Corrosion-resistant member for semiconductor manufacturing apparatus and method for manufacturing the same
    61.
    发明授权
    Corrosion-resistant member for semiconductor manufacturing apparatus and method for manufacturing the same 有权
    用于半导体制造装置的耐腐蚀构件及其制造方法

    公开(公告)号:US08685313B2

    公开(公告)日:2014-04-01

    申请号:US13624119

    申请日:2012-09-21

    Abstract: A mixed powder was prepared by weighing Yb2O3 and SrCO3 in such a way that the molar ratio became 1:1. The resulting mixed powder was subjected to uniaxial pressure forming, so as to produce a disc-shaped compact. The compact was heat-treated in an air atmosphere, so that a complex oxide was synthesized. The resulting complex oxide was pulverized. After the pulverization, a slurry was taken out and was dried in a nitrogen gas stream, so as to produce a synthesized powder material. The resulting synthesized powder material was subjected to uniaxial pressure forming, so as to produce a disc-shaped compact. The resulting compact was fired by a hot-press method, so as to obtain a corrosion-resistant member for semiconductor manufacturing apparatus. The resulting corrosion-resistant member was made from a SrYb2O4.

    Abstract translation: 通过称量Yb2O3和SrCO3以使摩尔比为1:1的方式制备混合粉末。 将所得混合粉末进行单轴压力成形,以生成圆盘状压块。 在空气气氛中对压块进行热处理,合成复合氧化物。 将所得复合氧化物粉碎。 粉碎后,取出浆液,并在氮气流中干燥,得到合成粉末材料。 将所得合成的粉末材料进行单轴压力成形,以制造圆盘状压块。 通过热压法烧成所得的压坯,得到半导体制造装置的耐腐蚀构件。 得到的耐腐蚀构件由SrYb2O4制成。

    Semiconductor light emitting apparatus and light source apparatus using the same
    62.
    发明授权
    Semiconductor light emitting apparatus and light source apparatus using the same 有权
    半导体发光装置及使用其的光源装置

    公开(公告)号:US08684562B2

    公开(公告)日:2014-04-01

    申请号:US13894114

    申请日:2013-05-14

    Abstract: A semiconductor light emitting apparatus includes a solid-state light emitting device and a wavelength converter that converts primary light emitted by the solid-state light emitting device into secondary light at a loner-wavelength. The wavelength converter is an inorganic compact that includes a transparent wavelength conversion layer containing phosphor having a garnet crystal structure. The phosphor contains a constituent element group composed of at least one element selected from the group consisting of Mg, Ca, Sr, Ba, Y, La, Gd, Tb, and Lu. Part of the constituent element group is substituted by Ce3+ and the amount of Ce3+ is 1 atomic % less of the entire constituent element group. As a result, a high-power and highly reliable semiconductor light emitting apparatus suitable as a point light source is provided. In addition, such a semiconductor light emitting apparatus is manufactured through a simple application of traditionally used practical technicians.

    Abstract translation: 一种半导体发光装置,其包括将固体发光元件发射的一次光转换为二次光的固态发光元件和波长转换器。 波长转换器是包含含有具有石榴石晶体结构的荧光体的透明波长转换层的无机压块。 荧光体含有由选自Mg,Ca,Sr,Ba,Y,La,Gd,Tb和Lu中的至少一种元素组成的构成元素基团。 构成元素组的一部分被Ce 3+代替,Ce 3+的量相对于整个构成元素组为1原子%以下。 结果,提供了适合作为点光源的高功率和高度可靠的半导体发光装置。 此外,这种半导体发光装置通过传统使用的实际技术人员的简单应用来制造。

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