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    Ion micro-analysis
    31.
    发明授权
    Ion micro-analysis 失效
    离子微分析

    公开(公告)号：US4510387A

    公开(公告)日：1985-04-09

    申请号：US435728

    申请日：1982-10-20

    Applicant: Eiichi Izumi ,  Hifumi Tamura

    Inventor： Eiichi Izumi ,  Hifumi Tamura

    IPC: G01N23/225 ,  G01Q30/02 ,  H01J37/22 ,  H01J37/252 ,  H01J37/256

    CPC classification number: H01J37/252

    Abstract: In ion micro-analysis, intensity of at least one species of secondary ions is monitored, and a reference etching time required for etching an implanted depth of primary ions is determined from a profile of a secondary ion intensity signal. Analysis time is graduated on the basis of the reference etching time to represent an analysis signal with the scale of the depth. The primary ions are non-volatile and may be active ions which react with a specimen or metal ions. The analyzed depth can be found during the analysis to prevent unwanted analysis and assure rapid data processing.

    Abstract translation: 在离子微分析中，监测至少一种二次离子的强度，并且根据二次离子强度信号的轮廓确定蚀刻初级离子的注入深度所需的参考蚀刻时间。 分析时间基于参考刻蚀时间分度，以表示具有深度刻度的分析信号。 初级离子是非挥发性的，并且可以是与样品或金属离子反应的活性离子。 在分析过程中可以发现分析的深度，以防止不必要的分析，并确保快速的数据处理。

    Electron energy analyzing apparatus
    32.
    发明授权
    Electron energy analyzing apparatus 失效
    电子能量分析仪

    公开(公告)号：US4480220A

    公开(公告)日：1984-10-30

    申请号：US318404

    申请日：1981-11-05

    Applicant: Shigeto Isakozawa ,  Morioki Kubozoe

    Inventor： Shigeto Isakozawa ,  Morioki Kubozoe

    IPC: H01J37/22 ,  G01N23/06 ,  G01N23/225 ,  H01J37/252 ,  G01N27/00

    CPC classification number: G01N23/225 ,  H01J37/252

    Abstract: An electron energy analyzing apparatus is disclosed in which electrons having passed through a sample are subjected to energy analysis, respective energy values of the crest and trough of an energy peak characterizing a predetermined substance in the sample are selected, subtraction is performed beetween output signals of a detector obtained respectively at the energy values, the sign of a difference between the output signals is judged to separate a background signal from an energy loss peak signal, and a distribution image of the substance is displayed on the basis of the energy loss peak signal containing no background signal.

    Abstract translation: 公开了一种电子能量分析装置，其中通过样品的电子进行能量分析，选择表征样品中预定物质的能量峰的波峰和谷的各自的能量值，在 分别以能量值获得的检测器，输出信号之间的差异的符号被判断为将背景信号与能量损失峰值信号分开，并且基于能量损失峰值信号显示物质的分布图像 不含背景信号。

    Electrically conductive sample support-mounting for secondary ion mass spectrometer analysis
    33.
    发明授权
    Electrically conductive sample support-mounting for secondary ion mass spectrometer analysis 失效
    用于二次离子质谱仪分析的导电样品支架安装

    公开(公告)号：US4465935A

    公开(公告)日：1984-08-14

    申请号：US381044

    申请日：1982-05-24

    Applicant: Rolf von Criegern ,  Ingo Weitzel

    Inventor： Rolf von Criegern ,  Ingo Weitzel

    IPC: G01Q30/16 ,  H01J37/20 ,  H01J37/252 ,  H01J49/04 ,  G01N21/00 ,  G01N23/00

    CPC classification number: H01J49/0409 ,  H01J37/20 ,  H01J37/252 ,  H01J49/142

    Abstract: An electrically conductive sample support mounting for the analysis technique of secondary ion mass spectrometry employs a sample plate accommodating the sample. At the sample plate surface facing an ion beam or neutral particle beam, the sample is arranged in an environment-free fashion fully in the interior of the region impinged or scanned by the ion beam or neutral particle beam. Through the creation of a so-called orifice, interfering influences which can arise from a crater rim and from its surroundings are entirely eliminated. The invention is applied in the case of depth profile measurement of ion-implanted doping materials in semiconductor crystal disks and for the purpose of ultrasensitive trace analysis in solids.

    Abstract translation: 用于二次离子质谱分析技术的导电样品支持安装采用容纳样品的样品板。 在面向离子束或中性粒子束的样品板表面上，样品以无环境的方式完全设置在由离子束或中性粒子束撞击或扫描的区域的内部。 通过产生所谓的孔口，完全消除了从火山口边缘及其周边产生的干扰影响。 本发明适用于在半导体晶体盘中的离子注入掺杂材料的深度分布测量的情况下，并且用于固体中的超敏感痕量分析的目的。

    Ion microprobe analyzer
    35.
    发明授权
    Ion microprobe analyzer 失效
    离子微探针分析仪

    公开(公告)号：US3894233A

    公开(公告)日：1975-07-08

    申请号：US41050473

    申请日：1973-10-29

    Applicant: HITACHI LTD

    Inventor： TAMURA HIFUMI ,  KONDO TOSHIO ,  NAKAMURA KAZUMITSU

    IPC: H01J37/252 ,  H01J49/14 ,  H01J37/26

    CPC classification number: H01J49/142 ,  H01J37/252

    Abstract: An ion microprobe analyzer including a detector of secondary particles emitted from a specimen by bombarding a specimen with an ion beam, and means for recording or displaying the relationship between currents of the secondary particles and specific ions. According to this ion microprobe analyzer the influence on the measurement of the work function of a surface of the specimen is eliminated and the measurement of a concentration distribution of an element in a direction toward the depth of the specimen can be measured precisely.

    Abstract translation: 一种离子微探针分析仪，其包括通过用离子束轰击样品从样品发射的二次粒子的检测器，以及用于记录或显示二次粒子和特定离子的电流之间的关系的装置。 根据这种离子微探针分析仪，消除了对样品表面的功函数的测量的影响，并且可以精确地测量元件在朝向样品深度的方向上的浓度分布的测量。

    Charged particle analyzer with means to determine the coordinate position of the sample
    36.
    发明授权
    Charged particle analyzer with means to determine the coordinate position of the sample 失效
    用于确定样品坐标位置的充电颗粒分析仪

    公开(公告)号：US3686501A

    公开(公告)日：1972-08-22

    申请号：US3686501D

    申请日：1970-09-28

    Applicant: VARIAN ASSOCIATES

    Inventor： TAYLOR NORMAN J ,  MANN JOSEPH K ,  ATWOOD ALLEN W

    IPC: H01J37/252 ,  H01J49/48 ,  G01T1/36

    CPC classification number: H01J49/482 ,  H01J37/252

    Abstract: A cylindrical mirror analyzer is described having apparatus for quickly and accurately positioning the area of a sample to be investigated at the proper position for analysis. The cylindrical analyzer includes a pair of coaxial and radially spaced apart cylinders and suitable mechanism for supporting a sample to be investigated on their common axis. Means are provided for forming in the space between the cylinders a charged particle deflecting field which will deflect towards the inner cylinder any charged particles within such space which have issued from the sample. Slots in the inner cylinder define a path for the passage of particles from the sample into the space between the cylinders for deflection and then back through the inner cylinder to the cylindrical axis where such particles are collected for analysis of their energy. A screen of fluorescent material is disposed at a location at which it will be activated by particles issuing from the sample because of the bombardment, and a shield is disposed between the fluorescent screen and the sample to project an unactivated or shadow area on the screen. The positional relationship of the shadow on the screen is indicative of the coordinate position of the area on the sample from which the radiation is emitted and, hence, is indicative of the location of the area under investigation.

    Abstract translation: 描述了一种圆柱形镜面分析仪，其具有用于将待研究样品的面积快速准确地定位在适当位置进行分析的装置。 圆柱形分析器包括一对同轴和径向间隔开的圆柱体和用于在其共同轴线上支撑要研究的样品的适当机构。 提供了用于在气缸之间的空间中形成带电粒子偏转场的装置，其将朝向内圆柱体偏转，在该空间内从样品发出的任何带电粒子。 内筒中的槽限定了用于使颗粒从样品通过到用于偏转的气缸之间的空间的路径，然后通过内圆筒返回到圆柱轴线，其中收集这些颗粒以分析其能量。 荧光材料的屏幕设置在由于轰击而从样品发出的颗粒被激活的位置处，并且在荧光屏和样品之间设置屏蔽以在屏幕上投影未激活或阴影区域。 屏幕上的阴影的位置关系表示放射辐射的样品上的区域的坐标位置，因此表示被调查区域的位置。

    Blocking apparatus and method utilizing a low-energy ion beam
    37.
    发明授权
    Blocking apparatus and method utilizing a low-energy ion beam 失效
    阻塞装置和使用低能量离子束的方法

    公开(公告)号：US3622782A

    公开(公告)日：1971-11-23

    申请号：US3622782D

    申请日：1968-09-16

    Applicant: MINNESOTA MINING & MFG

    Inventor： SMITH DAVID P ,  SALO JAMES W

    IPC: G01Q60/00 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/26

    CPC classification number: H01J37/252 ,  H01J37/08 ,  H01J37/20

    Abstract: Apparatus and method for producing a blocking pattern of the crystalline structure of a solid surface using a low-energy ion beam is shown wherein the low-energy ion beam is focused to a predetermined cross section and directed by an extended bored member onto a predetermined area of the solid surface at an angle greater than 5* and less than 90* enabling the ions to be scattered from the solid surface to produce a projected blocking pattern which impinges upon a fluorescent screen positioned substantially parallel to and spaced a predetermined distance from the solid surface for producing as a visual image the projected blocking pattern representing the crystalline structure of the solid surface. The extended bored member also collimates the focused ion beam into a smaller predetermined cross section and produces secondary electrons while collimating the focused beam to thereby produce a cloud of electrons which neutralize any charge at the solid surface produced by incidence of the collimated ion beam.

    Ion lens to provide a focused ion, or ion and electron beam at a target, particularly for ion microprobe apparatus
    38.
    发明授权
    Ion lens to provide a focused ion, or ion and electron beam at a target, particularly for ion microprobe apparatus 失效
    离子镜头提供聚焦离子，或离子和电子束在目标，特别是离子微阵列设备

    公开(公告)号：US3617739A

    公开(公告)日：1971-11-02

    申请号：US3617739D

    申请日：1970-04-09

    Applicant: INST PLASMAPHYSIK GMBH

    Inventor： LIEBL HELMUT

    IPC: G01Q30/02 ,  H01J37/252 ,  H01J49/30 ,  H01J37/14 ,  H01J37/12

    CPC classification number: H01J37/252 ,  H01J49/30

    Abstract: An ion lens (12) is located between an ion source (10) and the magnetic sector field of an ion microprobe apparatus, the ion lens having its input focal plane in the region in which the ion beam emitted by the ion source has its smallest cross section, the magnetic sector field being a uniform homogeneous 180* magnetic field in which the ions emitted from the ion lens (12) as parallel bundles are first deflected by 90*, then passed through an aperture for selection of ions of predetermined mass, and again deflected by 90*, to be emitted as parallel bundles of ions of preselected mass. The microprobe may be combined with an electron beam generator which emits a parallel beam of electrons to a second uniform 180* magnetic field, which places the electron beam coaxially with the ion beam. The ion beam passes through a portion of this second magnetic field in a region which is of insufficient field strength to deflect the ion beam, to provide for simultaneous, or selective irradiation of the same spot on a test sample by ions or electrons. Lenses for simultaneous focusing of ions and electrons (FIG. 2) includes a pair of pole shoes with a magnetic field therebetween and a nonmagnetic electrode located between the pole shoes and energized with respect to the pole shoes to provide for combined magnetic and electrical action on the ion, and/or electron beam.

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