公开(公告)号：US20130098292A1

公开(公告)日：2013-04-25

申请号：US13708936

申请日：2012-12-08

申请人： Emmerich Bertagnolli ,  Heinz Wanzenboeck ,  Wolfram Buehler ,  Camille Stebler ,  Ulrike Zeile ,  Alexander Rosenthal

发明人： Emmerich Bertagnolli ,  Heinz Wanzenboeck ,  Wolfram Buehler ,  Camille Stebler ,  Ulrike Zeile ,  Alexander Rosenthal

IPC分类号： C23C16/48

CPC分类号： H01J37/3178 ,  C23C16/486 ,  C23C16/487 ,  H01J37/16 ,  H01J37/20 ,  H01J37/261 ,  H01J37/30 ,  H01J37/3056 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/2602 ,  H01J2237/303 ,  H01J2237/31744

摘要： A processing system for processing an object (3) is provided, wherein the processing system is adapted, to focus a first energy beam, in particular an electron beam (11), and a second energy beam, in particular an ion beam (21), on a focusing region (29) in which a object (3) to be processed is arrangeable. A processing chamber wall (35) having two openings (38, 39) for traversal of both energy beams and a connector (37) for supplying process gas delimits a processing chamber (45) from a vacuum chamber (2) of the processing system. Processing the object by activating the process gas through one of the energy beams and inspecting the object via one of the energy beams is enabled for different orientations of the object relative to a propagation direction of one of the energy beams.

公开(公告)号：US08779381B2

公开(公告)日：2014-07-15

申请号：US13200155

申请日：2011-09-19

申请人： Matthias Lang ,  Ulrike Zeile ,  Michael Albiez ,  Wolfram Bühler

发明人： Matthias Lang ,  Ulrike Zeile ,  Michael Albiez ,  Wolfram Bühler

IPC分类号： H01J27/00 ,  H01J3/14

CPC分类号： H01J37/02 ,  H01J37/09 ,  H01J37/28 ,  H01J2237/022

摘要： An aperture unit for a particle beam device, in particular an electron beam device, is disclosed. Deposit supporting units are arranged at the aperture unit, with which deposit supporting units contaminations can be bound in such a way that the contaminations can no longer deposit at an aperture opening of the aperture unit. Coatings which can be arranged on the aperture unit make it possible to reduce interactions which cause contaminations to deposit at the aperture opening.

摘要翻译： 公开了一种用于粒子束装置，特别是电子束装置的孔单元。 沉积支撑单元布置在孔单元处，沉积支撑单元污染物可以以这样的方式结合，使得污染物不再能够沉积在孔单元的孔口处。 可以布置在孔单元上的涂层使得可以减少导致污染物沉积在孔口处的相互作用。

公开(公告)号：US08502142B2

公开(公告)日：2013-08-06

申请号：US12584992

申请日：2009-09-15

申请人： Ulrike Zeile ,  Dietmar Donitz

发明人： Ulrike Zeile ,  Dietmar Donitz

IPC分类号： G21K5/10 ,  G01F23/00

CPC分类号： G01N1/286 ,  H01J2237/31745

摘要： A device and method for analyzing a sample provide for extracting a part to be analyzed from the sample with the aid of a previously generated opening in the sample. The part to be analyzed is examined in greater detail with the aid of a particle beam. For this purpose, the sample is placed in the opening or on a sample holder.

摘要翻译： 用于分析样品的装置和方法提供了借助于样品中先前产生的开口从样品中提取待分析的部分。 借助于粒子束来更详细地检查待分析的部分。 为此，将样品置于开口或样品架上。

公开(公告)号：US20110192973A1

公开(公告)日：2011-08-11

申请号：US12931358

申请日：2011-01-27

申请人： Albrecht Glasmachers ,  Alexander Laue ,  Michel Aliman ,  Hubert Mantz ,  Ulrike Zeile ,  Holger Dömer

发明人： Albrecht Glasmachers ,  Alexander Laue ,  Michel Aliman ,  Hubert Mantz ,  Ulrike Zeile ,  Holger Dömer

IPC分类号： H01J49/10 ,  H01J3/26 ,  B82Y30/00

CPC分类号： H01J37/265 ,  H01J3/26 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J49/063 ,  H01J49/065 ,  H01J49/10 ,  H01J2237/05 ,  H01J2237/2449 ,  H01J2237/2527

摘要： An apparatus for transmission of energy of an ion to at least one gas particle and/or for transportation of an ion and a particle beam device having an apparatus such as this are disclosed. In particular, a container is provided, in which a gas is arranged which has gas particles, wherein the container has a transport axis. Furthermore, at least one first multipole unit and at least one second multipole unit are provided, which are arranged along the transport axis. The first multipole unit and the second multipole unit are formed by printed circuit boards. Furthermore, an electronic circuit is provided, which provides each multipole unit with a potential, such that a potential gradient is generated, in particular along the transport axis.

摘要翻译： 公开了一种用于将离子的能量传输到至少一个气体颗粒和/或用于输送离子的装置和具有这样的装置的粒子束装置。 特别地，提供一种容器，其中布置有气体颗粒的气体，其中容器具有输送轴线。 此外，提供沿着输送轴线布置的至少一个第一多极单元和至少一个第二多极单元。 第一多极单元和第二多极单元由印刷电路板形成。 此外，提供了一种电子电路，其为每个多极单元提供电势，使得产生电位梯度，特别是沿输送轴。

公开(公告)号：US20090014648A1

公开(公告)日：2009-01-15

申请号：US12156954

申请日：2008-06-05

申请人： Ulrike Zeile ,  Andreas Schertel

发明人： Ulrike Zeile ,  Andreas Schertel

IPC分类号： G01N23/00

CPC分类号： H01J37/20 ,  H01J37/26 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/20207 ,  H01J2237/206 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A particle beam device includes a movable carrier element with at least one receiving element for receiving a specimen and in which the receiving element is situated on the carrier element. In various embodiments, the receiving element may be situated removably on the carrier element and/or multiple receiving elements may be situated on the carrier element in such a way that a movement of the carrier element causes a movement of the multiple receiving elements in the same spatial direction or around the same axis. The carrier element may be movable in three spatial directions situated perpendicular to one another and rotatable around a first axis which is parallel to an optical axis of the particle beam device and around a second axis which is situated perpendicular to the optical axis. A method for using the particle beam device in connection with specimen study and preparation is also disclosed.

摘要翻译： 粒子束装置包括具有至少一个用于接收样本的接收元件的可移动的载体元件，并且其中接收元件位于载体元件上。 在各种实施例中，接收元件可以可拆卸地位于载体元件上和/或多个接收元件可以位于载体元件上，使得载体元件的移动导致多个接收元件在同一移动中的移动 空间方向或围绕同一轴线。 载体元件可以在三个空间方向上移动，该三个空间方向彼此垂直并可围绕平行于粒子束装置的光轴并围绕垂直于光轴定位的第二轴线的第一轴线旋转。 还公开了与样品研究和制备相关的使用粒子束装置的方法。

公开(公告)号：US20120305765A1

公开(公告)日：2012-12-06

申请号：US13589461

申请日：2012-08-20

申请人： Ulrike ZEILE ,  Andreas SCHERTEL

发明人： Ulrike ZEILE ,  Andreas SCHERTEL

IPC分类号： H01J37/26

CPC分类号： H01J37/20 ,  H01J37/26 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/20207 ,  H01J2237/206 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A particle beam device includes a movable carrier element with at least one receiving element for receiving a specimen and in which the receiving element is situated on the carrier element. In various embodiments, the receiving element may be situated removably on the carrier element and/or multiple receiving elements may be situated on the carrier element in such a way that a movement of the carrier element causes a movement of the multiple receiving elements in the same spatial direction or around the same axis. The carrier element may be movable in three spatial directions situated perpendicular to one another and rotatable around a first axis which is parallel to an optical axis of the particle beam device and around a second axis which is situated perpendicular to the optical axis. A method for using the particle beam device in connection with specimen study and preparation is also disclosed.

摘要翻译： 粒子束装置包括具有至少一个用于接收样本的接收元件的可移动的载体元件，并且其中接收元件位于载体元件上。 在各种实施例中，接收元件可以可拆卸地位于载体元件上和/或多个接收元件可以位于载体元件上，使得载体元件的移动导致多个接收元件在同一移动中的移动 空间方向或围绕同一轴线。 载体元件可以在三个空间方向上移动，该三个空间方向彼此垂直并可围绕平行于粒子束装置的光轴并围绕垂直于光轴定位的第二轴线的第一轴线旋转。 还公开了与样品研究和制备相关的使用粒子束装置的方法。

公开(公告)号：US20110220788A1

公开(公告)日：2011-09-15

申请号：US12931272

申请日：2011-01-27

申请人： Alexander Laue ,  Albrecht Glasmachers ,  Christian Hendrich ,  Dirk Preikszas ,  Michel Aliman ,  Hubert Mantz ,  Ulrike Zeile ,  Holger Dömer

发明人： Alexander Laue ,  Albrecht Glasmachers ,  Christian Hendrich ,  Dirk Preikszas ,  Michel Aliman ,  Hubert Mantz ,  Ulrike Zeile ,  Holger Dömer

IPC分类号： H01J49/26 ,  H01J3/14

CPC分类号： H01J49/065 ,  H01J49/067 ,  H01J49/068 ,  H01J49/14 ,  H01J49/4225 ,  H01J49/4235

摘要： An apparatus for focusing and for storage of ions and an apparatus for separation of a first pressure area from a second pressure area are disclosed, in particular for an analysis apparatus for ions. A particle beam device may have at least one of the abovementioned apparatuses. A container for holding ions and at least one multipole unit are provided. The multipole unit has a through-opening with a longitudinal axis as well as a multiplicity of electrodes. A first set of the electrodes is at a first radial distance from the longitudinal axis. A second set of the electrodes is in each case at a second radial distance from the longitudinal axis. The first radial distance is less than the second radial distance. Alternatively or additionally, the apparatus may have an elongated opening with a radial extent. The opening has a longitudinal extent which is greater than the radial extent.

摘要翻译： 公开了一种用于聚焦和存储离子的装置和用于将第一压力区域与第二压力区域分离的装置，特别是用于离子分析装置。 粒子束装置可以具有上述装置中的至少一个。 提供了用于保持离子和至少一个多极单元的容器。 多极单元具有纵向轴线的通孔以及多个电极。 第一组电极处于距纵向轴线的第一径向距离处。 在每种情况下，第二组电极距离纵向轴线的第二径向距离。 第一径向距离小于第二径向距离。 或者或另外，该装置可以具有径向范围的细长开口。 开口具有大于径向范围的纵向范围。

公开(公告)号：US20100059672A1

公开(公告)日：2010-03-11

申请号：US12584283

申请日：2009-09-02

申请人： Ulrike Zeile

发明人： Ulrike Zeile

IPC分类号： G01N23/203 ,  H01J49/26 ,  G01N23/225 ,  H01J27/02

CPC分类号： G01N23/2251 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/2442 ,  H01J2237/2445 ,  H01J2237/24485 ,  H01J2237/2807 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A device and method for analyzing a sample, in particular a sample which contains low-density materials, is provided. Ions of a predefined mass and/or a predefined elementary charge are selected from a plurality of ions. The selected ions are directed onto the sample for sample preparation. An electron beam is then directed onto the prepared sample and a spatial distribution of scattered electrons is measured.

摘要翻译： 提供了用于分析样品的装置和方法，特别是包含低密度材料的样品。 从多个离子中选择预定质量和/或预定义的基本电荷的离子。 选择的离子被引导到样品上用于样品制备。 然后将电子束导向到制备的样品上，并测量散射电子的空间分布。

公开(公告)号：US08487270B2

公开(公告)日：2013-07-16

申请号：US13589461

申请日：2012-08-20

申请人： Ulrike Zeile ,  Andreas Schertel

发明人： Ulrike Zeile ,  Andreas Schertel

IPC分类号： H01J37/26

CPC分类号： H01J37/20 ,  H01J37/26 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/20207 ,  H01J2237/206 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A particle beam device includes a movable carrier element with at least one receiving element for receiving a specimen and in which the receiving element is situated on the carrier element. In various embodiments, the receiving element may be situated removably on the carrier element and/or multiple receiving elements may be situated on the carrier element in such a way that a movement of the carrier element causes a movement of the multiple receiving elements in the same spatial direction or around the same axis. The carrier element may be movable in three spatial directions situated perpendicular to one another and rotatable around a first axis which is parallel to an optical axis of the particle beam device and around a second axis which is situated perpendicular to the optical axis. A method for using the particle beam device in connection with specimen study and preparation is also disclosed.

公开(公告)号：US08263933B2

公开(公告)日：2012-09-11

申请号：US12584284

申请日：2009-09-02

申请人： Ulrike Zeile

发明人： Ulrike Zeile

IPC分类号： H01J49/26 ,  H01J37/00 ,  B01D59/44

CPC分类号： H01J49/142 ,  G01N23/2258

摘要： A device and method for analyzing an organic sample provide high spatial resolution. A focused ion beam is directed onto the organic sample. Fragments detached from the sample are examined using mass spectroscopy.

摘要翻译： 用于分析有机样品的装置和方法提供高空间分辨率。 聚焦离子束被引导到有机样品上。 使用质谱检查从样品分离的片段。