公开(公告)号：US08530837B2

公开(公告)日：2013-09-10

申请号：US13204528

申请日：2011-08-05

申请人： Pavel Adamec

发明人： Pavel Adamec

IPC分类号： H01J37/285 ,  G01N23/00 ,  G21K7/00

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2449 ,  H01J2237/245

摘要： A charged particle beam device for inspecting a specimen includes a charged particle beam source adapted to generate a primary charged particle beam; an objective lens device adapted to direct the primary charged particle beam onto the specimen; a retarding field device adapted to accelerate secondary charged particles starting from the specimen, a first detector device having a central opening, includes at least two azimuthal detector segments for detecting secondary particles, wherein the objective lens device is adapted such that particles with different starting angles from the specimen exhibit crossovers at substantially the same distance from the specimen between the objective lens and the detector device, and an aperture located between the objective lens and the crossovers, having an opening which is equal to or smaller than the central opening in the detector device.

摘要翻译： 用于检查样本的带电粒子束装置包括适于产生初级带电粒子束的带电粒子束源; 适于将初级带电粒子束引导到样本上的物镜装置; 适于加速从样本开始的次级带电粒子的延迟场设备，具有中心开口的第一检测器装置包括至少两个用于检测次级粒子的方位角检测器段，其中物镜装置适于使得起始角度不同的颗粒 来自该样本的物镜在与物镜和检测器装置之间的样本基本上相同的距离处展开交叉，以及位于物镜和交越器之间的孔，其具有等于或小于检测器中的中心开口的开口 设备。

公开(公告)号：US08373136B2

公开(公告)日：2013-02-12

申请号：US12579869

申请日：2009-10-15

申请人： Gerald Schoenecker ,  Stefan Lanio

发明人： Gerald Schoenecker ,  Stefan Lanio

IPC分类号： H01J3/18 ,  H01J3/20

CPC分类号： H01J37/1472 ,  H01J2237/1508 ,  H01J2237/153

摘要： An achromatic beam separator device for separating a primary charged particle beam from another charged particle beam and providing the primary charged particle beam on an optical axis (142) is provided, including a primary charged particle beam inlet (134), a primary charged particle beam outlet (132) encompassing the optical axis, a magnetic deflection element (163) adapted to generate a magnetic field, and an electrostatic deflection element (165) adapted to generate an electric field overlapping the magnetic field, wherein at least one element chosen from the electrostatic deflection element and the magnetic deflection element is positioned and/or positionable to compensate an octopole influence.

摘要翻译： 提供了一种消色差束分离器装置，用于将初级带电粒子束与另一带电粒子束分离并在光轴（142）上提供初级带电粒子束，包括初级带电粒子束入口（134），初级带电粒子束 包括光轴的出口（132），适于产生磁场的磁偏转元件（163）和适于产生与磁场重叠的电场的静电偏转元件（165），其中，从 静电偏转元件和磁偏转元件被定位和/或定位以补偿八极杆的影响。

公开(公告)号：US07838830B2

公开(公告)日：2010-11-23

申请号：US11923407

申请日：2007-10-24

申请人： Juergen Frosien ,  Helmut Banzhof ,  Jacob Levin ,  Dror Shemesh

发明人： Juergen Frosien ,  Helmut Banzhof ,  Jacob Levin ,  Dror Shemesh

IPC分类号： G01N23/00

CPC分类号： H01J37/1478 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/1506 ,  H01J2237/2448 ,  H01J2237/26 ,  H01J2237/2806 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A charged particle beam apparatus is provided, which comprises a charged particle beam column for generating a primary charged particle beam; a focusing assembly, such as a charged particle lens, e.g., an electrostatic lens, for focusing the primary charged particle beam on a specimen; a detector for detecting charged signal particles which are emerging from the specimen; and a deflector arrangement for deflecting the primary charged particle beam. The deflector arrangement is arranged downstream of the focusing assembly and is adapted for allowing the charged signal particles passing therethrough. The detector is laterally displaced with respect to the optical axis in a deflection direction defined by the post-focusing deflector arrangement.

摘要翻译： 提供带电粒子束装置，其包括用于产生初级带电粒子束的带电粒子束柱; 聚焦组件，例如带电粒子透镜，例如静电透镜，用于将初级带电粒子束聚焦在样本上; 用于检测从样本出现的带电信号颗粒的检测器; 以及用于偏转初级带电粒子束的偏转器装置。 偏转器布置布置在聚焦组件的下游，并且适于允许带电信号颗粒通过其中。 检测器在由后聚焦偏转器布置限定的偏转方向上相对于光轴横向移位。

公开(公告)号：US20090289185A1

公开(公告)日：2009-11-26

申请号：US12133298

申请日：2008-06-04

申请人： Juergen FROSIEN ,  Dieter WINKLER ,  Udo WEIGEL ,  Stefan GRIMM

发明人： Juergen FROSIEN ,  Dieter WINKLER ,  Udo WEIGEL ,  Stefan GRIMM

IPC分类号： G01N23/00

CPC分类号： H01J37/08 ,  H01J27/26 ,  H01J37/28 ,  H01J2237/004 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/244 ,  H01J2237/24514 ,  H01J2237/24535 ,  H01J2237/24564 ,  H01J2237/24578 ,  H01J2237/2594 ,  H01J2237/2623 ,  H01J2237/2816 ,  H01J2237/2817

摘要： A focused ion beam device is described comprising a gas field ion source with an analyzer for analyzing and classifying the structure of a specimen, a controller for controlling and/or modifying the structure of the specimen according to the analysis of the analyzer, an emitter tip, the emitter tip has a base tip comprising a first material and a supertip comprising a material different from the first material, wherein the supertip is a single atom tip and the base tip is a single crystal base tip. Furthermore, the focused ion beam device has a probe current control and a sample charge control. A method of operating a focused ion beam device is provided comprising applying a voltage between a single emission centre of the supertip and an electrode, supplying gas to the emitter tip, analyzing and classifying the structure of a specimen, and controlling the structure of the specimen.

摘要翻译： 描述了一种聚焦离子束装置，其包括气体离子源，其具有用于分析和分类样品结构的分析器，用于根据分析仪的分析来控制和/或改变样品的结构的控制器，发射器尖端 发射极尖端具有包括第一材料和超高压头的基座尖端，所述第一材料和第一材料包括不同于所述第一材料的材料，其中所述超高压是单个原子尖端，并且所述基座尖端是单晶基底尖端。 此外，聚焦离子束装置具有探针电流控制和样品充电控制。 提供了一种操作聚焦离子束装置的方法，包括在超高压的单个发射中心和电极之间施加电压，向发射极尖端供应气体，分析和分类样品的结构，以及控制样品的结构 。

公开(公告)号：US20090121160A1

公开(公告)日：2009-05-14

申请号：US12253042

申请日：2008-10-16

申请人： Dieter Winkler ,  Udo Weigel ,  Stefan Grimm

发明人： Dieter Winkler ,  Udo Weigel ,  Stefan Grimm

IPC分类号： G01J1/00

CPC分类号： H01J37/073 ,  H01J27/26 ,  H01J37/08 ,  H01J37/265 ,  H01J37/304 ,  H01J2237/06341 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/30466 ,  H01J2237/30477 ,  H01J2237/31749

摘要： A charged particle beam device is described. The device includes an emitter unit including an emitter tip; a voltage supply unit adapted for providing a stable voltage to generate a stable extraction field at the emitter tip; a pulsed voltage supply member adapted for providing a pulsed voltage to generate a pulsed extraction field on top of the stable extraction field; a measuring unit for measuring an emitter characteristic; and a control unit adapted for receiving a signal from the measuring unit and for control of the pulsed voltage supply member.

摘要翻译： 描述带电粒子束装置。 该装置包括发射器单元，其包括发射极尖端; 电压供应单元，适于提供稳定的电压以在发射极尖端处产生稳定的提取场; 脉冲电压供应构件，其适于提供脉冲电压以在所述稳定提取场的顶部产生脉冲提取场; 用于测量发射极特性的测量单元; 以及控制单元，适于接收来自测量单元的信号并用于控制脉冲电压供应构件。

公开(公告)号：US20090001266A1

公开(公告)日：2009-01-01

申请号：US12209079

申请日：2008-09-11

申请人： JUERGEN FROSIEN

发明人： JUERGEN FROSIEN

IPC分类号： G01N23/00

CPC分类号： H01J37/08 ,  H01J37/30 ,  H01J2237/0216 ,  H01J2237/061 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/08 ,  H01J2237/0807 ,  H01J2237/26

摘要： The present invention provides a charged particle beam apparatus with a charged particle beam source including an emitter with an emitter tip; and supporting member for supporting the emitter. Further, the apparatus includes an emitter location-measuring device for repeatedly measuring the location of the emitter; and a deflector system for compensating variations in the location of the emitter.

摘要翻译： 本发明提供带电粒子束装置，带电粒子束源包括具有发射极尖端的发射极; 以及用于支撑发射器的支撑构件。 此外，该装置包括用于反复测量发射器的位置的发射器位置测量装置; 以及用于补偿发射器位置变化的偏转器系统。

公开(公告)号：US20080224062A1

公开(公告)日：2008-09-18

申请号：US12047614

申请日：2008-03-13

申请人： Pavel ADAMEC

发明人： Pavel ADAMEC

IPC分类号： H01J1/50

CPC分类号： H01J37/141 ,  H01J2237/002 ,  H01J2237/1405

摘要： A magnetic lens for a charged particle beam device and a charged particle beam device are provided. The magnetic lens includes a coil with coil windings to be excited for generation of a magnetic field, a pole piece to guide the magnetic field, a heat shield, which is connected to a cooling system, and a thermal insulation layer provided between the heat shield and the coil.

摘要翻译： 提供了一种用于带电粒子束装置和带电粒子束装置的磁透镜。 磁性透镜包括具有用于产生磁场的被激励的线圈绕组的线圈，用于引导磁场的极片，连接到冷却系统的隔热层和设置在隔热层之间的绝热层 和线圈。

公开(公告)号：US20080073583A1

公开(公告)日：2008-03-27

申请号：US11675689

申请日：2007-02-16

申请人： Thomas JASINSKI ,  Helmut BANZHOF ,  Jurgen FROSIEN

发明人： Thomas JASINSKI ,  Helmut BANZHOF ,  Jurgen FROSIEN

IPC分类号： H01J37/08

CPC分类号： H01J37/304 ,  H01J2237/1532 ,  H01J2237/31755

摘要： An ion beam apparatus is provided, the ion beam apparatus comprising a movable ion source, a condenser lens, an aperture, and a scanning unit disposed between the condenser lens and the aperture, said scanning unit being adapted to scan an ion beam across the aperture. Furthermore, a method for aligning components of an ion beam apparatus is provided, comprising the steps of: producing an ion beam by means of an ion source, producing a first image of a beam cross section of the ion beam at a first voltage of a condenser lens, producing a second image of the beam cross section of the ion beam at a second voltage of the condenser lens, and positioning the ion source so that the centers of the first and second images coincide.

摘要翻译： 提供离子束装置，离子束装置包括可移动离子源，聚光透镜，孔径和设置在聚光透镜和孔之间的扫描单元，所述扫描单元适于扫过离子束穿过孔 。 此外，提供了一种用于对准离子束装置的部件的方法，包括以下步骤：通过离子源产生离子束，产生离子束的束截面的第一图像，其中第一电压为 聚光透镜，在聚光透镜的第二电压下产生离子束的束横截面的第二图像，并且定位离子源使得第一和第二图像的中心重合。

公开(公告)号：US20070018562A1

公开(公告)日：2007-01-25

申请号：US11489979

申请日：2006-07-20

申请人： Pavel Adamec ,  Fang Zhou

发明人： Pavel Adamec ,  Fang Zhou

IPC分类号： H01J1/02

CPC分类号： H01J37/06 ,  H01J37/02 ,  H01J37/073 ,  H01J49/48 ,  H01J2237/06316

摘要： A field emitter arrangement and a method of cleaning an emitting surface of a field emitter are provided. The field emitter arrangement may include a field emitter tip having an emitting surface, wherein said field emitter tip is adapted to generate a primary beam of charged particles, and at least one electron source adapted to illuminate the emitting surface of the field emitter tip. The method of cleaning the emitting surface may include providing the field emitter having the emitting surface and at least one electron source adapted to illuminate the emitting surface and illuminating the emitting surface of the field emitter with a cleansing electron beam generated by the at least one electron source.

摘要翻译： 提供场发射器布置和清洁场发射器的发射表面的方法。 场发射器配置可以包括具有发射表面的场发射器尖端，其中所述场发射极尖端适于产生带电粒子的主光束，以及适于照射场发射器尖端的发射表面的至少一个电子源。 清洁发射表面的方法可以包括提供具有发射表面的场致发射体和至少一个电子源，其适于照射发射表面并用由至少一个电子产生的清洁电子束照射场发射器的发射表面 资源。

公开(公告)号：US07045781B2

公开(公告)日：2006-05-16

申请号：US10759392

申请日：2004-01-16

申请人： Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

发明人： Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

IPC分类号： H01J37/28

CPC分类号： H01J37/285 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0435 ,  H01J2237/049 ,  H01J2237/2855 ,  H01J2237/2857

摘要： A charged particle beam apparatus is provided which comprises a charged particle source for producing a primary beam of charged particles, aperture means for collimating said primary beam of charged particles, wherein said aperture means is adapted to switch between a collimation of said primary beam to a width appropriate for serial imaging of a sample as well as a collimation of said primary beam to a width appropriate for parallel imaging of said sample, a condenser lens for condensing said primary beam of charged particles, scanning means for deflecting said primary beam of charged particles, an objective lens for focusing said condensed primary beam, a sectorized detector for detecting a secondary charged particles. Also, several different operation modes of the beam apparatus are described allowing for serial imaging as well as parallel imaging.

摘要翻译： 提供一种带电粒子束装置，其包括用于产生带电粒子的主束的带电粒子源，用于准直所述带电粒子的一次束的孔径装置，其中所述孔口装置适于在所述主光束的准直之间切换 适合于样本的串行成像的宽度以及所述主光束的准直到适合于所述样品的平行成像的宽度，用于聚集所述带电粒子的一次束的聚光透镜，用于偏转所述带电粒子的一次束的扫描装置 用于聚焦所述冷凝的主光束的物镜，用于检测次级带电粒子的扇形检测器。 此外，描述了束装置的几种不同的操作模式，允许串行成像以及平行成像。