METHOD OF MAKING AN INTEGRATED CIRCUIT INCLUDING ELECTRODEPOSITION OF ALUMINIUM
    6.
    发明申请
    METHOD OF MAKING AN INTEGRATED CIRCUIT INCLUDING ELECTRODEPOSITION OF ALUMINIUM 审中-公开
    制造包含铝电沉积的集成电路的方法

    公开(公告)号:US20080257744A1

    公开(公告)日:2008-10-23

    申请号:US11737530

    申请日:2007-04-19

    CPC classification number: C25D3/44 C25D17/002 C25D17/004 C25D21/11

    Abstract: A method of making an integrated circuit including composition of matter for electrodepositing of aluminium is disclosed. One embodiment includes a bath having a solution of selected aluminium salts in a substantially anhydrous organic solvent, to uses of certain aluminium salts for electrodepositing and to processes for electrodepositing aluminium.

    Abstract translation: 公开了一种制造集成电路的方法,该集成电路包括用于电沉积铝的物质的组成。 一个实施方案包括具有选定的铝盐在基本上无水的有机溶剂中的溶液的浴,使用某些铝盐进行电沉积和电沉积铝的方法。

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