公开(公告)号：US20110151279A1

公开(公告)日：2011-06-23

申请号：US12641251

申请日：2009-12-17

申请人： Donald G. Allen ,  Amanda Baer ,  Yingjian Chen ,  Andrew Chiu ,  Liubo Hong ,  Wen-Chien D. Hsiao ,  Edward H.P. Lee ,  Fenglin Liu ,  Aron Pentek ,  Katalin Pentek ,  Kyusik Shin ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

发明人： Donald G. Allen ,  Amanda Baer ,  Yingjian Chen ,  Andrew Chiu ,  Liubo Hong ,  Wen-Chien D. Hsiao ,  Edward H.P. Lee ,  Fenglin Liu ,  Aron Pentek ,  Katalin Pentek ,  Kyusik Shin ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

IPC分类号： G11B5/33

CPC分类号： G11B5/3163 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/314 ,  G11B5/3143 ,  G11B5/3146 ,  G11B5/315 ,  Y10T428/11 ,  Y10T428/1171

摘要： A magnetic write head having a tapered trailing edge and having a magnetic layer formed over a trailing edge of the write pole at a location recessed from the ABS, the magnetic layer being separated from the trailing edge of the write pole by a thin non-magnetic layer. The thin non-magnetic layer is preferably sufficiently thin that the magnetic layer can function as a portion of the write pole in a region removed from the ABS. A trailing magnetic shield is formed over the write pole and is separated from the write pole by a non-magnetic trailing gap layer. A non-magnetic spacer layer can be formed over the magnetic layer to provide additional separation between the magnetic layer and the trailing magnetic shield.

摘要翻译： 一种具有锥形后缘并具有磁性层的磁性写头，该磁性层形成在从ABS的凹陷处的写入极的后缘上，该磁性层通过薄的非磁性的方式与写入极的后缘分离 层。 薄的非磁性层优选地足够薄，使得磁性层可以在从ABS去除的区域中用作写入极的一部分。 尾磁屏蔽形成在写极上，并且通过非磁性拖尾间隙层与写极分离。 可以在磁性层之上形成非磁性间隔层，以在磁性层和尾部磁屏蔽之间提供额外的间隔。

公开(公告)号：US20110134569A1

公开(公告)日：2011-06-09

申请号：US12634533

申请日：2009-12-09

申请人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Sue S. Zhang ,  Yi Zheng

发明人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Sue S. Zhang ,  Yi Zheng

IPC分类号： G11B5/10

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/31

摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a plurality of tapered surfaces at or near and air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on one or more of the tapered surfaces of the magnetic pole at a distance from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.

摘要翻译： 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面（ABS）处或附近具有多个锥形表面，其中写入极的厚度在远离ABS的方向上增加。 可以在与ABS相距一定距离处的磁极的一个或多个锥形表面上形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

公开(公告)号：US20100155232A1

公开(公告)日：2010-06-24

申请号：US12343014

申请日：2008-12-23

申请人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： C23C14/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  H01F41/34

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic data recording, having a write pole with a tapered trailing edge for improved write field at small bit lengths. The trailing edge taper is formed by a deposition process that can be performed after the write pole flare point has already been formed, and especially after a wrap around shield side gap has been formed. This advantageously allows the distance between the write pole flare point and the trailing edge taper to be closely controlled.

摘要翻译： 一种用于制造用于垂直磁数据记录的磁写头的方法，具有带有锥形后缘的写极，以便以较小的位长改善写入场。 后缘锥形是通过可以在已经形成写入磁极扩张点之后进行的沉积工艺形成的，特别是在形成了围绕屏蔽侧间隙之后。 这有利地允许密切控制写磁极扩张点和后缘锥度之间的距离。

公开(公告)号：US07712206B2

公开(公告)日：2010-05-11

申请号：US11439297

申请日：2006-05-22

申请人： Ming Jiang ,  Aron Pentek ,  Yi Zheng

发明人： Ming Jiang ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  H01R31/00

CPC分类号： G11B5/3143 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49021 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield. After forming a magnetic write pole such as by masking and ion milling a magnetic write pole layer, a thin layer of alumina is deposited. This is followed by the deposition of a thin layer of Rh. Then, a thick layer of alumina is deposited, having a thickness that is preferably at least equal to the height of the write pole layer. A chemical mechanical polish is then performed until a portion of the Rh layer over the top (trailing edge) of the write pole is exposed. A material removal process such as ion milling is then performed to remove the exposed Rh layer exposing the thin alumina layer there beneath. Since the Rh trailing gap layer is electrically conductive it can also serve as a seed layer for electroplating the magnetic trailing shield.

摘要翻译： 一种用于构造用于垂直磁记录的磁写头的方法，该写头具有带后挡板的写极。 在通过掩蔽和离子铣削磁性写入磁极层形成磁性写入磁极之后，沉积薄层的氧化铝。 随后沉积一层薄薄​​的Rh。 然后，沉积厚的氧化铝层，其厚度优选至少等于写入极层的高度。 然后执行化学机械抛光，直到暴露在写柱的顶部（后缘）上的Rh层的一部分。 然后进行诸如离子研磨的材料去除工艺以除去暴露在其下面的薄氧化铝层的暴露的Rh层。 由于Rh拖尾间隙层是导电的，所以它也可以用作用于电镀磁性后屏蔽的种子层。

公开(公告)号：US20090152234A1

公开(公告)日：2009-06-18

申请号：US11956277

申请日：2007-12-13

申请人： Hung-Chin Guthrie ,  Ming Jiang ,  Edward Hin Pong Lee ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Hung-Chin Guthrie ,  Ming Jiang ,  Edward Hin Pong Lee ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315

摘要： A method for manufacturing a magnetic write head having a write pole with a flared step feature that defines a secondary flare point. The method involves depositing a magnetic write pole material on a substrate and then depositing a magnetic material over the write pole material followed by a non-magnetic material. A first mask is formed having a front edge to define the location of the secondary flare point, and one or more material removal processes are used to remove portions of the magnetic layer and non-magnetic layer that are not protected by this first mask. The first mask is replaced by a second mask that is configured to define a write pole, and an ion milling is performed to define the write pole. Shadowing from the magnetic layer and non-magnetic layer form a flared secondary flare point.

摘要翻译： 一种用于制造具有定义二次闪光点的具有扩口步骤特征的写极的磁写头的方法。 该方法包括将磁性写入极材料沉积在衬底上，然后将磁性材料沉积在写入极材料上，随后是非磁性材料。 形成第一掩模，其具有前边缘以限定次级火炬点的位置，并且使用一个或多个材料去除过程来去除未被该第一掩模保护的磁性层和非磁性层的部分。 第一个掩模由配置为定义写入极的第二个掩模代替，并且执行离子铣削来定义写入极点。 从磁性层和非磁性层的阴影形成扩张的次级耀斑点。

公开(公告)号：US20090139080A1

公开(公告)日：2009-06-04

申请号：US12343713

申请日：2008-12-24

申请人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49032 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head that avoids the challenges associated with the formation of fence structures during write pole definition. A magnetic write pole material is deposited. A mask structure is deposited over the magnetic write pole material. The mask structure includes a first hard mask, a marker layer, a physically robust, inorganic RIEable image transfer layer, a second hard mask structure over the image transfer layer and a photoresist layer over the second hard mask. A reactive ion etching process can be used to transfer the image of the photoresist mask and second hard mask layer onto the image transfer layer. An ion milling is performed to define the write pole. A layer of non-magnetic material such as alumina is deposited. An ion milling is performed until the marker layer has been reached, and another reactive ion etching is performed to remove the remaining hard mask.

摘要翻译： 一种用于制造写磁头的磁头的方法，其避免了写磁极定义期间与栅栏结构的形成有关的挑战。 沉积磁性写入极材料。 掩模结构沉积在磁性写入极材料上。 掩模结构包括第一硬掩模，标记层，物理上坚固的无机RIEable图像转印层，图像转印层上方的第二硬掩模结构和在第二硬掩模上的光致抗蚀剂层。 可以使用反应离子蚀刻工艺将光致抗蚀剂掩模和第二硬掩模层的图像转印到图像转印层上。 执行离子铣削以限定写入极。 沉积一层非磁性材料如氧化铝。 进行离子研磨直到达到标记层，并执行另一反应离子蚀刻以除去剩余的硬掩模。

公开(公告)号：US20050193550A1

公开(公告)日：2005-09-08

申请号：US10792330

申请日：2004-03-02

申请人： Hung-Chin Guthrie ,  Ming Jiang ,  Jerry Lo ,  Aron Pentek ,  Yi Zheng

发明人： Hung-Chin Guthrie ,  Ming Jiang ,  Jerry Lo ,  Aron Pentek ,  Yi Zheng

IPC分类号： B24B1/00 ,  C09K3/14 ,  H01L21/00

CPC分类号： B24B1/00 ,  G11B5/00 ,  G11B5/3116 ,  G11B5/3163 ,  H01L21/00 ,  Y10T29/49032 ,  Y10T29/49044 ,  Y10T29/49048

摘要： A method for forming a high aspect ratio magnetic structure in a magnetic write head using a combination of chemical mechanical polishing and reactive ion etching.

摘要翻译： 使用化学机械抛光和反应离子蚀刻的组合在磁写头中形成高纵横比磁结构的方法。

公开(公告)号：US20090152235A1

公开(公告)日：2009-06-18

申请号：US11956292

申请日：2007-12-13

申请人： Wen-Chien David Hsiao ,  Hieu Lam ,  Vladimir Nikitin ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Hieu Lam ,  Vladimir Nikitin ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3166 ,  G11B5/3169

摘要： A method for manufacturing a magnetic write head having a stepped trailing shield. The stepped trailing shield is formed by forming a non-magnetic bump over a write pole prior to electroplating a wrap-around magnetic shield. The method allows the location of the front edge of the bump relative to the back edge of the wrap-around shield to be monitored by measuring the electrical resistance of an electrical lapping guide formed concurrently with these features. This concurrent formation of a lapping guide can be used to define the relative location of other features as well, such as the location of a back edge of a wrap-around shield relative to a flare point of a write pole.

摘要翻译： 一种用于制造具有阶梯式后挡板的磁写头的方法。 在电镀环绕磁屏蔽之前，通过在写入极上形成非磁性凸块来形成阶梯式后屏蔽。 该方法允许通过测量与这些特征同时形成的电研磨引导件的电阻来监测凸块的前边缘相对于环绕护罩的后边缘的位置。 研磨引导件的这种同时形成也可以用于限定其它特征的相对位置，例如环绕屏蔽件的后边缘相对于写入极点的扩张点的位置。

公开(公告)号：US08003304B2

公开(公告)日：2011-08-23

申请号：US12023892

申请日：2008-01-31

申请人： Vladimir Nikitin ,  Yi Zheng

发明人： Vladimir Nikitin ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/3166 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3169 ,  Y10T29/49036 ,  Y10T29/49037 ,  Y10T29/49046

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method provides for accurate definition of a device feature such as a write pole flare point. A functional lapping guide is formed to determine when a lapping operation should be terminated to define an air bearing surface of a slider. In order to provide accurate compensation for manufacturing variations in the functional lapping guide, a dummy lapping guide is provided. An amount of variation of a front edge of the dummy lapping guide, which is defined by the same process step as a writer pole flare point, can be calculated by measuring the width (stripe height) of the dummy lapping guide based on its electrical resistance. Since the back edges of the dummy lapping guide and functional lapping guide are defined by the same manufacturing steps, the back edge of the functional lapping guide can then be determined, and used for accurately control of the writer flare point through their correlation established from the dummy lapping guide.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法提供了诸如写极点闪光点的设备特征的精确定义。 形成功能研磨引导件以确定何时应当终止研磨操作以限定滑块的空气轴承表面。 为了对功能研磨导轨的制造变化提供准确的补偿，提供了一个虚拟研磨导轨。 可以通过测量基于其电阻的虚拟研磨导轨的宽度（条带高度）来计算由研磨引导件的相同工艺步骤限定的假研磨引导件的前边缘的变化量， 。 由于仿真研磨引导件和功能性研磨引导件的后边缘由相同的制造步骤限定，因此可以确定功能研磨导向件的后边缘，并且用于通过其从 虚拟研磨指南。

公开(公告)号：US20090197208A1

公开(公告)日：2009-08-06

申请号：US12023892

申请日：2008-01-31

申请人： Vladimir Nikitin ,  Yi Zheng

发明人： Vladimir Nikitin ,  Yi Zheng

IPC分类号： B44C1/22 ,  G03F7/00

CPC分类号： G11B5/3166 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3169 ,  Y10T29/49036 ,  Y10T29/49037 ,  Y10T29/49046

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method provides for accurate definition of a device feature such as a write pole flare point. A functional lapping guide is formed to determine when a lapping operation should be terminated to define an air bearing surface of a slider. In order to provide accurate compensation for manufacturing variations in the functional lapping guide, a dummy lapping guide is provided. An amount of variation of a front edge of the dummy lapping guide, which is defined by the same process step as a writer pole flare point, can be calculated by measuring the width (stripe height) of the dummy lapping guide based on its electrical resistance. Since the back edges of the dummy lapping guide and functional lapping guide are defined by the same manufacturing steps, the back edge of the functional lapping guide can then be determined, and used for accurately control of the writer flare point through their correlation established from the dummy lapping guide.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法提供了诸如写极点闪光点的设备特征的精确定义。 形成功能研磨引导件以确定何时应当终止研磨操作以限定滑块的空气轴承表面。 为了对功能研磨导轨的制造变化提供准确的补偿，提供了一个虚拟研磨导轨。 可以通过测量基于其电阻的虚拟研磨导轨的宽度（条带高度）来计算由研磨引导件的相同工艺步骤限定的假研磨引导件的前边缘的变化量， 。 由于仿真研磨引导件和功能性研磨引导件的后边缘由相同的制造步骤限定，因此可以确定功能研磨导向件的后边缘，并且用于通过其从 虚拟研磨指南。