METHOD FOR STRAIN-RELIEVED THROUGH SUBSTRATE VIAS
    1.
    发明申请
    METHOD FOR STRAIN-RELIEVED THROUGH SUBSTRATE VIAS 有权
    通过基板VIAS进行应变的方法

    公开(公告)号:US20140302674A1

    公开(公告)日:2014-10-09

    申请号:US14311405

    申请日:2014-06-23

    Abstract: A semiconductor die including strain relief for through substrate vias (TSVs). A method for strain relief of TSVs includes defining a through substrate via cavity in a substrate. The method also includes depositing an isolation layer in the cavity. The method further includes filling the cavity with a conductive material. The method also includes removing a portion of the isolation layer to create a recessed portion.

    Abstract translation: 包括通过衬底通孔(TSV)的应变消除的半导体管芯。 用于TSV应变消除的方法包括在衬底中限定通孔的通孔。 该方法还包括在空腔中沉积隔离层。 该方法还包括用导电材料填充空腔。 该方法还包括去除隔离层的一部分以形成凹陷部分。

    INTEGRATED INTERPOSER WITH EMBEDDED ACTIVE DEVICES
    3.
    发明申请
    INTEGRATED INTERPOSER WITH EMBEDDED ACTIVE DEVICES 有权
    具有嵌入式有源器件的集成式插补器

    公开(公告)号:US20150250058A1

    公开(公告)日:2015-09-03

    申请号:US14463367

    申请日:2014-08-19

    Abstract: An integrated interposer between a first component and a second component includes a substrate. The substrate may have thermal and/or mechanical properties with values lying between the thermal and/or mechanical properties of the first component and the second component. Active devices are disposed on a first surface of the substrate. A contact layer is coupled to the active devices and configured to couple at least the first component and a third component to the integrated interposer. At least one through via(s) is coupled to the contact layer and extends through the substrate to a second surface of the substrate. An interconnect layer is disposed on the second surface of the substrate and coupled to the at least one through via(s). The interconnect layer is configured to couple the second component to the integrated interposer.

    Abstract translation: 第一部件和第二部件之间的集成插入件包括基板。 衬底可以具有热和/或机械性能,其中值位于第一部件和第二部件的热和/或机械性能之间。 有源器件设置在衬底的第一表面上。 接触层耦合到有源器件并且被配置为将至少第一部件和第三部件耦合到集成插入器。 至少一个通孔连接到接触层并且延伸穿过衬底到衬底的第二表面。 互连层设置在衬底的第二表面上并且耦合到至少一个通孔。 互连层被配置为将第二组件耦合到集成插入器。

    INTERPOSER INTEGRATED WITH 3D PASSIVE DEVICES
    6.
    发明申请
    INTERPOSER INTEGRATED WITH 3D PASSIVE DEVICES 有权
    与三维被动装置集成的插件

    公开(公告)号:US20160043068A1

    公开(公告)日:2016-02-11

    申请号:US14454851

    申请日:2014-08-08

    Abstract: An integrated interposer includes an interposer substrate including at least a first portion of a 3D passive device within an active region of the interposer substrate. The integrated interposer also includes an inter-conductive dielectric layer on an active surface of the active region of the interposer substrate, the inter-conductive dielectric layer including at least a second portion of the 3D passive device. The integrated interposer further includes a contact layer coupled to the 3D passive devices and configured to couple at least one die to the integrated interposer. The integrated interposer also includes at least one through via coupled to the contact layer and extending through the interposer substrate to a passive surface of the interposer substrate. The integrated interposer further includes an interconnect layer on the passive surface of the interposer substrate and coupled to the at least one through via.

    Abstract translation: 集成插入器包括插入器基板,其包括在内插器基板的有源区域内的3D无源器件的至少第一部分。 该集成插入器还包括在该插入器基板的有源区域的有源表面上的导电介电层,该导电介质层至少包括该3D无源器件的第二部分。 集成中介层还包括耦合到3D无源器件并被配置为将至少一个管芯耦合到集成插入器的接触层。 集成插入器还包括至少一个通孔,其连接到接触层并且延伸穿过插入器衬底到内插器衬底的无源表面。 集成插入器还包括在插入器基板的被动表面上并且耦合到至少一个通孔的互连层。

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