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    Optical waveguide structure
    14.
    发明授权
    Optical waveguide structure 有权
    光波导结构

    公开(公告)号：US09036954B2

    公开(公告)日：2015-05-19

    申请号：US13078210

    申请日：2011-04-01

    Applicant: Mauro J. Kobrinsky ,  Bruce A. Block ,  Peter L. Chang

    Inventor： Mauro J. Kobrinsky ,  Bruce A. Block ,  Peter L. Chang

    IPC: G02F1/035 ,  G02F1/025 ,  G02F1/065 ,  G02F1/225

    CPC classification number: G02F1/035 ,  G02F1/025 ,  G02F1/065 ,  G02F1/225 ,  G02F2201/18

    Abstract: Embodiments of the invention describe a multi-segment optical waveguide that enables an optical modulator to be low-power and athermal by decreasing the device length needed for a given waveguide length. Embodiments of the invention describe an optical waveguide that is folded onto itself, and thus includes at least two sections. Thus, embodiments of the invention may decrease the device size of a modulator by at least around a factor of two if the device is folded twofold (device size may be further reduced if the modulator is folded threefold, four-fold, five-fold, etc.).Embodiments of the invention further enable the electrode length required to create the desired electro-optic effect for the multi-segment optical waveguide to be reduced. In embodiments of the invention, certain electrodes may be “shared” amongst the different segments of the waveguide, thereby reducing the power requirement and capacitance of a device having a waveguide of a given length.

    Abstract translation: 本发明的实施例描述了一种多段光波导，其通过减小给定波导长度所需的器件长度，使光调制器能够实现低功率和无热性。 本发明的实施例描述了折叠到其自身上的光波导，因此包括至少两个部分。 因此，如果将器件折叠两倍，则本发明的实施例可以将调制器的器件尺寸减小至少约二分之一（如果调制器折叠三倍，四倍，五倍， 等等。）。 本发明的实施例还使得能够减少为多分段光波导产生期望的电光效应所需的电极长度。 在本发明的实施例中，某些电极可以在波导的不同部分之间“共享”，由此降低具有给定长度的波导的器件的功率需求和电容。

    Waveguide photodetector device and manufacturing method thereof
    15.
    发明授权
    Waveguide photodetector device and manufacturing method thereof 有权
    波导光电探测器及其制造方法

    公开(公告)号：US08290325B2

    公开(公告)日：2012-10-16

    申请号：US12217066

    申请日：2008-06-30

    Applicant: Miriam R. Reshotko ,  Bruce A. Block

    Inventor： Miriam R. Reshotko ,  Bruce A. Block

    IPC: G02B6/10

    CPC classification number: G02B6/1228 ,  G02B6/42 ,  G02B6/4202 ,  H01L31/105 ,  H01L31/1085

    Abstract: Embodiments of the present invention describe a waveguide-based photodetector device and its methods of fabrication. The waveguide photodetector device comprises a substrate having a cladding structure formed thereon. A waveguide element for receiving optical signals is disposed within the cladding structure. A portion of the waveguide element is encapsulated by a photodetector element that detects the optical signal received by the waveguide element and generates an electrical signal based on the optical signal. Encapsulating the waveguide element in the photodetector element improves coupling efficiency and enables a waveguide photodetector device with higher speeds and higher responsivity.

    Abstract translation: 本发明的实施例描述了一种基于波导的光电检测器件及其制造方法。 波导光检测器件包括其上形成有包层结构的基板。 用于接收光信号的波导元件设置在包层结构内。 波导元件的一部分被检测由波导元件接收的光信号的光检测器元件封装，并且基于光信号产生电信号。 将光波导元件中的波导元件封装提高了耦合效率，并使波导光电探测器器件具有更高的速度和更高的响应度。

    EFFICIENT LIGHT COUPLER FROM OFF-CHIP TO ON-CHIP WAVEGUIDES
    16.
    发明申请
    EFFICIENT LIGHT COUPLER FROM OFF-CHIP TO ON-CHIP WAVEGUIDES 审中-公开
    从芯片到片上波形的高效光耦合器

    公开(公告)号：US20100304514A1

    公开(公告)日：2010-12-02

    申请号：US12835685

    申请日：2010-07-13

    Applicant: Bruce A. Block ,  Paul Davids

    Inventor： Bruce A. Block ,  Paul Davids

    IPC: H01L33/48

    CPC classification number: G02B6/125 ,  G02B6/12004 ,  G02B6/42 ,  G02B6/4214

    Abstract: In an embodiment, light from a single mode light source may be deflected into a low index contrast (LIC) waveguide in an opto-electronic integrated circuit (OEIC) (or “opto-electronic chip”) by a 45 degree mirror. The mirror may be formed by polishing an edge of the die at a 45 degree angle and coating the polished edge with a metal layer. Light coupled into the LIC waveguide may then be transferred from the LIC waveguide to a high index contrast (HIC) waveguide by evanescent coupling.

    Abstract translation: 在一个实施例中，来自单模光源的光可以通过45度反射镜偏转到光电集成电路（OEIC）（或“光电芯片”）中的低折射率对比度（LIC）波导中。 可以通过以45度的角度抛光模具的边缘并且用金属层涂覆抛光的边缘来形成反射镜。 耦合到LIC波导中的光然后可以通过ev逝耦合从LIC波导传输到高折射率对比度（HIC）波导。

    Selective surface exposure, cleans, and conditioning of the germanium film in a Ge photodetector
    17.
    发明授权
    Selective surface exposure, cleans, and conditioning of the germanium film in a Ge photodetector 失效
    锗光电探测器中锗膜的选择性表面曝光，清洁和调节

    公开(公告)号：US07078160B2

    公开(公告)日：2006-07-18

    申请号：US10607955

    申请日：2003-06-26

    Applicant: Justin K. Brask ,  Bruce A. Block ,  Uday Shah

    Inventor： Justin K. Brask ,  Bruce A. Block ,  Uday Shah

    IPC: G03F7/00

    CPC classification number: H01L31/1808 ,  H01L21/02071 ,  H01L21/306 ,  H01L21/31144 ,  Y02E10/50

    Abstract: A method of protecting a sensitive layer from harsh chemistries. The method includes forming a first sensitive layer, forming a second layer upon the first layer, then forming a third layer over the second layer. The third layer is utilized as a mask during patterning of the second layer. During patterning, however, the second layer is only partially etched, thus leaving a buffer layer overlying the first layer. The third layer is completely removed while the buffer layer protects the first layer from the harsh chemicals that are utilized to remove the third layer. Then, the buffer layer is carefully removed down to the surface of the first layer.

    Abstract translation: 保护敏感层免受恶劣化学物质的影响。 该方法包括形成第一敏感层，在第一层上形成第二层，然后在第二层上形成第三层。 在第二层的图案化期间，第三层用作掩模。 然而，在图案化期间，第二层仅被部分蚀刻，因此留下覆盖在第一层上的缓冲层。 第三层被完全去除，而缓冲层保护第一层免受用于去除第三层的苛刻化学物质。 然后，将缓冲层小心地移除到第一层的表面。

    Fabrication of 3-D capacitor with dual damascene process
    19.
    发明授权
    Fabrication of 3-D capacitor with dual damascene process 有权
    具有双镶嵌工艺的三维电容器的制造

    公开(公告)号：US06790780B2

    公开(公告)日：2004-09-14

    申请号：US09965972

    申请日：2001-09-27

    Applicant: Sarah E. Kim ,  R. Scott List ,  Bruce A. Block

    Inventor： Sarah E. Kim ,  R. Scott List ,  Bruce A. Block

    IPC: H01L21302

    CPC classification number: H01L21/311 ,  H01L21/302 ,  H01L21/76807 ,  H01L21/76877 ,  H01L28/55 ,  H01L28/75

    Abstract: A three dimensional capacitor fabricated as part of a dual damascene process is disclosed. The capacitor structure comprises two barrier metal layers separated by a high k dielectric and is formed in all the via and trench openings. The upper barrier layer and dielectric is selectively removed from those openings which will have ordinary vias and conductors, the other opening remains as capaitor.

    Abstract translation: 公开了作为双镶嵌工艺的一部分制造的三维电容器。 电容器结构包括由高k电介质隔开的两个阻挡金属层，并且形成在所有通孔和沟槽开口中。 从具有普通通孔和导体的那些开口选择性地去除上阻挡层和电介质，另一个开口保持为电容器。

    WAVEGUIDE COUPLED SURFACE PLASMON POLARITION PHOTO DETECTOR
    20.
    发明申请
    WAVEGUIDE COUPLED SURFACE PLASMON POLARITION PHOTO DETECTOR 审中-公开
    波形耦合表面等离子体偏振照相检测器

    公开(公告)号：US20130287333A1

    公开(公告)日：2013-10-31

    申请号：US13856063

    申请日：2013-04-03

    Applicant: Bruce A. Block

    Inventor： Bruce A. Block

    IPC: G02B6/00 ,  H01L31/0232

    CPC classification number: G02B6/00 ,  B82Y20/00 ,  G02B6/12004 ,  G02B6/1226 ,  H01L31/0232 ,  H01L31/105 ,  H01L31/1085

    Abstract: A metal-semiconductor-metal (MSM) device couples light from an optical mode in a waveguide to a surface plasmon polarition (SPP) mode on an electrode surface of the MSM device. Once in an SPP mode, the absorption of light in the semiconductor can take place in a very small area. This may allow for a shrinking of the active detector area and allow for low capacitance, very short transit distance for the electrical carriers and allow for very low voltage devices and/or very high frequency.

    Abstract translation: 金属 - 半导体 - 金属（MSM）器件将光从波导中的光学模式耦合到MSM器件的电极表面上的表面等离子体激元偏振（SPP）模式。 一旦处于SPP模式，半导体中的光的吸收可以在非常小的区域中发生。 这可以允许有源检测器区域的收缩，并允许电容器的低电容，非常短的传输距离，并且允许非常低的电压器件和/或非常高的频率。

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