Abstract:
A semiconductor die including strain relief for through substrate vias (TSVs). A method for strain relief of TSVs includes defining a through substrate via cavity in a substrate. The method also includes depositing an isolation layer in the cavity. The method further includes filling the cavity with a conductive material. The method also includes removing a portion of the isolation layer to create a recessed portion.
Abstract:
Methods and apparatuses, wherein the method includes reducing stacking stress. The method couples a first die to a compliant layer. The method couples a second die to the compliant layer, wherein the compliant layer at least partially covers a portion of an interface between the first die and the second die, and wherein the compliant layer is formed in a trench in the second die.
Abstract:
An integrated interposer between a first component and a second component includes a substrate. The substrate may have thermal and/or mechanical properties with values lying between the thermal and/or mechanical properties of the first component and the second component. Active devices are disposed on a first surface of the substrate. A contact layer is coupled to the active devices and configured to couple at least the first component and a third component to the integrated interposer. At least one through via(s) is coupled to the contact layer and extends through the substrate to a second surface of the substrate. An interconnect layer is disposed on the second surface of the substrate and coupled to the at least one through via(s). The interconnect layer is configured to couple the second component to the integrated interposer.
Abstract:
An integrated interposer may include a substrate and a resistive-type non-volatile memory (NVM) array(s). The integrated interposer may also include a contact layer on a first surface of the substrate. The contact layer may include interconnections configured to couple the resistive-type NVM array(s) to a die(s). The resistive-type NVM array(s) may be partially embedded within the contact layer of the integrated interposer.
Abstract:
Systems and methods include a first semiconductor die with a substrate having a first side and a second side opposite to the first side. A first set of electronic elements is integrated on the first side. A second set of electronic elements is integrated on the second side. One or more through-substrate vias through the substrate are used to couple one or more of the first set of electronic elements and one or more of the second set of electronic elements. The through-substrate vias may be through-silicon vias (TSVs) or a through-glass vias (TGVs). The first semiconductor die may be stacked with a second semiconductor die, with the first side or the second side of the first semiconductor die interfacing an active side of the second semiconductor die.
Abstract:
An integrated interposer includes an interposer substrate including at least a first portion of a 3D passive device within an active region of the interposer substrate. The integrated interposer also includes an inter-conductive dielectric layer on an active surface of the active region of the interposer substrate, the inter-conductive dielectric layer including at least a second portion of the 3D passive device. The integrated interposer further includes a contact layer coupled to the 3D passive devices and configured to couple at least one die to the integrated interposer. The integrated interposer also includes at least one through via coupled to the contact layer and extending through the interposer substrate to a passive surface of the interposer substrate. The integrated interposer further includes an interconnect layer on the passive surface of the interposer substrate and coupled to the at least one through via.