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276 条记录 (耗时 0.019 秒)

    Method for directly depositing metal containing patterned films
    43.
    发明授权
    Method for directly depositing metal containing patterned films 失效
    用于直接沉积含金属图案的薄膜的方法

    公开(公告)号：US5534312A

    公开(公告)日：1996-07-09

    申请号：US339127

    申请日：1994-11-14

    申请人： Ross H. Hill ,  Bentley J. Palmer ,  Alfred A. Avey, Jr. ,  Sharon L. Blair ,  Chu-Hui W. Chu ,  Meihua Gao ,  Wai L. Law

    发明人： Ross H. Hill ,  Bentley J. Palmer ,  Alfred A. Avey, Jr. ,  Sharon L. Blair ,  Chu-Hui W. Chu ,  Meihua Gao ,  Wai L. Law

    IPC分类号： C23C18/14 ,  H01L21/288 ,  H01L21/3205 ,  H05K3/10 ,  H05H1/00

    CPC分类号： C23C18/14 ,  H05K3/105

    摘要： A photoresist-free method for making patterned films of metal oxides, metals, or other metal containing compounds is described. The method involves applying an amorphous film of a metal complex to a substrate. The film may be conveniently applied by spin coating using standard industry techniques. The metal complex used is photoreactive and undergoes a low temperature chemical reaction in the presence of light of a suitable wavelength. The end product of the reactions depends upon the atmosphere in which the reactions take place. Metal oxide films may be made in air. Patterned films may be made by exposing only selected portions of the film to light. Patterns of two or more materials may be laid down from the same film by exposing different parts of the film to light in different atmospheres. The resulting patterned film is generally planar. Separate planarization steps are not generally required.

    摘要翻译： 描述了制造金属氧化物，金属或其它含金属化合物的图案化膜的无光致抗蚀剂方法。 该方法包括将金属络合物的非晶膜施加到基底上。 可以使用标准工业技术通过旋涂方便地施加该膜。 所使用的金属络合物是光反应性的并且在合适波长的光存在下经历低温化学反应。 反应的最终产物取决于反应发生的气氛。 金属氧化物膜可以在空气中制成。 图案化的膜可以通过仅将膜的选定部分曝光而制成。 通过将不同部分的膜暴露于不同气氛中的光，可以从相同的膜中放下两种或更多种材料的图案。 所得图案化膜通常是平面的。 通常不需要单独的平坦化步骤。

    Composite mirrors
    44.
    发明授权
    Composite mirrors 失效
    复合镜

    公开(公告)号：US5517338A

    公开(公告)日：1996-05-14

    申请号：US963650

    申请日：1992-10-20

    申请人： George D. Vaughn ,  Charles R. Graham

    发明人： George D. Vaughn ,  Charles R. Graham

    IPC分类号： C23C18/08 ,  C23C18/14 ,  G02B5/32

    CPC分类号： C23C18/14 ,  C23C18/08

    摘要： Composite mirrors on a substrate comprising a mixture of up to 20 percent of polymer and at least 80 percent of metal clusters, e.g. of gold, palladium or silver, which have a nominal diameter less than 100 nanometers and which are agglomerated in a layer conforming to the surface of the substrate. Composite mirrors are produced by coating a substrate with a solution comprising at least 80 percent solvent, e.g. water and alcohol, and up to 20 percent of a mixture of up to 20 percent polymer, e.g. methylcellulose, and at least 80 percent metal, present as a salt of volatiles-forming anion, e.g. silver lactate or palladium acetate; dry films of polymer and salt are exposed to heat or ultraviolet light to convert the salt to metal clusters. Polymeric mirrors are especially useful for making reflection holograms on polymeric surfaces embossed with a latent holographic image in a relief pattern.

    摘要翻译： 基底上的复合反射镜，其包含高达20％的聚合物和至少80％的金属簇的混合物，例如， 金，钯或银，其具有小于100纳米的标称直径，并且在与基材表面相符的层中聚集。 复合反射镜通过用包含至少80％溶剂的溶液涂布基材来制备，例如， 水和醇，以及高达20％的高达20％的聚合物的混合物，例如。 甲基纤维素和至少80％的金属，以形成挥发物的阴离子的盐形式存在，例如， 乳酸银或乙酸钯; 将聚合物和盐的干膜暴露于热或紫外光以将盐转化为金属簇。 聚合反射镜特别适用于在浮雕图案中用潜像全息图像压印的聚合物表面上制作反射全息图。

    Photolytic deposition of metal from solution onto a substrate
    45.
    发明授权
    Photolytic deposition of metal from solution onto a substrate 失效
    将金属从溶液中光解沉积到基底上

    公开(公告)号：US5100693A

    公开(公告)日：1992-03-31

    申请号：US533543

    申请日：1990-06-05

    申请人： John J. Eisch ,  Marek P. Boleslawski

    发明人： John J. Eisch ,  Marek P. Boleslawski

    IPC分类号： C23C18/14 ,  H05K3/18

    CPC分类号： C23C18/14 ,  H05K3/185

    摘要： Metal is photolytically deposited from solution onto a substrate in contact with the solution by irradiating with light a solution containing a solubilized metal source and an organic compound containing a plurality of proximal Lewis base substituent groups so as to be capable of promoting the photoreduction of the metal onto the substrate.

    摘要翻译： 通过用光照射包含溶解的金属源和含有多个近侧路易斯碱取代基的有机化合物的溶液，使溶液中的溶液光解地沉积到与溶液接触的基底上，以便能够促进金属的光还原 到基板上。

    Selective conversion of polymer coatings to ceramics
    48.
    发明授权
    Selective conversion of polymer coatings to ceramics 失效
    聚合物涂层选择性转化为陶瓷

    公开(公告)号：US4753716A

    公开(公告)日：1988-06-28

    申请号：US023267

    申请日：1987-03-09

    申请人： Charles L. Beatty ,  John R. Eyler ,  Clifford H. Watson

    发明人： Charles L. Beatty ,  John R. Eyler ,  Clifford H. Watson

    IPC分类号： C03C17/22 ,  C04B41/50 ,  C23C18/14 ,  C01B33/00 ,  C04B35/52 ,  C04B35/58

    CPC分类号： C23C18/14 ,  C03C17/22 ,  C03C17/225 ,  C04B41/5066 ,  C03C2217/281 ,  C03C2217/282 ,  C03C2218/153 ,  C03C2218/32

    摘要： A process for the selective conversion of a polymer coating to a ceramic material is disclosed. This process initially involves the provision of a polymer film which has been generated by R. F. plasma vapor phase polymerization of a monomer comprising an inorganic (i.e. silicon) or an organometallic constituent on a receptive substrate. The polymer is thereafter selectively exposed to a coherent or focused energy source (i.e. CO.sub.2 laser) at the appropriate wavelength and power output to effect in situ conversion of a polymer film to a ceramic deposit which is substantially devoid of carbonaceous impurities. This process is also unique for its ability to provide a ceramic deposit that is firmly adherent on a variety of receptive substrates. The degree of adherence is far superior to ceramic coatings derived by chemical vapor deposition (CVD) techniques. The process lends itself to the formation of ceramic patterns which have application in the microelectronics industry.

    摘要翻译： 公开了一种将聚合物涂层选择性转化为陶瓷材料的方法。 该方法最初涉及提供聚合物膜，其通过R.F.等离子体气相聚合产生聚合物膜，该聚合物膜包含无机（即硅）或有机金属成分的单体在接受性底物上。 此后，聚合物以适当的波长和功率输出选择性地暴露于相干或聚焦的能源（即CO 2激光），以使聚合物膜原位转化成基本上不含碳质杂质的陶瓷沉积物。 该工艺也是独特的，因为其提供牢固粘附在各种接受性基材上的陶瓷沉积物的能力。 粘附度远远优于通过化学气相沉积（CVD）技术得到的陶瓷涂层。 该方法适用于微电子工业中应用的陶瓷图案的形成。