DEVICE HAVING CONTACT PAD WITH A CONDUCTIVE LAYER AND A CONDUCTIVE PASSIVATION LAYER
    71.
    发明申请
    DEVICE HAVING CONTACT PAD WITH A CONDUCTIVE LAYER AND A CONDUCTIVE PASSIVATION LAYER 审中-公开
    具有导电层和导电钝化层的接触垫的装置

    公开(公告)号:US20080142983A1

    公开(公告)日:2008-06-19

    申请号:US12036887

    申请日:2008-02-25

    Applicant: Tongbi Jiang Li Li

    Inventor: Tongbi Jiang Li Li

    Abstract: A method and apparatus is disclosed for sequential processing of integrated circuits, particularly for conductively passivating a contact pad with a material which resists formation of resistive oxides. In particular, a tank is divided into three compartments, each holding a different solution: a lower compartment and two upper compartments divided by a barrier, which extends across and partway down the tank. The solutions have different densities and therefore separate into different layers. In the illustrated embodiment, integrated circuits with patterned contact pads are passed through one of the upper compartments, in which oxide is removed from the contact pads. Continuing downward into the lower compartment and laterally beneath the barrier, a protective layer is selectively formed on the insulating layer surrounding the contact pads. As the integrated circuits are moved upwardly into the second upper compartment, a conducting monomer selectively forms on the contact pads prior to any exposure to air. The integrated circuits can then be transferred to an ozone chamber where polymerization results in a conductive passivation layer on the contact pad.

    Abstract translation: 公开了用于集成电路的顺序处理的方法和装置,特别是用抵抗形成电阻氧化物的材料导电地钝化接触焊盘。 特别地,罐被分成三个隔室,每个隔间都有一个不同的解决方案:一个下隔室和两个隔离隔间的隔离隔板,两个隔间延伸横跨槽和一半的槽。 溶液具有不同的密度,因此分离成不同的层。 在所示实施例中,具有图案化接触焊盘的集成电路通过上隔室之一,其中氧化物从接触焊盘移除。 继续向下进入下隔室并在屏障下方横向放置,在围绕接触垫的绝缘层上选择性地形成保护层。 当集成电路向上移动到第二上隔室中时,在任何暴露于空气之前,在接触焊盘上选择性地形成导电单体。 然后可以将集成电路转移到臭氧室,其中聚合导致接触焊盘上的导电钝化层。

    Semiconductor constructions
    78.
    发明授权
    Semiconductor constructions 有权
    半导体结构

    公开(公告)号:US07095095B2

    公开(公告)日:2006-08-22

    申请号:US10879372

    申请日:2004-06-28

    Abstract: The invention includes a semiconductor construction. The construction has a semiconductor material die with a front surface, a back surface in opposing relation to the front surface, and a thickness of less than 400 microns between the front and back surfaces. The construction also has circuitry associated with the die and over the front surface of the die, and a layer touching the back surface of the die. The layer can correspond to getter-inducing material and/or to a stress-inducing material. The layer can have a composition which includes silicon dioxide and/or silicon nitride. The composition can include one or more hydrogen isotopes, and the hydrogen isotopes can have a higher abundance of deuterium than the natural abundance of deuterium.

    Abstract translation: 本发明包括半导体结构。 该结构具有半导体材料模具,其具有前表面,与前表面相对的后表面,并且在前表面和后表面之间的厚度小于400微米。 该结构还具有与管芯相连的电路和管芯前表面上的电路,以及接触管芯背面的层。 该层可以对应于吸气剂诱导材料和/或对应力诱导材料。 该层可以具有包括二氧化硅和/或氮化硅的组成。 该组合物可以包括一种或多种氢同位素,氢同位素可以具有比氘天然丰度更高的氘丰度。

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