公开(公告)号：US12020999B2

公开(公告)日：2024-06-25

申请号：US17308461

申请日：2021-05-05

Applicant: MATERION CORPORATION

Inventor： Ramesh Kothandapani

IPC: H01L23/10 ,  B23K1/00 ,  B32B3/06 ,  B32B3/26 ,  B32B9/00 ,  B32B9/04 ,  C04B37/02

CPC classification number: H01L23/10 ,  B23K1/00 ,  B32B3/06 ,  B32B3/266 ,  B32B9/005 ,  B32B9/041 ,  C04B37/026 ,  B32B2255/205 ,  B32B2439/00 ,  B32B2457/14 ,  C04B2237/125 ,  C04B2237/34 ,  C04B2237/343 ,  C04B2237/348 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/408 ,  C04B2237/592 ,  C04B2237/708 ,  C04B2237/86 ,  H01L2924/16195

Abstract: A cover lid for use with a semiconductor package is disclosed. First, a polyamide mask is applied to one surface of the lid plate. Next, the exposed areas of the surface, as well as the sides of the lid plate, are metallized. The polyamide mask can then be removed. This reduces pullback and shrinkage of the metallized layer, while lowering the manufacturing cost and process times.

公开(公告)号：US20230212082A1

公开(公告)日：2023-07-06

申请号：US17999499

申请日：2021-05-25

Applicant: Heraeus Conamic North America LLC

Inventor： Luke WALKER ,  Matthew Joseph DONELON ,  Sudip KOIRALA

IPC: C04B37/00 ,  C03C10/00 ,  C03C4/20 ,  C03C8/02 ,  B32B5/16 ,  B32B37/06 ,  B32B7/12 ,  B32B9/00 ,  B32B9/04 ,  B32B7/027

CPC classification number: C04B37/003 ,  C03C10/00 ,  C03C4/20 ,  C03C8/02 ,  B32B5/16 ,  B32B37/06 ,  B32B7/12 ,  B32B9/005 ,  B32B9/048 ,  B32B7/027 ,  C04B2237/10 ,  C04B2237/343 ,  C04B2237/60 ,  C04B2237/708 ,  C03C2209/00 ,  C03C2204/00 ,  H01L21/6833

Abstract: Disclosed is a joined ceramic body comprising a first ceramic portion comprising a first ceramic, a second ceramic portion comprising a second ceramic, and a joining layer formed between the first ceramic portion and the second ceramic portion. The joining layer has a bond thickness of from 0.5 to 20 um and comprises silicon dioxide having a total impurity content of 20 ppm and less. A method of making the joined ceramic body and a joining material are also disclosed.

公开(公告)号：US20190202746A1

公开(公告)日：2019-07-04

申请号：US16079562

申请日：2017-02-24

Applicant: KYOCERA Corporation

Inventor： Kiyotaka NAKAMURA ,  Masayuki MORIYAMA

IPC: C04B37/00 ,  B32B18/00

CPC classification number: C04B37/003 ,  B32B18/00 ,  C04B35/581 ,  C04B37/005 ,  C04B2235/3208 ,  C04B2235/3217 ,  C04B2235/3225 ,  C04B2235/3865 ,  C04B2235/442 ,  C04B2235/95 ,  C04B2235/96 ,  C04B2237/064 ,  C04B2237/366 ,  C04B2237/58 ,  C04B2237/595 ,  C04B2237/708 ,  C04B2237/78 ,  C04B2237/80 ,  C04B2237/88

Abstract: A ceramic bonded body may include a first member, a second member, a joining layer between the first member and the second member, and a covering layer which covers the joining layer and is located over the first member and the second member. The first member and the second member may include aluminum nitride-based ceramic. The joining layer and the covering layer may include at least aluminum, calcium, yttrium, and oxygen where, in 100 mass % of all of the constituents configuring the joining layer and the covering layer, the aluminum is 21 mass % or more converted to oxides, the calcium is 21 mass % or more converted to oxides, and the sum of the aluminum and the calcium converted to oxides is 86 mass % or more. The covering layer has a content of yttrium converted to oxides greater than that of the joining layer.

公开(公告)号：US20180265418A1

公开(公告)日：2018-09-20

申请号：US15984667

申请日：2018-05-21

Applicant: The Boeing Company

Inventor： Tab Hunter Crooks ,  MaryAnn S. Muench

IPC: C04B37/00 ,  C09J1/00 ,  B32B18/00 ,  C04B35/638 ,  C04B37/02 ,  C04B37/04 ,  B32B7/02 ,  B32B7/12 ,  C04B35/636

CPC classification number: C04B37/005 ,  B32B7/02 ,  B32B7/12 ,  B32B18/00 ,  B32B2307/30 ,  C04B35/6365 ,  C04B35/638 ,  C04B37/008 ,  C04B37/025 ,  C04B37/028 ,  C04B37/04 ,  C04B2235/5436 ,  C04B2235/656 ,  C04B2235/9607 ,  C04B2237/06 ,  C04B2237/10 ,  C04B2237/343 ,  C04B2237/38 ,  C04B2237/385 ,  C04B2237/401 ,  C04B2237/52 ,  C04B2237/58 ,  C04B2237/60 ,  C04B2237/708 ,  C04B2237/72 ,  C09J1/00

Abstract: Adhesive compositions and methods for bonding materials with different thermal expansion coefficients is provided. The adhesive is formulated using a flux material, a low flux material, and a filler material, where the filler material comprises particulate from at least one of the two components being bonded together. A thickening agent can also be used as part of the adhesive composition to aid in applying the adhesive and establishing a desired bond thickness. The method of forming a high strength bond using the disclosed adhesive does not require the use of intermediary layer or the use of high cure temperatures that could damage one or both of the components being bonded together.

公开(公告)号：US10000422B2

公开(公告)日：2018-06-19

申请号：US14708880

申请日：2015-05-11

Applicant: CoorsTek, Inc.

Inventor： Joseph R Fellows ,  Merrill Wilson

IPC: C04B37/00

CPC classification number: C04B37/006 ,  C04B2235/662 ,  C04B2235/75 ,  C04B2235/96 ,  C04B2237/121 ,  C04B2237/365 ,  C04B2237/368 ,  C04B2237/52 ,  C04B2237/60 ,  C04B2237/708 ,  C04B2237/72

Abstract: The present invention provides a ceramic to ceramic joint and methods for making such a joint. Generally, the joint includes a first ceramic part and a second ceramic part, wherein the first and second ceramic parts each include a ceramic-carbide or a ceramic-nitride material. In some cases, an aluminum-initiated joint region joins the first and second ceramic parts. This joint region typically includes chemical species from the first and second ceramic parts that have diffused into the joint region. Additionally, the first and second ceramic parts each typically include a joint diffusion zone that is disposed adjacent to the joint region and which includes aluminum species from the joint region that have diffused into the joint diffusion zone. Other implementations are also described.

公开(公告)号：US09969645B2

公开(公告)日：2018-05-15

申请号：US14134276

申请日：2013-12-19

Applicant: Javier E. Gonzalez ,  Arthur F. Grant

Inventor： Javier E. Gonzalez ,  Arthur F. Grant

IPC: C03C8/24 ,  C03C10/00 ,  C04B37/00 ,  B01D65/00 ,  B01D71/02 ,  C04B35/626 ,  C04B35/632 ,  C04B35/634 ,  C04B35/638 ,  C04B37/02 ,  H01M8/0282 ,  H01M8/0286

CPC classification number: C03C8/24 ,  B01D65/003 ,  B01D71/024 ,  C03C10/0018 ,  C04B35/6264 ,  C04B35/632 ,  C04B35/6342 ,  C04B35/638 ,  C04B37/005 ,  C04B37/025 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2237/10 ,  C04B2237/348 ,  C04B2237/40 ,  C04B2237/401 ,  C04B2237/60 ,  C04B2237/708 ,  C04B2237/765 ,  H01M8/0282 ,  H01M8/0286 ,  Y10T403/477

Abstract: An improved method of sealing a ceramic part to a solid part made of ceramic, metal, cermet or a ceramic coated metal is provided. The improved method includes placing a bond agent comprising an Al2O3 and SiO2 based glass-ceramic material and organic binder material on adjoining surfaces of the ceramic part and the solid part. The assembly is heated to a first target temperature that removes or dissolves the organic binder material from the bond agent and the assembly is subjected to a second induction heating step at a temperature ramp rate of between about 100° C. and 200° C. per minute to temperatures where the glass-ceramic material flows and wets the interface between adjoining surfaces. The assembly is rapidly cooled at a cooling rate of about 140° C. per minute or more to induce nucleation and re-crystallization of the glass-ceramic material to form a dense, durable and gas-tight seal.

公开(公告)号：US20180040533A1

公开(公告)日：2018-02-08

申请号：US15557208

申请日：2016-03-02

Applicant: MITSUBISHI MATERIALS CORPORATION

Inventor： Nobuyuki Terasaki ,  Yoshiyuki Nagatomo

IPC: H01L23/373 ,  H01L23/498 ,  H01L21/48

CPC classification number: H01L23/3735 ,  B23K11/20 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/18 ,  C04B37/021 ,  C04B37/026 ,  C04B2237/121 ,  C04B2237/128 ,  C04B2237/366 ,  C04B2237/402 ,  C04B2237/704 ,  C04B2237/706 ,  C04B2237/708 ,  H01L21/4846 ,  H01L21/4882 ,  H01L23/473 ,  H01L23/49838 ,  H01L2224/32225

Abstract: A method of manufacturing a bonded body is provided in which a copper member (13B) formed from copper or a copper alloy, and an aluminum member (31) formed from an aluminum alloy in which a Si concentration is set in a range of 1 mass % to 25 mass % are bonded to each other. In the aluminum member before the bonding, D90 of an equivalent circle diameter of a Si phase at a bonding surface with the copper member is set in a range of 1 μm to 8 μm, and the aluminum member and the copper member are subjected to solid-phase diffusion bonding.

公开(公告)号：US09735085B2

公开(公告)日：2017-08-15

申请号：US15119547

申请日：2015-01-30

Applicant: MITSUBISHI MATERIALS CORPORATION

Inventor： Nobuyuki Terasaki ,  Yoshiyuki Nagatomo

IPC: H05K7/00 ,  H01L23/373 ,  H01L25/07 ,  H01L25/18 ,  C04B37/02 ,  H01L23/15 ,  B23K1/00 ,  B23K35/30 ,  H05K1/18

CPC classification number: H01L23/3735 ,  B23K1/0016 ,  B23K35/302 ,  C04B37/026 ,  C04B2235/656 ,  C04B2235/6567 ,  C04B2237/121 ,  C04B2237/122 ,  C04B2237/124 ,  C04B2237/126 ,  C04B2237/127 ,  C04B2237/128 ,  C04B2237/343 ,  C04B2237/366 ,  C04B2237/402 ,  C04B2237/407 ,  C04B2237/60 ,  C04B2237/708 ,  C04B2237/72 ,  H01L23/15 ,  H01L25/07 ,  H01L25/18 ,  H01L2224/32225 ,  H01L2224/83101 ,  H05K1/181 ,  H05K2201/10378

Abstract: There is provided a bonded body of the invention in which a ceramic member formed of a ceramic containing Al and a Cu member formed of Cu or a Cu alloy are bonded to each other, in which a bonding portion is formed between the ceramic member and the Cu member, an active metal compound region formed of a compound containing active metal is formed on the bonded portion on the ceramic member side, and an Al concentration of the bonding portion having a thickness range of 0.5 μm to 3 μm from one surface of the active metal compound region on the Cu member side towards the Cu member side is in a range of 0.5 at % to 15 at %.

公开(公告)号：US20170190591A1

公开(公告)日：2017-07-06

申请号：US15101849

申请日：2015-08-28

Applicant: SUMITOMO ELECTRIC HARDMETAL CORP.

Inventor： Shinya Imamura ,  Anongsack Paseuth ,  Takanori Detani ,  Hideaki Kanaoka

IPC: C01F7/02 ,  B23B27/14 ,  C04B37/00

CPC classification number: C01F7/02 ,  B23B27/148 ,  B23B2224/04 ,  B23B2224/28 ,  B23B2224/32 ,  B23B2224/36 ,  B23B2228/04 ,  B23B2228/08 ,  B23B2228/105 ,  B23B2228/36 ,  C01P2002/78 ,  C04B37/001 ,  C04B37/005 ,  C04B2237/08 ,  C04B2237/083 ,  C04B2237/343 ,  C04B2237/36 ,  C04B2237/704 ,  C04B2237/708 ,  C04B2237/72 ,  C04B2237/76 ,  C23C16/0272 ,  C23C16/403 ,  C23C16/56 ,  C23C28/044 ,  C23C30/005

Abstract: A surface-coated cutting tool according to the present invention includes a coating. The coating has an α-Al2O3 layer. The α-Al2O3 layer includes a lower layer portion and an upper layer portion. When respective crystal orientations of crystal grains of α-Al2O3 are specified by performing EBSD analyses with an FE-SEM on a cross-section obtained when the α-Al2O3 layer is cut along a plane including a normal line of a surface of the α-Al2O3 layer and a color map is prepared based on the crystal orientations, in the color map, an area in the upper layer portion occupied by the crystal grains of which normal direction of a (001) plane is within ±10° with respect to a normal direction of the surface of the α-Al2O3 layer is equal to or more than 90%, and such an area in the lower layer portion is equal to or less than 50%.

公开(公告)号：US09624137B2

公开(公告)日：2017-04-18

申请号：US14292804

申请日：2014-05-30

Applicant: Component Re-Engineering Company, Inc.

Inventor： Alfred Grant Elliot ,  Brent Donald Alfred Elliot ,  Frank Balma ,  Richard Erich Schuster ,  Dennis George Rex ,  Alexander Veytser

IPC: B23K31/02 ,  C04B37/00 ,  B23K35/28 ,  B23K1/00 ,  B23K1/19 ,  B23K1/20 ,  B23K35/00 ,  B32B9/00 ,  B32B9/04 ,  B32B15/20 ,  C04B35/645 ,  H01L21/687 ,  B23K35/38 ,  B23K1/008 ,  B23K3/08 ,  F16B9/00 ,  F16B11/00

CPC classification number: C04B37/006 ,  B23K1/0016 ,  B23K1/008 ,  B23K1/19 ,  B23K1/20 ,  B23K3/087 ,  B23K35/005 ,  B23K35/286 ,  B23K35/38 ,  B32B9/005 ,  B32B9/04 ,  B32B9/041 ,  B32B15/20 ,  B32B37/06 ,  B32B37/10 ,  C04B35/645 ,  C04B37/001 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/6581 ,  C04B2235/6582 ,  C04B2235/945 ,  C04B2237/121 ,  C04B2237/122 ,  C04B2237/126 ,  C04B2237/127 ,  C04B2237/34 ,  C04B2237/343 ,  C04B2237/348 ,  C04B2237/36 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/592 ,  C04B2237/60 ,  C04B2237/61 ,  C04B2237/64 ,  C04B2237/66 ,  C04B2237/68 ,  C04B2237/704 ,  C04B2237/708 ,  C04B2237/72 ,  C04B2237/76 ,  C04B2237/765 ,  C04B2237/80 ,  C04B2237/84 ,  F16B9/00 ,  F16B11/006 ,  H01L21/67103 ,  H01L21/6833 ,  H01L21/68757 ,  H01L21/68785 ,  H01L21/68792 ,  Y10T403/46 ,  Y10T428/31504 ,  Y10T428/31678

Abstract: A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be on a non-diffusable type, such as aluminum nitride, alumina, beryllium oxide, and zirconia, and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.