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    Semiconductor memory device and manufacturing method for the same
    81.
    发明授权
    Semiconductor memory device and manufacturing method for the same 有权
    半导体存储器件及其制造方法

    公开(公告)号：US07304343B2

    公开(公告)日：2007-12-04

    申请号：US11084648

    申请日：2005-03-16

    申请人： Fujio Masuoka ,  Shinji Horii ,  Takuji Tanigami ,  Takashi Yokoyama

    发明人： Fujio Masuoka ,  Shinji Horii ,  Takuji Tanigami ,  Takashi Yokoyama

    IPC分类号： H01L29/76

    CPC分类号： H01L29/66825 ,  H01L27/115 ,  H01L27/11556 ,  H01L29/7887 ,  H01L29/7923

    摘要： The present invention provides a semiconductor memory device including: a semiconductor substrate of a first conductivity type; and a memory cell including: (i) a columnar semiconductor portion formed on the substrate, (ii) at least two charge-storage layers formed around a periphery of the columnar semiconductor portion and divided in a direction vertical to the semiconductor substrate, and (iii) a control gate that covers at least a portion of charge-storage layers, wherein the memory cell is capable of holding two-bit or more data.

    摘要翻译： 本发明提供一种半导体存储器件，包括：第一导电类型的半导体衬底; 以及存储单元，包括：（i）形成在所述基板上的柱状半导体部，（ii）形成在所述柱状半导体部的周围的并且沿与所述半导体基板垂直的方向分割的至少两个电荷存储层，和 iii）覆盖电荷存储层的至少一部分的控制栅极，其中所述存储器单元能够保持两位或更多数据。

    Programmable semiconductor memory array having series-connected memory cells
    84.
    发明授权
    Programmable semiconductor memory array having series-connected memory cells 失效
    具有串联存储单元的可编程半导体存储器阵列

    公开(公告)号：US06233176B1

    公开(公告)日：2001-05-15

    申请号：US09134558

    申请日：1998-08-14

    申请人： Fujio Masuoka

    发明人： Fujio Masuoka

    IPC分类号： G11C1604

    CPC分类号： G11C16/0483 ,  H01L27/115

    摘要： Memory cells are divided into a plurality of series circuit units arranged in matrix fashion and comprising some memory cells connected in series. The memory cells each consist of non-volatile transistors provided with a control gate electrode, a floating gate electrode and an erase gate electrode. Bit lines to which one end of each of the series circuit units of the plurality of series circuit units arranged in one row are connected in common. Column lines are provided in common for the series circuit units that are arranged in one column and that are respectively connected to each control gate electrode of the memory cells constituting each of the series circuit unit. A voltage by which the selected non-volatile transistor works in a saturation state is applied to the control gate electrode of the selected transistor of a series circuit unit by a column line, thereby injecting hot electrons from the semiconductor substrate into the floating gate electrode. Another voltage by which the non-selected non-volatile transistor works in a non-saturation operation is applied to the gate electrodes of the remaining non-volatile transistors of the series circuit unit. By sequentially selecting memory cells in one series circuit unit, the sequential data writing operation is performed. The sequential data reading operation is performed in a similar manner.

    摘要翻译： 存储单元被分成以矩阵方式布置的多个串联电路单元，并且包括串联连接的一些存储器单元。 每个存储单元由设置有控制栅电极，浮栅电极和擦除栅电极的非易失性晶体管组成。 排列成一排的多个串联电路单元的串联电路单元的一端的共同连接的位线。 对于排列成一列的串联电路单元共同地提供列线，并且分别连接到构成串联电路单元的每一个的存储单元的每个控制栅电极。 所选择的非易失性晶体管工作在饱和状态的电压通过列线施加到串联电路单元的选定晶体管的控制栅电极，从而将热电子从半导体衬底注入到浮置栅电极中。 未选择的非易失性晶体管工作在非饱和操作中的另一电压被施加到串联电路单元的剩余非易失性晶体管的栅电极。 通过依次选择一个串联电路单元中的存储单元，执行顺序数据写入操作。 以类似的方式执行顺序数据读取操作。

    Electrically erasable programmable read-only memory with threshold value controller for data programming
    85.
    发明授权
    Electrically erasable programmable read-only memory with threshold value controller for data programming 失效
    电可擦除可编程只读存储器，具有用于数据编程的阈值控制器

    公开(公告)号：US6081454A

    公开(公告)日：2000-06-27

    申请号：US145466

    申请日：1998-09-02

    申请人： Kazunori Ohuchi ,  Tomoharu Tanaka ,  Yoshihisa Iwata ,  Yasuo Itoh ,  Masaki Momodomi ,  Fujio Masuoka

    发明人： Kazunori Ohuchi ,  Tomoharu Tanaka ,  Yoshihisa Iwata ,  Yasuo Itoh ,  Masaki Momodomi ,  Fujio Masuoka

    IPC分类号： G11C17/00 ,  G11C16/02 ,  G11C16/04 ,  G11C16/10 ,  G11C16/26 ,  G11C16/34 ,  G11C29/00 ,  G11C29/12 ,  H01L21/8247 ,  H01L27/115 ,  H01L29/788 ,  H01L29/792 ,  G11C16/06

    CPC分类号： G11C16/3459 ,  G11C16/0483 ,  G11C16/10 ,  G11C16/26 ,  G11C16/3454

    摘要： A NAND cell type electrically erasable programmable read-only memory has a memory array section containing NAND cell units. Each NAND cell unit has a series array of floating gate type metal-oxide semiconductor field effect transistors as memory cell transistors. The memory section is associated with a control-gate controller, a data-latch circuit, a sense amplifier section, and a data comparator, which is connected via an output buffer to a verify-termination detector. When a data is once written into a selected memory cell in a data programming mode, a specific biasing voltage is applied to the selected cell so that the actual electrical data write condition of the selected memory cell is verified. If the comparator detects that the verified write condition is dissatisfied, data-rewriting operations are repeatedly executed by additionally supplying the selected cell with a suitable voltage which compensates for the dissatisfaction of the verified write condition in the selected memory cell transistor.

    摘要翻译： NAND单元型电可擦除可编程只读存储器具有包含NAND单元单元的存储器阵列部分。 每个NAND单元单元具有作为存储单元晶体管的浮栅型金属氧化物半导体场效应晶体管的串联阵列。 存储器部分与控制门控制器，数据锁存电路，读出放大器部分和数据比较器相关联，其经由输出缓冲器连接到验证终止检测器。 当在数据编程模式下将数据一次写入所选择的存储单元中时，将特定的偏置电压施加到所选择的单元，从而验证所选存储单元的实际电数据写入状态。 如果比较器检测到验证的写入条件不满意，则通过向所选择的单元格额外提供补偿所选择的存储单元晶体管中的验证的写入条件的不满足的适当电压来重复执行数据重写操作。

    Non-volatile semiconductor memory and method of manufacturing the same
    86.
    发明授权
    Non-volatile semiconductor memory and method of manufacturing the same 失效
    非易失性半导体存储器及其制造方法

    公开(公告)号：US5824583A

    公开(公告)日：1998-10-20

    申请号：US949819

    申请日：1997-10-14

    申请人： Masamichi Asano ,  Hiroshi Iwahashi ,  Ryouhei Kirisawa ,  Ryozo Nakayama ,  Satoshi Inoue ,  Riichiro Shirota ,  Tetsuo Endoh ,  Fujio Masuoka

    发明人： Masamichi Asano ,  Hiroshi Iwahashi ,  Ryouhei Kirisawa ,  Ryozo Nakayama ,  Satoshi Inoue ,  Riichiro Shirota ,  Tetsuo Endoh ,  Fujio Masuoka

    IPC分类号： G11C16/04 ,  H01L21/8247 ,  H01L27/115 ,  H01L29/788

    CPC分类号： H01L27/11519 ,  G11C16/0483 ,  H01L27/115 ,  H01L27/11521 ,  H01L27/11524 ,  H01L29/7883 ,  H01L29/7885

    摘要： The present invention relates to a non-volatile semiconductor memory having non-volatile memory cells capable of electrically erasing and writing data. Each memory cell has a floating gate formed on the surface of the semiconductor substrate above the channel region, and a control gate. The floating gate partially covers the channel region. Each memory cell is thereby constructed of a parallel connection of a floating gate transistor and an enhancement type transistor. The floating gate transistor is displaced in one of the widthwise directions of the channel region, or partially covers only the central portion of the channel region in the widthwise direction thereof. A plurality of memory cells are connected in series to constitute a basic block. Adjacent basic blocks are separated by an enhancement type MOS transistor. In this memory, a memory cell (floating gate) and an enhancement type MOS transistor (gate) are formed in self alignment with each other using the same mask. In addition, in this memory, a control gate and a floating gate are formed in self alignment with each other using the same mask.

    摘要翻译： 本发明涉及具有能够电擦除和写入数据的非易失性存储单元的非易失性半导体存储器。 每个存储单元具有形成在沟道区域上方的半导体衬底的表面上的浮置栅极和控制栅极。 浮动栅极部分地覆盖沟道区域。 因此，每个存储单元由浮栅晶体管和增强型晶体管的并联连接构成。 浮栅晶体管在沟道区域的宽度方向中的一个方向上位移，或部分仅覆盖沟道区域的宽度方向的中心部分。 多个存储单元串联连接以构成基本块。 相邻的基本块由增强型MOS晶体管分开。 在该存储器中，使用相同的掩模，以彼此对准的方式形成存储单元（浮置栅极）和增强型MOS晶体管（栅极）。 此外，在该存储器中，使用相同的掩模，以彼此对准的方式形成控制栅极和浮动栅极。

    Semiconductor memory device
    87.
    发明授权
    Semiconductor memory device 失效
    半导体存储器件

    公开(公告)号：US5523980A

    公开(公告)日：1996-06-04

    申请号：US364990

    申请日：1994-12-28

    申请人： Koji Sakui ,  Hiroshi Nakamura ,  Tomoharu Tanaka ,  Masaki Momodomi ,  Fujio Masuoka ,  Kazunori Ohuchi ,  Tetsuo Endoh

    发明人： Koji Sakui ,  Hiroshi Nakamura ,  Tomoharu Tanaka ,  Masaki Momodomi ,  Fujio Masuoka ,  Kazunori Ohuchi ,  Tetsuo Endoh

    IPC分类号： G11C16/06 ,  G11C8/12 ,  G11C16/02 ,  G11C16/04 ,  G11C29/00 ,  G11C29/34 ,  H01L29/78 ,  G11C8/00

    CPC分类号： G11C8/12 ,  G11C16/0483

    摘要： A NAND-cell type EEPROM having a plurality of bit lines, a plurality of control gate lines intersecting with the bit lines, and a plurality of memory cells driven by applying a potential to the control gate lines for selectively storing data, supplying data to the bit lines and receiving data therefrom. The memory cells form a plurality of cell units. The memory cells constituting each cell unit are connected in series to one bit line by a common selecting gate transistor. A plurality of data latch circuits are provided on the bit lines, respectively, for storing data to be written into the memory cells selected by the control gate lines. Further, a plurality of selecting gate drivers are provided to correspond to the cell units, respectively, for driving the control gate lines. A row decoder decodes row addresses for driving the selecting gate drivers and the control gate lines. A plurality of block-address latch circuits are provided to correspond to the selecting gate drivers, respectively, for temporarily storing signals derived from a row address by the row decoder, thereby to select at least two of the selecting gate drivers at the same time in order to write data.

    摘要翻译： 具有多个位线的NAND单元型EEPROM，与位线相交的多个控制栅极线，以及通过向控制栅极线施加电位而驱动的多个存储单元，用于选择性地存储数据，向 位线和从其接收数据。 存储单元形成多个单元单元。 构成每个单元单元的存储单元通过公共选择栅极晶体管串联连接到一个位线。 分别在位线上提供多个数据锁存电路，用于存储要写入由控制栅极线选择的存储单元的数据。 此外，分别提供多个选择栅极驱动器以对应于用于驱动控制栅极线的单元单元。 行解码器解码用于驱动选择栅极驱动器和控制栅极线的行地址。 提供多个块地址锁存电路以分别对应于选择栅极驱动器，用于临时存储由行解码器从行地址导出的信号，从而同时选择至少两个选择栅极驱动器 命令写数据。

    Non-volatile semiconductor memory with NAND cell structure and switching transistors with different channel lengths to reduce punch-through
    88.
    发明授权
    Non-volatile semiconductor memory with NAND cell structure and switching transistors with different channel lengths to reduce punch-through 失效
    具有NAND单元结构的非易失性半导体存储器和具有不同通道长度的开关晶体管以减少穿通

    公开(公告)号：US5508957A

    公开(公告)日：1996-04-16

    申请号：US312072

    申请日：1994-09-26

    申请人： Masaki Momodomi ,  Fujio Masuoka ,  Yasuo Itoh ,  Hiroshi Iwahashi ,  Yoshihisa Iwata ,  Masahiko Chiba ,  Satoshi Inoue ,  Riichiro Shirota ,  Ryozo Nakayama ,  Kazunori Ohuchi ,  Shigeyoshi Watanabe ,  Ryouhei Kirisawa

    发明人： Masaki Momodomi ,  Fujio Masuoka ,  Yasuo Itoh ,  Hiroshi Iwahashi ,  Yoshihisa Iwata ,  Masahiko Chiba ,  Satoshi Inoue ,  Riichiro Shirota ,  Ryozo Nakayama ,  Kazunori Ohuchi ,  Shigeyoshi Watanabe ,  Ryouhei Kirisawa

    IPC分类号： G11C16/04 ,  G11C16/10 ,  G11C16/16 ,  G11C16/30 ,  H01L27/115 ,  G11C16/06 ,  H01L29/788

    CPC分类号： G11C16/30 ,  G11C16/0483 ,  G11C16/10 ,  G11C16/16 ,  H01L27/115

    摘要： An erasable programmable read-only memory with NAND cell structure includes NAND cell blocks, each of which has a selection transistor connected to the corresponding bit line and a series array of memory cell transistors, and a switching transistor connected between the series array of memory cell transistors and ground. Each cell transistor has a floating gate and a control gate. Word lines are connected to the control gates of the cell transistors. In a data writing mode, a selection transistor of a certain cell block containing a selected cell is rendered conductive, so that this cell block is connected to the corresponding bit line. Under such a condition, a decoder circuit stores a desired data (a logic "one" e.g.) in the selected cell, by applying an "H" level voltage to the bit line, applying an "L" level voltage to a word line connected to the selected cell, applying the "H" level voltage to a memory cell or cells positioned between the selected cell and the bit line, and applying the "L" level voltage to a memory cell or cells positioned between the selected cell and the ground. The selection transistor and switching transistor for a corresponding series array of memory cell transistors have different channel lengths to reduce punch through.

    摘要翻译： 具有NAND单元结构的可擦除可编程只读存储器包括NAND单元块，每个单元块具有连接到对应位线的选择晶体管和存储单元晶体管的串联阵列，以及连接在串联阵列存储单元之间的开关晶体管 晶体管和地。 每个单元晶体管具有浮置栅极和控制栅极。 字线连接到单元晶体管的控制栅极。 在数据写入模式中，包含所选择的单元的某个单元块的选择晶体管被导通，使得该单元块连接到对应的位线。 在这种情况下，解码器电路通过向位线施加“H”电平电压，将所需数据（例如逻辑“1”）存储在所选择的单元中，对连接的字线施加“L”电平电压 将“H”电平施加到位于所选择的单元和位线之间的存储单元或单元，并将“L”电平施加到位于所选单元和地之间的存储单元或单元 。 用于存储单元晶体管的相应串联阵列的选择晶体管和开关晶体管具有不同的沟道长度以减少穿通。

    Electrically erasable programmable read-only memory with NAND cell structure and intermediate level voltages initially applied to bit lines
    89.
    发明授权
    Electrically erasable programmable read-only memory with NAND cell structure and intermediate level voltages initially applied to bit lines 失效
    电可擦除可编程只读存储器，NAND单元结构和中间电平电压最初应用于位线

    公开(公告)号：US5440509A

    公开(公告)日：1995-08-08

    申请号：US22392

    申请日：1993-02-24

    申请人： Masaki Momodomi ,  Koichi Toita ,  Yasuo Itoh ,  Yoshihisa Iwata ,  Fujio Masuoka ,  Masahiko Chiba ,  Tetsuo Endo ,  Riichiro Shirota ,  Ryouhei Kirisawa

    发明人： Masaki Momodomi ,  Koichi Toita ,  Yasuo Itoh ,  Yoshihisa Iwata ,  Fujio Masuoka ,  Masahiko Chiba ,  Tetsuo Endo ,  Riichiro Shirota ,  Ryouhei Kirisawa

    IPC分类号： G11C17/00 ,  G11C16/02 ,  G11C16/04 ,  G11C16/06 ,  G11C16/08 ,  G11C16/30 ,  H01L27/115

    CPC分类号： G11C16/0483 ,  G11C16/08 ,  G11C16/30 ,  H01L27/115

    摘要： An erasable programmable read-only memory (EPROM) with a NAND cell structure includes NAND cell blocks, each of which has a selection transistor connected to the corresponding bit line and memory cell transistors connected in series. Word lines are connected to control gates of the cell transistors. In a data write mode, a selection transistor of a certain cell block containing a selected cell is rendered conductive to connect the cell block to the corresponding bit line. A control circuit is provided for applying an "L" level voltage (approximately 0 V) to a word line connected to the selected cell, applying an "H" level voltage (approximately 20 V) to a word line or word lines positioned between the selected word line and a contact node connecting the cell block and a specific bit line associated therewith, applying a voltage corresponding to data to be written to the specific bit line, and applying an intermediate voltage between the "H" and "L" level voltages to non-selected bit lines, thereby writing the data in the selected cell by tunneling. If the data is logic "0" data, the intermediate voltage is applied also to the specific bit line.

    摘要翻译： 具有NAND单元结构的可擦除可编程只读存储器（EPROM）包括NAND单元块，每个单元块具有连接到相应位线的选择晶体管和串联连接的存储单元晶体管。 字线连接到单元晶体管的控制栅极。 在数据写入模式中，包含所选择的单元的某个单元块的选择晶体管被导通以将单元块连接到对应的位线。 提供一种控制电路，用于向连接到所选择的单元的字线施加“L”电平电压（大约0V），对位于第一个单元之间的字线或字线施加“H”电平电压（大约20V） 选择字线和连接单元块和与其相关联的特定位线的接触节点，施加与要写入到特定位线的数据相对应的电压，以及在“H”和“L”电平电压之间施加中间电压 到未选择的位线，从而通过隧道将数据写入所选择的单元。 如果数据是逻辑“0”数据，则中间电压也被施加到特定位线。

    Non-volatile semiconductor memory and method of manufacturing the same
    90.
    发明授权
    Non-volatile semiconductor memory and method of manufacturing the same 失效
    非易失性半导体存储器及其制造方法

    公开(公告)号：US5323039A

    公开(公告)日：1994-06-21

    申请号：US499342

    申请日：1990-06-21

    申请人： Masamichi Asano ,  Hiroshi Iwahashi ,  Ryouhei Kirisawa ,  Ryozo Nakayama ,  Satoshi Inoue ,  Riichiro Shirota ,  Tetsuo Endoh ,  Fujio Masuoka

    发明人： Masamichi Asano ,  Hiroshi Iwahashi ,  Ryouhei Kirisawa ,  Ryozo Nakayama ,  Satoshi Inoue ,  Riichiro Shirota ,  Tetsuo Endoh ,  Fujio Masuoka

    IPC分类号： G11C16/04 ,  H01L21/8247 ,  H01L27/115 ,  H01L29/788 ,  H01L29/68

    CPC分类号： H01L27/11519 ,  G11C16/0483 ,  H01L27/115 ,  H01L27/11521 ,  H01L27/11524 ,  H01L29/7883 ,  H01L29/7885

    摘要： The present invention relates to a non-volatile semiconductor memory having non-volatile memory cells capable of electrically erasing and writing data. Each memory cell has a floating gate formed on the surface of the semiconductor substrate above the channel region, and a control gate. The floating gate partially covers the channel region. Each memory cell is thereby constructed of a parallel connection of a floating gate transistor and an enhancement type transistor. The floating gate transistor is displaced in one of the widthwise directions of the channel region, or partially covers only the central portion of the channel region in the widthwise direction thereof. A plurality of memory cells are connected in series to constitute a basic block. Adjacent basic blocks are separated by an enhancement type MOS transistor. In this memory, a memory cell (floating gate) and an enhancement type MOS transistor (gate) are formed in self alignment with each other using the same mask. In addition, in this memory, a control gate and a floating gate are formed in self alignment with each other using the same mask.

    摘要翻译： PCT No.PCT / JP89 / 00942 Sec。 371 1990年6月21日第 102（e）日期1990年6月21日PCT提交1989年9月14日PCT公布。 公开号WO90 / 04855 日期为1990年5月3日。本发明涉及具有能够电擦除和写入数据的非易失性存储单元的非易失性半导体存储器。 每个存储单元具有形成在沟道区域上方的半导体衬底的表面上的浮置栅极和控制栅极。 浮动栅极部分地覆盖沟道区域。 因此，每个存储单元由浮栅晶体管和增强型晶体管的并联连接构成。 浮栅晶体管在沟道区域的宽度方向中的一个方向上位移，或部分仅覆盖沟道区域的宽度方向的中心部分。 多个存储单元串联连接以构成基本块。 相邻的基本块由增强型MOS晶体管分开。 在该存储器中，使用相同的掩模，以彼此对准的方式形成存储单元（浮置栅极）和增强型MOS晶体管（栅极）。 此外，在该存储器中，使用相同的掩模，以彼此对准的方式形成控制栅极和浮动栅极。