公开(公告)号：US06242737B1

公开(公告)日：2001-06-05

申请号：US09136730

申请日：1998-08-19

申请人： Hideaki Ohnishi ,  Yukihito Kondo ,  Kunio Takayanagi

发明人： Hideaki Ohnishi ,  Yukihito Kondo ,  Kunio Takayanagi

IPC分类号： G01N1312

CPC分类号： G01Q30/02 ,  H01J2237/204 ,  H01J2237/28 ,  Y10S977/852 ,  Y10S977/86 ,  Y10S977/864 ,  Y10S977/871

摘要： The present invention is to provide a microscopic system by which a simultaneous observation at an ultra high vacuum condition by an electron microscope and by a scanning probe microscope is possible in an ultra high vacuum electron microscope chamber 9 equipped with an observation stage 3, to which an ultra high vacuum chamber 1 for a scanning probe microscope equipping with a scanning probe microscope holder 2 in which scanning probe microscope is contained and a specimen treatment chamber 5 possessing a specimen holder 4 on which a specimen is held are connected. Said each chamber of microscopic system can be separately exhausted to the ultra high vacuum level and the specimen holder and the scanning probe microscope holder can voluntarily be fixed to said observation stage and be removed from said observation stage.

摘要翻译： 本发明提供一种微型系统，在具有观察台3的超高真空电子显微室9中，通过电子显微镜和扫描探针显微镜在超高真空条件下同时观察是可能的，其中 用于扫描探针显微镜的超高真空室1装备有其中包含扫描探针显微镜的扫描探针显微镜架2和具有其上保持有试样的试样保持器4的试样处理室5。 所述每个微观系统室可以分别耗尽到超高真空水平，并且样品架和扫描探针显微镜支架可以自愿地固定到所述观察台并从所述观察台移除。

公开(公告)号：US06173604B1

公开(公告)日：2001-01-16

申请号：US09158037

申请日：1998-09-22

申请人： Xiao-Dong Xiang ,  Chen Gao

发明人： Xiao-Dong Xiang ,  Chen Gao

IPC分类号： G01B734

CPC分类号： G01Q60/22 ,  Y10S977/86 ,  Y10S977/864 ,  Y10S977/865 ,  Y10S977/869

摘要： A novel scanning microscope is described that uses near-field evanescent electromagnetic waves to probe sample properties. The novel microscope is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The inventive scanning evanescent wave electromagnetic microscope (SEMM) can map dielectric constant, tangent loss, conductivity, complex electrical impedance, and other electrical parameters of materials. The quantitative map corresponds to the imaged detail. The novel microscope can be used to measure electrical properties of both dielectric and electrically conducting materials.

摘要翻译： 描述了一种新颖的扫描显微镜，其使用近场渐逝电磁波来探测样品特性。 该新型显微镜能够对样品的电性能进行高分辨率成像和定量测量。 本发明的扫描瞬逝波电磁显微镜（SEMM）可以绘制材料的介电常数，切线损耗，电导率，复电阻抗等电参数。 定量图对应于成像细节。 新型显微镜可用于测量电介质和导电材料的电学性能。

公开(公告)号：US5831153A

公开(公告)日：1998-11-03

申请号：US801049

申请日：1997-02-14

申请人： Gerd Karl Binnig ,  Walter Haeberle

发明人： Gerd Karl Binnig ,  Walter Haeberle

IPC分类号： G01B21/30 ,  G01B5/28 ,  G01N37/00 ,  G01Q30/14

CPC分类号： G01Q30/14 ,  B82Y35/00 ,  Y10S977/86 ,  Y10S977/873

摘要： An investigation and/or manipulation device for a sample which is located in a container fluid includes an investigation and/or manipulation tool which is mounted at a first of a cantilever and which during investigation and/or manipulation of the sample immerses into the container fluid. The opposite side of the cantilever is at least partly not immersed into the container fluid during investigation.

摘要翻译： 位于容器流体中的用于样品的调查和/或操纵装置包括调查和/或操作工具，其被安装在悬臂的第一个处，并且在样品的调查和/或操纵期间浸入容器流体 。 在调查期间，悬臂的相对侧至少部分地不浸入容器流体中。

公开(公告)号：US5808977A

公开(公告)日：1998-09-15

申请号：US708954

申请日：1996-09-06

申请人： Hajime Koyanagi ,  Sumio Hosaka ,  Ryo Imura

发明人： Hajime Koyanagi ,  Sumio Hosaka ,  Ryo Imura

IPC分类号： G01Q90/00 ,  G11B5/00 ,  G11B7/09 ,  G11B9/00 ,  G11B11/16 ,  G11B13/00 ,  G11B7/00

CPC分类号： G11B5/00 ,  G11B11/16 ,  G11B13/00 ,  G11B9/14 ,  G11B9/1454 ,  G11B9/1472 ,  B82Y10/00 ,  G11B7/0901 ,  Y10S977/732 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/86 ,  Y10S977/869 ,  Y10S977/873 ,  Y10S977/881

摘要： An object of the present invention is to provide a novel tracking method and device, suitable for use in a recording means applying the technology of a scanning probe microscope, for recording and/or reproducing high-density information of a size of several tens of nm or less at high speed and with high accuracy. The tracking method and device includes a recording medium having bumpy structures for tracking, which are formed on the surface thereof, a cantilever having a tip for writing in, reading out and erasing information, and means for detecting bending and torsion of the cantilever. Further, the tip and the recording medium are moved relative to each other in the direction in which a fixed end and a free end of the cantilever are coupled to each other, in a state in which the tip has been brought into proximity to or contact with the recording medium. In this state, the amount and direction of the torsion of the cantilever, or the amount of the bending thereof and the direction of the torsion thereof due to the bumpy structures are set as feedback signals so as to perform tracking.

摘要翻译： 本发明的目的是提供一种新颖的跟踪方法和装置，适用于应用扫描探针显微镜技术的记录装置，用于记录和/或再现几十nm大小的高密度信息 或更低，高精度。 跟踪方法和装置包括：具有用于跟踪的颠簸结构的记录介质，其形成在其表面上，具有用于写入，读出和擦除信息的尖端的悬臂以及用于检测悬臂的弯曲和扭转的装置。 此外，尖端和记录介质在尖端已经接近或接触的状态下沿着悬臂的固定端和自由端彼此联接的方向相对于彼此移动 与记录介质。 在这种状态下，悬臂的扭转量和方向，或其弯曲量以及由于颠簸结构引起的扭转方向被设定为反馈信号，以进行跟踪。

公开(公告)号：US5760300A

公开(公告)日：1998-06-02

申请号：US848662

申请日：1997-04-29

申请人： Hiroshi Kajimura

发明人： Hiroshi Kajimura

IPC分类号： G01B21/30 ,  G01B5/28 ,  G01N37/00 ,  G01Q30/08 ,  G01Q30/14 ,  G01Q30/20 ,  G01Q60/24 ,  G01Q60/32 ,  G01Q60/38 ,  G01Q80/00

CPC分类号： G01Q60/34 ,  B82Y35/00 ,  G01Q30/14 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/852 ,  Y10S977/86 ,  Y10S977/875

摘要： A probing apparatus having an elastic body supported by a support and provided with a probe at its free end. The elastic body is disposed in a solution in which a sample is held. The elastic body is forcibly oscillated at its natural frequency by a driving source. A displacement detecting device detects a variation in the oscillation state of the elastic body which takes place when the tip of the probe is placed in the vicinity of the surface of the sample. The detected output from the displacement detecting device is fed to a sample data monitor device to provide a topographic image thereon.

摘要翻译： 探测装置具有由支撑体支撑并在其自由端设置有探针的弹性体。 弹性体设置在保持样品的溶液中。 弹性体通过驱动源以其固有频率强制振荡。 位移检测装置检测当探针的末端放置在样品表面附近时发生的弹性体的振动状态的变化。 来自位移检测装置的检测到的输出被馈送到样本数据监视器装置以在其上提供地形图像。

公开(公告)号：US5751683A

公开(公告)日：1998-05-12

申请号：US506516

申请日：1995-07-24

申请人： Victor B. Kley

发明人： Victor B. Kley

IPC分类号： G01B7/31 ,  G01Q30/00 ,  G01Q60/10 ,  G01Q60/18 ,  G01Q60/58 ,  G01Q70/00 ,  G03F1/84 ,  G03F7/20 ,  G11B5/00 ,  G11B5/23 ,  G11B5/31 ,  G11B7/00 ,  G11B9/00 ,  G11B11/12 ,  G11B11/16 ,  H02N1/00

CPC分类号： G03F1/84 ,  B82Y10/00 ,  G01B7/31 ,  G03F7/70375 ,  G03F7/70483 ,  G11B11/007 ,  G11B11/05 ,  G11B9/14 ,  G11B9/1409 ,  G11B9/1418 ,  G11B9/1427 ,  G11B9/1436 ,  G11B9/1445 ,  G11B9/1454 ,  G11B9/149 ,  H02N1/006 ,  B82Y20/00 ,  G01Q80/00 ,  G11B11/12 ,  G11B11/16 ,  G11B2005/0002 ,  G11B2005/0021 ,  G11B5/232 ,  G11B5/3116 ,  G11B9/06 ,  G11B9/08 ,  Y10S977/851 ,  Y10S977/86 ,  Y10S977/875 ,  Y10S977/877

摘要： A data storage system that includes a positioning system for positioning the write/read mechanism and the storage medium of the data storage device with respect to each other in first and second predefined directions. The positioning system comprises a positioning apparatus comprising microfabricated first and second positioning assemblies. The positioning system further comprises a controller to position a positionable support structure of the first positioning assembly in a first predefined direction within a range of positioning that is larger than the range of movement of a moveable support structure of the first positioning assembly by controlling (A) a stationary support structure clamp in clamping and unclamping the positionable structure to and from the support structure, (B) a moveable structure clamp in clamping and unclamping the positionable support structure to and from the moveable support structure, and (C) the movement of the moveable support structure. In one embodiment, one of the write/read mechanism and the storage medium is carried by the positionable support structure so that it is positioned with the first positioning assembly. The other one of the write/read mechanism and the storage medium is positioned with the second positioning assembly. In another embodiment, the positionable support structure carries the second positioning assembly and one of the write/read mechanism and the storage medium is positioned with the second positioning assembly while the other is held stationary. In several embodiments, the read/write mechanism is used to mechanically write data to and electrically read data from the storage medium. In still another embodiment, the read/write mechanism is used to optically write data to and electrically read data from the storage medium. In yet another embodiment, the read/write mechanism is acoustically aided in electrically writing data to and reading data from the storage medium.

公开(公告)号：US5621211A

公开(公告)日：1997-04-15

申请号：US578376

申请日：1995-12-26

申请人： John C. H. Spence

发明人： John C. H. Spence

IPC分类号： G01Q30/02 ,  G01Q60/10 ,  G01Q60/16 ,  H01J37/30 ,  H01J49/00 ,  B01D59/44

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q30/02 ,  Y10S977/852 ,  Y10S977/86 ,  Y10S977/861 ,  Y10S977/881

摘要： A scanning tunneling atom-probe microscope and method for identifying atoms at an identified site on a sample surface involves first identifying the atoms of interest on the sample surface in images formed by a conventional scanning tunneling microscope. These atoms are then transferred to the tip of the scanning tunneling microscope. The sample is then removed, and the atoms ejected from the tip into a conventional time-of-flight spectrometer. By measuring the time of flight of the atoms from the tip to a channel-plate ion detector, the atomic number of the atoms may be determined.

摘要翻译： 扫描隧道原子探针显微镜和用于识别样品表面上的鉴定位点处的原子的方法包括首先在常规扫描隧道显微镜形成的图像中识别样品表面上的感兴趣原子。 然后将这些原子转移到扫描隧道显微镜的尖端。 然后取出样品，将原子从尖端喷射到常规飞行时间谱仪中。 通过测量原子从尖端到通道板离子检测器的飞行时间，可以确定原子的原子数。

公开(公告)号：US5619035A

公开(公告)日：1997-04-08

申请号：US577199

申请日：1995-12-22

申请人： Paul S. Weiss ,  Stephan J. Stranick

发明人： Paul S. Weiss ,  Stephan J. Stranick

IPC分类号： G01Q30/02 ,  G01Q30/10 ,  G01Q30/14 ,  G01Q30/16 ,  G01Q60/12 ,  G01Q60/16 ,  G01Q60/18 ,  G01Q60/60 ,  G11B9/00 ,  G11B11/00 ,  G11B11/08 ,  H01J37/20 ,  H01J37/28

CPC分类号： G01Q60/16 ,  B82Y10/00 ,  B82Y20/00 ,  B82Y35/00 ,  B82Y40/00 ,  G01Q30/10 ,  G01Q30/16 ,  G01Q60/12 ,  G01Q60/22 ,  G01Q60/60 ,  G11B11/002 ,  G11B11/08 ,  G11B9/14 ,  G11B9/149 ,  H01J37/20 ,  H01J2237/204 ,  H01J2237/2065 ,  H01J2237/2538 ,  H01J2237/2583 ,  H01J2237/31738 ,  Y10S977/86

摘要： A system for transporting in a vacuum chamber sample holders and samples between a holder tray and a location for use with a surface analytical instrument is disclosed. Also provided is a system including a microwave coaxial cable connecting the tip terminal of a scanning tunneling microscope to a microwave signal source and a system for clamping a heater to a sample holder in order to heat the sample.

摘要翻译： 公开了一种用于在真空室中运送样品保持器和样品在保持器托盘和用于表面分析仪器的位置之间的系统。 还提供了一种系统，其包括将扫描隧道显微镜的末端连接到微波信号源的微波同轴电缆和用于将加热器夹持到样品架以便加热样品的系统。

公开(公告)号：US5510615A

公开(公告)日：1996-04-23

申请号：US478479

申请日：1995-06-07

申请人： Huddee Ho ,  Paul E. West

发明人： Huddee Ho ,  Paul E. West

IPC分类号： G01Q10/04 ,  G01Q30/02 ,  G01Q30/16 ,  G01Q30/18 ,  G01Q70/02 ,  H01J37/28 ,  H01J37/067

CPC分类号： G01Q30/02 ,  B82Y35/00 ,  G01Q30/18 ,  G01Q70/02 ,  H01J37/28 ,  H01J2237/2818 ,  Y10S977/86

摘要： The scanning probe microscope translation apparatus includes a scanning probe microscope for examining a specimen, with a specimen stage for mounting the specimen for examination by the scanning probe microscope, and a first translator mounted to the scanning probe microscope for translating the specimen stage relative to the scanning probe microscope. A support frame is dimensioned and adapted to be mounted in a specimen chamber of a scanning electron microscope, and a second translator is provided for scanning the scanning probe microscope relative to the support frame. The second translator is mounted on dual mass plates provided for isolating the scanning probe microscope from external vibrations, and suspension device are provided for suspending the mass plates from the support frame. A vacuum load lock system permits moving the scanning probe microscope, specimen stage, first translator, and mounting assembly into and out of the vacuum of the scanning electron microscope vacuum chamber.

摘要翻译： 扫描探针显微镜转印装置包括用于检查样本的扫描探针显微镜，具有用于通过扫描探针显微镜安装用于检查的样本的样本台和安装到扫描探针显微镜上的第一平移器，用于将样本台相对于 扫描探针显微镜。 支撑框架尺寸适于安装在扫描电子显微镜的样本室中，并且提供第二平移器用于相对于支撑框架扫描扫描探针显微镜。 第二个翻译器安装在双重质量板上，用于将扫描探针显微镜与外部振动隔离，并提供悬挂装置，用于将质量板从支撑架悬挂下来。 真空负载锁定系统允许将扫描探针显微镜，样品台，第一平移器和安装组件移入和移出扫描电子显微镜真空室的真空。

公开(公告)号：US5496999A

公开(公告)日：1996-03-05

申请号：US320490

申请日：1994-10-11

申请人： Frederick I. Linker ,  Michael D. Kirk ,  John D. Alexander ,  Sang-il Park ,  Sung-il Park ,  Ian R. Smith ,  Peter R. Swift

发明人： Frederick I. Linker ,  Michael D. Kirk ,  John D. Alexander ,  Sang-il Park ,  Sung-il Park ,  Ian R. Smith ,  Peter R. Swift

IPC分类号： G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q20/00 ,  G01Q30/02 ,  G01Q30/06 ,  G01Q60/10 ,  G01Q60/24 ,  G01Q70/02 ,  G02B21/00 ,  H01J37/26

CPC分类号： G01Q10/04 ,  B82Y35/00 ,  G01Q10/06 ,  G01Q20/02 ,  G01Q30/025 ,  G01Q70/02 ,  G02B21/002 ,  Y10S977/851 ,  Y10S977/86 ,  Y10S977/873

摘要： A scanning probe microscope having numerous advantages is disclosed. Respective scanning force and scanning tunneling probes are removably mounted in the head using kinematic mounting techniques so that they may be substituted for one another without the need to adjust the cantilever deflection sensor. A linear position-sensitive photodetector in the deflection sensor eliminates further the need for adjustments. A motorized, non-stacked x,y coarse movement stage is kinematically positioned with respect to the base and features a minimized mechanical loop to reduce thermal and vibrational effects on the position of the sample. A z coarse movement stage positions the head kinematically with respect to the base and includes a motorized drive means which allows the height, tilt and pitch of the probe to be adjusted. The scanner includes x,y and z sample position detectors which provide an accurate measurement of the position of the sample with respect to the probe. The z position detector provides an output which is exclusive of sample tilt and which may be used as an output of the scanning probe microscope. The outputs of the x,y and z position detectors may also be connected in feedback loops with the controller to improve the performance of the scanning probe microscope.

摘要翻译： 公开了具有许多优点的扫描探针显微镜。 使用运动学安装技术将各扫描力和扫描隧道探针可拆卸地安装在头部中，使得它们可以彼此替代，而不需要调整悬臂偏转传感器。 偏转传感器中的线性位置敏感光电检测器进一步消除了对调整的需要。 机动的，非堆叠的x，y粗移动台相对于基座运动地定位，并具有最小化的机械回路，以减少对样品位置的热和振动影响。 z粗移动台将头相对于基座运动地定位，并且包括允许调节探头的高度，倾斜和俯仰的电动驱动装置。 扫描器包括x，y和z采样位置检测器，其提供样品相对于探针的位置的精确测量。 z位置检测器提供的输出不包括样品倾斜，可用作扫描探针显微镜的输出。 x，y和z位置检测器的输出也可以与控制器连接在反馈回路中，以提高扫描探针显微镜的性能。