CRYSTALLINE THIN-FILM TRANSISTOR
    8.
    发明申请
    CRYSTALLINE THIN-FILM TRANSISTOR 审中-公开
    晶体薄膜晶体管

    公开(公告)号:US20140191237A1

    公开(公告)日:2014-07-10

    申请号:US13967128

    申请日:2013-08-14

    Abstract: A method for forming a thin film transistor includes joining a crystalline substrate to an insulating substrate. A doped layer is deposited on the crystalline substrate, and the doped layer is patterned to form source and drain regions. The crystalline substrate is patterned to form an active area such that a conductive channel is formed in the crystalline substrate between the source and drain regions. A gate stack is formed between the source and drain regions, and contacts are formed to the source and drain regions and the gate stack through a passivation layer.

    Abstract translation: 一种形成薄膜晶体管的方法,包括将晶体衬底接合到绝缘衬底上。 掺杂层沉积在晶体衬底上,并且掺杂层被图案化以形成源区和漏区。 将晶体衬底图案化以形成有源区,使得在源区和漏区之间的晶体衬底中形成导电沟道。 在源极和漏极区域之间形成栅极堆叠,并且通过钝化层将触点形成到源极和漏极区域以及栅极堆叠。

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