THREE-DIMENSIONAL INTEGRATED MULTISPECTRAL IMAGING SENSOR
    88.
    发明申请
    THREE-DIMENSIONAL INTEGRATED MULTISPECTRAL IMAGING SENSOR 有权
    三维集成多目标成像传感器

    公开(公告)号:US20170018594A1

    公开(公告)日:2017-01-19

    申请号:US14802014

    申请日:2015-07-17

    Abstract: A three-dimensional multispectral imaging sensor and method for forming a three-dimensional multispectral imaging sensor are provided. The three-dimensional multispectral imaging sensor includes a monolithic structure having a plurality of layers. Each of the layers is formed from light detecting materials for detecting light of respective different non-overlapping wavelengths and having respective different bandgaps

    Abstract translation: 提供了一种用于形成三维多光谱成像传感器的三维多光谱成像传感器和方法。 三维多光谱成像传感器包括具有多层的单片结构。 每个层由用于检测各个不同非重叠波长的光并具有各自不同带隙的光检测材料形成

    Infra red detectors and methods of manufacturing infra red detectors using MOVPE
    90.
    发明授权
    Infra red detectors and methods of manufacturing infra red detectors using MOVPE 有权
    红外探测器和使用MOVPE制造红外探测器的方法

    公开(公告)号:US09455369B2

    公开(公告)日:2016-09-27

    申请号:US14978856

    申请日:2015-12-22

    Abstract: A method of forming infra red detector arrays is described, starting with the manufacture of a wafer. The wafer is formed from a GaAs or GaAs/Si substrate having CMT deposited thereon by MOVPE. The CMT deposited comprises a number of layers of differing composition, the composition being controlled during the MOVPE process and being dependent on the thickness of the layer deposited. Other layers are positioned between the active CMT layers and the substrate. A CdTe buffer layer aids the deposition of the CMT on the substrate and an etch stop layer is also provided. Once the wafer is formed, the buffer layer, the etch stop layer and all intervening layers are etched away leaving a wafer suitable for further processing into an infra red detector.

    Abstract translation: 描述了形成红外探测器阵列的方法,从制造晶片开始。 晶片由具有通过MOVPE沉积在其上的CMT的GaAs或GaAs / Si衬底形成。 沉积的CMT包括许多不同组成的层,组合物在MOVPE工艺期间被控制,并且取决于沉积层的厚度。 其它层位于活性CMT层和基底之间。 CdTe缓冲层有助于CMT沉积在衬底上,并且还提供蚀刻停止层。 一旦晶片形成,缓冲层,蚀刻停止层和所有中间层被蚀刻掉,留下适合进一步加工成红外检测器的晶片。

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