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49 条记录 (耗时 0.029 秒)

    Schottky emission cathode and a method of stabilizing the same
    1.
    发明授权
    Schottky emission cathode and a method of stabilizing the same 失效
    肖特基发射阴极及其稳定方法

    公开(公告)号：US5616926A

    公开(公告)日：1997-04-01

    申请号：US509286

    申请日：1995-07-31

    申请人： Hiroyuki Shinada ,  Shingo Kimura ,  Katsuhiro Kuroda ,  Satoru Fukuhara ,  Takashi Ohshima

    发明人： Hiroyuki Shinada ,  Shingo Kimura ,  Katsuhiro Kuroda ,  Satoru Fukuhara ,  Takashi Ohshima

    IPC分类号： H01J1/304 ,  H01J3/02

    CPC分类号： H01J1/304 ,  H01J2201/317 ,  H01J2237/06316

    摘要： A Schottky emission cathode has a filament, a needle-shaped piece of single crystal refractory metal which is attached to the filament and has a flat crystal surface at a tip thereof, and an adsorbed layer including at least one kind of a metal other than the single crystal refractory metal on the flat crystal surface. The piece of single crystal refractory metal is heated by passing a current through the filament and electrons are extracted by an electric field applied on a tip of the needle-shaped piece of single crystal refractory metal. The tip of the needle-shaped piece of single crystal refractory metal as a radius of curvature of a value to produce an energy width among electrons extracted from the tip not exceeding a predetermined value when the electric field is sufficient to prevent the flat crystal surface from collapsing during operation of the cathode.

    摘要翻译： 肖特基发射阴极具有长丝，单晶耐火金属针形片，其附着于灯丝并且在其顶端具有平坦的晶体表面，并且包括至少一种金属以外的吸附层， 单晶难熔金属在平面晶面上。 通过使电流通过灯丝来加热单晶难熔金属片，并通过施加在针状单晶耐火金属片的尖端上的电场来提取电子。 针状单晶难熔金属片的尖端作为曲率半径值，以在电场足以防止平坦晶体表面产生从尖端提取的电子之间的能量不超过预定值时 在阴极运行期间塌陷。

    Cathode having a reservoir and method of manufacturing the same
    2.
    发明授权
    Cathode having a reservoir and method of manufacturing the same 失效
    具有储存器的阴极及其制造方法

    公开(公告)号：US5838096A

    公开(公告)日：1998-11-17

    申请号：US679727

    申请日：1996-07-12

    申请人： Hiroyuki Shinada ,  Satoru Fukuhara ,  Katsuhiro Kuroda

    发明人： Hiroyuki Shinada ,  Satoru Fukuhara ,  Katsuhiro Kuroda

    IPC分类号： H01J37/06 ,  H01J1/15 ,  H01J1/304

    CPC分类号： H01J1/15

    摘要： A cathode includes a hairpin type filament made of a refractory metal such as W, Mo or Re; a single crystal needle, made of a refractory metal such as W, Mo or Re joined to the filament; and a reservoir formed by applying a slurry of a powder of a metal or metal compound and an organic solvent containing nitrocellulose in the vicinity of a junction between the single crystal needle and the filament. The powder for a reservoir is made of a metal lower than the single crystal needle in a work function or electron affinity, such as Ti, Zr, Hf, Y, Th, Sc or Se, or a compound thereof.

    摘要翻译： 阴极包括由难熔金属如W，Mo或Re制成的发夹型长丝; 由诸如W，Mo或Re的难熔金属制成的单晶针连接到灯丝上; 以及通过在单晶针和丝之间的接合处附近施加金属或金属化合物的粉末和含有硝化纤维素的有机溶剂的浆料形成的储存器。 用于储存器的粉末以比单晶针低的金属，例如Ti，Zr，Hf，Y，Th，Sc或Se或它们的化合物在功函数或电子亲和力下制成。

    Electron beam source and its manufacturing method and electron beam source apparatus and electron beam apparatus using the same
    3.
    发明授权
    Electron beam source and its manufacturing method and electron beam source apparatus and electron beam apparatus using the same 失效
    电子束源及其制造方法和电子束源装置及使用其的电子束装置

    公开(公告)号：US5811819A

    公开(公告)日：1998-09-22

    申请号：US568865

    申请日：1995-12-05

    申请人： Takashi Ohshima ,  Hiroyuki Shinada ,  Katsuhiro Kuroda

    发明人： Takashi Ohshima ,  Hiroyuki Shinada ,  Katsuhiro Kuroda

    IPC分类号： H01J1/304 ,  H01J1/308 ,  H01J9/02 ,  H01J37/073 ,  H01J37/06

    CPC分类号： H01J9/025 ,  H01J1/3042 ,  H01J1/308 ,  H01J37/073 ,  H01J2201/30426

    摘要： An electron beam source is provided with an electron forming means such as a doped layer of Si for forming conduction band electrons near the surface of the pointed tip of a needle-shaped structure while suppressing emission of electrons from a valence band. The surface of the pointed tip of the needle-shaped structure is formed with a single-crystal semiconductor or insulator. Preferably a surface passivation layer and/or a highly doped layer is formed on the surface of the needle-shaped structure. Also, means for exciting electrons in a valence band may be provided. An electron beam source apparatus and electron beam apparatus incorporating the electron beam source as defined above are also disclosed.

    摘要翻译： 电子束源设置有诸如Si的掺杂层的电子形成装置，用于在抑制从价带发射电子的同时在针状结构的尖端的表面附近形成导带电子。 针状结构的尖端的表面由单晶半导体或绝缘体形成。 优选地，在针状结构的表面上形成表面钝化层和/或高掺杂层。 此外，也可以提供用于激发在价带中的电子的装置。 还公开了包含如上所述的电子束源的电子束源装置和电子束装置。

    Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams
    9.
    发明授权
    Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams 有权
    使用多个带电粒子束检查集成电路图案的方法和装置

    公开(公告)号：US06476390B1

    公开(公告)日：2002-11-05

    申请号：US09646281

    申请日：2000-09-15

    申请人： Hisaya Murakoshi ,  Yusuke Yajima ,  Hiroyuki Shinada ,  Mari Nozoe ,  Atsuko Takafuji ,  Kaoru Umemura ,  Masaki Hasegawa ,  Katsuhiro Kuroda

    发明人： Hisaya Murakoshi ,  Yusuke Yajima ,  Hiroyuki Shinada ,  Mari Nozoe ,  Atsuko Takafuji ,  Kaoru Umemura ,  Masaki Hasegawa ,  Katsuhiro Kuroda

    IPC分类号： G01N2300

    CPC分类号： H01J37/28 ,  G01N23/225 ,  G01N23/2255 ,  H01J2237/16 ,  H01J2237/18 ,  H01J2237/2817 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

    摘要： In a pattern inspection device of the present invention having at least three electron-optical systems, detection signals approximately simultaneously obtained from identical circuit patterns are compared with each other. Further, areas around plural electron sources can be maintained at high degrees of vacuum by evacuating an electron gun chamber mounted with plural electron guns independently of a sample chamber. Further, electric fields and magnetic fields are confined in each electron-optical system by a shield electrode which makes it possible to evacuate an electron beam path to a high degree of vacuum, and at the same time, secondary electrons and reflected electrons are detected in the same electron-optical system by setting the samples to a negative voltage and accelerating secondary electrons and reflected electrons toward the electron source side in the direction of the electron beam axis. Thus, defect determination in pattern inspection is performable substantially simultaneously, and at the same time, the throughput of the inspections is improvable in proportion to the number of the electron-optical systems. Further, three or more electron sources are operable in a stable manner in high vacuum states, and signals from closely arranged electron-optical systems are detectable with high accuracy, and accurate inspections are performable.

    摘要翻译： 在具有至少三个电子 - 光学系统的本发明的图案检查装置中，将从相同电路图形大致同时获得的检测信号彼此进行比较。 此外，通过与安装有多个电子枪的电子枪室独立于样品室排出，可以将多个电子源周围的区域保持在高真空度。 此外，通过屏蔽电极将电场和磁场限制在每个电子 - 光学系统中，该屏蔽电极使得可以将电子束路径排出到高真空度，同时二次电子和反射电子被检测到 相同的电子 - 光学系统通过将样品设置为负电压并且在电子束轴的方向上将二次电子和反射电子加速朝向电子源侧。 因此，图案检查中的缺陷确定可以基本上同时执行，并且同时，检查的吞吐量可以与电子 - 光学系统的数量成比例地改善。 此外，三个或更多个电子源可以以高真空状态稳定地操作，并且来自紧密排列的电子 - 光学系统的信号可以高精度地检测，并且可以进行准确的检查。