公开(公告)号：US20100200431A1

公开(公告)日：2010-08-12

申请号：US12704206

申请日：2010-02-11

申请人： Youngok Kim ,  Jeongnam Han ,  Changki Hong ,  Boun Yoon ,  Kuntack Lee ,  Young-Hoo Kim

发明人： Youngok Kim ,  Jeongnam Han ,  Changki Hong ,  Boun Yoon ,  Kuntack Lee ,  Young-Hoo Kim

IPC分类号： G01N27/26

CPC分类号： H01L22/14

摘要： The inventive concept provides a wafer test method and a wafer test apparatus. The wafer test method can recognize the amount of residuals generated in a sidewall of the metal-containing layer pattern and the extent of corrosion of a sidewall of the metal-containing layer pattern using the measured electric resistance by supplying an electrolyte so that the electrolyte is in contact with a portion of the metal-containing layer pattern in a predetermined chip region and measuring an electric resistance between a first electrode which is electrically in contact with the other portion of the metal-containing layer pattern and a second electrode which is in contact with the electrolyte in the predetermined region. Thus, a wafer test method and a wafer test apparatus can be embodied by an in-line method without dividing a wafer into each chip.

摘要翻译： 本发明的概念提供了晶片测试方法和晶片测试装置。 晶片测试方法可以通过提供电解质来确定含金属层图案的侧壁中产生的残留量以及含金属层图案的侧壁的腐蚀程度，使得电解质为 与预定芯片区域中的含金属层图案的一部分接触，并且测量与含金属层图案的另一部分电接触的第一电极和接触的第二电极之间的电阻 电解液在预定区域内。 因此，可以通过在线方式来实现晶片测试方法和晶片测试装置，而不将晶片分成每个芯片。

公开(公告)号：US20160027637A1

公开(公告)日：2016-01-28

申请号：US14704912

申请日：2015-05-05

申请人： KYOUNGSEOB KIM ,  YONGSUN KO ,  KYOUNG HWAN KIM ,  SeokHoon KIM ,  KUNTACK LEE ,  HYOSAN LEE

发明人： KYOUNGSEOB KIM ,  YONGSUN KO ,  KYOUNG HWAN KIM ,  SeokHoon KIM ,  KUNTACK LEE ,  HYOSAN LEE

IPC分类号： H01L21/02 ,  H01L21/56 ,  H01L21/67 ,  H01L21/78

CPC分类号： H01L21/02068 ,  H01L21/67051 ,  H01L21/78

摘要： A method of manufacturing a semiconductor device includes: forming a pattern on a surface of a semiconductor substrate; placing the substrate on a platform of a substrate treatment apparatus; rotating the wafer while applying a cleaning liquid from a first nozzle and a wetting liquid from a second nozzle to treat a first region on the surface of the substrate; vertically changing the distance of the second nozzle together with the first nozzle with respect to the platform; after the vertical change, rotating the wafer while applying the cleaning liquid from the first nozzle and the wetting liquid from the second nozzle to treat a second region on the surface of the substrate; and forming a semiconductor device from the treated substrate.

摘要翻译： 一种制造半导体器件的方法包括：在半导体衬底的表面上形成图案; 将基板放置在基板处理装置的平台上; 在从第一喷嘴施加清洁液体和来自第二喷嘴的润湿液体的同时旋转晶片以处理基板表面上的第一区域; 与第一喷嘴相对于平台垂直地改变第二喷嘴的距离; 在垂直变化之后，在从第一喷嘴施加清洁液体和来自第二喷嘴的润湿液体的同时转动晶片以处理基板表面上的第二区域; 以及从处理过的衬底形成半导体器件。

公开(公告)号：US08202369B2

公开(公告)日：2012-06-19

申请号：US12119313

申请日：2008-05-12

申请人： Frank Holsteyns ,  Kuntack Lee

发明人： Frank Holsteyns ,  Kuntack Lee

IPC分类号： B08B7/04 ,  B08B7/00 ,  B08B7/02

CPC分类号： B08B3/02 ,  B08B3/12 ,  B08B2203/0288 ,  G10K15/043 ,  H01L21/02052 ,  H01L21/67051 ,  H01L21/67057 ,  Y10S134/902

摘要： Methods and apparatus for creating and controlling transient cavitation are disclosed. An example method includes selecting a range of bubble sizes to be created in a liquid and selecting characteristics for an acoustic field to be applied to the liquid. The method further includes creating gas bubbles of the selected range of bubble sizes in the liquid, creating an acoustic field with the selected characteristics and subjecting the liquid to the acoustic field. In the example method, at least one of the range of bubble sizes and the characteristics of the acoustic field is selected in correspondence with the other so as to control transient cavitation in the liquid for the selected range of bubble sizes. Particularly, the methods and apparatus may be used for the cleaning of a surface, such as a semiconductor substrate.

摘要翻译： 公开了用于创建和控制瞬时空化的方法和装置。 一个示例性方法包括选择要在液体中产生的气泡大小的范围，并选择要施加到液体的声场的特性。 该方法还包括在液体中产生气泡尺寸选定范围的气泡，产生具有选定特性的声场并使液体经受声场。 在该示例性方法中，气泡尺寸范围和声场的特性中的至少一个与另一个对应地选择，以便在所选择的气泡尺寸范围内控制液体中的瞬时空化。 特别地，所述方法和装置可用于清洁表面，例如半导体衬底。

公开(公告)号：US08076198B2

公开(公告)日：2011-12-13

申请号：US12657092

申请日：2010-01-13

申请人： Hyosan Lee ,  Boun Yoon ,  Kuntack Lee ,  Donghyun Kim ,  Daehyuk Kang ,  Imsoo Park ,  Youngok Kim ,  Young-Hoo Kim ,  Sang Won Bae

发明人： Hyosan Lee ,  Boun Yoon ,  Kuntack Lee ,  Donghyun Kim ,  Daehyuk Kang ,  Imsoo Park ,  Youngok Kim ,  Young-Hoo Kim ,  Sang Won Bae

IPC分类号： H01L21/336 ,  H01L21/76 ,  H01L21/4763 ,  H01L21/461

CPC分类号： H01L27/11551 ,  H01L27/11556 ,  H01L27/11578 ,  H01L29/66825 ,  H01L29/7881

摘要： A method of fabricating a nonvolatile memory device with a three-dimensional structure includes alternately stacking first and second material layers in two or more layers on a semiconductor substrate, forming trenches penetrating the stacked first and second material layers by performing a first etching process, and removing the second material layers exposed in the trenches by performing a second etching process. The first and second material layers are formed of materials that have the same main component but have different impurity contents, respectively.

摘要翻译： 一种制造具有三维结构的非易失性存储器件的方法包括在半导体衬底上交替堆叠两层或多层第一和第二材料层，通过执行第一蚀刻工艺形成贯穿层叠的第一和第二材料层的沟槽，以及 通过执行第二蚀刻工艺去除在沟槽中暴露的第二材料层。 第一和第二材料层由具有相同主要成分但具有不同杂质含量的材料形成。

公开(公告)号：US20080276960A1

公开(公告)日：2008-11-13

申请号：US12119313

申请日：2008-05-12

申请人： Frank Holsteyns ,  Kuntack Lee

发明人： Frank Holsteyns ,  Kuntack Lee

IPC分类号： B08B3/12 ,  C25F3/30 ,  B01D47/02 ,  A01G31/06

CPC分类号： B08B3/02 ,  B08B3/12 ,  B08B2203/0288 ,  G10K15/043 ,  H01L21/02052 ,  H01L21/67051 ,  H01L21/67057 ,  Y10S134/902

摘要： The invention relates to a method for creating transient cavitation comprising the steps of creating gas bubbles having a range of bubble sizes in a liquid, creating an acoustic field and subjecting the liquid to the acoustic field, characterized in that the range of bubble sizes and/or the characteristics of the acoustic field are selected to tune them to each other, thereby controlling transient cavitation in the selected range of bubble sizes. It also relates to an apparatus suitable for performing the method according to the invention.

摘要翻译： 本发明涉及一种用于产生瞬时空化的方法，包括以下步骤：产生具有液体中气泡尺寸范围的气泡，产生声场并使液体经受声场，其特征在于，气泡尺寸和/ 或者选择声场的特性来使它们彼此调谐，从而控制在所选择的气泡尺寸范围内的瞬时空化。 它还涉及适用于执行根据本发明的方法的装置。

公开(公告)号：US20150368557A1

公开(公告)日：2015-12-24

申请号：US14312043

申请日：2014-06-23

申请人： Hyosan Lee ,  Yongsun Ko ,  Kyoungseob Kim ,  Kuntack Lee ,  Jihoon Jeong ,  Chen Lin ,  Christopher K. Ober

发明人： Hyosan Lee ,  Yongsun Ko ,  Kyoungseob Kim ,  Kuntack Lee ,  Jihoon Jeong ,  Chen Lin ,  Christopher K. Ober

IPC分类号： C09K13/00

CPC分类号： C09K13/08 ,  C23F1/18 ,  C23F1/20 ,  C23F1/26 ,  H01L21/02063 ,  H01L21/0273 ,  H01L21/31111 ,  H01L21/32134 ,  H01L21/67017 ,  H01L21/6708 ,  H01L21/76802 ,  H01L24/03 ,  H01L24/11 ,  H01L2224/03614 ,  H01L2224/0401 ,  H01L2224/05571 ,  H01L2224/05624 ,  H01L2224/05647 ,  H01L2224/05666 ,  H01L2224/05681 ,  H01L2224/05684 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/20102 ,  H01L2924/20103 ,  H01L2924/20104

摘要： The present inventive concepts provide metal etchant compositions and methods of fabricating a semiconductor device using the same. The metal etchant composition includes an organic peroxide in a range of about 0.1 wt % to about 20 wt %, an organic acid in a range of about 0.1 wt % to about 70 wt %, and an alcohol-based solvent in a range of about 10 wt % to about 99.8 wt %. The metal etchant composition may be used in an anhydrous system.

摘要翻译： 本发明构思提供金属蚀刻剂组合物和使用其制造半导体器件的方法。 金属蚀刻剂组合物包括约0.1重量％至约20重量％范围内的有机过氧化物，约0.1重量％至约70重量％范围内的有机酸和约0.001重量％至约70重量％范围内的醇系溶剂 10重量％至约99.8重量％。 金属蚀刻剂组合物可用于无水体系中。

公开(公告)号：US09027576B2

公开(公告)日：2015-05-12

申请号：US13844149

申请日：2013-03-15

申请人： Yong-Jhin Cho ,  Yongsun Ko ,  Kyoungseob Kim ,  Kwangsu Kim ,  SeokHoon Kim ,  Jung-Min Oh ,  Kuntack Lee ,  Wonho Jang ,  Yongmyung Jun

发明人： Yong-Jhin Cho ,  Yongsun Ko ,  Kyoungseob Kim ,  Kwangsu Kim ,  SeokHoon Kim ,  Jung-Min Oh ,  Kuntack Lee ,  Wonho Jang ,  Yongmyung Jun

IPC分类号： H01L21/67

CPC分类号： H01L21/67017 ,  H01L21/67051 ,  H01L21/6708

摘要： Substrate treatment systems are provided. The substrate treatment systems may include a treating device configured to treat a substrate with a supercritical fluid, and a supplying device configured to supply the supercritical fluid to the treating device. The treating device may include a supercritical process zone in which the substrate is treated with the supercritical fluid, and a pre-supercritical process zone in which the supercritical fluid is expanded and then provided into the supercritical process zone to create a supercritical state in the supercritical process zone.

摘要翻译： 提供底物处理系统。 衬底处理系统可以包括被配置为用超临界流体处理衬底的处理装置和被配置为将超临界流体供应到处理装置的供给装置。 处理装置可以包括其中用超临界流体处理衬底的超临界过程区，以及超临界过程区，其中超临界流体被膨胀，然后被提供到超临界过程区以在超临界流体中产生超临界状态 过程区。

公开(公告)号：US08228089B2

公开(公告)日：2012-07-24

申请号：US12704206

申请日：2010-02-11

申请人： Youngok Kim ,  Jeongnam Han ,  Changki Hong ,  Boun Yoon ,  Kuntack Lee ,  Young-Hoo Kim

发明人： Youngok Kim ,  Jeongnam Han ,  Changki Hong ,  Boun Yoon ,  Kuntack Lee ,  Young-Hoo Kim

IPC分类号： G01R31/26 ,  G01R31/08 ,  H01L21/66

CPC分类号： H01L22/14

摘要： The inventive concept provides a wafer test method and a wafer test apparatus. The wafer test method can recognize the amount of residuals generated in a sidewall of the metal-containing layer pattern and the extent of corrosion of a sidewall of the metal-containing layer pattern using the measured electric resistance by supplying an electrolyte so that the electrolyte is in contact with a portion of the metal-containing layer pattern in a predetermined chip region and measuring an electric resistance between a first electrode which is electrically in contact with the other portion of the metal-containing layer pattern and a second electrode which is in contact with the electrolyte in the predetermined region. Thus, a wafer test method and a wafer test apparatus can be embodied by an in-line method without dividing a wafer into each chip.

摘要翻译： 本发明的概念提供了晶片测试方法和晶片测试装置。 晶片测试方法可以通过提供电解质来确定含金属层图案的侧壁中产生的残留量以及含金属层图案的侧壁的腐蚀程度，使得电解质为 与预定芯片区域中的含金属层图案的一部分接触，并且测量与含金属层图案的另一部分电接触的第一电极和接触的第二电极之间的电阻 电解液在预定区域内。 因此，可以通过在线方式来实现晶片测试方法和晶片测试装置，而不将晶片分成每个芯片。

公开(公告)号：US20100181610A1

公开(公告)日：2010-07-22

申请号：US12650076

申请日：2009-12-30

申请人： Young-Hoo Kim ,  Daehyuk Kang ,  Youngok Kim ,  Sang Won Bae ,  Boun Yoon ,  Kuntack Lee

发明人： Young-Hoo Kim ,  Daehyuk Kang ,  Youngok Kim ,  Sang Won Bae ,  Boun Yoon ,  Kuntack Lee

IPC分类号： H01L29/792

CPC分类号： H01L29/792 ,  H01L27/11551 ,  H01L27/11556 ,  H01L27/11578 ,  H01L27/11582 ,  H01L29/7926

摘要： Provided are nonvolatile memory devices with a three-dimensional structure and methods of fabricating the same. The nonvolatile memory device includes conductive patterns three-dimensionally arranged on a semiconductor substrate, semiconductor patterns that extend from the semiconductor substrate and intersect one-side walls of the conductive patterns, charge storage layers interposed between the semiconductor patterns and one-side walls of the conductive patterns, and seed layer patterns interposed between the charge storage layers and one-side walls of the conductive patterns.

摘要翻译： 提供具有三维结构的非易失性存储器件及其制造方法。 非易失性存储器件包括三维地布置在半导体衬底上的导电图案，半导体图案从半导体衬底延伸并与导电图案的一侧壁相交，插入在半导体图案和半导体图案的一侧壁之间的电荷存储层 导电图案和介于电荷存储层和导电图案的单侧壁之间的种子层图案。

公开(公告)号：US09153597B2

公开(公告)日：2015-10-06

申请号：US13616254

申请日：2012-09-14

申请人： Young-Hoo Kim ,  Sang Won Bae ,  Kuntack Lee ,  Hyosan Lee

发明人： Young-Hoo Kim ,  Sang Won Bae ,  Kuntack Lee ,  Hyosan Lee

IPC分类号： H01L21/336 ,  H01L27/115 ,  H01L21/3105 ,  H01L21/311

CPC分类号： H01L27/11582 ,  H01L21/3105 ,  H01L21/31111 ,  H01L27/11556

摘要： The inventive concept provides methods of manufacturing three-dimensional semiconductor devices. In some embodiments, the methods include forming a stack structure including sacrificial layers and insulation layers, forming a trench penetrating the stack structure, forming a hydrophobic passivation element on the surfaces of the insulation layers that were exposed by the trench and selectively removing the sacrificial layers.

摘要翻译： 本发明构思提供制造三维半导体器件的方法。 在一些实施例中，所述方法包括形成包括牺牲层和绝缘层的堆叠结构，形成穿透堆叠结构的沟槽，在绝缘层的表面上形成疏水钝化元件，该绝缘层被沟槽暴露并选择性地去除牺牲层 。