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    Oxime ester photoiniators having a combined structure
    61.
    发明申请
    Oxime ester photoiniators having a combined structure 有权
    具有组合结构的肟酯光合剂

    公开(公告)号：US20040170924A1

    公开(公告)日：2004-09-02

    申请号：US10480146

    申请日：2003-12-08

    发明人： Kazuhiko Kunimoto ,  Junichi Tanabe ,  Hisatoshi Kura ,  Hidetaka Oka ,  Masaki Ohwa

    IPC分类号： G03F007/031

    CPC分类号： C08F2/50 ,  B33Y70/00 ,  C07C251/66 ,  G03F7/031

    摘要： Compounds of the formulae I, II and III 1 wherein R1 is for example hydrogen, C3-C8cycloalkyl, C1-C12alkyl, phenyl unsubstituted or substituted; R2 and R2null for example are hydrogen, C1-C20alkyl, C3-C8cycloalkyl or phenyl, unsubstituted or substituted, or are 2 Ar1 is for example phenyl, optionally substituted by e.g. 3 Ar2 is for example phenylene, optionally substituted e.g. by null(CO)R7, (D), (E) or (F); Ar3 is for example phenyl; M1, M2 and M3 are, for example, C1-C20alkylene; M4 is for example direct bond, nullOnull, nullSnull, nullYnull(C1-C10alkylene)-Ynullnull, optionally substituted; Y and Ynull are for example a direct bond or nullOnull; R7 is for example hydrogen, C1-C20alkyl or phenyl, optionally substituted; R8, R9, R8null and R9null are for example hydrogen or C1-C12alkyl, exhibit an unexpectedly good performance in photopolymerization reactions.

    摘要翻译： 式I，II和III的化合物，其中R 1为例如氢，C 3 -C 8环烷基，C 1 -C 12烷基，未取代或取代的苯基; R 2和R 2'例如是氢，C 1 -C 20烷基，C 3 -C 8环烷基或未取代或取代的苯基，或者Ar 1是例如苯基， Ar 2是例如亚苯基，任选被取代的例如亚苯基。 （CO）R7，（D），（E）或（F）; Ar 3例如是苯基; M1，M2和M3是例如C1-C20亚烷基; M4例如直接键合，-O - ， - S - ， - Y-（C 1 -C 10亚烷基）-Y'-，任选取代; Y和Y'例如是直接键或-O-键; R 7是例如氢，任选被取代的C 1 -C 20烷基或苯基; R8，R9，R8'和R9'是例如氢或C1-C12烷基，在光聚合反应中表现出出乎意料的良好性能。

    Organic anti-reflective polymer and method for manufacturing thereof
    62.
    发明授权
    Organic anti-reflective polymer and method for manufacturing thereof 有权
    有机抗反射聚合物及其制造方法

    公开(公告)号：US06538090B2

    公开(公告)日：2003-03-25

    申请号：US10095417

    申请日：2002-03-11

    申请人： Min-Ho Jung ,  Sung-Eun Hong ,  Ki-Ho Baik

    发明人： Min-Ho Jung ,  Sung-Eun Hong ,  Ki-Ho Baik

    IPC分类号： C08F22012

    CPC分类号： C08F220/34 ,  C07C251/66 ,  C08F2220/281 ,  C08F2220/325 ,  C08F220/14

    摘要： Polymers are disclosed having the following formula 1 or 2: Polymers of the present invention can be used as an ARC material useful for submicrolithography processes using 248 nm KrF, 193 nm ArF and 157 nm F2 lasers. The polymers contain a chromophore substituent that exhibits sufficient absorbance at the wavelengths useful for the submicrolithography process. The ARC prevents back reflection of light from lower layers and the alteration of the CD by diffracted and reflected light from the lower layers. The ARC also eliminates standing waves and reflective notching due to the optical properties of lower layers on the wafer and to changes in the thickness of the photosensitive film applied thereon, thereby resulting in the stable formation of ultrafine patterns suitable for 64M, 256M, 1 G, 4 G and 16 G DRAMs and a great improvement in the production yield.

    摘要翻译： 公开了具有下式1或2的聚合物：本发明的聚合物可以用作ARC光学材料，用于使用248nm KrF，193nm ArF和157nm F2激光的亚微光刻工艺。 聚合物含有在用于亚微光刻工艺的波长处表现出足够吸光度的发色团取代基。 ARC防止来自下层的光的背反射和来自下层的衍射和反射光的CD的改变。 由于晶片上的较低层的光学性质和施加在其上的感光膜的厚度的变化，ARC还消除了驻波和反射凹陷，从而导致适合于64M，256M，1G ，4G和16G DRAM，并且生产产量大大提高。

    Methods and compositions for controlling biofouling using oxime esters
    64.
    发明授权
    Methods and compositions for controlling biofouling using oxime esters 失效
    用肟酯控制生物结垢的方法和组合物

    公开(公告)号：US5817696A

    公开(公告)日：1998-10-06

    申请号：US536319

    申请日：1995-09-29

    申请人： Mark L. Zollinger ,  Stephen D. Bryant

    发明人： Mark L. Zollinger ,  Stephen D. Bryant

    IPC分类号： C02F1/00 ,  A01N37/16 ,  C02F1/50 ,  C07C251/66 ,  A01N33/24 ,  A01N37/00

    CPC分类号： C07C251/66 ,  A01N37/16 ,  C02F1/50

    摘要： The present invention relates to a method to inhibit bacteria from adhering to a submergible surface. The method contacts the submergible surface with an effective amount of at least one oxime ester to inhibit bacterial adhesion to the submergible surface. The present invention also relates to a method for controlling biofouling of an aqueous system. This method adds an effective amount of at least one oxime ester to inhibit bacteria from adhering to a submerged surface within the aqueous system.. This method effectively controls biofouling without substantially killing the bacteria. The oxime ester used in the method of the invention has the following formula: ##STR1## The present invention also relates to compositions containing oxime esters and useable in the above methods. The compositions comprise at least one oxime ester in an amount effective to inhibit bacteria from adhering to submergible or submerged surfaces.

    摘要翻译： 本发明涉及一种抑制细菌粘附在潜水表面上的方法。 该方法用有效量的至少一种肟酯接触该潜水表面以抑制细菌粘附到潜水表面。 本发明还涉及一种用于控制水系统的生物污垢的方法。 该方法添加有效量的至少一种肟酯以抑制细菌粘附到水系统内的浸没表面。该方法有效地控制生物污损而基本上不杀死细菌。 本发明方法中使用的肟酯具有下式：本发明还涉及含有肟酯的组合物，可用于上述方法。 组合物包含至少一种肟酯，其量可有效地抑制细菌粘附到潜水或浸没的表面。