摘要:
Within both a method for forming a patterned photoresist layer and a method for forming an electroplated patterned conductor layer while employing the patterned photoresist layer as a patterned photoresist plating mask layer there is first provided a substrate. There is then formed over the substrate a blanket photoresist layer formed of a negative photoresist material. There is then photoexposed the blanket photoresist layer to form a photoexposed blanket photoresist layer while employing a photoexposure apparatus which employs an annular edge ring exclusion apparatus positioned over an annular edge ring of the blanket photoresist layer and the substrate. Finally, there is then developed the photoexposed blanket photoresist layer to form a patterned photoresist layer having an annular edge ring excluded over the annular edge ring of the substrate. By employing within the context of the present invention the annular edge ring exclusion apparatus, the electroplated patterned conductor layer is formed with enhanced thickness uniformity.
摘要:
A new process is provided which is an extension and improvement of present processing for the creation of a solder bump. After the layers of Under Bump Metal and a layer of solder metal have been created in patterned and etched format and overlying the contact pad, following a conventional processing sequence, a layer of polyimide is deposited. The solder flow is performed using the thickness of the deposited layer of polyimide to control the height of the column underneath the reflown solder.
摘要:
A method of fabricating a solder bump including the following steps. A UBM over a substrate.having an exposed pad portion is provided. The UBM being in electrical contact with the pad portion. A first patterning layer is formed over the UBM. The first patterning layer including a photosensitive material sensitive to light having a first wavelength. A second patterning layer is formed over the first patterning layer. The second patterning layer including a photosensitive material sensitive to light having a second wavelength. The first patterning layer is selectively exposed with the light having the first wavelength, leaving a first unexposed portion substantially centered over the pad portion between first exposed portions. The second patterning layer is selectively exposed with the light having the second wavelength, leaving a second unexposed portion wider than, and substantially centered over, the first unexposed portion of the exposed first patterning layer. The second unexposed portion of the exposed second patterning layer being between exposed portions. The second unexposed portion of the exposed second patterning layer and the first unexposed portion of the exposed first patterning layer are removed to form opening. A solder plug is formed within the opening. The exposed portions of the exposed first patterning layer and the exposed portions of the exposed second patterning layer are removed. The solder plug is reflowed to form a solder bump.
摘要:
A new method and processing sequence is provided for the creation of interconnect bumps. A layer of passivation is deposited over a contact pad and patterned, creating an opening in the layer of passivation that aligns with the contact pad. A layer of UBM metal is deposited over the layer of passivation, the layer of UBM is overlying the contact pad and limited to the immediate surroundings of the contact pad. The central surface of the layer of UBM is selectively electroplated after which a layer of solder or solder alloy is solder printed over the electroplated surface of the layer of UBM. A solder flux or paste is applied over the surface of the solder printed solder compound or solder alloy. Flowing of the solder or solder alloy creates the solder bump of the invention.
摘要:
A semiconductor process includes the following steps. A first gate structure and a second gate structure are formed on a substrate, wherein the top of the first gate structure includes a cap layer, so that the vertical height of the first gate structure is higher than the vertical height of the second gate structure. An interdielectric layer is formed on the substrate. A first chemical mechanical polishing process is performed to expose the top surface of the cap layer. A second chemical mechanical polishing process is performed to expose the top surface of the second gate structure or an etching process is performed to remove the interdielectric layer located on the second gate structure. A second chemical mechanical polishing process is then performed to remove the cap layer.
摘要:
A method for manufacturing the integrated circuit device comprises providing a substrate having a first region, a second region, and a third region. A first gate stack, a second gate stack, and a third gate stack are formed over the substrate in the first region, the second region, and the third region, respectively. The first gate stack, the second gate stack, and the third gate stack comprise a sacrificial layer over a first dielectric layer. The first gate stack and the second gate stack are removed and a second dielectric layer is formed in the first region and the second region. The portion of second dielectric layer in the first region is transformed into a third dielectric layer by a treatment.
摘要:
An integrated circuit device and method for manufacturing the integrated circuit device is disclosed. The disclosed method provides improved control over a surface proximity and tip depth of integrated circuit device. In an embodiment, the method achieves improved control by forming a doped region and a lightly doped source and drain (LDD) region in a source and drain region of the device. The doped region is implanted with a dopant type opposite the LDD region.
摘要:
A 6-pin electronic package includes a first side including a pair of first outer pins and a first middle pin, and a second side including a pair of second outer pins and a second middle pin. The first outer pins and the second middle pin are operatively coupled to a first circuit to provide a first function. The second outer pins and the first middle pin are operatively coupled to a second circuit to provide a second function. The 6-pin electronic package can be replaced on a circuit substrate with a first electronic package and a second electronic package that collectively include at least six pins. The 6-pin electronic package and the first and second electronic packages can be interchangeably used on a circuit substrate of an electronic device. The circuit substrate may include any one of the 6-pin electronic package mountable to the circuit substrate, and the first and second electronic packages. The first electronic package is mountable on the circuit substrate on a same footprint as the 6-pin electronic package. The second electronic package is mountable on the circuit substrate adjacent the first electronic package such that six pins of the first and second electronic packages share the same footprint as the pins of the 6-pin electronic package.
摘要:
A new method is provided for the processing of metals, most notably copper, such that damage to exposed surfaces of these metals is prevented. During a step of semiconductor processing, which results in exposing a metal surface to a wet substance having a pH value, a voltage is applied to the metal that is exposed. The value of the applied voltage can, dependent on the value of the pH constant of the wet substance, be selected such that the exposed metal surface is protected against alkaline effects of the wet substance.
摘要:
A chip antenna apparatus for receiving global positioning system signals, includes a L-shaped ground area and an omni-directional chip antenna. The L-shaped ground area is disposed on a circuit board. The omni-directional chip antenna is disposed in a gap of the L-shaped ground area on the circuit board and electrically connected to the L-shaped ground area.