公开(公告)号：US09278905B2

公开(公告)日：2016-03-08

申请号：US14382455

申请日：2013-03-04

Applicant: Takashi Ohshima ,  Hiroyuki Morimoto ,  Yuhei Shimizu

Inventor： Takashi Ohshima ,  Hiroyuki Morimoto ,  Yuhei Shimizu

IPC: C07C211/00 ,  C07C209/62 ,  C07D217/02 ,  C07B41/02 ,  C07B43/04 ,  C07B51/00 ,  C07C213/02 ,  C07C227/06 ,  C07D209/16 ,  C07F7/18 ,  C07C41/26 ,  C07C29/00 ,  C07C41/18 ,  C07C227/04 ,  C07D209/08 ,  C07D309/12 ,  C07D317/28

CPC classification number: C07C209/62 ,  C07B41/02 ,  C07B43/04 ,  C07B51/00 ,  C07C29/00 ,  C07C41/18 ,  C07C41/26 ,  C07C213/02 ,  C07C227/04 ,  C07C227/06 ,  C07D209/08 ,  C07D209/16 ,  C07D217/02 ,  C07D309/12 ,  C07D317/28 ,  C07F7/1804 ,  C07F7/1892 ,  C07C31/205 ,  C07C33/22 ,  C07C43/23 ,  C07C211/27 ,  C07C211/46 ,  C07C215/76 ,  C07C215/30 ,  C07C215/44 ,  C07C229/60 ,  C07C217/84 ,  C07C217/02 ,  C07C211/38

Abstract: Disclosed is a method for producing a compound having an amino group and/or a hydroxyl group from a substrate compound having an atomic group containing CO or CS by eliminating such atomic group. The substrate compound, having an atomic group containing CO or CS (for example, an amide, a carbamate, or the like), is allowed to react with a compound expressed by formula (I) below, at a temperature of 120° C. or lower, preferably in the presence of an ammonium salt, to eliminate such atomic group containing CO or CS. In formula (I) A may not be present, and in a case where A is present, A represents an alkyl group having 1 to 6 carbon atoms. H2N-A-NH2  (I).

Abstract translation: 公开了通过除去这种原子团，从具有含有CO或CS的原子团的底物化合物制备具有氨基和/或羟基的化合物的方法。 使具有含有CO或CS的原子团（例如酰胺，氨基甲酸酯等）的底物化合物与下述式（I）表示的化合物在120℃的温度下反应。 或更低，优选在铵盐存在下，以消除含有CO或CS的原子团。 在式（I）中，A可以不存在，并且在存在A的情况下，A表示具有1至6个碳原子的烷基。 H2N-A-NH2（I）。

公开(公告)号：US08772735B2

公开(公告)日：2014-07-08

申请号：US13666119

申请日：2012-11-01

Applicant: Keigo Kasuya ,  Takashi Ohshima ,  Souichi Katagiri ,  Shigeru Kokubo ,  Hideo Todokoro

Inventor： Keigo Kasuya ,  Takashi Ohshima ,  Souichi Katagiri ,  Shigeru Kokubo ,  Hideo Todokoro

IPC: H01J1/304

CPC classification number: H01J1/304 ,  H01J37/073 ,  H01J37/265 ,  H01J2237/022 ,  H01J2237/06325 ,  H01J2237/0653 ,  H01J2237/0656

Abstract: A charged particle beam apparatus includes a field emission electron source, electrodes for applying an electric field to the field emission electron source, and a vacuum exhaust unit for keeping the pressure around the field emission electron source at 1×10−8 Pa or less. The apparatus uses electron beams emitted to have an electron-beam-center radiation angle of 1×10−2 sr or less, and uses the electric current thereof, the second order differentiation of which is negative or zero with respect to time, and which reduces at a rate of 10% or less per hour. A heating unit is provided for the field emission electron source, and a detection unit is provided for the electric current of the electron beam. The field emission electron source is repeatedly heated to keep the electric current of the electron beam to be emitted, at a predetermined value or higher.

Abstract translation: 带电粒子束装置包括场致发射电子源，用于向场发射电子源施加电场的电极和用于将场致发射电子源周围的压力保持在1×10 -8 Pa以下的真空排气单元。 该装置使用发射的电子束具有1×10 -2 sr以下的电子束中心辐射角，并使用其电流，其二阶微分相对于时间为负或为零，其中 以每小时10％或更少的速度减少。 为场发射电子源提供加热单元，为电子束的电流提供检测单元。 重复加热场致发射电子源以使电子束的电流保持在规定值以上。

公开(公告)号：US08686380B2

公开(公告)日：2014-04-01

申请号：US12453986

申请日：2009-05-28

Applicant: Souichi Katagiri ,  Takashi Ohshima ,  Sho Takami ,  Makoto Ezumi ,  Takashi Doi ,  Yuji Kasai

Inventor： Souichi Katagiri ,  Takashi Ohshima ,  Sho Takami ,  Makoto Ezumi ,  Takashi Doi ,  Yuji Kasai

IPC: G21G5/00

CPC classification number: H01J37/18 ,  H01J2237/06341 ,  H01J2237/182 ,  H01J2237/188

Abstract: The present invention provides a charged particle beam apparatus that keeps the degree of vacuum in the vicinity of the electron source to ultra-high vacuum such as 10−8 to 10−9 Pa even in the state where electron beams are emitted using a non-evaporable getter pump and is not affected by dropout foreign particles.The present invention includes a vacuum vessel in which a charged particle source (electron source, ion source, etc.) is disposed and a non-evaporable getter pump disposed at a position that does not directly face electron beams and includes a structure that makes the non-evaporable getter pump upward with respect to a horizontal direction to drop out foreign particles into a bottom in a groove, so that the foreign particles dropped out from the non-evaporable getter pump do not face an electron optical system. Or, the present invention includes a structure that is covered by a shield means, or a means that is disposed immediately on a surface of the non-evaporable getter pump but at a position where the electron beams are not seen and has a concave structure capable of trapping the dropout foreign particles on a lower portion of the non-evaporable getter pump.

Abstract translation: 本发明提供了一种带电粒子束装置，其将电子源附近的真空度保持为10-8至10-9Pa的超高真空度，即使在使用非电子束发射电子束的状态下， 可蒸发吸气泵，不受脱落异物的影响。 本发明包括设置有带电粒子源（电子源，离子源等）的真空容器和设置在不直接面向电子束的位置的非蒸发性吸气泵，并且包括使 不可蒸发的吸气剂相对于水平方向向上泵送以将异物排出到槽中的底部，使得从非蒸发性吸气泵排出的异物不面向电子光学系统。 或者，本发明包括被屏蔽装置覆盖的结构，或者立即设置在不可蒸发的吸气泵的表面上，但是在不能看到电子束的位置处并具有凹形结构的装置 在非蒸发性吸气泵的下部捕获脱落的异物。

公开(公告)号：US08629395B2

公开(公告)日：2014-01-14

申请号：US13521273

申请日：2011-01-12

Applicant: Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

Inventor： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

IPC: H01J37/28 ,  H01J37/244 ,  G01N23/22

CPC classification number: H01J49/067 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/28

Abstract: In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each of the energy bands using the signals, the charged particle beam apparatus has a charged particle source (12-1); an aperture (16) that limits the diameter of the charged particle beam (4); optics (14, 17, 19) for the charged particle beam; a specimen holder (21); a charged particle detector (40) that detects secondary charged particles and reflected charged particles from a specimen; and signal calculation unit that processes the output signal from the charged particle detector. The charged particle detector (40) is provided with a first small detector (51) having a first detection sensitivity and a second small detector (52) having a second detection sensitivity, and makes the detection solid angle viewed from a position on the specimen, to which the charged particle beam (4) is to be radiated, to be the same for the first small detector (51) and the second small detector (52).

Abstract translation: 为了提供一种带电粒子束装置，其能够将鉴别中的带电粒子束信号检测为多个能带，并且使用该信号获得每个能带的高分辨率图像，带电粒子束装置具有带电粒子 来源（12-1）; 限制带电粒子束（4）的直径的孔（16）; 用于带电粒子束的光学器件（14,17,19） 样品架（21）; 检测来自试样的二次带电粒子和反射带电粒子的带电粒子检测器（40） 以及处理来自带电粒子检测器的输出信号的信号计算单元。 带电粒子检测器（40）具有第一检测灵敏度的第一小检测器（51）和具有第二检测灵敏度的第二小检测器（52），并从检体上的位置观察检测立体角， 对于第一小型检测器（51）和第二小型检测器（52），带电粒子束（4）将被照射到其上。

公开(公告)号：US08431709B2

公开(公告)日：2013-04-30

申请号：US12682591

申请日：2008-10-10

Applicant: Kazushi Mashima ,  Takashi Ohshima ,  Takanori Iwasaki ,  Noboru Sayo

Inventor： Kazushi Mashima ,  Takashi Ohshima ,  Takanori Iwasaki ,  Noboru Sayo

IPC: C07D211/34 ,  C07D207/08 ,  C07C69/78

CPC classification number: C07D213/55 ,  C07C67/03 ,  C07C67/08 ,  C07C213/06 ,  C07C231/02 ,  C07C253/30 ,  C07C2601/14 ,  C07C2602/08 ,  C07C2602/10 ,  C07D211/34 ,  C07D295/195 ,  C07C69/618 ,  C07C69/24 ,  C07C69/612 ,  C07C69/76 ,  C07C69/78 ,  C07C219/14 ,  C07C219/18 ,  C07C219/22 ,  C07C233/69 ,  C07C233/73 ,  C07C255/57

Abstract: Disclosed is a selective ester production process of an alcoholic hydroxyl group, which proceeds under chemically mild conditions, while having adequate environmental suitability, operability and economical efficiency. Specifically disclosed is a process for producing an ester compound, which is characterized in that an alcohol and a carboxylic acid ester compound are reacted in the presence of a compound containing zinc element, thereby selectively acylating a hydroxyl group of the alcohol.

Abstract translation: 公开了在化学温和条件下进行的醇羟基的选择性酯生产方法，同时具有足够的环境适应性，可操作性和经济效率。 具体公开了一种酯化合物的制造方法，其特征在于，在含有锌元素的化合物的存在下使醇和羧酸酯化合物反应，从而选择性地酰化醇的羟基。

公开(公告)号：US08426835B2

公开(公告)日：2013-04-23

申请号：US13376473

申请日：2010-06-15

Applicant: Keigo Kasuya ,  Takashi Ohshima ,  Souichi Katagiri ,  Masashi Kimura

Inventor： Keigo Kasuya ,  Takashi Ohshima ,  Souichi Katagiri ,  Masashi Kimura

IPC: G21K5/08

CPC classification number: H01J37/065 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/09 ,  H01J37/3174 ,  H01J2237/0206 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/06316 ,  H01J2237/06325 ,  H01J2237/06375 ,  H01J2237/2482

Abstract: An electron gun that serves to reduce the quantity of electron stimulated desorption and accomplishes vacuum evacuation efficiently with a sufficient degree of vacuum. An electron source 1 and an extraction electrode 6 are provided for emitting an electron beam 7 from the electron source 1. A first vacuum chamber 16 containing the electron source 1 is connected to a second vacuum chamber 9 via an aperture 8 provided in the extraction electrode 6. Each vacuum chamber is differentially evacuated with an independent vacuum evacuation means, and the generation of electron stimulated desorption gas 11 is reduced by securing a wide route of vacuum evacuation around the electron source 1 and intercepting the procession of back scattered electrons 12 emitted from the area with the electron beam 7 on the extraction electrode 6 by using a shielding electrode 22 given a prescribed potential.

Abstract translation: 一种电子枪，其用于减少电子刺激的解吸量，并以足够的真空度有效地实现真空排气。 提供电子源1和提取电极6，用于从电子源1发射电子束7.包含电子源1的第一真空室16通过设置在引出电极中的孔8连接到第二真空室9 每个真空室用独立的真空排气装置进行差异抽真空，并且通过确保在电子源1周围的宽的真空排气路径并且截断从后面散射的电子12的排出而减少电子刺激的解吸气体11的产生 通过使用给定电位的屏蔽电极22，在引出电极6上具有电子束7的区域。

公开(公告)号：US20120313358A1

公开(公告)日：2012-12-13

申请号：US13579803

申请日：2011-02-02

Applicant: Masakazu Okamoto ,  Akifumi Hanawa ,  Takashi Ohshima

Inventor： Masakazu Okamoto ,  Akifumi Hanawa ,  Takashi Ohshima

IPC: B60R21/26

CPC classification number: B60R21/2171 ,  B60R21/206 ,  B60R21/2346 ,  B60R21/237

Abstract: An airbag having a cushion part defining an insertion hole that is positioned between first and second sewing lines provided to a base fabric and that is provided for the insertion of the inflator from an outside to an inside. A diffuser positioned within the cushion part and in which the inflator is inserted from the insertion hole. The diffuser has a tubular portion with a portion formed by folding layers of fabrics and being sewn to the base fabric along the first sewing line. The diffuser fabric of the tubular portion on a side adjacent to the base fabric being additionally sewn to the base fabric along a second sewing line. The diffuser includes a guide member 1 that extends and covers the insertion hole with a surface that continues from an inner surface of the diffuser. The guide member being sewn to the base fabric along the first sewing line.

Abstract translation: 一种安全气囊，其具有限定插入孔的缓冲部件，所述插入孔位于设置在基布上的第一和第二缝合线之间，并且设置成用于将充气器从外部插入到内部。 位于缓冲部分内的扩散器，其中充气机从插入孔插入其中。 扩散器具有管状部分，其部分通过折叠织物层而形成，并且沿着第一缝合线缝合到基底织物。 在与基底织物相邻的一侧的管状部分的扩散织物，沿第二缝合线另外缝合到基底织物上。 扩散器包括引导构件1，该引导构件1从扩散器的内表面延伸并覆盖插入孔。 引导构件沿着第一缝合线缝合到基底织物上。

公开(公告)号：US08115184B2

公开(公告)日：2012-02-14

申请号：US12318583

申请日：2008-12-31

Applicant: Hiroyasu Shichi ,  Shinichi Matsubara ,  Takashi Ohshima ,  Satoshi Tomimatsu ,  Tomihiro Hashizume ,  Tohru Ishitani

Inventor： Hiroyasu Shichi ,  Shinichi Matsubara ,  Takashi Ohshima ,  Satoshi Tomimatsu ,  Tomihiro Hashizume ,  Tohru Ishitani

IPC: H01J49/00

CPC classification number: H01J27/26 ,  H01J37/08 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/182

Abstract: A gas field ion source that can simultaneously increase a conductance during rough vacuuming and reduce an extraction electrode aperture diameter from the viewpoint of the increase of ion current. The gas field ion source has a mechanism to change a conductance in vacuuming a gas molecule ionization chamber. That is, the conductance in vacuuming a gas molecule ionization chamber is changed in accordance with whether or not an ion beam is extracted from the gas molecule ionization chamber. By forming lids as parts of the members constituting the mechanism to change the conductance with a bimetal alloy, the conductance can be changed in accordance with the temperature of the gas molecule ionization chamber, for example the conductance is changed to a relatively small conductance at a relatively low temperature and to a relatively large conductance at a relatively high temperature.

Abstract translation: 一种气体离子源，其可以在粗吸真空中同时增加电导，并且从离子电流的增加的角度降低提取电极的孔直径。 气体离子源具有改变真空气体分子离子化室中的电导的机理。 也就是说，根据是否从气体分子离子化室抽出离子束，改变对气体分子离子化室进行抽真空的电导。 通过将盖子形成为构成用双金属合金改变电导的机构的部件的部分，可以根据气体分子离子化室的温度来改变电导率，例如，电导率变为相对较小的电导率 相对较低的温度和相对高的温度下的相对较大的电导率。

公开(公告)号：US20110089336A1

公开(公告)日：2011-04-21

申请号：US12999075

申请日：2009-06-10

Applicant: Keigo Kasuya ,  Takashi Ohshima ,  Souichi Katagiri ,  Shigeru Kokubo ,  Hideo Todokoro

Inventor： Keigo Kasuya ,  Takashi Ohshima ,  Souichi Katagiri ,  Shigeru Kokubo ,  Hideo Todokoro

IPC: H01J27/26 ,  H01J27/00

CPC classification number: H01J1/304 ,  H01J37/073 ,  H01J37/265 ,  H01J2237/022 ,  H01J2237/06325 ,  H01J2237/0653 ,  H01J2237/0656

Abstract: Provided is a charged particle beam apparatus, which can emit a stable electron beam, having high brightness and a narrow energy width. The charged particle beam apparatus comprises a field emission electron source, electrodes for applying an electric field to the field emission electron source, and a vaccume exhaust unit for keeping the pressure around the field emission electron source at 1 10−8 Pa or less. The apparatus is so constituted as to use such one of the electron beams emitted as has an electron-beam-center radiation angle of 1 10−2 str or less, and to use the electric current thereof, the second order differentiation of which is negative or zero with respect to the time, and which reduces at a rate of 10% or less per hour. The charged particle beam apparatus further comprises a heating unit for the field emission electron source, and a detection unit for the electric current of the electron beam. The field emission electron source is repeatedly heated to keep the electric current of the electron beam to be emitted, at a predetermined value or higher.

Abstract translation: 提供一种带电粒子束装置，其能够发射具有高亮度和窄能量宽度的稳定电子束。 带电粒子束装置包括场致发射电子源，用于向场致发射电子源施加电场的电极和用于将场致发射电子源周围的压力保持在10×10 8 Pa以下的疫苗排气单元。 该装置构成为使用发射的电子束中心辐射角为1×10 -2 str以下的电子束，并使用其电流，其二阶微分为负 或相对于时间为零，并以每小时10％或更少的速率减少。 带电粒子束装置还包括用于场发射电子源的加热单元和用于电子束电流的检测单元。 重复加热场致发射电子源以使电子束的电流保持在规定值以上。

公开(公告)号：US07759652B2

公开(公告)日：2010-07-20

申请号：US11749181

申请日：2007-05-16

Applicant: Takashi Ohshima ,  Mitsugu Sato ,  Yutaka Kaneko ,  Souichi Katagiri ,  Koichiro Takeuchi

Inventor： Takashi Ohshima ,  Mitsugu Sato ,  Yutaka Kaneko ,  Souichi Katagiri ,  Koichiro Takeuchi

IPC: H01J1/50

CPC classification number: H01J37/143 ,  H01J37/28 ,  H01J2237/1405 ,  H01J2237/2813 ,  H01J2237/31749

Abstract: The present invention provides a compact electron lens causing little aberration, and a charged particle beam apparatus such as a scanning electron microscope that is super compact and offers a high resolution. An upper magnetic pole and a sample-side magnetic pole are magnetically coupled to the respective poles of a permanent magnet that is made of a highly strong magnetic material such as a rare-earth cobalt system or a neodymium-iron-boron system, that is axially symmetrical, and that has a hole in the center thereof. An inner gap is created on the side of a center axis. Thus, a magnetic lens is formed axially. Moreover, a semi-stationary magnetic path that shields an outside magnetic field and has the magnetic reluctance thereof regulated is disposed outside. The sample-side magnetic pole and magnetic path defines a region where magnetic reluctance is the highest outside the permanent magnet. A space defined by the permanent magnet, upper magnetic pole, sample-die magnetic pole, and semi-stationary magnetic path is filled with a filling made of a non-magnetic material. Thus, an objective lens is constructed.

Abstract translation: 本发明提供一种产生很小像差的小型电子透镜，以及诸如扫描电子显微镜的带电粒子束装置，其具有超级紧凑并且提供高分辨率。 上磁极和样本侧磁极磁耦合到由诸如稀土钴体系或钕铁硼体系的高强度磁性材料制成的永磁体的各极上，即， 轴向对称，并且在其中心具有孔。 在中心轴的一侧产生内部间隙。 因此，磁性透镜轴向形成。 此外，将外部磁场屏蔽并具有调节磁阻的半静态磁路设置在外部。 样品侧磁极和磁路限定永磁体外磁阻最高的区域。 由永磁体，上磁极，样品芯磁极和半静态磁路限定的空间填充有由非磁性材料制成的填充物。 因此，构成物镜。