公开(公告)号：US20240183030A1

公开(公告)日：2024-06-06

申请号：US18492149

申请日：2023-10-23

申请人： SEMES CO., LTD.

发明人： Hae Won CHOI ,  Thomas Jongwan KWON ,  Chengyeh HSU

IPC分类号： C23C16/04 ,  C23C16/06

CPC分类号： C23C16/045 ,  C23C16/06

摘要： Provided is a substrate treatment apparatus using a supercritical fluid, the apparatus capable of depositing a conformal film in a trench with a high aspect ratio and capable of performing void-free complete gap-filling. The substrate treatment apparatus includes: an upper vessel including a first body and a supply port formed in the first body and supplying a process fluid; a baffle plate installed in the upper vessel and supplying the process fluid supplied through the supply port to a treatment space by diffusing the process fluid; a lower vessel including a second body and an exhaust port formed in the second body and exhausting the process fluid from the treatment space; and a support plate installed in the lower vessel to face the baffle plate and supporting a substrate, wherein while a supercritical process is performed in the treatment space, the support plate is heated so that the temperature of the support plate is higher than that of the first body.

公开(公告)号：US20240178010A1

公开(公告)日：2024-05-30

申请号：US18242003

申请日：2023-09-05

申请人： SEMES CO., LTD.

发明人： Kang Sul KIM ,  Tae Keun KIM ,  Kyeong Min LEE

IPC分类号： H01L21/67

CPC分类号： H01L21/67051

摘要： A liquid supply apparatus is provided. The liquid supply apparatus includes: a base unit having an operating space, an inlet port, through which a treatment liquid is introduced, and an outlet port, through which the treatment liquid is discharged, formed therein; bellows having the operating space formed on its outside within the base unit, including an inlet and an outlet, which form ends of the inlet and outlet ports, respectively, of the base unit and communicate to create a storage space that the treatment liquid flows in and out of, and expanding or contracting to increase or reduce the volume of the storage space; an operating unit supplying operating fluid into or discharging the operating fluid from the operating space; and a drain line communicating with the storage space, from below the base unit, and discharging the treatment liquid, wherein the operating unit supplies the operating fluid into the operating space to enable the bellows to contract, or discharges the operating fluid from the operating space to enable the bellows to expand, and the drain line discharges residual treatment liquid remaining in the storage space to replace the treatment liquid.

公开(公告)号：US20240177976A1

公开(公告)日：2024-05-30

申请号：US18514080

申请日：2023-11-20

申请人： SEMES CO., LTD.

发明人： Hyoungkyu SON ,  Juyong JANG

IPC分类号： H01J37/32

CPC分类号： H01J37/32522 ,  H01J37/32715 ,  H01J2237/2001 ,  H01J2237/2007

摘要： Provided is a liner structure including a liner body, a heating coil arranged in the liner body and configured to heat the liner body, and a magnetic coil arranged below the heating coil in the liner body and configured to generate a magnetic field.

公开(公告)号：US20240177975A1

公开(公告)日：2024-05-30

申请号：US18372954

申请日：2023-09-26

申请人： SEMES CO., LTD.

发明人： Yong Jun BAE ,  Seung Pyo LEE ,  Dong Jun PARK ,  Chang Eon PARK ,  Su Won KIM ,  Dho Young KIM

IPC分类号： H01J37/32 ,  F28F3/12

CPC分类号： H01J37/32522 ,  F28F3/12 ,  H01J37/32091 ,  H01J37/3244 ,  H01J37/32513 ,  H01J2237/002

摘要： A cooling plate and a plasma processing chamber are proposed. The cooling plate is configured to allow air to flow throughout the entire region of a window while reducing a region of covering the window. The cooling plate is configured to cool a window configured to seal a plasma processing space at an upper portion, and the cooling plate includes a body having a circular plate shape covering a part of a center region of the window, an inlet through which a gas is introduced into the body, and an outlet through which the gas is discharged from the body to the window. A flow path through which the gas flows and a slope formed from the flow path toward the window are formed between the inlet and the outlet.

公开(公告)号：US20240177971A1

公开(公告)日：2024-05-30

申请号：US18507420

申请日：2023-11-13

申请人： SEMES CO., LTD.

发明人： Sung Suk WI ,  Yoon Seok CHOI ,  Hanlim KANG

IPC分类号： H01J37/32

CPC分类号： H01J37/32183 ,  H01J37/32165 ,  H01J2237/3341

摘要： Provided is a matching network module including a plurality of housings individualized to reduce cross radio frequency (RF) interference, a plurality of matching networks respectively mounted in the plurality of housings to separately perform impedance matching between a plurality of RF generators and a plasma chamber, and a common output rod connecting output terminals of the plurality of matching networks to each other.

公开(公告)号：US20240174451A1

公开(公告)日：2024-05-30

申请号：US18376427

申请日：2023-10-03

申请人： SEMES CO., LTD.

发明人： Hanbit KIM ,  Daeil JANG ,  Jongseon JEON ,  Jungdae KIM ,  Hyojoo JEOUN

IPC分类号： B65G43/04 ,  B65G35/06

CPC分类号： B65G43/04 ,  B65G35/06 ,  B65G2201/0297 ,  B65G2203/0291 ,  B65G2203/042

摘要： Provided is an overhead hoist transport device including an article transport vehicle having a space in which articles are loaded and unloaded, and including traveling wheels, guide wheels, and steering wheels, a traveling rail positioned along a ceiling of a semiconductor manufacturing line and providing a moving path for the article transport vehicle, a measuring sensor attached to the article transport vehicle and configured to measure a traveling state of the article transport vehicle, and a system configured to receive measured values from the measuring sensor, wherein the traveling rail includes at least one traveling section among a straight section, a curved section, and a branching section, and wherein the system is further configured to determine whether specific wheels of the article transport vehicle are detached on the traveling rail.

公开(公告)号：US20240173752A1

公开(公告)日：2024-05-30

申请号：US18516821

申请日：2023-11-21

申请人： SEMES CO., LTD.

发明人： Junhee CHOI ,  Tae-keun KIM ,  Kang Sul KIM ,  Kyeong Min LEE ,  Yong Jun KIM

IPC分类号： B08B3/08 ,  B08B3/02 ,  B08B3/12 ,  B08B5/02 ,  B08B13/00 ,  H01L21/02 ,  H01L21/67

CPC分类号： B08B3/08 ,  B08B3/02 ,  B08B3/12 ,  B08B5/02 ,  B08B13/00 ,  H01L21/02057 ,  H01L21/67051 ,  B08B2203/02

摘要： Disclosed are a substrate processing apparatus and a substrate processing method that allow a chemical liquid to penetrate deeply into a gap between patterns of a substrate. The substrate processing apparatus includes a chamber having a processing space defined therein in which a substrate is processed; a chuck installed in the processing space and configured to support the substrate thereon; a chemical liquid supply formed on top of the chuck and configured to supply a chemical liquid droplet toward an upper surface of the substrate supported on the chuck; and a pressurizer formed on top of the chuck and configured to pressurize the chemical liquid droplet supplied on the upper surface of the substrate so that the pressed chemical liquid droplet fills a gap between patterns formed on the substrate.

公开(公告)号：US20240170305A1

公开(公告)日：2024-05-23

申请号：US18425816

申请日：2024-01-29

申请人： SEMES CO., LTD.

发明人： Jin Woo JUNG ,  Do Hyeon YOON ,  Yong Hee LEE

IPC分类号： H01L21/67 ,  H01L21/02 ,  H01L21/677

CPC分类号： H01L21/67028 ,  H01L21/02101 ,  H01L21/67103 ,  H01L21/67248 ,  H01L21/67739

摘要： A substrate processing apparatus includes a substrate cleaning unit cleaning a substrate, a substrate drying unit drying the substrate, and a transfer robot transferring the substrate between the substrate cleaning unit and the substrate drying unit. The substrate drying unit includes a substrate processing container having a substrate processing space accommodating the substrate, and the transfer robot includes a surface temperature measurement sensor measuring a surface temperature of the substrate processing container.

公开(公告)号：US20240160486A1

公开(公告)日：2024-05-16

申请号：US18380656

申请日：2023-10-17

申请人： SEMES CO., LTD.

发明人： Sang Hyun SON ,  Yeon Chul Song ,  Myeong Jun Lim ,  Ji Hoon Yoo ,  Kwang Sup Kim ,  Jong Min Lee ,  Young Ho Park ,  Jun Ho Oh ,  Joong Chol Shin ,  Hyun Cheol Cho

IPC分类号： G06F9/50

CPC分类号： G06F9/5038 ,  G06F9/5072 ,  G06F2209/503 ,  G06F2209/505

摘要： A computing resource management system using software modularization in a cluster computing environment in which computing devices are connected, including an application process running on each computing device and an algorithm processing process configured to run independently of the application process and perform task processing on the application process, the computing resource management system including: a task managing system configured to receive a task request message from an application process requiring a task from each computing device; a process managing system configured to confirm an algorithm processing process of computing devices connected to the cluster computing environment, and determine whether there is an algorithm processing process in an idle state to which the application process requested for a task will be assigned; and a performed managing system configured to confirm a result of an application process whose task is performed by the algorithm processing process.

公开(公告)号：US20240160214A1

公开(公告)日：2024-05-16

申请号：US18472877

申请日：2023-09-22

申请人： SEMES CO., LTD.

发明人： Jungwoo KIM ,  Jongwon JUNG ,  Seungju LEE

IPC分类号： G05D1/02

CPC分类号： G05D1/0274 ,  G05D1/0214 ,  G05D1/024 ,  G05D1/0248 ,  G05D1/0287 ,  G05D2201/0216

摘要： An autonomous driving device includes a plurality of vehicles configured to travel on the ceiling of a manufacturing line in which manufacturing equipment is arranged, a traveling rail arranged along the ceiling of the manufacturing line to provide a movement path for each of the plurality of vehicles, a measurement module mounted on each of the plurality of vehicles and including a LiDAR sensor and a 3-dimensional sensor, and a map generating module configured to receive information from the measurement module, wherein the map generating module is further configured to generate a 3-dimensional map that 3-dimensionally represents the manufacturing line.