Techniques for reducing bowing in power transistor devices
    5.
    发明申请
    Techniques for reducing bowing in power transistor devices 有权
    在功率晶体管器件中减少弓形的技术

    公开(公告)号:US20050189616A1

    公开(公告)日:2005-09-01

    申请号:US10788678

    申请日:2004-02-27

    CPC分类号: H01L29/66234 H01L29/0657

    摘要: Power transistor devices and techniques for reducing bowing in such devices are provided. In one aspect, a power transistor device is provided. The power transistor device comprises a substrate, a device film formed on the substrate and an adhesion layer formed on a side of the substrate opposite the device film, wherein at least a portion of the adhesion layer is at least partially segmented. The power transistor device thereby exhibits a reduced amount of bowing relative to an amount of bowing expected without the segmenting of the adhesion layer. The power transistor device may be part of an integrated circuit.

    摘要翻译: 提供了功率晶体管器件和用于减少这种器件中的弓形的技术。 一方面,提供了一种功率晶体管器件。 功率晶体管器件包括衬底,形成在衬底上的器件膜和形成在衬底相对于器件膜的一侧上的粘附层,其中粘附层的至少一部分至少部分地被分割。 因此,功率晶体管器件相对于预期的弯曲量而显示减少的弯曲量,而没有粘附层的分割。 功率晶体管器件可以是集成电路的一部分。

    Semiconductor device with improved thermal characteristics
    8.
    发明申请
    Semiconductor device with improved thermal characteristics 审中-公开
    具有改善热特性的半导体器件

    公开(公告)号:US20050184385A1

    公开(公告)日:2005-08-25

    申请号:US10784756

    申请日:2004-02-23

    摘要: A semiconductor device includes a substrate and an active region formed in the substrate proximate an upper surface of the substrate. The active region includes at least one circuit element formed therein. At least one channel is formed in a back surface of the substrate opposite the upper surface of the substrate, the channel being formed proximate the active region. The channel is substantially filled with one or more layers of a thermally conductive material and configured so as to provide a thermal conduction path for conducting heat away from the active region.

    摘要翻译: 半导体器件包括衬底和形成在衬底中的靠近衬底的上表面的有源区。 有源区包括形成在其中的至少一个电路元件。 在衬底的与衬底的上表面相对的背表面中形成至少一个沟道,该沟道靠近有源区形成。 通道基本上填充有一层或多层导热材料,并且构造成提供用于将热量从有源区域传导出来的热传导路径。