摘要:
On a substrate of n-type GaAs, an n-type cladding layer of n-type Zn.sub.0.9 Mg.sub.0.1 S.sub.0.13 Se.sub.0.87, an n-type light guiding layer of n-type ZnS.sub.0.06 Se.sub.0.94, an active layer of ZnCdSe and a p-type light guiding layer of p-type ZnS.sub.0.06 Se.sub.0.94 are successively formed. On the p-type light guiding layer, a p-type contact structure is formed. The p-type contact structure includes a first layer of p-type ZnS.sub.0.31 Se.sub.0.54 Te.sub.0.15, a second layer of ZnS.sub.0.47 Se.sub.0.28 Te.sub.0.25, a third layer of p-type ZnS.sub.0.65 Te.sub.0.35, a fourth layer of p-type ZnS.sub.0.5 Te.sub.0.5 and a fifth layer of p-type ZnTe.
摘要:
Between a semiconductor laser diode and an optical disk, a collimator lens for collimating a laser beam output from the semiconductor laser diode, a liquid crystal optical shutter for attenuating the collimated beam having passed through the collimator lens, and a beam splitter for splitting reflected light from the optical disk are disposed. In addition, a collective lens for collecting the collimated beam obtained by the collimator lens on a data holding surface of the optical disk is further disposed.
摘要:
According to one aspect of the invention, a crystal-growing method for forming a II-VI single crystalline semiconductor expressed by Zn.sub.1-x Cd.sub.x Se (where 0
摘要:
A capacitor element of a semiconductor device used for a super-LSI is formed by the steps including (a) removing a natural oxide film on a surface of a lower electrode of polysilicon, (b) forming on the surface of the lower electrode an impurity-doped tantalum oxide film, and (c) forming an upper electrode with at least a bottom thereof constituted by titanium nitride. The steps may further include (d) nitriding the surface of the lower electrode after the removal of the natural oxide film, and (e) densifying the tantalum oxide film by way of a high temperature heat treatment after the formation of the tantalum oxide film. In this way, it is possible to reduce thickness of a capacitive insulating film and to form the capacitor element in which the leakage current characteristics are improved.
摘要:
A method for manufacturing a semiconductor device, wherein a thin film of tantalum oxide is formed as a dielectric film in a capacitor element, increases capacitance per unit area and reduces a leakage current in the capacitor element of DRAM memory cells. The method includes steps of forming a polysilicon film constituting a lower electrode of the capacitor element, removing a natural oxide film from the surface of the polysilicon film, nitriding the surface of the polysilicon by rapid thermal nitriding (RTN) using lamp-annealing, forming a tantalum oxide film, densifying and nitriding consecutively the tantalum oxide film, and forming an upper capacitor electrode thereon. The capacitor element formed by the method has a large capacitance per unit area Cs=13.8 fF/.mu.m.sup.2.
摘要翻译:一种用于制造半导体器件的方法,其中在电容器元件中形成氧化钽薄膜作为电介质膜,增加了每单位面积的电容,并降低了DRAM存储单元的电容器元件中的漏电流。 该方法包括以下步骤:形成构成电容器元件的下电极的多晶硅膜,从多晶硅膜的表面去除自然氧化膜,通过使用灯退火的快速热氮化(RTN)对多晶硅的表面进行氮化,形成 氧化钽膜,连续致密化氮化钽膜,在其上形成上层电容电极。 由该方法形成的电容器元件具有单位面积Cs = 13.8fF / m 2的大电容。
摘要:
A phase-locked laser array comprising a plurality of element regions for passing electric current into an active layer; and inter-element regions formed between the element regions. Each of the inter-element regions is so formed as to have two regions, i.e. a non-diffusion region at the center thereof and a diffusion regions disposed on both sides thereof, thereby rendering the refractive index in the non-diffusion region higher than that in the diffusion regions. The method of manufacturing the phase-locked laser array which is characterized by including a step growing an optical waveguide layer of superlattice on a portion of a second clad layer while diffusing impurities doped in the second clad layer into said optical waveguide layer, thereby forming a diffusion regions on both sides of the inter-element region.
摘要:
This invention presents a new soldering material comprising an indium layer formed on EFTE film for solder-mounting a semiconductor device onto a metal heat sink. This indium layer can be easily transferred onto the heat sink by pressure applied by a tool, without the aid of ultrasonic energy. This produces a highly immaculate surface of the indium layer transferred onto the heat sink, and achieves stable soldering strength of the soldered semiconductor device. This invention also offers a multi-layered soldering material comprising a thin layer of metal of which the melting point is higher than the soldering temperature, and two indium layers sandwiching said metal layer, formed on an EFTE film. This multi-layered soldering material can be easily transferred onto a metal heat sink by a pressure applying tool without the aid of ultrasonic energy resulting in the stable soldering of a semiconductor device even if it has surface irregularities, without causing an electrical leakage or short circuit.
摘要:
Saturation of received signals and generation of artifacts that are associated with tap concentration are prevented from occurring even if the differences in the delay amount between each of transducers are small. The ultrasound diagnosis apparatus comprises a plurality of ultrasound transducers, a plurality of taps, a delay amount calculator, a channel distributor, and a delay processor. The delay amount calculator calculates a first delay amount. The channel distributor specifies the minimum delay amount and the maximum delay amount from the first delay amount. Further, the channel distributor divides the range from the minimum delay amount to the maximum delay amount by the number of taps, and relates each to a tap. The channel distributor also inputs a signal output from an ultrasound transducer to the tap related to the divided range including the corresponding first delay amount. The delay processor relates the tap to a previously set second delay amount, and conducts delay processing on the signal input in each of the taps based on the related second delay amount.
摘要:
A semiconductor device of the present invention includes a conductive film made up of a polysilicon film, a barrier metal film and a high melting point, metal nitride film sequentially laminated in this order. The conductive film is annealed to lower the resistance of the metal nitride film. Annealing causes the metal nitride film, which is formed in an amorphous state, to release nitrogen and increases the crystal size of metal having a high melting point. This successfully improves the crystallization of the high melting point metal and lowers the resistance of the metal nitride film without regard to the crystallization of the underlying barrier metal film. It is therefore possible to improve the crystallization of the metal nitride film or to obviate the step of providing the barrier metal film with a double-layer structure, i.e., to simplify the production procedure. A method of producing the semiconductor device is also disclosed.
摘要:
The semiconductor laser of this invention includes an active layer formed in a c-axis direction, wherein the active layer is made of a hexagonal-system compound semiconductor, and anisotropic strain is generated in a c plane of the active layer.