Production method of thin film resistance element formed on printed circuit board, and thin film resistance element employing the method
    78.
    发明公开
    Production method of thin film resistance element formed on printed circuit board, and thin film resistance element employing the method 审中-公开
    一种用于薄膜电阻器的制造在印刷电路板和薄膜电阻器的过程

    公开(公告)号:EP1139353A2

    公开(公告)日:2001-10-04

    申请号:EP01301805.6

    申请日:2001-02-28

    Abstract: The invention provides a production method capable of forming a thin film resistance element having a thickness and a shape controlled in a high accuracy in a printed circuit board (core material). The production method of a thin film resistance element formed on a printed circuit board, has the steps of forming a thin film resistance layer having a predetermined thickness on the printed circuit board through an insulation layer by a dry process used in producing a semiconductor, forming an electrically conductive layer on the thin resistance layer, and etching the electrically conductive layer selectively so as to make, at least, a pair of electrically conductive pads, resulting in the thin film resistance element having a predetermined value of resistivity between the pair of electrically conductive pads. Thereby, it is possible to form the thin film resistance element having a thickness and a shape controlled in a high accuracy on the printed circuit board (core material).

    Abstract translation: 本发明提供一种能够形成具有一定厚度和在印刷电路板(芯材)的高精确度控制的形状的薄膜电阻元件的制造方法。 形成在印刷电路板的薄膜电阻元件的制造方法,具有形成在制造半导体使用的干法具有通过向绝缘层上的印刷电路板的预定厚度的薄膜电阻层的工序,形成 薄电阻层上的导电层,并且选择性地蚀刻导电层,以使至少一对导电焊盘,在薄膜电阻元件所得到的具有一对电之间的电阻率的预定值 导电衬垫。 由此,可以形成具有厚度和在高精度地控制在印刷电路板(芯材)的形状的薄膜电阻元件。

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