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    Sample structure analyzing method, transmission electron microscope, and computer-readable non-transitory recording medium
    3.
    发明授权
    Sample structure analyzing method, transmission electron microscope, and computer-readable non-transitory recording medium 有权
    样品结构分析方法，透射电子显微镜和计算机可读非瞬态记录介质

    公开(公告)号：US08841614B1

    公开(公告)日：2014-09-23

    申请号：US14106352

    申请日：2013-12-13

    申请人： Kabushiki Kaisha Toshiba

    发明人： Takeshi Murakami ,  Haruko Akutsu

    IPC分类号： H01J37/26 ,  G01N23/20

    CPC分类号： G01N23/20058 ,  H01J37/222 ,  H01J37/295

    摘要： In accordance with an embodiment, a sample structure analyzing method includes generating a beam and then applying the beam to a plurality of observation regions on a sample, and acquiring a plurality of diffraction images from the beam which has passed through the sample; and comparing the acquired diffraction images, and judging the difference between the observation regions from the comparison result, or identifying the grain boundary of crystal constituting the sample.

    摘要翻译： 根据实施例，样本结构分析方法包括产生一个束，然后将光束施加到样本上的多个观察区域，并从已经通过样本的束获取多个衍射图像; 比较所获取的衍射图像，根据比较结果判断观察区域之间的差异，或者识别构成样品的晶体的晶界。

    Analysis apparatus and analysis method
    4.
    发明授权
    Analysis apparatus and analysis method 有权
    分析仪器及分析方法

    公开(公告)号：US09269533B2

    公开(公告)日：2016-02-23

    申请号：US14482652

    申请日：2014-09-10

    申请人： KABUSHIKI KAISHA TOSHIBA

    发明人： Takeshi Murakami

    IPC分类号： H01J37/26 ,  H01J37/28

    CPC分类号： H01J37/26 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/032 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/2801

    摘要： In accordance with an embodiment, an analysis apparatus includes a secondary electron optical system, at least one detector, and a composition analysis unit. The secondary electron optical system includes a charged particle beam source and a lens. The charged particle beam source generates a charged particle beam and irradiates a sample with it. The lens controls a focal position and a trajectory of the charged particle beam using an electric field or a magnetic field. The detector detects a characteristic X-ray from the sample. The composition analysis unit analyzes a composition of a material constituting the sample from the detected characteristic X-ray. Each detector is arranged in such a manner that at least part of a detection surface thereof is placed on the same plane as an exit surface of the secondary electron optical system, or placed on the charged particle beam side of the same plane.

    摘要翻译： 根据实施例，分析装置包括二次电子光学系统，至少一个检测器和组成分析单元。 二次电子光学系统包括带电粒子束源和透镜。 带电粒子束源产生带电粒子束并照射样品。 透镜使用电场或磁场控制带电粒子束的焦点位置和轨迹。 检测器检测来自样品的特征X射线。 组分分析单元从检测到的特征X射线分析构成样品的材料的组成。 每个检测器被布置成使得其检测表面的至少一部分被放置在与二次电子光学系统的出射表面相同的平面上，或者放置在同一平面的带电粒子束侧上。

    Electro-optical inspection apparatus and method with dust or particle collection function
    6.
    发明授权
    Electro-optical inspection apparatus and method with dust or particle collection function 有权
    电光检测装置及方法，具有灰尘或颗粒收集功能

    公开(公告)号：US09105444B2

    公开(公告)日：2015-08-11

    申请号：US14096361

    申请日：2013-12-04

    申请人： Ebara Corporation

    发明人： Kenji Watanabe ,  Masahiro Hatakeyama ,  Yoshihiko Naito ,  Tatsuya Kohama ,  Kenji Terao ,  Takeshi Murakami ,  Takehide Hayashi ,  Kiwamu Tsukamoto ,  Hiroshi Sobukawa ,  Norio Kimura

    IPC分类号： H01J37/24 ,  H01J37/02 ,  H01J37/22 ,  H01J37/26 ,  H01J37/29

    CPC分类号： H01J37/22 ,  H01J37/265 ,  H01J37/29 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/24495 ,  H01J2237/24564 ,  H01J2237/2817

    摘要： An electro-optical inspection apparatus is provided that is capable of preventing adhesion of dust or particles to the sample surface as much as possible. A stage (100) on which a sample (200) is placed is disposed inside a vacuum chamber (112) that can be evacuated to vacuum, and a dust collecting electrode (122) is disposed to surround a periphery of the sample (200). The dust collecting electrode (122) is applied with a voltage having the same polarity as a voltage applied to the sample (200) and an absolute value that is the same or larger than an absolute value of the voltage. Thus, because dust or particles such as particles adhere to the dust collecting electrode (122), adhesion of the dust or particles to the sample surface can be reduced. Instead of using the dust collecting electrode, it is possible to form a recess on a wall of the vacuum chamber containing the stage, or to dispose on the wall a metal plate having a mesh structure to which a predetermined voltage is applied. In addition, adhesion of dust or particles can be further reduced by disposing a gap control plate (124) having a through hole (124a) at the center above the sample (200) and the dust collecting electrode (122).

    摘要翻译： 提供一种电光检查装置，其能够尽可能地防止灰尘或颗粒附着到样品表面。 将其上放置有样品（200）的载物台（100）设置在能够抽真空的真空室（112）的内部，并且设置集尘电极（122）以包围样品（200）的周围， 。 集尘电极（122）施加与施加到样品（200）的电压相同极性的电压和与电压的绝对值相同或更大的绝对值。 因此，由于灰尘或颗粒例如颗粒附着在集尘电极122上，所以可以降低灰尘或颗粒对样品表面的粘附。 代替使用集尘电极，可以在包含载物台的真空室的壁上形成凹部，或者在壁上配置具有施加了预定电压的网状结构的金属板。 此外，通过在样品（200）上方的中心和集尘电极（122）设置具有通孔（124a）的间隙控制板（124），可以进一步减少灰尘或颗粒的附着。