Electronic interconnects and methods of making same
    62.
    发明授权
    Electronic interconnects and methods of making same 有权
    电子互连及其制作方法

    公开(公告)号:US07517785B2

    公开(公告)日:2009-04-14

    申请号:US11255489

    申请日:2005-10-21

    IPC分类号: H01L21/44

    摘要: A method for making an interconnect is provided. The method includes depositing a conductive layer on a substrate, depositing a protective layer on the conductive layer, patterning the protective layer to form openings to the conductive layer, depositing contact pads on the conductive layer through the openings in the protective layer, the contact pads comprising a conductive material, and patterning the conductive layer and the protective layer to form electrical traces on the substrate.

    摘要翻译: 提供一种互连方法。 该方法包括在衬底上沉积导电层,在导电层上沉积保护层,图案化保护层以形成到导电层的开口;通过保护层中的开口在导电层上沉积接触焊盘,接触垫 包括导电材料,以及图案化导电层和保护层以在基底上形成电迹线。

    Process for fabricating a tool used in electrochemical machining
    66.
    发明授权
    Process for fabricating a tool used in electrochemical machining 失效
    制造电化学加工用工具的工艺

    公开(公告)号:US06303193B1

    公开(公告)日:2001-10-16

    申请号:US09187664

    申请日:1998-11-05

    IPC分类号: B05D300

    摘要: A process for producing a pattern in the surface coating of an electrode used in an electrochemical machining process comprises the steps of providing a cylinder having a body composed of an electrically conductive material and a surface coating of an electrically insulating material and exposing the surface coating of the cylinder to a source of light in accordance with the pattern. Locators(s) may optionally be formed on the surface of the cylinder to assist in positioning the electrode in a predrilled hole.

    摘要翻译: 用于在电化学加工工艺中使用的用于电极的表面涂层中形成图案的方法包括以下步骤:提供具有由导电材料构成的主体和电绝缘材料的表面涂层的圆柱体, 气缸根据图案的光源。 定位器可以可选地形成在圆柱体的表面上,以帮助将电极定位在预钻孔中。

    Scaled adaptive lithography
    67.
    发明授权
    Scaled adaptive lithography 失效
    缩放适应光刻

    公开(公告)号:US5844810A

    公开(公告)日:1998-12-01

    申请号:US453110

    申请日:1995-05-30

    摘要: An adaptive method of providing electrical interconnections for a plurality of feed-through lines each having a respective end extending to at least one substrate surface includes generating an artwork representation for the electrical interconnections using specified feed-through line end positions on the at least one substrate surface. The at least one substrate surface may include a surface of a stack of substrates with at least two substrates having feed-through line ends facing a common direction. Actual positions of the at least two of the feed-through line ends are determined, and a scale factor is estimated using the determined actual positions. Actual positions of others of the feed-through line ends are estimated using the scale factor, and the artwork representation is modified to properly include electrical interconnections to ones of the feed-through line ends which are not in their specified positions. The artwork representation can be converted into a turn point polygon (TPP) format for effective data handling and modification of the artwork representation, and the TPP format can then be can be converted to a rectangular representation. A laser can be controlled in accordance with the rectangular representation of the modified artwork.

    摘要翻译: 提供用于多个馈通线的电互连的自适应方法,每个馈通线具有延伸到至少一个衬底表面的相应端包括使用至少一个衬底上的指定的馈通线端位置来产生电互连的图形图示 表面。 所述至少一个衬底表面可以包括具有至少两个衬底的堆叠衬底的表面,所述至少两个衬底具有面向公共方向的穿通线端。 确定至少两个馈通线末端的实际位置,并且使用所确定的实际位置来估计比例因子。 使用比例因子估计馈通线末端的其他人的实际位置,并且修改图形表示以适当地包括与不在其指定位置的馈通线端部的电互连。 艺术品表示可以转换为转折点多边形(TPP)格式,用于有效的数据处理和修改艺术品表示,然后可以将TPP格式转换为矩形表示。 可以根据经修改的图案的矩形表示来控制激光。