公开(公告)号：US07671609B2

公开(公告)日：2010-03-02

申请号：US11587485

申请日：2005-04-26

申请人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

发明人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

IPC分类号： G01R31/02

CPC分类号： A63H29/22 ,  A63H30/04 ,  A63H31/00 ,  F16H48/08 ,  G01R1/06711 ,  G01R1/0735 ,  G01R3/00 ,  H01L51/5012 ,  H05B33/14 ,  Y10T29/49155

摘要： A sheet-like probe has a porous film. In the sheet-like probe, a contact film is penetratingly supported at each position of through-holes formed in the porous film, and a peripheral edge of the contact film and the porous film are integrated such that a flexible resin insulation layer is included in a fine hole of the porous film. Electrode structure bodies are supported in a penetrating manner in the insulation layer. Each electrode structure body includes a surface electrode section exposed to the front surface of the insulation layer and projecting from the front surface of the insulation layer, a back surface electrode section exposed to the back surface of the insulation layer, a short-circuit section continuously extending from the base end of the front surface electrode section, penetrating the insulation layer in its thickness direction, and connected to the back surface electrode section, a holding section extending outward, along the front surface of the insulation layer, from the base end section of the front surface electrode section, and a supporting body supporting the insulation layer.

摘要翻译： 片状探针具有多孔膜。 在片状探针中，在形成于多孔膜的贯通孔的各位置上，充分地将接触膜支撑在接触膜的周缘和多孔膜的一体，使得柔性树脂绝缘层包含在 多孔膜的细孔。 电极结构体以穿透方式被支撑在绝缘层中。 每个电极结构体包括暴露于绝缘层的前表面并从绝缘层的前表面突出的表面电极部分，暴露于绝缘层的背面的背面电极部分，连续的短路部分 从前表面电极部分的基端部延伸穿过绝缘层的厚度方向，并与背面电极部分连接，沿着绝缘层的前表面向外延伸的保持部分从基端部分 和支撑绝缘层的支撑体。

公开(公告)号：US07737707B2

公开(公告)日：2010-06-15

申请号：US11587401

申请日：2005-04-26

申请人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

发明人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

IPC分类号： G01R1/073 ,  H05K3/02

CPC分类号： A63H29/22 ,  A63H30/04 ,  A63H31/00 ,  F16H48/08 ,  G01R1/06711 ,  G01R1/0735 ,  G01R3/00 ,  H01L51/5012 ,  H05B33/14 ,  Y10T29/49155

摘要： A sheet-like probe and a method of producing the probe. In the probe electrode structure bodies do not come out from an insulation film and achieve high durability, and in a burn-in test for a wafer having a large area and for a circuit device having to-be-inspected electrodes with small intervals, positional displacement, caused by temperature variation, between the electrode structure bodies and the to-be-inspected electrode can be reliably prevented for stable connection conditions. The sheet-like probe includes an insulation layer and a contact film provided with electrode structure bodies arranged on the insulation layer to be apart from each other in the surface direction of the insulation layer and penetratingly extend in the thickness direction of the insulation layer. The electrode structure bodies each are composed of a surface electrode section exposed to the front surface of the insulation layer.

摘要翻译： 片状探针及其制造方法。 在探针电极结构体中，绝缘膜不会脱出并达到高耐久性，在具有大面积的晶片的老化试验以及具有小间隔的被检查电极的电路装置中，位置 为了稳定的连接条件，可以可靠地防止电极结构体和被检查电极之间的温度变化引起的位移。 片状探针包括绝缘层和接触膜，该接触膜具有设置在绝缘层上的电极结构体，以在绝缘层的表面方向上彼此分开，并且在绝缘层的厚度方向上贯通地延伸。 电极结构体各自由暴露于绝缘层的前表面的表面电极部分构成。

公开(公告)号：US20070205783A1

公开(公告)日：2007-09-06

申请号：US11587401

申请日：2005-04-26

申请人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

发明人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

IPC分类号： G01R31/02

CPC分类号： A63H29/22 ,  A63H30/04 ,  A63H31/00 ,  F16H48/08 ,  G01R1/06711 ,  G01R1/0735 ,  G01R3/00 ,  H01L51/5012 ,  H05B33/14 ,  Y10T29/49155

摘要： A sheet-like probe and a method of producing the probe. In the probe electrode structure bodies do not come out from an insulation film and achieve high durability, and in a burn-in test for a wafer having a large area and for a circuit device having to-be-inspected electrodes with small intervals, positional displacement, caused by temperature variation, between the electrode structure bodies and the to-be-inspected electrode can be reliably prevented for stable connection conditions. The sheet-like probe includes an insulation layer and a contact film provided with electrode structure bodies arranged on the insulation layer to be apart from each other in the surface direction of the insulation layer and penetratingly extend in the thickness direction of the insulation layer. The electrode structure bodies each are composed of a surface electrode section exposed to the front surface of the insulation layer.

摘要翻译： 片状探针及其制造方法。 在探针电极结构体中，绝缘膜不会脱出并达到高耐久性，在具有大面积的晶片的老化试验以及具有小间隔的被检查电极的电路装置中，位置 为了稳定的连接条件，可以可靠地防止电极结构体和被检查电极之间的温度变化引起的位移。 片状探针包括绝缘层和接触膜，该接触膜具有设置在绝缘层上的电极结构体，以在绝缘层的表面方向上彼此分开，并且在绝缘层的厚度方向上贯通地延伸。 电极结构体各自由暴露于绝缘层的前表面的表面电极部分构成。

公开(公告)号：US07656176B2

公开(公告)日：2010-02-02

申请号：US11718065

申请日：2005-10-27

申请人： Mutsuhiko Yoshioka ,  Hitoshi Fujiyama ,  Hisao Igarashi

发明人： Mutsuhiko Yoshioka ,  Hitoshi Fujiyama ,  Hisao Igarashi

IPC分类号： G01R31/02

CPC分类号： G01R1/0735

摘要： A probe member for wafer inspection having a sheet-like probe, the probe including a frame plate in which openings are formed, and contact films arranged on a front surface of the frame plate so as to close the openings, each of the contact films obtained by arranging, in an insulating film formed of a flexible resin, a plurality of electrode structures, and an anisotropically conductive connector, which is composed of a frame plate, in which a plurality of openings have been formed corresponding to the electrode regions, and a plurality of elastic anisotropically conductive films arranged on and supported by the frame plate so as to close the respective openings, wherein each of the openings of the frame plate in the sheet-like probe have a size for receiving the external shape in a plane direction in the elastic anisotropically conductive film of the anisotropically conductive connector.

摘要翻译： 一种用于晶片检查的探针构件，具有片状探针，该探针包括其中形成有开口的框架板和布置在框架板的前表面上的接触膜以闭合开口，每个接触膜获得 通过在由柔性树脂形成的绝缘膜中布置多个电极结构和各向异性导电连接器，所述多个电极结构和各向异性导电连接器由框架板组成，其中已经形成对应于电极区域的多个开口，以及 多个弹性各向异性导电膜，其布置在所述框架板上并由所述框架板支撑以封闭各个开口，其中所述片状探针中的所述框架板的每个开口具有用于在平面方向上接收外部形状的尺寸 各向异性导电连接器的弹性各向异性导电膜。

公开(公告)号：US20070268032A1

公开(公告)日：2007-11-22

申请号：US11718576

申请日：2005-11-10

申请人： Mutsuhiko Yoshioka ,  Hitoshi Fujiyama ,  Hisao Igarashi

发明人： Mutsuhiko Yoshioka ,  Hitoshi Fujiyama ,  Hisao Igarashi

IPC分类号： G01R31/00

CPC分类号： G01R1/07307

摘要： Provided are a probe member, a probe card and a wafer inspection apparatus, by which a good electrically connected state can be surely achieved, positional deviation by temperature change can be prevented, and the good electrically connected state can be stably retained even when a wafer has a diameter of 8 inches or greater, and the pitch of electrodes to be inspected is extremely small. The probe member of the invention has a sheet-like probe, which is composed of a frame plate made of a metal, in which an opening has been formed, and a plurality of contact films arranged on and supported by a front surface of the frame plate so as to close the opening, wherein the contact film is obtained by arranging, in a flexible insulating film, a plurality of electrode structures, and an anisotropically conductive connector, which is composed of a frame plate, in which a plurality of openings have been formed, and a plurality of elastic anisotropically conductive films arranged on and supported by the frame plate so as to close the respective openings, and is arranged on a back surface of the sheet-like probe. The opening of the frame plate in the sheet-like probe has a size capable of receiving the external shape in a plane direction in the frame plate of the anisotropically conductive connector.

摘要翻译： 提供了一种探针构件，探针卡和晶片检查装置，通过该探针构件，探针卡和晶片检查装置，可以可靠地实现良好的电连接状态，可以防止温度变化引起的位置偏差，并且即使当晶片 具有8英寸或更大的直径，并且待检查的电极的间距非常小。 本发明的探针构件具有片状探针，该片状探针由其上形成有开口的金属制框架板构成，并且多个接触膜布置在框架的前表面上并由框架的前表面支撑 板，以封闭开口，其中通过在柔性绝缘膜中布置多个电极结构和由框架板构成的各向异性导电连接器，其中多个开口具有多个开口而获得接触膜 以及多个弹性各向异性导电膜，其被布置在框架板上并由框架板支撑以封闭各个开口，并且布置在片状探针的后表面上。 片状探针中的框架板的开口具有能够在各向异性导电连接器的框架板中在平面方向上接收外部尺寸的尺寸。

公开(公告)号：US20090140756A1

公开(公告)日：2009-06-04

申请号：US11718065

申请日：2005-10-27

申请人： Mutsuhiko Yoshioka ,  Hitoshi Fujiyama ,  Hisao Igarashi

发明人： Mutsuhiko Yoshioka ,  Hitoshi Fujiyama ,  Hisao Igarashi

IPC分类号： G01R31/02

CPC分类号： G01R1/0735

摘要： Disclosed herein are a probe member for wafer inspection, a probe card for wafer inspection and a wafer inspection apparatus, by which a good electrically connected state can be surely achieved, positional deviation by temperature change can be prevented, and the good electrically connected state can be stably retained even when a wafer has a diameter of 8 inches or greater, and the pitch of electrodes to be inspected is extremely small.The probe member of the invention has a sheet-like probe, which is composed of a frame plate made of a metal, in which a plurality of openings have been formed, and a plurality of contact films arranged on and supported by a front surface of the frame plate so as to close the respective openings, wherein each of the contact films is obtained by arranging, in a flexible insulating film, a plurality of electrode structures, and an anisotropically conductive connector, which is composed of a frame plate, in which a plurality of openings have been formed, and a plurality of elastic anisotropically conductive films arranged on and supported by the frame plate so as to close the respective openings, and is arranged on a back surface of the sheet-like probe, wherein each of the openings of the frame plate in the sheet-like probe has a size capable of receiving the external shape in a plane direction in the elastic anisotropically conductive film.

摘要翻译： 这里公开了用于晶片检查的探针构件，晶片检查用探针卡和晶片检查装置，能够可靠地实现良好的电连接状态，能够防止温度变化引起的位置偏差，良好的电连接状态 即使当晶片具有8英寸或更大的直径，并且待检查的电极的间距极小时也能够被稳定地保持。 本发明的探针构件具有片状探针，该片状探针由其中形成有多个开口的金属制框架板和形成有多个开口的多个接触膜构成，多个接触膜由前表面 框架板以闭合各个开口，其中每个接触膜通过在柔性绝缘膜中布置多个电极结构和由框架板组成的各向异性导电连接器来获得，其中 已经形成多个开口，并且多个弹性各向异性导电膜布置在框架板上并由框架板支撑以封闭各个开口，并且布置在片状探针的后表面上，其中每个 片状探针中的框架板的开口具有能够在弹性各向异性导电膜中在平面方向上接收外部形状的尺寸。

公开(公告)号：US20060252044A1

公开(公告)日：2006-11-09

申请号：US10554218

申请日：2004-04-23

申请人： Katsuya Okumura ,  Makoto Mihara ,  Mutsuhiko Yoshioka

发明人： Katsuya Okumura ,  Makoto Mihara ,  Mutsuhiko Yoshioka

IPC分类号： C12Q1/68 ,  C12M1/34 ,  H01L21/00

CPC分类号： B01L3/50255 ,  B01L2300/0681 ,  B01L2300/0819 ,  G01N33/54373

摘要： There are provided a biochip and a biochip kit, in which a target contained in an analyte is reacted with a probe with high efficiency in a short time, B/F separation efficiency is high, and high-sensitive quantitative determination and detection can be realized, and a production process thereof, and a method for reacting a target contained in an analyte with a probe, and, for example, separation and fractionation method and a detection and identification method for a target contained in an analyte, using the biochip kit. The biochip according to the present invention comprises a well(s) provided with a filter comprising straight pores, with a uniform pore diameter, provided at uniform pore spacings. A dispersion with probe-supported particles dispersed therein is contained in the well, and an analyte is placed in the well(s) to react the analyte with the probe-supported particles. A solution such as an analyte solution can be introduced into or discharged from the well through the filter.

摘要翻译： 提供了生物芯片和生物芯片试剂盒，其中包含在分析物中的靶在短时间内与探针高效率地反应，B / F分离效率高，并且可以实现高灵敏度的定量测定和检测 及其制备方法，以及使用生物芯片试剂盒使包含在分析物中的靶与探针反应的方法，例如分离和分级方法以及包含在分析物中的靶的检测和鉴定方法。 根据本发明的生物芯片包括设置有均匀孔隙的具有均匀孔径的直孔的过滤器，孔设置成均匀的孔隙。 将分散在其中的探针负载颗粒的分散体包含在孔中，并将分析物放置在孔中以使分析物与探针负载的颗粒反应。 诸如分析物溶液的溶液可以通过过滤器引入或从井中排出。

公开(公告)号：US06890605B2

公开(公告)日：2005-05-10

申请号：US10252607

申请日：2002-09-24

申请人： Michinori Nishikawa ,  Manabu Sekiguchi ,  Matthias Patz ,  Mutsuhiko Yoshioka ,  Atsushi Shiota ,  Kinji Yamada

发明人： Michinori Nishikawa ,  Manabu Sekiguchi ,  Matthias Patz ,  Mutsuhiko Yoshioka ,  Atsushi Shiota ,  Kinji Yamada

IPC分类号： C09D183/06 ,  C23C18/12 ,  H01L21/312 ,  B05D3/04 ,  B05D3/06 ,  H05H1/00

CPC分类号： H01L21/3122 ,  C23C18/04 ,  C23C18/1212 ,  C23C18/122 ,  H01L21/02126 ,  H01L21/0214 ,  H01L21/022 ,  H01L21/02211 ,  H01L21/02216 ,  H01L21/02271 ,  H01L21/02282 ,  H01L21/0234 ,  H01L21/02343 ,  H01L21/02348 ,  Y10T428/25 ,  Y10T428/259

摘要： An insulating film for semiconductors which has excellent adhesion to films formed by CVD and is useful as a dielectric film in semiconductor devices and the like is provided. The insulating film is obtained by a method comprising:(A) a step of subjecting a substrate to at least either of (A-1) at least one treatment selected from the group consisting of an ultraviolet irradiation treatment, an oxygen plasma treatment, a nitrogen plasma treatment, a helium plasma treatment, an argon plasma treatment, a hydrogen plasma treatment and an ammonia plasma treatment, and (A-2) a treatment with at least one of alkoxysilane compound having a reactive group and a product of the hydrolysis and condensation thereof; and(B) a step of applying a composition for film formation which comprises an organic solvent and either or both of at least one compound selected from the group consisting of compounds represented by the general formulae (1) to (4) as described hereinabove, and a hydrolysis/condensation product obtained by hydrolyzing and condensing the at least one compound, to the substrate and heating the resulting coating.

摘要翻译： 提供了一种半导体用绝缘膜，其与通过CVD形成的膜具有优异的粘附性，并且可用作半导体器件等中的电介质膜。 绝缘膜是通过以下方法获得的：（A）使基材经受（A-1）至少一种选自紫外线照射处理，氧等离子体处理， 氮等离子体处理，氦等离子体处理，氩等离子体处理，氢等离子体处理和氨等离子体处理，以及（A-2）使用具有反应性基团的烷氧基硅烷化合物和水解和 冷凝; 和（B）应用如上所述的包含有机溶剂和选自由通式（1）至（4）表示的化合物组成的组中的至少一种化合物中的任一种或两者的成膜用组合物的步骤， 以及通过水解和冷凝至少一种化合物而获得的水解/缩合产物，并加热所得到的涂层。

公开(公告)号：US20090015281A1

公开(公告)日：2009-01-15

申请号：US12170746

申请日：2008-07-10

申请人： Mutsuhiko Yoshioka ,  Akira Matsuura ,  Masaya Naoi ,  Takashi Amemiya ,  Syuichi Tsukada ,  Tomohisa Hoshino

发明人： Mutsuhiko Yoshioka ,  Akira Matsuura ,  Masaya Naoi ,  Takashi Amemiya ,  Syuichi Tsukada ,  Tomohisa Hoshino

IPC分类号： G01R31/28

CPC分类号： G01R31/2891 ,  G01R1/07342 ,  G01R31/2808 ,  H05K1/0269 ,  H05K3/303 ,  H05K2201/0108 ,  H05K2201/09918 ,  H05K2201/10378 ,  H05K2203/166 ,  Y02P70/613

摘要： The method is a method for positioning a three-layered rectangular frame-like anisotropic conductive connector in order to inspect the electrical properties of an object for inspection. The positioning is carried out in the following manner. The three-layered anisotropic conductive sheet is composed of a first anisotropic conductive sheet, a center substrate and a second anisotropic conductive sheet. Markings and through-holes are formed on the center substrate, and semi-transparent protrusions and through-holes are formed on each of the first anisotropic conductive sheet and the second anisotropic conductive sheet. The markings are identified through the semi-transparent protrusions by detecting means disposed on the side of the first anisotropic conductive sheet and the second anisotropic conductive sheet and thereby the positioning of the semi-transparent protrusions to the markings is carried out, whereby performing the positioning of the first anisotropic conductive sheet, the center substrate and the second anisotropic conductive sheet.

摘要翻译： 该方法是用于定位三层矩形框状的各向异性导电连接器以便检查被检查物体的电气特性的方法。 定位如下进行。 三层各向异性导电片由第一各向异性导电片，中心基片和第二各向异性导电片构成。 在中心基板上形成标记和通孔，并且在第一各向异性导电片和第二各向异性导电片之间形成半透明突起和通孔。 通过设置在第一各向异性导电片和第二各向异性导电片侧的检测装置通过半透明突起来识别标记，由此执行半透明突起到标记的定位，由此执行定位 的第一各向异性导电片，中心基片和第二各向异性导电片。

公开(公告)号：US06645881B2

公开(公告)日：2003-11-11

申请号：US10112951

申请日：2002-04-02

申请人： Nobuhide Yamada ,  Rempei Nakata ,  Makoto Sugiura ,  Mutsuhiko Yoshioka ,  Takahiro Kitano ,  Shinji Kobayashi

发明人： Nobuhide Yamada ,  Rempei Nakata ,  Makoto Sugiura ,  Mutsuhiko Yoshioka ,  Takahiro Kitano ,  Shinji Kobayashi

IPC分类号： H01L2131

CPC分类号： C23C18/1212 ,  B05D1/26 ,  C09D183/04 ,  C09D183/14 ,  H01L21/02118 ,  H01L21/02126 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/312 ,  H01L21/3122 ,  H01L21/3127 ,  H01L21/31691

摘要： A coating solution for used in a scan coating method contains a low vapor pressure solvent having a vapor pressure lower than 1 Torr (133.322 Pa) at room temperature.