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公开(公告)号:US08395239B2
公开(公告)日:2013-03-12
申请号:US12915170
申请日:2010-10-29
申请人: Hsien-Wei Chen , Chung-Ying Yang
发明人: Hsien-Wei Chen , Chung-Ying Yang
CPC分类号: H01L24/14 , H01L23/585 , H01L24/05 , H01L24/13 , H01L2224/0233 , H01L2224/02331 , H01L2224/02379 , H01L2224/0239 , H01L2224/0401 , H01L2224/05008 , H01L2224/05024 , H01L2224/13012 , H01L2224/13014 , H01L2224/13116 , H01L2224/13139 , H01L2224/13147 , H01L2224/14179 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01059 , H01L2924/01072 , H01L2924/01074 , H01L2924/01082 , H01L2924/014 , H01L2924/1306 , H01L2924/14 , H01L2924/00012 , H01L2924/00
摘要: A semiconductor device includes a substrate having a seal ring region and a circuit region, at least one corner bump disposed in the circuit region, a seal ring structure disposed in the seal ring region, and a connector electrically coupling a metal layer of the seal ring structure to the at least one corner bump. The at least one corner bump is configured to be coupled to a signal ground. A method of fabricating a semiconductor device includes providing a substrate having a seal ring region and a circuit region, providing at least one corner bump in a triangular corner bump zone in the circuit region, providing a seal ring structure in the seal ring region, electrically coupling a metal layer of the seal ring structure to the at least one corner bump, and electrically coupling the at least one corner bump to a signal ground.
摘要翻译: 半导体器件包括具有密封环区域和电路区域的基板,设置在电路区域中的至少一个拐角凸起,设置在密封环区域中的密封环结构,以及将密封环的金属层电耦合的连接器 结构到至少一个拐角凸起。 所述至少一个拐角凸块被配置为耦合到信号接地。 一种制造半导体器件的方法包括提供具有密封环区域和电路区域的衬底,在电路区域中的三角形拐角凸起区域中提供至少一个拐角凸起,在密封环区域中提供密封环结构,电 将所述密封环结构的金属层耦合到所述至少一个拐角凸块,以及将所述至少一个拐角凸起电耦合到信号接地。
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公开(公告)号:US08373254B2
公开(公告)日:2013-02-12
申请号:US12181663
申请日:2008-07-29
申请人: Hsien-Wei Chen , Yu-Wen Liu , Hao-Yi Tsai
发明人: Hsien-Wei Chen , Yu-Wen Liu , Hao-Yi Tsai
IPC分类号: H01L21/302 , H01L23/58
CPC分类号: H01L23/49811 , H01L21/78 , H01L23/585 , H01L2924/0002 , H01L2924/00
摘要: A crack prevention structure that reduces integrated circuit corner peeling and reduces cracking is disclosed. The crack prevention structure comprises a semiconductor substrate; a first plurality of dielectric layers of a first material disposed over the semiconductor substrate; a second plurality of dielectric layers of a second material different than the first material, disposed on the first plurality of dielectric layers, wherein the first plurality of dielectric layers and the second plurality of dielectric layers meet at an interface; and a plurality of metal structures and a plurality of via structures formed through the interface of the first plurality of dielectric layers and the second plurality of dielectric layers.
摘要翻译: 公开了一种减少集成电路角剥离并减少开裂的防裂结构。 防裂结构包括半导体衬底; 设置在所述半导体衬底上的第一材料的第一多个电介质层; 设置在所述第一多个电介质层上的第二材料的不同于所述第一材料的第二多个电介质层,其中所述第一多个电介质层和所述第二多个电介质层在界面处相交; 以及通过所述第一多个介电层和所述第二多个电介质层的界面形成的多个金属结构体和多个通孔结构。
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公开(公告)号:US20120299159A1
公开(公告)日:2012-11-29
申请号:US13117549
申请日:2011-05-27
申请人: Hsien-Wei Chen
发明人: Hsien-Wei Chen
IPC分类号: H01L23/544 , H01L21/76
CPC分类号: H01L23/544 , G03F7/70625 , G03F7/70633 , G03F7/70683 , G03F9/7076 , G03F9/7084 , H01L21/50 , H01L27/0203 , H01L2924/0002 , H01L2924/00
摘要: Devices and methods for pattern alignment are disclosed. In one embodiment, a semiconductor device includes a die including an integrated circuit region, an assembly isolation region around the integrated circuit region, and a seal ring region around the assembly isolation region. The device further includes a die alignment mark disposed within the seal ring region or the assembly isolation region.
摘要翻译: 公开了用于图案对准的装置和方法。 在一个实施例中,半导体器件包括具有集成电路区域的集成电路,集成电路区域周围的组件隔离区域和围绕组件隔离区域的密封环区域。 该装置还包括设置在密封环区域或组件隔离区域内的管芯对准标记。
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公开(公告)号:US20120211902A1
公开(公告)日:2012-08-23
申请号:US13463433
申请日:2012-05-03
申请人: Shin-Puu Jeng , Yu-Wen Liu , Hao-Yi Tsai , Hsien-Wei Chen
发明人: Shin-Puu Jeng , Yu-Wen Liu , Hao-Yi Tsai , Hsien-Wei Chen
IPC分类号: H01L23/485 , H01L23/49
CPC分类号: H01L24/03 , H01L24/05 , H01L2224/02166 , H01L2224/0401 , H01L2224/05093 , H01L2224/05096 , H01L2224/05124 , H01L2224/05147 , H01L2224/05166 , H01L2224/05181 , H01L2224/05184 , H01L2224/05187 , H01L2224/05552 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/16 , H01L2224/85201 , H01L2224/85205 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01032 , H01L2924/01033 , H01L2924/01046 , H01L2924/01049 , H01L2924/01068 , H01L2924/01073 , H01L2924/01074 , H01L2924/01078 , H01L2924/01082 , H01L2924/01087 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/10253 , H01L2924/10329 , H01L2924/14 , H01L2924/30105 , H01L2924/3011 , H01L2924/37001 , H01L2924/00012 , H01L2924/00
摘要: A bonding pad structure is provided that includes two conductive layers and a connective layer interposing the two conductive layers. The connective layer includes a contiguous, conductive structure. In an embodiment, the contiguous conductive structure is a solid layer of conductive material. In other embodiments, the contiguous conductive structure is a conductive network including, for example, a matrix configuration or a plurality of conductive stripes. At least one dielectric spacer may interpose the conductive network. Conductive plugs may interconnect a bond pad and one of the conductive layers.
摘要翻译: 提供了一种焊盘结构,其包括两个导电层和插入两个导电层的连接层。 连接层包括连续的导电结构。 在一个实施例中,邻接的导电结构是导电材料的固体层。 在其它实施例中,连续导电结构是包括例如矩阵配置或多个导电条纹的导电网络。 至少一个电介质间隔物可以插入导电网络。 导电插头可以将接合焊盘和导电层中的一个互连。
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公开(公告)号:US08203209B2
公开(公告)日:2012-06-19
申请号:US12813763
申请日:2010-06-11
申请人: Chen-Hua Yu , Shin-Puu Jeng , Hao-Yi Tsai , Hsien-Wei Chen
发明人: Chen-Hua Yu , Shin-Puu Jeng , Hao-Yi Tsai , Hsien-Wei Chen
IPC分类号: H01L23/498
CPC分类号: H01L24/11 , H01L23/3192 , H01L2224/0401 , H01L2224/05006 , H01L2224/05124 , H01L2224/05139 , H01L2224/05144 , H01L2224/05147 , H01L2224/05155 , H01L2224/05166 , H01L2224/05184 , H01L2224/05552 , H01L2224/05572 , H01L2224/05655 , H01L2224/13006 , H01L2224/13099 , H01L2224/16225 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01022 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01074 , H01L2924/01075 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/014 , H01L2924/14 , H01L2924/19041 , H01L2924/3511 , H01L2924/00012 , H01L2924/00014 , H01L2924/013
摘要: An integrated circuit structure includes a semiconductor substrate, and an active device formed at a front surface of the semiconductor substrate. A bond pad is over the front surface of the semiconductor substrate. The bond pad has a first dimension in a first direction parallel to the front surface of the semiconductor substrate. A bump ball is over the bond pad, wherein the bump ball has a diameter in the first direction, and wherein an enclosure of the first dimension and the diameter is greater than about −1 μm.
摘要翻译: 集成电路结构包括半导体衬底和形成在半导体衬底的前表面的有源器件。 接合焊盘在半导体衬底的前表面之上。 接合焊盘在与半导体基板的前表面平行的第一方向上具有第一尺寸。 凸块球在接合垫上方,其中凸块球具有在第一方向上的直径,并且其中第一尺寸和直径的外壳大于约-1μm。
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公开(公告)号:US08174124B2
公开(公告)日:2012-05-08
申请号:US12756727
申请日:2010-04-08
申请人: Ming-Yen Chiu , Hsien-Wei Chen , Ming-Fa Chen , Shin-Puu Jeng
发明人: Ming-Yen Chiu , Hsien-Wei Chen , Ming-Fa Chen , Shin-Puu Jeng
IPC分类号: H01L23/48
CPC分类号: H01L23/522 , H01L21/6835 , H01L23/481 , H01L24/05 , H01L24/06 , H01L24/13 , H01L24/14 , H01L2221/68327 , H01L2221/6834 , H01L2221/68372 , H01L2224/0401 , H01L2224/05075 , H01L2224/05124 , H01L2224/05139 , H01L2224/05144 , H01L2224/05147 , H01L2224/05155 , H01L2224/05184 , H01L2224/0557 , H01L2224/05572 , H01L2224/06515 , H01L2224/13147 , H01L2224/13644 , H01L2224/13655 , H01L2224/14181 , H01L2924/0002 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01074 , H01L2924/01079 , H01L2924/014 , H01L2924/14 , H01L2224/05552 , H01L2924/00
摘要: A device includes a semiconductor substrate including a front side and a backside. A through-substrate via (TSV) penetrates the semiconductor substrate. A dummy metal line is formed on the backside of the semiconductor substrate, and may be connected to the dummy TSV.
摘要翻译: 一种器件包括包括正面和背面的半导体衬底。 贯穿衬底通孔(TSV)穿透半导体衬底。 虚拟金属线形成在半导体衬底的背面,并且可以连接到虚拟TSV。
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公开(公告)号:US20120104594A1
公开(公告)日:2012-05-03
申请号:US12915170
申请日:2010-10-29
申请人: Hsien-Wei Chen , Chung-Ying Yang
发明人: Hsien-Wei Chen , Chung-Ying Yang
CPC分类号: H01L24/14 , H01L23/585 , H01L24/05 , H01L24/13 , H01L2224/0233 , H01L2224/02331 , H01L2224/02379 , H01L2224/0239 , H01L2224/0401 , H01L2224/05008 , H01L2224/05024 , H01L2224/13012 , H01L2224/13014 , H01L2224/13116 , H01L2224/13139 , H01L2224/13147 , H01L2224/14179 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01059 , H01L2924/01072 , H01L2924/01074 , H01L2924/01082 , H01L2924/014 , H01L2924/1306 , H01L2924/14 , H01L2924/00012 , H01L2924/00
摘要: A semiconductor device includes a substrate having a seal ring region and a circuit region, at least one corner bump disposed in the circuit region, a seal ring structure disposed in the seal ring region, and a connector electrically coupling a metal layer of the seal ring structure to the at least one corner bump. The at least one corner bump is configured to be coupled to a signal ground. A method of fabricating a semiconductor device includes providing a substrate having a seal ring region and a circuit region, providing at least one corner bump in a triangular corner bump zone in the circuit region, providing a seal ring structure in the seal ring region, electrically coupling a metal layer of the seal ring structure to the at least one corner bump, and electrically coupling the at least one corner bump to a signal ground.
摘要翻译: 半导体器件包括具有密封环区域和电路区域的基板,设置在电路区域中的至少一个拐角凸起,设置在密封环区域中的密封环结构,以及将密封环的金属层电耦合的连接器 结构到至少一个拐角凸起。 所述至少一个拐角凸块被配置为耦合到信号接地。 一种制造半导体器件的方法包括提供具有密封环区域和电路区域的衬底,在电路区域中的三角形拐角凸起区域中提供至少一个拐角凸起,在密封环区域中提供密封环结构,电 将所述密封环结构的金属层耦合到所述至少一个拐角凸块,以及将所述至少一个拐角凸起电耦合到信号接地。
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公开(公告)号:US20120018877A1
公开(公告)日:2012-01-26
申请号:US12843549
申请日:2010-07-26
申请人: Chung-Ying Yang , Chao-Wen Shih , Hao-Yi Tsai , Hsien-Wei Chen , Mirng-Ji Lii , Tzuan-Horng Liu
发明人: Chung-Ying Yang , Chao-Wen Shih , Hao-Yi Tsai , Hsien-Wei Chen , Mirng-Ji Lii , Tzuan-Horng Liu
IPC分类号: H01L23/538 , H01L23/488
CPC分类号: H01L23/5385 , H01L23/3121 , H01L23/5384 , H01L24/16 , H01L24/48 , H01L24/73 , H01L25/0652 , H01L25/0655 , H01L25/105 , H01L2224/05571 , H01L2224/05573 , H01L2224/056 , H01L2224/16225 , H01L2224/16227 , H01L2224/16237 , H01L2224/32225 , H01L2224/451 , H01L2224/48227 , H01L2224/73204 , H01L2225/0651 , H01L2225/06517 , H01L2225/1023 , H01L2225/1058 , H01L2924/00014 , H01L2924/14 , H01L2924/181 , H01L2924/00012 , H01L2924/00 , H01L2224/45099 , H01L2224/05599
摘要: A device includes a package substrate including a first non-reflowable metal bump extending over a top surface of the package substrate; a die over and bonded to the package substrate; and a package component over the die and bonded to the package substrate. The package component includes a second non-reflowable metal bump extending below a bottom surface of the package component. The package component is selected from the group consisting essentially of a device die, an additional package substrate, and combinations thereof. A solder bump bonds the first non-reflowable metal bump to the second non-reflowable metal bump.
摘要翻译: 一种器件包括封装衬底,其包括在封装衬底的顶表面上延伸的第一不可回流金属凸块; 并且结合到封装基板上; 以及在所述管芯上并且结合到所述封装衬底的封装部件。 包装部件包括在包装部件的底部表面下方延伸的第二不可回流金属凸块。 封装部件选自基本上由器件管芯,附加封装衬底及其组合组成的组。 焊料凸块将第一不可回流金属凸块接合到第二不可回流金属凸块。
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公开(公告)号:US20110287627A1
公开(公告)日:2011-11-24
申请号:US13197003
申请日:2011-08-03
申请人: Hsien-Wei Chen , Ying-Ju Chen , Yu-Wen Liu , Hao-Yi Tsai , Shin-Puu Jeng
发明人: Hsien-Wei Chen , Ying-Ju Chen , Yu-Wen Liu , Hao-Yi Tsai , Shin-Puu Jeng
IPC分类号: H01L21/768
CPC分类号: H01L22/34 , H01L24/05 , H01L2924/14 , H01L2924/1461 , H01L2924/00
摘要: A semiconductor test pad interconnect structure with integrated die-separation protective barriers. The interconnect structure includes a plurality of stacked metal layers each having an electrically conductive test pad separated from other test pads by a dielectric material layer. In one embodiment, at least one metallic via bar is embedded into the interconnect structure and electrically interconnects each of the test pads in the metal layers together. The via bar extends substantially along an entire first side defined by each test pad in some embodiments. In other embodiments, a pair of opposing via bars may be provided that are arranged on opposite sides of a die singulation saw cut line defined in a scribe band on a semiconductor wafer.
摘要翻译: 具有集成的模具隔离保护屏障的半导体测试焊盘互连结构。 互连结构包括多个堆叠的金属层,每个层具有通过介电材料层与其它测试焊盘分离的导电测试焊盘。 在一个实施例中,至少一个金属通孔条被嵌入到互连结构中,并将金属层中的每个测试焊盘电连接在一起。 在一些实施例中,通孔棒基本上沿着由每个测试垫限定的整个第一侧面延伸。 在其它实施例中,可以提供一对相对的通孔条,其布置在限定在半导体晶片上的划线带中的模切单切锯切线的相对侧上。
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公开(公告)号:US20110266541A1
公开(公告)日:2011-11-03
申请号:US13180304
申请日:2011-07-11
申请人: Chung-Ying Yang , Hsien-Wei Chen
发明人: Chung-Ying Yang , Hsien-Wei Chen
IPC分类号: H01L23/48
CPC分类号: H01L27/0203 , H01L22/32 , H01L22/34 , H01L23/585 , H01L24/05 , H01L2223/5446 , H01L2223/54493 , H01L2224/02166 , H01L2224/05093 , H01L2224/05553 , H01L2924/01019 , H01L2924/04941 , H01L2924/13091 , H01L2924/14 , H01L2924/00
摘要: A semiconductor chip includes a circuit region and a corner stress relief (CSR) region. The CSR region is in a corner of the semiconductor chip. A device under test (DUT) structure or a functional circuit is disposed on the circuit region. A probe pad is disposed on the CSR region. A metal line extends from the circuit region to the CSR region to electrically connect the probe pad to the DUT structure or a functional circuit.
摘要翻译: 半导体芯片包括电路区域和角部应力消除(CSR)区域。 CSR区域位于半导体芯片的一角。 被测器件(DUT)结构或功能电路设置在电路区域上。 探针垫设置在CSR区域上。 金属线从电路区域延伸到CSR区域,以将探针焊盘电连接到DUT结构或功能电路。
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