDED STRUCTURE
    4.
    发明申请
    BASE MEMBER WITH BINDING FILM, BONDING METHOD, AND BONDED STRUCTURE 审中-公开
    具有结合膜的基座部件,接合方法和结合结构

    公开(公告)号:US20090317617A1

    公开(公告)日:2009-12-24

    申请号:US12484316

    申请日:2009-06-15

    IPC分类号: C09J7/02 B32B37/00

    摘要: A bonding film-formed base member includes a base member and a bonding film formed by supplying a liquid material containing a metal complex on a surface of the base member and then drying and burning the liquid material. The bonding film includes a metal atom and a leaving group made of an organic component. In the bonding-film formed base member, energy is applied to at least a partial region of a surface of the bonding film to eliminate the leaving group present near the surface of the bonding film from the bonding film so as to allow the at least a partial region of the surface to have adhesion to an object intended to be bonded to the bonding film-formed base member.

    摘要翻译: 接合膜形成的基底构件包括基底构件和通过在基底构件的表面上供给含有金属络合物的液体材料,然后干燥和燃烧液体材料而形成的接合膜。 接合膜包括金属原子和由有机组分制成的离去基团。 在接合膜形成的基底部件中,能量被施加到接合膜的表面的至少一部分区域,以消除接合膜表面附近存在的离开基团,从而允许至少一个 表面的局部区域具有与要接合到接合膜形成的基底构件的物体的粘合性。