公开(公告)号：US08703395B2

公开(公告)日：2014-04-22

申请号：US13283582

申请日：2011-10-28

申请人： Hayato Namai ,  Hiroki Nakagawa ,  Kentaro Harada ,  Takehiko Naruoka

发明人： Hayato Namai ,  Hiroki Nakagawa ,  Kentaro Harada ,  Takehiko Naruoka

IPC分类号： G03F7/26

CPC分类号： G03F7/40 ,  G03F7/0397 ,  G03F7/325 ,  G03F7/405 ,  H01L21/0337

摘要： A pattern-forming method includes applying a photoresist composition to a substrate to form a resist film. The photoresist composition includes an acid generator and a first polymer that includes an acid-dissociable group. The resist film is exposed. The resist film is developed using a developer having an organic solvent content of 80 mass % or more to form a prepattern of the resist film. A polymer film having a phase separation structure in a space defined by the prepattern is formed using a composition that includes a plurality of second polymers. A part of the phase separation structure of the polymer film is removed.

摘要翻译： 图案形成方法包括将光致抗蚀剂组合物施加到基底以形成抗蚀剂膜。 光致抗蚀剂组合物包括酸产生剂和包含酸解离基团的第一聚合物。 抗蚀剂膜被曝光。 使用有机溶剂含量为80质量％以上的显影剂显影抗蚀剂膜，以形成抗蚀剂膜的前体图案。 使用包含多个第二聚合物的组合物形成在由预制图案限定的空间中具有相分离结构的聚合物膜。 除去聚合物膜的相分离结构的一部分。

公开(公告)号：US08697343B2

公开(公告)日：2014-04-15

申请号：US12294386

申请日：2007-03-23

申请人： Hiroki Nakagawa ,  Hiromitsu Nakashima ,  Gouji Wakamatsu ,  Kentarou Harada ,  Yukio Nishimura ,  Takeo Shioya

发明人： Hiroki Nakagawa ,  Hiromitsu Nakashima ,  Gouji Wakamatsu ,  Kentarou Harada ,  Yukio Nishimura ,  Takeo Shioya

IPC分类号： G03F7/26 ,  G03F7/039

CPC分类号： G03F7/0046 ,  C08F220/18 ,  C08F220/24 ,  C08F220/28 ,  G03F7/0045 ,  G03F7/039 ,  G03F7/0397 ,  G03F7/162 ,  G03F7/168 ,  G03F7/2006 ,  G03F7/2041 ,  G03F7/322 ,  G03F7/38 ,  G03F7/40

摘要： An object of the present invention is to provide a novel fluorine-containing polymer, a radiation-sensitive resin composition for liquid immersion lithography which contains the fluorine-containing polymer, which leads to a pattern having an excellent shape and excellent depth of focus, wherein the amount of an eluted component in a liquid for liquid immersion lithography such as water that comes in contact with the resist during exposure in liquid immersion lithography is little, and which provides a larger receding contact angle between the resist film and the liquid for liquid immersion lithography such as water, and a method for purifying the fluorine-containing polymer. The present resin composition comprises a novel fluorine-containing polymer (A) containing repeating units represented by the general formulae (1) and (2) and having Mw of 1,000-50,000, a resin (B) having an acid-unstable group, a radiation-sensitive acid generator (C), a nitrogen-containing compound (D) and a solvent (E).

摘要翻译： 本发明的目的是提供一种含氟聚合物，其含有含氟聚合物的液浸光刻用的辐射敏感性树脂组合物，其导致具有优异形状和优异的焦深的图案，其中 在液浸光刻中曝光期间与抗蚀剂接触的液体浸液式液晶等液体中的洗脱组分的量很少，并且在抗蚀剂膜和用于液浸的液体之间提供较大的后退接触角 光刻法如水，以及纯化含氟聚合物的方法。 本发明的树脂组合物包含含有由通式（1）和（2）表示的重复单元并具有1,000-50,000的Mw的新的含氟聚合物（A），具有酸不稳定基团的树脂（B）， 辐射敏感性酸产生剂（C），含氮化合物（D）和溶剂（E）。

公开(公告)号：US20120319555A1

公开(公告)日：2012-12-20

申请号：US13574048

申请日：2011-02-02

申请人： Hiroki Nakagawa ,  Toshiyuki Namura ,  Yoshinori Kakuno ,  Kazushige Sugita

发明人： Hiroki Nakagawa ,  Toshiyuki Namura ,  Yoshinori Kakuno ,  Kazushige Sugita

IPC分类号： F21S2/00

CPC分类号： F21V29/70 ,  F21K9/232 ,  F21K9/68 ,  F21K9/69 ,  F21V3/049 ,  F21V7/0033 ,  F21V7/22 ,  F21V13/02 ,  F21V19/00 ,  F21V23/009 ,  F21V29/20 ,  F21V29/89 ,  F21Y2105/10 ,  F21Y2113/13 ,  F21Y2115/10 ,  H01L25/0753 ,  H01L2924/0002 ,  H01L2924/00

摘要： An LED light source lamp has built-in drive circuits in a housing, and is used by being attached to a lamp holder. An LED installation plate is arranged, in a main space of the housing, on an attachment side to the lamp holder. An LED module on a surface, of the LED installation plate, opposite to the lamp holder, is a collection of LEDs driven by the drive circuit. A light diffusion member is arranged so as to block the optical axis of light emitted by each LED of the LED module. Here, the drive circuits are arranged in an outer peripheral space, between the LED module and the light diffusion member, so as not to block the optical axis of light emitted by each LED of the LED module.

摘要翻译： LED光源灯在外壳内部具有驱动电路，并被安装在灯座上。 LED安装板在壳体的主空间中安装在与灯座的附接侧上。 在LED安装板的与灯座相对的表面上的LED模块是由驱动电路驱动的LED的集合。 光漫射构件被布置成阻挡LED模块的每个LED发射的光的光轴。 这里，驱动电路被布置在LED模块和光漫射构件之间的外周空间中，以便不阻挡LED模块的每个LED发射的光的光轴。

公开(公告)号：US20120063129A1

公开(公告)日：2012-03-15

申请号：US13319993

申请日：2011-03-02

申请人： Hiroki Nakagawa ,  Yoshinori Kakuno ,  Takaari Uemoto ,  Kazushige Sugita

发明人： Hiroki Nakagawa ,  Yoshinori Kakuno ,  Takaari Uemoto ,  Kazushige Sugita

IPC分类号： F21V7/00 ,  F21V29/00 ,  F21V21/00

CPC分类号： F21V29/85 ,  F21K9/20 ,  F21K9/68 ,  F21V3/00 ,  F21V7/05 ,  F21V29/506 ,  F21V29/70 ,  F21Y2103/10 ,  F21Y2113/13 ,  F21Y2115/10

摘要： Provided is a lamp designed to use as a light source a solid-state light emitting device with a simple and inexpensive structure and having an improved heat dissipation performance. A lamp uses a solid-state light emitting device as a light source. A cap is mounted to an external apparatus at the time of use. A housing is made of a translucent material and is connected to the cap. A light-emitting module includes one or a plurality of solid-state light emitting devices and is mounted such that the main-light-emission side (lower side in FIG. 1) thereof is in close contact with the inner wall of the housing. Further, the gap between the housing and the light-emitting module may be filled with a thermal conductive material having a translucency and a thermal conductivity.

摘要翻译： 提供一种设计成将光源用作具有简单且便宜的结构并具有改善的散热性能的固态发光器件的灯。 灯使用固态发光器件作为光源。 在使用时将盖子安装到外部设备。 壳体由半透明材料制成并连接到帽盖上。 发光模块包括一个或多个固态发光器件，并且安装成使得其主发光侧（图1中的下侧）与壳体的内壁紧密接触。 此外，壳体和发光模块之间的间隙可以填充有具有半透明性和导热性的导热材料。

公开(公告)号：US20120028198A1

公开(公告)日：2012-02-02

申请号：US13272501

申请日：2011-10-13

申请人： Atsushi NAKAMURA ,  Hiroki Nakagawa ,  Hiromitsu Nakashima ,  Takayuki Tsuji ,  Hiroshi Dougauchi ,  Daita Kouno ,  Yukio Nishimura

发明人： Atsushi NAKAMURA ,  Hiroki Nakagawa ,  Hiromitsu Nakashima ,  Takayuki Tsuji ,  Hiroshi Dougauchi ,  Daita Kouno ,  Yukio Nishimura

IPC分类号： G03F7/20 ,  C08K5/06

CPC分类号： G03F7/11 ,  C08F220/18 ,  C08F220/30 ,  G03F7/0046 ,  G03F7/2041

摘要： An upper layer-forming composition includes a resin, and a solvent. The resin is dissolvable in a developer for a photoresist film which is to be covered by the upper layer-forming composition to form a pattern by exposure to radiation. The solvent dissolves the resin in the solvent. The solvent includes a compound shown by a formula (1). Each of R1 and R2 independently represents a hydrocarbon group having 1 to 8 carbon atoms or a halogenated hydrocarbon group. R1—O—R2  (1)

摘要翻译： 上层形成组合物包括树脂和溶剂。 该树脂可溶于用于通过暴露于辐射形成图案的上层形成组合物覆盖的光致抗蚀剂膜的显影剂中。 溶剂溶解在溶剂中的树脂。 溶剂包括由式（1）表示的化合物。 R 1和R 2各自独立地表示碳原子数1〜8的烃基或卤代烃基。 R1-O-R2（1）

公开(公告)号：US20110316442A1

公开(公告)日：2011-12-29

申请号：US13159777

申请日：2011-06-14

申请人： Hiroyuki Sako ,  Katsunobu Hamamoto ,  Takeshi Saito ,  Hiroki Nakagawa ,  Hiroshi Terasaka

发明人： Hiroyuki Sako ,  Katsunobu Hamamoto ,  Takeshi Saito ,  Hiroki Nakagawa ,  Hiroshi Terasaka

IPC分类号： H05B37/02

CPC分类号： H05B33/089 ,  H05B33/0815 ,  Y02B20/347 ,  Y02B20/348

摘要： The LED lighting device includes a lighting circuit unit, a current detecting unit, a voltage detecting unit, and a control unit. The lighting circuit unit is adapted in use to be connected to a lamp socket to be connected to a LED lamp, and is configured to provide an output voltage in the form of a DC voltage to the lamp socket in a manner to turn on the LED lamp. The current detecting unit is configured to detect an output current which is caused by the output voltage and is supplied from said lighting circuit unit to said lamp socket. The voltage detecting unit is configured to detect the output voltage of said lighting circuit unit. The control unit configured to control the lighting circuit unit. The control unit is configured to perform constant-current control of control the lighting circuit unit in a manner to regulate the output voltage such that the output current is identical to a target value while keeping the output voltage not higher than a maximum-load voltage, when the output current detected by the current detecting unit is not less than a predetermined threshold value, and is configured to perform no-load control of controlling the lighting circuit unit in a manner to regulate the output voltage such that the output voltage is kept identical to a no-load voltage higher than the maximum-load voltage, when the output current detected by the current detecting unit is less than the predetermined threshold value.

摘要翻译： LED照明装置包括照明电路单元，电流检测单元，电压检测单元和控制单元。 照明电路单元适于连接到要连接到LED灯的灯座，并且被配置为以将LED的形式的DC电压的形式的LED输出电压提供给灯插座 灯。 电流检测单元被配置为检测由输出电压引起的并从所述点亮电路单元提供给所述灯座的输出电流。 电压检测单元被配置为检测所述点亮电路单元的输出电压。 所述控制单元被配置为控制所述点亮电路单元。 控制单元被配置为以保持输出电压不高于最大负载电压的方式对调节输出电压进行控制的恒流控制，使得输出电流与目标值相同， 当由电流检测单元检测到的输出电流不小于预定阈值时，并且被配置为以调节输出电压的方式执行控制点亮电路单元的空载控制，使得输出电压保持相同 当由电流检测单元检测到的输出电流小于预定阈值时，该空载电压高于最大负载电压。

公开(公告)号：US08076053B2

公开(公告)日：2011-12-13

申请号：US12091712

申请日：2006-10-25

申请人： Atsushi Nakamura ,  Hiroki Nakagawa ,  Hiromitsu Nakashima ,  Takayuki Tsuji ,  Hiroshi Dougauchi ,  Daita Kouno ,  Yukio Nishimura

发明人： Atsushi Nakamura ,  Hiroki Nakagawa ,  Hiromitsu Nakashima ,  Takayuki Tsuji ,  Hiroshi Dougauchi ,  Daita Kouno ,  Yukio Nishimura

IPC分类号： G03F7/00 ,  G03F7/004 ,  G03F7/40 ,  G03F7/11

CPC分类号： G03F7/11 ,  C08F220/18 ,  C08F220/30 ,  G03F7/0046 ,  G03F7/2041

摘要： An upper layer-forming composition formed on a photoresist while causing almost no intermixing with the photoresist film and a photoresist patterning method are provided. The upper layer-forming composition is stably maintained without being eluted in a medium such as water during liquid immersion lithography and is easily dissolved in an alkaline developer. The upper layer-forming composition covers a photoresist film for forming a pattern by exposure to radiation. The composition comprises a resin dissolvable in a developer for the photoresist film and a solvent in which the resin is dissolved. The solvent has a viscosity of less than 5.2×10−3 Pa·s at 20° C. In addition, the solvent does not cause intermixing of the photoresist film and the upper layer-forming composition. The solvent contains an ether or a hydrocarbon.

摘要翻译： 提供了形成在光致抗蚀剂上的上层形成组合物，同时几乎不与光致抗蚀剂膜混合，并且提供光致抗蚀剂图案化方法。 上层形成组合物在液浸光刻期间稳定地保持在介质如水中不被洗脱，并容易溶解在碱性显影剂中。 上层形成组合物覆盖用于通过暴露于辐射形成图案的光致抗蚀剂膜。 该组合物包含可溶于光致抗蚀剂膜的显影剂中的树脂和溶解有树脂的溶剂。 溶剂在20℃下的粘度小于5.2×10-3Pa·s。此外，溶剂不会引起光致抗蚀剂膜和上层形成组合物的混合。 溶剂含有醚或烃。

公开(公告)号：US20080020133A1

公开(公告)日：2008-01-24

申请号：US11718341

申请日：2005-11-10

申请人： Hiroyuki Kobori ,  Koujiro Ohkawa ,  Hiroki Nakagawa ,  Yosuke Yabuuchi ,  Keisuke Nomura

发明人： Hiroyuki Kobori ,  Koujiro Ohkawa ,  Hiroki Nakagawa ,  Yosuke Yabuuchi ,  Keisuke Nomura

IPC分类号： B05D7/24

CPC分类号： H01L21/316 ,  C23C18/1216 ,  C23C18/1225 ,  C23C18/127 ,  C23C18/1279 ,  C23C18/1291 ,  C23C18/14 ,  C23C18/1651 ,  C23C18/1662 ,  C23C18/1667 ,  C23C18/1678 ,  C23C18/1682 ,  C23C18/31 ,  C23C22/74 ,  C23C22/83 ,  H01L21/02186 ,  H01L21/02189 ,  H01L21/02282 ,  H01M8/1246 ,  Y02E60/525 ,  Y02P70/56

摘要： A metal oxide film producing method which is an inexpensive wetting coating by use of a metal oxide film forming-solution, and which enables to yield an even and dense metal oxide film having a sufficient film thickness even on a substrate, such as one having complicated structural part or one comprising porous materials. The method of producing a metal oxide film, comprises: a first metal oxide film-forming step of bringing a substrate into contact with a first metal oxide film forming-solution that has a metal salt or a metal complex as a metal source and at least one of an oxidizing agent and a reducing agent dissolved, and forming a first metal oxide film on the substrate; and a second metal oxide film-forming step of heating the substrate having the first metal oxide film up to a metal oxide film forming-temperature or higher, bringing the resultant into contact with a second metal oxide film forming-solution that has a metal salt or a metal complex dissolved as a metal source, and yielding a second metal oxide film.

摘要翻译： 一种金属氧化物膜的制造方法，其是通过使用金属氧化物成膜溶液而廉价的润湿涂层，并且即使在具有复杂的基板的基板上也能够产生具有足够的膜厚度的均匀且致密的金属氧化物膜 结构部件或包括多孔材料的部件。 制造金属氧化物膜的方法包括：第一金属氧化物膜形成步骤，使基板与具有金属盐或金属络合物的第一金属氧化物形成溶液作为金属源接触，并且至少 溶解氧化剂和还原剂中的一种，在基板上形成第一金属氧化物膜; 以及第二金属氧化物膜形成步骤，将具有第一金属氧化物膜的基板加热至金属氧化物成膜温度以上，使得与第二金属氧化物成膜溶液接触，形成金属盐 或作为金属源溶解的金属络合物，并产生第二金属氧化物膜。

公开(公告)号：US20070042292A1

公开(公告)日：2007-02-22

申请号：US11504809

申请日：2006-08-16

申请人： Eiji Yoneda ,  Hirokazu Sakakibara ,  Hiromitsu Nakashima ,  Hiroki Nakagawa ,  Yukio Nishimura

发明人： Eiji Yoneda ,  Hirokazu Sakakibara ,  Hiromitsu Nakashima ,  Hiroki Nakagawa ,  Yukio Nishimura

IPC分类号： G03C1/00

CPC分类号： G03F7/0397 ,  G03F7/0045 ,  G03F7/0392 ,  G03F7/2041

摘要： A radiation-sensitive resin composition which is a resist having properties such as excellent sensitivity, a small degree of line edge roughness of patterns, capability of inhibiting pattern collapsing, and the like is provided. The radiation-sensitive resin composition comprises an acid-dissociable group-containing polymer having recurring units of the following formulas (1-1) and (1-2), an additive of the following formula (1-3), and an acid generator, in the formula (1-1), R1 represents a methyl group and the like and X represents a specific polycyclic alicyclic hydrocarbon group and the like, in the formula (1-2), R1 represents a methyl group and the like and Z represents an acid-dissociable group which is dissociable by the action of an acid, and in the formula (1-3), n is an integer from 1-8 and A individually represents a hydroxyl group and the like.

摘要翻译： 提供了作为抗敏剂的耐辐射敏感性树脂组合物，其具有优异的灵敏度，图案的线边缘粗糙度，抑制图案折叠的能力等。 辐射敏感性树脂组合物包含具有下式（1-1）和（1-2）的重复单元的酸解离基团的聚合物，下式（1-3）的添加剂和酸发生剂 在式（1-1）中，R 1表示甲基等，X表示特定的多环脂肪族烃基等，式（1-2）中，R' SUP> 1表示甲基等，Z表示可通过酸的作用而离解的酸解离基，在式（1-3）中，n为1-8的整数 A独立地表示羟基等。

公开(公告)号：US06984926B2

公开(公告)日：2006-01-10

申请号：US10780100

申请日：2004-02-17

申请人： Yuji Tsuneto ,  Hiroki Nakagawa ,  Akiko Nakanishi ,  Kenji Itaya ,  Kenji Nakano ,  Kohhei Iwase ,  Hiroki Kitagawa ,  Yasushige Tomiyoshi ,  Shiro Iida

发明人： Yuji Tsuneto ,  Hiroki Nakagawa ,  Akiko Nakanishi ,  Kenji Itaya ,  Kenji Nakano ,  Kohhei Iwase ,  Hiroki Kitagawa ,  Yasushige Tomiyoshi ,  Shiro Iida

IPC分类号： H01J1/02

CPC分类号： H01J61/327 ,  H01J61/526

摘要： A compact self-ballasted fluorescent lamp has an arc tube in a double-spiral configuration, the arc tube being formed by bending a glass tube around an axis of spiral up to both ends of the glass tube, and a holder that is made of resin and holds this arc tube. Electrodes, each being equipped with a filament coil, are sealed at respective ends of the glass tube. The holder is made up of a holding resin member with a cylindrical shape having a closed bottom and a resin cover in a cone shape, the holder including a circumferential wall and an end wall that is at the edge of the circumferential wall. A heat-dissipating plate is provided inside the holding resin member, at a position corresponding to where the filament coils within the glass tube are.

摘要翻译： 紧凑型自镇流荧光灯具有双螺旋构造的电弧管，所述电弧管通过将玻璃管绕着所述玻璃管的两端的螺旋轴线弯曲而形成，并且由树脂制成的保持架 并保持该电弧管。 每个装有灯丝线圈的电极在玻璃管的各个端部被密封。 保持器由具有封闭底部的圆柱形的保持树脂构件和圆锥形的树脂盖构成，保持器包括圆周壁和位于周壁边缘的端壁。 在保持树脂构件的内部，与玻璃管内的丝线圈对应的位置设置有散热板。