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公开(公告)号:WO2012133818A1
公开(公告)日:2012-10-04
申请号:PCT/JP2012/058676
申请日:2012-03-30
CPC分类号: H01L23/5329 , H01L21/56 , H01L21/563 , H01L23/29 , H01L23/295 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/32 , H01L24/73 , H01L24/92 , H01L25/0657 , H01L2224/0401 , H01L2224/05009 , H01L2224/0557 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/06181 , H01L2224/11334 , H01L2224/11462 , H01L2224/13025 , H01L2224/13147 , H01L2224/16145 , H01L2224/16146 , H01L2224/16225 , H01L2224/16227 , H01L2224/2929 , H01L2224/293 , H01L2224/2937 , H01L2224/29386 , H01L2224/29387 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/92125 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06565 , H01L2924/00014 , H01L2924/01019 , H01L2924/10253 , H01L2924/12044 , H01L2924/15311 , Y10T428/2991 , H01L2924/00012 , H01L2224/05552 , H01L2924/00
摘要: 高い熱伝導性と低線膨張性を両立した層間充填材組成物により充填された三次元集積回路積層体を提供する。 半導体デバイス層が形成された半導体基板を少なくとも2層以上積層した半導体基板積層体を有し、該半導体基板間に、樹脂(A)及び無機フィラー(B)を含有し、熱伝導率が0.8W/(m・K)以上の第1の層間充填材層を有することを特徴とする三次元集積回路積層体。
摘要翻译: 提供一种通过具有高导热性和低线性膨胀的层间填料组合物填充的三维集成电路层叠体。 该三维集成电路层叠体的特征在于具有通过层叠形成有半导体器件层的至少两层半导体衬底而形成的半导体衬底层叠体,并且通过在半导体衬底之间具有包含第二层间填充材料层 树脂(A)和无机填料(B),其导热率至少为0.8W /(m·K)。
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公开(公告)号:WO2011156221A3
公开(公告)日:2012-04-05
申请号:PCT/US2011039044
申请日:2011-06-03
申请人: HENKEL CORP , GASA JEFFREY , PHAN DUNG NGHI , LEON JEFFREY , HAJELA SHARAD , KONG SHENGQIAN
发明人: GASA JEFFREY , PHAN DUNG NGHI , LEON JEFFREY , HAJELA SHARAD , KONG SHENGQIAN
IPC分类号: H01L23/12
CPC分类号: C08L63/00 , C08G77/28 , C08L83/08 , H01L21/56 , H01L21/6836 , H01L23/293 , H01L23/296 , H01L24/27 , H01L24/29 , H01L24/83 , H01L25/50 , H01L2224/274 , H01L2224/27436 , H01L2224/29 , H01L2224/29101 , H01L2224/2919 , H01L2224/2929 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/29364 , H01L2224/29369 , H01L2224/2937 , H01L2224/29386 , H01L2224/29388 , H01L2224/29393 , H01L2224/83191 , H01L2224/83855 , H01L2224/83856 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/0102 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01046 , H01L2924/01047 , H01L2924/01056 , H01L2924/01057 , H01L2924/01061 , H01L2924/01074 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/0665 , H01L2924/0635 , H01L2924/00 , H01L2924/00014 , H01L2924/05432 , H01L2924/05442 , H01L2924/04642 , H01L2924/0503 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299
摘要: A process for coating a semiconductor wafer with a coating composition comprises curing the coating with a pulsed UV light, thereby preventing delamination during reflow operations. In a particular embodiment, the coating composition comprises both epoxy and acrylate resins. The epoxy resin can be cured thermally; the acrylate resin is cured by UV irradiation.
摘要翻译: 用涂料组合物涂覆半导体晶片的方法包括用脉冲UV光固化涂层,从而防止回流操作期间的分层。 在一个具体实施方案中,涂料组合物包含环氧树脂和丙烯酸酯树脂。 环氧树脂可以热固化; 丙烯酸酯树脂通过UV照射固化。
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3.
公开(公告)号:WO2008094149A1
公开(公告)日:2008-08-07
申请号:PCT/US2007/002740
申请日:2007-01-31
发明人: EUNSOOK, Chae
IPC分类号: H01L21/027 , H01L21/08
CPC分类号: H01L24/27 , H01L24/29 , H01L24/83 , H01L25/0657 , H01L2224/27416 , H01L2224/29 , H01L2224/29101 , H01L2224/2919 , H01L2224/29198 , H01L2224/2929 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/29364 , H01L2224/29369 , H01L2224/2937 , H01L2224/29386 , H01L2224/29388 , H01L2224/29393 , H01L2224/83191 , H01L2224/83856 , H01L2224/94 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01042 , H01L2924/01046 , H01L2924/01047 , H01L2924/01056 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0665 , H01L2924/07802 , H01L2924/00 , H01L2924/00014 , H01L2924/05432 , H01L2924/05442 , H01L2924/04642 , H01L2924/0503 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299 , H01L2224/27
摘要: This invention is a semiconductor wafer having an active side and a back side opposite the active side, which back side is coated with a filled, spin-coatable coating, wherein the coating comprises a resin and a spherical filler characterized by an average particle diameter of greater than 2 μm and a single peak particle size distribution. In another embodiment the invention is a method for producing a spin- coatable, B-stageable coating with a thixotropic index of 1.2 or less. In a third embodiment the invention is a method for producing a coated semiconductor wafer.
摘要翻译: 本发明是一种具有活性侧和与活性侧相反的背面的半导体晶片,该背面涂覆有填充的可旋涂涂层,其中涂层包括树脂和球形填料,其特征在于平均粒径为 大于2μm和单峰粒度分布。 在另一个实施方案中,本发明是用于制备触变指数为1.2或更小的可旋涂的B阶可涂层的方法。 在第三实施例中,本发明是一种制造涂覆的半导体晶片的方法。
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公开(公告)号:WO2011156221A2
公开(公告)日:2011-12-15
申请号:PCT/US2011/039044
申请日:2011-06-03
申请人: HENKEL CORPORATION , GASA, Jeffrey , PHAN, Dung, Nghi , LEON, Jeffrey , HAJELA, Sharad , KONG, Shengqian
IPC分类号: H01L23/12
CPC分类号: C08L63/00 , C08G77/28 , C08L83/08 , H01L21/56 , H01L21/6836 , H01L23/293 , H01L23/296 , H01L24/27 , H01L24/29 , H01L24/83 , H01L25/50 , H01L2224/274 , H01L2224/27436 , H01L2224/29 , H01L2224/29101 , H01L2224/2919 , H01L2224/2929 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/29364 , H01L2224/29369 , H01L2224/2937 , H01L2224/29386 , H01L2224/29388 , H01L2224/29393 , H01L2224/83191 , H01L2224/83855 , H01L2224/83856 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/0102 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01046 , H01L2924/01047 , H01L2924/01056 , H01L2924/01057 , H01L2924/01061 , H01L2924/01074 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/0665 , H01L2924/0635 , H01L2924/00 , H01L2924/00014 , H01L2924/05432 , H01L2924/05442 , H01L2924/04642 , H01L2924/0503 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299
摘要: A process for coating a semiconductor wafer with a coating composition comprises curing the coating with a pulsed UV light, thereby preventing delamination during reflow operations. In a particular embodiment, the coating composition comprises both epoxy and acrylate resins. The epoxy resin can be cured thermally; the acrylate resin is cured by UV irradiation.
摘要翻译: 用涂料组合物涂覆半导体晶片的方法包括用脉冲UV光固化涂层,从而防止回流操作期间的分层。 在一个具体实施方案中,涂料组合物包含环氧树脂和丙烯酸酯树脂。 环氧树脂可以热固化; 丙烯酸酯树脂通过UV照射固化。
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5.
公开(公告)号:WO2011040064A1
公开(公告)日:2011-04-07
申请号:PCT/JP2010/054677
申请日:2010-03-18
申请人: 積水化学工業株式会社 , 李洋洙 , 脇岡さやか , 中山篤 , ディラオ カール アルビン
发明人: 李洋洙 , 脇岡さやか , 中山篤 , ディラオ カール アルビン
IPC分类号: H01L21/60 , C09J7/00 , C09J11/04 , C09J163/00 , H01L21/52
CPC分类号: C09J163/00 , C08G59/4014 , C08G59/686 , C08K3/36 , C09J7/35 , C09J2203/326 , C09J2205/102 , H01L23/295 , H01L24/29 , H01L2224/29101 , H01L2224/2919 , H01L2224/2929 , H01L2224/293 , H01L2224/29323 , H01L2224/29324 , H01L2224/29366 , H01L2224/2937 , H01L2224/29386 , H01L2924/00013 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/0102 , H01L2924/01027 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/0104 , H01L2924/01045 , H01L2924/01047 , H01L2924/0105 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0665 , H01L2924/12042 , H01L2924/351 , H01L2924/00 , H01L2924/00014 , H01L2924/05442 , H01L2924/05432 , H01L2924/05032 , H01L2924/0503 , H01L2924/05042 , H01L2924/04642 , H01L2924/0532 , H01L2924/0542 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299
摘要: 本発明は、透明性が高く、半導体チップボンディング時のパターン又は位置表示の認識を容易なものとする半導体接合用接着剤を提供することを目的とする。 本発明は、エポキシ樹脂、無機フィラー及び硬化剤を含有する半導体接合用接着剤であって、前記無機フィラーは、半導体接合用接着剤中の含有量が30~70重量%であり、かつ、平均粒子径が0.1μm未満のフィラーAと、平均粒子径が0.1μm以上1μm未満のフィラーBとを含有し、前記フィラーAは、前記フィラーBに対する重量比が1/9~6/4である半導体接合用接着剤である。また、本発明は、エポキシ樹脂と、無機フィラーと、硬化剤とを含有する半導体接合用接着剤であって、前記エポキシ樹脂と前記無機フィラーとの屈折率の差が0.1以下である半導体接合用接着剤である。
摘要翻译: 公开了一种用于半导体接合的粘合剂,其具有高透明度并且能够容易地识别半导体芯片接合期间的图案或位置指示。 具体公开了一种含有环氧树脂,无机填料和固化剂的半导体接合用粘合剂,其特征在于,所述无机填料含有30〜70重量%的半导体结合用粘合剂 并且含有平均粒径小于0.1μm的填料A和平均粒径为0.1μm以上且小于1μm的填料B,填料A与填料B的重量比为 1/9至6/4。 还具体公开了一种含有环氧树脂,无机填料和固化剂的半导体接合用粘合剂,其特征在于,环氧树脂与无机填料的折射率之差为0.1以下 。
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公开(公告)号:WO2009105911A1
公开(公告)日:2009-09-03
申请号:PCT/CN2008/000393
申请日:2008-02-25
发明人: WANG, Minghai
IPC分类号: C09J11/00
CPC分类号: C09J11/04 , C08K3/013 , C08K3/36 , C09J11/06 , H01L24/29 , H01L24/32 , H01L24/83 , H01L2224/29 , H01L2224/2919 , H01L2224/29198 , H01L2224/2929 , H01L2224/2937 , H01L2224/29386 , H01L2224/29393 , H01L2224/83951 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/0102 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/01056 , H01L2924/01057 , H01L2924/01073 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/0665 , H01L2924/10253 , H01L2924/15788 , H01L2924/00 , H01L2924/3512 , H01L2924/05442 , H01L2924/00014 , H01L2924/04642 , H01L2924/0503 , H01L2924/05432 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299
摘要: A composition that will automatically flow (auto-flow) and form a fillet (self-fillet) will have a yield stress within the range of 1.8Pa to 10Pa (18 dynes/ cm 2 to 100 dynes/cm 2 ). Such a composition can be designed by using an appropriate choice of filler, regardless of the resin system used in the composition.
摘要翻译: 将自动流动(自动流动)并形成圆角(自圆角)的组合物的屈服应力将在1.8Pa至10Pa(18达因/ cm 2至100达因/ cm 2)的范围内。 无论组合物中使用的树脂体系如何,都可以通过使用适当的填料选择来设计这种组合物。
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