Micro electro mechanical systems device, method of manufacturing the same and micro electro mechanical systems module
    5.
    发明授权
    Micro electro mechanical systems device, method of manufacturing the same and micro electro mechanical systems module 有权
    微机电系统装置,制造方法及微机电系统模块

    公开(公告)号:US06961182B2

    公开(公告)日:2005-11-01

    申请号:US10910795

    申请日:2004-08-03

    申请人: Akihiro Murata

    发明人: Akihiro Murata

    摘要: A micro electro mechanical systems (MEMS) device includes a first substrate on which an electrode is formed, a movable substrate having at least a moving part and a periphery supporting member, and a second substrate having a concave portion. A space that includes a part of the concave portion is formed by jointing the first substrate, the movable substrate, and the second substrate together. The moving part inside the space moves when a voltage is applied between the electrode and the moving part through the periphery supporting member, and a part of the first substrate protrudes outside a side surface of the second substrate.

    摘要翻译: 微电子机械系统(MEMS)装置包括其上形成有电极的第一基板,至少具有移动部分和周边支撑部件的可移动基板以及具有凹部的第二基板。 包括凹部的一部分的空间通过将第一基板,可动基板和第二基板接合在一起而形成。 当通过周边支撑构件在电极和移动部件之间施加电压时,空间内的移动部分移动,并且第一基板的一部分突出到第二基板的侧表面的外侧。

    Analyzer
    7.
    发明申请
    Analyzer 有权
    分析仪

    公开(公告)号:US20050111008A1

    公开(公告)日:2005-05-26

    申请号:US10953876

    申请日:2004-09-29

    申请人: Akihiro Murata

    发明人: Akihiro Murata

    摘要: An analyzer includes an optical tunable filter 1 for selectively outputting light having a predetermined wavelength, and a PD 421 for receiving light outputted from the optical tunable filter 1 and then passed through or reflected by an object to be measured. The optical tunable filter 1 includes a first substrate 3 including a movable portion 31 having a light transmitting property; a second substrate 2 having a light transmitting property, the second substrate being provided so as to be opposed to the first substrate; a first gap 21 and a second gap 22 which are respectively provided between the movable portion 31 of the first substrate 3 and the second substrate 2; an interference portion which cases interference with light that enters the optical tunable filter 1 and that has the predetermined wavelength between the movable portion and the second substrate 2 by means of the second gap 22; and a driving portion for changing a distance of the second gap 22 by displacing the movable portion 31 with respect to the second substrate 2 using the first gap 21.

    摘要翻译: 分析器包括用于选择性地输出具有预定波长的光的光学可调谐滤光器1和用于接收从光学可调谐滤光器1输出的光然后通过或被待测物体反射的PD 421。 光可调谐滤光器1包括具有透光性的可动部31的第一基板3; 具有透光性的第二基板2,第二基板设置成与第一基板相对; 分别设置在第一基板3的可动部31和第二基板2之间的第一间隙21和第二间隙22; 干涉部分,其通过第二间隙22干扰进入光可调谐滤光器1并具有预定波长的可移动部分和第二基板2之间的光; 以及用于通过使用第一间隙21使可动部31相对于第二基板2移位来改变第二间隙22的距离的驱动部。

    Optical tunable filter and method for manufacturing the optical tunable filter
    8.
    发明申请
    Optical tunable filter and method for manufacturing the optical tunable filter 有权
    光可调滤波器及其制造方法

    公开(公告)号:US20050094297A1

    公开(公告)日:2005-05-05

    申请号:US10946621

    申请日:2004-09-21

    CPC分类号: H01P1/20381

    摘要: An optical tunable filter includes a first substrate 3 having a light transmitting property which includes a movable portion 31, a second substrate 20 having a light transmitting property which is provided so as to be opposed to the first substrate, a first gap 21 and a second gap 22 which are respectively provided between the movable portion 31 and the second substrate 20, an interference portion which causes interference of incident light between the movable portion 31 and the second substrate 20 through the second gap 22, and a driving portion which changes a distance of the second gap 22 by displacing the movable portion 31 with respect to the second substrate 20 using the first gap 21. This makes it possible to provide an optical tunable filter having a simpler structure and a smaller size, which can be manufactured through a simplified manufacturing process without using a release hole and can achieve stable driving of a movable portion, and a method for manufacturing such an optical tunable filter.

    摘要翻译: 光可调谐滤光器包括具有透光性的第一基板3,其包括可移动部分31,具有与第一基板相对的透光性的第二基板20,第一间隙21和第二基板 分别设置在可动部31和第二基板20之间的间隙22,通过第二间隙22引起可动部31和第二基板20之间的入射光的干涉的干涉部,以及改变距离 通过使用第一间隙21使可动部31相对于第二基板20移位。 这使得可以提供一种具有更简单的结构和更小尺寸的光学可调滤波器,其可以通过简化的制造工艺而不使用释放孔来制造并且可以实现可移动部分的稳定驱动,以及制造这种 光学可调滤波器。