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    Methods and chemistry for providing initial conformal electrochemical deposition of copper in sub-micron features
    74.
    发明申请
    Methods and chemistry for providing initial conformal electrochemical deposition of copper in sub-micron features 审中-公开
    在亚微米特征中提供铜的初始保形电化学沉积的方法和化学

    公开(公告)号：US20050109627A1

    公开(公告)日：2005-05-26

    申请号：US10962236

    申请日：2004-10-08

    申请人： Zhi-Wen Sun ,  Hooman Hafezi ,  Chunman Yu ,  Aron Rosenfeld ,  Michael Yang

    发明人： Zhi-Wen Sun ,  Hooman Hafezi ,  Chunman Yu ,  Aron Rosenfeld ,  Michael Yang

    IPC分类号： C25D3/38 ,  C25D5/02 ,  C25D5/10 ,  C25D7/12 ,  H01L21/288 ,  H01L21/768

    CPC分类号： H01L21/76843 ,  C25D3/38 ,  C25D5/10 ,  C25D7/123 ,  H01L21/2885 ,  H01L21/76868 ,  H01L21/76873 ,  H01L2221/1089

    摘要： A method for electrolytically repairing a copper seed layer. The method includes positioning the seed layer in fluid communication with a low conductivity seed layer repair solution, wherein the low conductivity seed layer repair solution includes a copper concentration of less than about 20 g/l, a pH of less than about 4, a chlorine ion concentration of between about 20 ppm and about 100 ppm, and an additive organic surfactant configured to suppress a copper deposition rate in the concentration range of 200 ppm to 2000 ppm. The method further includes applying a seed layer repair bias configured to generate a current density of less than about 5 mA/cm2 across the seed layer and cleaning the repaired seed layer in pure water containing less than 1 ppm chloride ions.

    摘要翻译： 一种用于电解修复铜籽晶层的方法。 该方法包括将种子层定位成与低电导种子层修复溶液流体连通，其中低电导种子层修复溶液包括小于约20g / l的铜浓度，小于约4的pH，氯 约20ppm至约100ppm的离子浓度，以及配置为在200ppm至2000ppm的浓度范围内抑制铜沉积速率的添加剂有机表面活性剂。 该方法还包括施加晶种层修复偏压，其被配置成跨越种子层产生小于约5mA / cm 2的电流密度，并且在含有小于1ppm的纯水中清洁修复的种子层 氯离子。

    Multiple precursor cyclical depositon system
    76.
    发明申请
    Multiple precursor cyclical depositon system 失效
    多个前体循环保存系统

    公开(公告)号：US20050008779A1

    公开(公告)日：2005-01-13

    申请号：US10913888

    申请日：2004-08-06

    申请人： Michael Yang ,  Hyungsuk Yoon ,  Hui Zhang ,  Hongbin Fang ,  Ming Xi

    发明人： Michael Yang ,  Hyungsuk Yoon ,  Hui Zhang ,  Hongbin Fang ,  Ming Xi

    IPC分类号： C23C16/44 ,  C23C16/455 ,  C23C16/00

    CPC分类号： C23C16/45544 ,  C23C16/45531 ,  C23C16/45561

    摘要： Embodiments of the present invention relate to an apparatus and method of cyclical deposition utilizing three or more precursors in which delivery of at least two of the precursors to a substrate structure at least partially overlap. One embodiment of depositing a ternary material layer over a substrate structure comprises providing at least one cycle of gases to deposit a ternary material layer. One cycle comprises introducing a pulse of a first precursor, introducing a pulse of a second precursor, and introducing a pulse of a third precursor in which the pulse of the second precursor and the pulse of the third precursor at least partially overlap. In one aspect, the ternary material layer includes, but is not limited to, tungsten boron silicon (WBxSiy), titanium silicon nitride (TiSixNy), tantalum silicon nitride (TaSixNy), silicon oxynitride (SiOxNy), and hafnium silicon oxide (HfSixOy). In one aspect, the composition of the ternary material layer may be tuned by changing the flow ratio of the second precursor to the third precursor between cycles.

    摘要翻译： 本发明的实施方案涉及利用三种或更多种前体的循环沉积的装置和方法，其中至少两种前体至少部分重叠的衬底结构。 在衬底结构上沉积三元材料层的一个实施例包括提供至少一个循环的气体以沉积三元材料层。 一个周期包括引入第一前体的脉冲，引入第二前体的脉冲，以及引入第三前体的脉冲，其中第二前体的脉冲和第三前体的脉冲至少部分重叠。 在一个方面，三元材料层包括但不限于钨硼硅（WBxSiy），氮化硅钛（TiSixNy），氮化钽（TaSixNy），氧氮化硅（SiOxNy）和氧化铪铪（HfSixOy） 。 在一个方面，三元材料层的组成可以通过在循环之间改变第二前体与第三前体的流动比来调节。

    Method of manufacturing optical fiber ribbons
    78.
    发明授权
    Method of manufacturing optical fiber ribbons 失效
    制造光纤带的方法

    公开(公告)号：US06454894B1

    公开(公告)日：2002-09-24

    申请号：US09116338

    申请日：1998-07-16

    申请人： Michael Yang ,  Patrick Bourghelle

    发明人： Michael Yang ,  Patrick Bourghelle

    IPC分类号： G02B604

    CPC分类号： G02B6/448

    摘要： A method of manufacturing optical ribbons, wherein the optical fibers are paid out by an optical fiber pay-out unit, and grouped together in a nozzle where they are coated in a coating material which is caused to set in order to form an optical fiber ribbon. A plurality of groups of optical fibers are formed in parallel in as many nozzles as possible, and the groups of optical fibers, which are coated in a coating material, are caused to set simultaneously using a single setting means for setting the coating material, in order to form as many ribbons of optical fibers as possible, thereby enabling the manufacturing cost of a ribbon to be reduced.

    摘要翻译： 一种制造光学带的方法，其中光纤由光纤放出单元支付，并且分组在喷嘴中，在喷嘴中被涂覆在被涂覆的材料中，以便形成光纤带 。 在尽可能多的喷嘴中平行地形成多组光纤，并且使用涂覆材料涂覆的光纤组，使用用于设置涂层材料的单个设置装置同时设置， 以形成尽可能多的光纤带，从而能够降低带的制造成本。

    Method to produce an animal's voice to embellish a music and a device to practice this method
    79.
    发明授权
    Method to produce an animal's voice to embellish a music and a device to practice this method 失效
    产生动物声音的方法来修饰音乐和设备来练习这种方法

    公开(公告)号：US5060267A

    公开(公告)日：1991-10-22

    申请号：US409301

    申请日：1989-09-19

    申请人： Michael Yang

    发明人： Michael Yang

    IPC分类号： G10H1/26 ,  G10H7/02

    CPC分类号： G10H7/02 ,  G10H1/26 ,  G10H2250/341 ,  G10H2250/351

    摘要： A method and a device for producing an imitative animal's voice to embellish a music. The animals voice is analyzed and approximated into a waveform represented exclusively by HIGH/LOW, and the time data X of each group of consecutive intervals of the same state are stored in a first ROM. The data X are stored in the consecutive addresses of a first read only memory ROM. When the ROM receives a pulse from a first address counter, the datum X stored in the mth address of the ROM will be sent to a first divider means if the address count of the first address counter is m. To further melodize the imitative animal's voice, the clocks from a first clock generator are compressed or expanded. The data Y, Z of the notes of the desired melody are stored in the consecutive addresses of a second ROM to respectively control the average (or apparent) pitch of the produced imitative voice and the duration of the voice at a given pitch. The device to melodize the imitative voice further comprises a second clock generator, of which the period t.sub.u " is equal to the length of the shortest note of the melody.

    摘要翻译： 一种用于产生模仿动物声音以润饰音乐的方法和装置。 对动物声音进行分析并近似为由HIGH / LOW专门表示的波形，并且将相同状态的每组连续间隔的时间数据X存储在第一ROM中。 数据X存储在第一只读存储器ROM的连续地址中。 当ROM从第一地址计数器接收到脉冲时，如果第一地址计数器的地址计数是m，则存储在ROM的第m个地址中的数据X将被发送到第一除法器装置。 为了进一步调整模仿动物的声音，来自第一个时钟发生器的时钟被压缩或扩展。 期望旋律的音符的数据Y，Z存储在第二ROM的连续地址中，以分别控制所产生的模仿声音的平均（或明显）音调和给定音调的语音持续时间。 用于调制模仿声音的装置进一步包括第二时钟发生器，其中周期tu“等于旋律的最短音符的长度。