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    HPC Workflow for Rapid Screening of Materials and Stacks for STT-RAM
    13.
    发明申请
    HPC Workflow for Rapid Screening of Materials and Stacks for STT-RAM 有权
    用于快速筛选STT-RAM的材料和堆叠的HPC工作流程

    公开(公告)号：US20140170775A1

    公开(公告)日：2014-06-19

    申请号：US13716396

    申请日：2012-12-17

    Applicant: INTERMOLECULAR, INC.

    Inventor： Imran Hashim

    IPC: H01L43/12

    CPC classification number: H01L43/12

    Abstract: In some embodiments, HPC techniques are applied to the screening and evaluating the materials, process parameters, process sequences, and post deposition treatment processes for the development of STT-RAM stacks. Simple test structures are employed for initial screening of basic materials properties of candidate materials for each layer within the stack. The use of multiple site-isolated regions on a single substrate allows many material and/or process conditions to be evaluated in a timely and cost effective manner. Interactions between the layers as well as interactions with the substrate can be investigated in a straightforward manner.

    Abstract translation: 在一些实施例中，HPC技术被应用于筛选和评估用于开发STT-RAM堆栈的材料，工艺参数，工艺顺序和后沉积处理过程。 使用简单的测试结构来初步筛选堆叠内每层的候选材料的基本材料性质。 在单个基板上使用多个位置隔离区域允许以及时和成本有效的方式评估许多材料和/或工艺条件。 可以以直接的方式研究层之间的相互作用以及与基底的相互作用。

    Atomic layer deposition of metal oxides for memory applications
    18.
    发明授权
    Atomic layer deposition of metal oxides for memory applications 有权
    用于记忆应用的金属氧化物的原子层沉积

    公开(公告)号：US09006026B2

    公开(公告)日：2015-04-14

    申请号：US14466695

    申请日：2014-08-22

    Applicant: Intermolecular Inc. ,  Kabushiki Kaisha Toshiba ,  SanDisk 3D LLC

    Inventor： Zhendong Hong ,  Vidyut Gopal ,  Imran Hashim ,  Randall J. Higuchi ,  Tim Minvielle ,  Hieu Pham ,  Takeshi Yamaguchi

    IPC: H01L21/00 ,  H01L21/8222 ,  H01L45/00 ,  H01L27/24

    CPC classification number: H01L45/146 ,  H01L27/2463 ,  H01L45/04 ,  H01L45/08 ,  H01L45/1233 ,  H01L45/1616

    Abstract: Embodiments of the invention generally relate to nonvolatile memory devices and methods for manufacturing such memory devices. The methods for forming improved memory devices, such as a ReRAM cells, provide optimized, atomic layer deposition (ALD) processes for forming a metal oxide film stack which contains at least one hard metal oxide film (e.g., metal is completely oxidized or substantially oxidized) and at least one soft metal oxide film (e.g., metal is less oxidized than hard metal oxide). The soft metal oxide film is less electrically resistive than the hard metal oxide film since the soft metal oxide film is less oxidized or more metallic than the hard metal oxide film. In one example, the hard metal oxide film is formed by an ALD process utilizing ozone as the oxidizing agent while the soft metal oxide film is formed by another ALD process utilizing water vapor as the oxidizing agent.

    Abstract translation: 本发明的实施例一般涉及用于制造这种存储器件的非易失性存储器件和方法。 用于形成改进的存储器件（例如ReRAM单元）的方法提供优化的原子层沉积（ALD）工艺，用于形成金属氧化物膜堆叠，其包含至少一个硬金属氧化物膜（例如，金属被完全氧化或基本上被氧化 ）和至少一种软金属氧化物膜（例如，金属比硬金属氧化物氧化较少）。 由于软金属氧化物膜比硬金属氧化物膜氧化得更少或更金属，所以软金属氧化物膜的电阻小于硬金属氧化物膜。 在一个实例中，通过利用臭氧作为氧化剂的ALD工艺形成硬质金属氧化物膜，而通过利用水蒸汽作为氧化剂的另一ALD工艺形成软金属氧化物膜。

    DRAM MIM Capacitor Using Non-Noble Electrodes
    19.
    发明申请
    DRAM MIM Capacitor Using Non-Noble Electrodes 有权
    DRAM MIM电容器使用非贵重电极

    公开(公告)号：US20150087130A1

    公开(公告)日：2015-03-26

    申请号：US14033326

    申请日：2013-09-20

    Applicant: Elpida Memory, Inc ,  Intermolecular, Inc.

    Inventor： Hanhong Chen ,  David Chi ,  Imran Hashim ,  Mitsuhiro Horikawa ,  Sandra G. Malhotra

    IPC: H01L49/02

    CPC classification number: H01L28/56 ,  H01L27/108 ,  H01L27/1085 ,  H01L28/40 ,  H01L28/75 ,  H01L28/82

    Abstract: A method for forming a capacitor stack includes forming a first bottom electrode layer including a conductive metal nitride material. A second bottom electrode layer is formed above the first bottom electrode layer. The second bottom electrode layer includes a conductive metal oxide material, wherein the crystal structure of the conductive metal oxide material promotes a desired high-k crystal phase of a subsequently deposited dielectric layer. A dielectric layer is formed above the second bottom electrode layer. Optionally, an oxygen-rich metal oxide layer is formed above the dielectric layer. Optionally, a third top electrode layer is formed above the oxygen-rich metal oxide layer. The third top electrode layer includes a conductive metal oxide material. A fourth top electrode layer is formed above the third top electrode layer. The fourth top electrode layer includes a conductive metal nitride material.

    Abstract translation: 形成电容器堆叠的方法包括形成包括导电金属氮化物材料的第一底部电极层。 在第一底部电极层的上方形成第二底部电极层。 第二底部电极层包括导电金属氧化物材料，其中导电金属氧化物材料的晶体结构促进随后沉积的介电层的期望的高k结晶相。 在第二底部电极层的上方形成电介质层。 任选地，在介电层上方形成富氧金属氧化物层。 可选地，在富氧金属氧化物层的上方形成第三上电极层。 第三顶部电极层包括导电金属氧化物材料。 第四上电极层形成在第三顶电极层的上方。 第四顶部电极层包括导电金属氮化物材料。

    Atomic Layer Deposition of Metal Oxide Materials for Memory Applications
    20.
    发明申请
    Atomic Layer Deposition of Metal Oxide Materials for Memory Applications 有权
    用于存储器应用的金属氧化物材料的原子层沉积

    公开(公告)号：US20150056749A1

    公开(公告)日：2015-02-26

    申请号：US14506298

    申请日：2014-10-03

    Applicant: Intermolecular Inc. ,  Kabushiki Kaisha Toshiba ,  SanDisk 3D LLC

    Inventor： Yun Wang ,  Tony P. Chiang ,  Vidyut Gopal ,  Imran Hashim ,  Dipankar Pramanik

    IPC: H01L45/00 ,  H01L21/02

    CPC classification number: H01L45/145 ,  C23C16/40 ,  C23C16/45525 ,  H01L21/02175 ,  H01L21/02178 ,  H01L21/02181 ,  H01L21/02186 ,  H01L21/02189 ,  H01L21/02192 ,  H01L21/02194 ,  H01L21/022 ,  H01L21/0228 ,  H01L27/2463 ,  H01L45/08 ,  H01L45/1266 ,  H01L45/146 ,  H01L45/1608 ,  H01L45/1616

    Abstract: Embodiments of the invention generally relate to nonvolatile memory devices, such as a ReRAM cells, and methods for manufacturing such memory devices, which includes optimized, atomic layer deposition (ALD) processes for forming metal oxide film stacks. The metal oxide film stacks contain a metal oxide coupling layer disposed on a metal oxide host layer, each layer having different grain structures/sizes. The interface disposed between the metal oxide layers facilitates oxygen vacancy movement. In many examples, the interface is a misaligned grain interface containing numerous grain boundaries extending parallel to the electrode interfaces, in contrast to the grains in the bulk film extending perpendicular to the electrode interfaces. As a result, oxygen vacancies are trapped and released during switching without significant loss of vacancies. Therefore, the metal oxide film stacks have improved switching performance and reliability during memory cell applications compared to traditional hafnium oxide based stacks of previous memory cells.

    Abstract translation: 本发明的实施例一般涉及非易失性存储器件，例如ReRAM单元，以及用于制造这种存储器件的方法，其包括用于形成金属氧化物膜堆叠的优化的原子层沉积（ALD）工艺。 金属氧化物膜堆叠包含设置在金属氧化物主体层上的金属氧化物耦合层，每个层具有不同的晶粒结构/尺寸。 设置在金属氧化物层之间的界面有助于氧空位移动。 在许多示例中，与垂直于电极界面延伸的体膜中的晶粒相反，界面是不对齐的晶粒界面，其包含平行于电极界面延伸的许多晶界。 因此，氧空缺在切换期间被捕获和释放，而空位明显损失。 因此，与以前的存储单元的传统的基于氧化铪的堆叠相比，金属氧化物膜堆叠在存储单元应用中具有改进的开关性能和可靠性。

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