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135 条记录 (耗时 0.065 秒)

    Acceleration sensor
    31.
    发明授权
    Acceleration sensor 有权
    加速度传感器

    公开(公告)号：US06360604B1

    公开(公告)日：2002-03-26

    申请号：US09423532

    申请日：1999-10-09

    申请人： Franz Laermer ,  Bernhard Elsner ,  Wilhelm Frey

    发明人： Franz Laermer ,  Bernhard Elsner ,  Wilhelm Frey

    IPC分类号： G01P1500

    CPC分类号： G01P15/125 ,  G01P2015/0814

    摘要： An acceleration sensor has an oscillating structure which is movably suspended on a substrate and can be deflected by an acting acceleration. The acceleration sensor also has an analyzing arrangement detecting a deflection of the oscillating structure due to the acceleration. The oscillating structure and/or the analyzing arrangement are connected to the substrate by mechanical decoupling devices.

    摘要翻译： 加速度传感器具有可移动地悬挂在基板上并且可以通过作用加速度而偏转的振荡结构。 加速度传感器还具有检测由于加速度引起的振动结构的偏转的分析装置。 振荡结构和/或分析装置通过机械解耦装置连接到基板。

    Method for fabricating a micromechanical component
    32.
    发明授权
    Method for fabricating a micromechanical component 有权
    微机械部件的制造方法

    公开(公告)号：US06268232B1

    公开(公告)日：2001-07-31

    申请号：US09302224

    申请日：1999-04-29

    申请人： Helmut Skapa ,  Horst Muenzel ,  Franz Laermer ,  Michael Offenberg ,  Heinz-Georg Vossenberg

    发明人： Helmut Skapa ,  Horst Muenzel ,  Franz Laermer ,  Michael Offenberg ,  Heinz-Georg Vossenberg

    IPC分类号： H01L2100

    CPC分类号： G01P15/0802 ,  B81B2201/0235 ,  B81C1/00571 ,  B81C2201/0109 ,  B81C2201/014 ,  B81C2201/056 ,  B81C2203/0109 ,  G01P1/023

    摘要： A method for fabricating a micromechanical component, in particular a surface-micromechanical acceleration sensor, involves preparing a substrate and providing an insulation layer on the substrate, in which a patterned circuit trace layer is buried. A conductive layer, including a first region and a second region, is provided on the insulation layer, and a movable element is configured in the first region by forming a first plurality of trenches and by using an etching agent to remove at least one portion of the insulation layer from underneath the conductive layer. A contact element is formed and electrically connected to the circuit trace layer in the second region by configuring a second plurality of trenches, and the resultant movable element is encapsulated in the first region. The second plurality of trenches for forming the contact element in the second region is first formed after the encapsulation of the movable element formed in the first region.

    摘要翻译： 用于制造微机械部件，特别是表面微机械加速度传感器的方法涉及准备衬底并在衬底上提供绝缘层，其中掩埋有图案化的电路迹线层。 包括第一区域和第二区域的导电层设置在绝缘层上，并且可移动元件通过形成第一多个沟槽而被构造在第一区域中，并且通过使用蚀刻剂去除至少一部分 绝缘层从导电层下面。 通过构造第二多个沟槽，形成接触元件并在第二区域中电连接到电路迹线层，并且所得到的可移动元件被封装在第一区域中。 在第二区域中形成接触元件的第二多个沟槽首先在形成在第一区域中的可移动元件的封装之后形成。

    Method of anisotropically etching silicon
    33.
    发明授权
    Method of anisotropically etching silicon 失效
    各向异性蚀刻硅的方法

    公开(公告)号：US5501893A

    公开(公告)日：1996-03-26

    申请号：US284490

    申请日：1994-08-05

    申请人： Franz Laermer ,  Andrea Schilp

    发明人： Franz Laermer ,  Andrea Schilp

    IPC分类号： H01L21/302 ,  B81C1/00 ,  H01L21/3065 ,  H01L21/308 ,  C25F3/12 ,  B44C1/22

    CPC分类号： H01L21/3085 ,  B81C1/00619 ,  H01L21/3065 ,  H01L21/30655 ,  B81C2201/0112 ,  Y10T428/24521

    摘要： A method of anisotropic plasma etching of silicon to provide laterally defined recess structures therein through an etching mask employing a plasma, the method including anisotropic plasma etching in an etching step a surface of the silicon by contact with a reactive etching gas to removed material from the surface of the silicon and provide exposed surfaces; polymerizing in a polymerizing step at least one polymer former contained in the plasma onto the surface of the silicon during which the surfaces that were exposed in a preceding etching step are covered by a polymer layer thereby forming a temporary etching stop; and alternatingly repeating the etching step and the polymerizing step. The method provides a high mask selectivity simultaneous with a very high anisotropy of the etched structures.

    摘要翻译： PCT No.PCT / DE93 / 01129 Sec。 371日期：1994年8月5日 102（e）日期1994年8月5日PCT提交1993年11月27日PCT公布。 出版物WO94 / 14187 日期：1994年6月23日。一种通过使用等离子体的蚀刻掩模在其中提供横向限定的凹陷结构的硅的各向异性等离子体蚀刻的方法，所述方法包括在蚀刻步骤中的各向异性等离子体蚀刻，所述硅的表面通过与反应性 蚀刻气体以从硅表面去除材料并提供暴露的表面; 在聚合步骤中将包含在等离子体中的至少一种聚合物前体聚合到硅的表面上，在该表面处，在前面的蚀刻步骤中暴露的表面被聚合物层覆盖，从而形成临时蚀刻停止; 并交替重复蚀刻步骤和聚合步骤。 该方法与蚀刻结构的非常高的各向异性同时提供高掩模选择性。

    component having a micromechanical microphone structure
    35.
    发明申请
    component having a micromechanical microphone structure 审中-公开
    组件具有微机械麦克风结构

    公开(公告)号：US20140291786A1

    公开(公告)日：2014-10-02

    申请号：US14233969

    申请日：2012-07-20

    申请人： Jochen Zoellin ,  Franz Laermer ,  Christoph Schelling ,  Mike Daley

    发明人： Jochen Zoellin ,  Franz Laermer ,  Christoph Schelling ,  Mike Daley

    IPC分类号： H04R7/06 ,  H04R19/00 ,  H04R19/04

    CPC分类号： H04R7/06 ,  B81B3/0051 ,  B81B2201/0257 ,  H04R19/005 ,  H04R19/04 ,  H04R2201/003

    摘要： Substrate-side overload protection for the diaphragm structure of a microphone component having a micromechanical microphone structure which impairs the damping properties of the microphone structure as little as possible, in which the microphone structure includes a diaphragm structure having at least one acoustically active diaphragm which is formed in a diaphragm layer above a semiconductor substrate. The diaphragm structure spans at least one sound opening in the rear side of the substrate. A stationary, acoustically permeable counter element is formed in the layer structure of the component above the diaphragm layer. According to the invention, at least projections are formed at the outer edge area of the diaphragm structure which protrude beyond the edge area of the sound opening, so that the edge area of the sound opening acts as a substrate-side stop for the diaphragm structure.

    摘要翻译： 用于具有微机械麦克风结构的麦克风部件的隔膜结构的基板侧过载保护，其尽可能少地损害麦克风结构的阻尼特性，其中麦克风结构包括具有至少一个声学活动隔膜的隔膜结构， 形成在半导体衬底上的隔膜层中。 隔膜结构跨越基板后侧的至少一个声音开口。 在隔膜层上方的部件的层结构中形成固定的，声学可渗透的计数元件。 根据本发明，至少在隔膜结构的外边缘区域形成突起，突出超过声音开口的边缘区域，使得声音开口的边缘区域用作隔膜结构的基板侧挡块 。

    Method for detecting the state of a tire
    36.
    发明授权
    Method for detecting the state of a tire 失效
    检测轮胎状态的方法

    公开(公告)号：US08332092B2

    公开(公告)日：2012-12-11

    申请号：US12227368

    申请日：2007-04-23

    申请人： Franz Laermer ,  Thorsten Pannek

    发明人： Franz Laermer ,  Thorsten Pannek

    IPC分类号： G01M17/02

    CPC分类号： B60T8/1725 ,  B60C23/064 ,  B60T2210/12 ,  B60T2210/14

    摘要： A method for detecting the state of a vehicle tire and/or a roadway, in which at least one sensor, in particular an acceleration sensor, disposed in the tire interior generates a signal that is assigned to physical variables of the vehicle tire and/or the roadway. A tire state and/or characteristics of the roadway are/is determined on the basis of the signal.

    摘要翻译： 一种用于检测车辆轮胎和/或道路的状态的方法，其中设置在轮胎内部的至少一个传感器，特别是加速度传感器产生分配给车辆轮胎的物理变量的信号和/或 巷道 基于信号确定轮胎状态和/或道路的特性。

    Bending transducer device for generating electrical energy from deformations and circuit module
    37.
    发明授权
    Bending transducer device for generating electrical energy from deformations and circuit module 有权
    用于从变形和电路模块产生电能的弯曲传感器装置

    公开(公告)号：US08154174B2

    公开(公告)日：2012-04-10

    申请号：US12455428

    申请日：2009-06-01

    申请人： Franz Laermer ,  Thorsten Pannek ,  Ralf Reichenbach ,  Marian Keck

    发明人： Franz Laermer ,  Thorsten Pannek ,  Ralf Reichenbach ,  Marian Keck

    IPC分类号： H01L41/08

    CPC分类号： B60C23/0411 ,  H01L41/1134 ,  H02N2/186

    摘要： A bending transducer device for generating electrical energy includes at least one elastically deformable support structure, one piezoelectric element, and a bearing device. The piezoelectric element is configured and situated on the support structure in such a way that the piezoelectric element is deformable due to a deformation of the support structure caused by vibration, and the support structure is supported vibration-capably in at least one bearing of the bearing device, the bearing being configured as an articulated receptacle, e.g., a hinge.

    摘要翻译： 用于产生电能的弯曲换能器装置包括至少一个可弹性变形的支撑结构，一个压电元件和一个轴承装置。 压电元件被构造并位于支撑结构上，使得压电元件由于由振动引起的支撑结构的变形而变形，并且支撑结构在轴承的至少一个轴承中可振动地支撑 装置，所述轴承被配置为铰接容器，例如铰链。

    Bending transducer for generating electrical energy from mechanical deformations
    38.
    发明授权
    Bending transducer for generating electrical energy from mechanical deformations 有权
    用于从机械变形产生电能的弯曲换能器

    公开(公告)号：US08040023B2

    公开(公告)日：2011-10-18

    申请号：US12538389

    申请日：2009-08-10

    申请人： Franz Laermer ,  Thorsten Pannek ,  Ralf Reichenbach ,  Marian Keck

    发明人： Franz Laermer ,  Thorsten Pannek ,  Ralf Reichenbach ,  Marian Keck

    IPC分类号： H01L41/113 ,  H01L41/053

    CPC分类号： H01L41/1134 ,  B60C23/041 ,  H01L41/0475

    摘要： A bending transducer device for generating electrical energy from deformations, and a circuit module which has such a bending transducer. The bending transducer includes at least one electrically deformable, vibration-capable, electrically conductive support structure, one piezoelectric element and a first contacting element, the conductive support structure having a first restraining area and a second restraining area for restraining the support structure, the piezoelectric element being designed and situated on the support structure in such a way that the piezoelectric element is deformable due to the deformation of the support structure caused by vibrations, and a first electrode for picking up the voltage generated by the deformation of the piezoelectric element is formed and contacted by the support structure, the first contacting element being connected electrically conductively to the support structure outside the first restraining area and the second restraining area.

    摘要翻译： 一种用于从变形产生电能的弯曲换能器装置，以及具有这种弯曲换能器的电路模块。 弯曲换能器包括至少一个可电动变形的，具有振动能力的导电支撑结构，一个压电元件和第一接触元件，所述导电支撑结构具有用于约束支撑结构的第一约束区和第二约束区， 元件被设计并且位于支撑结构上，使得压电元件由于由振动引起的支撑结构的变形而变形，并且形成用于拾取由压电元件的变形产生的电压的第一电极 并且由所述支撑结构接触，所述第一接触元件电连接到所述第一约束区域和所述第二约束区域外的所述支撑结构。