公开(公告)号：US5372213A

公开(公告)日：1994-12-13

申请号：US965940

申请日：1992-10-23

申请人： Masahiro Hasebe ,  Yoshinori Miyaishi ,  Satoru Wakuta ,  Yukihiro Minezawa ,  Takeshi Hara ,  Shigeo Tsuzuki

发明人： Masahiro Hasebe ,  Yoshinori Miyaishi ,  Satoru Wakuta ,  Yukihiro Minezawa ,  Takeshi Hara ,  Shigeo Tsuzuki

IPC分类号： B60K1/02 ,  B60K7/00 ,  B60K11/02 ,  B60K17/04 ,  B60K17/16

CPC分类号： F16H57/0416 ,  B60K1/02 ,  B60K11/02 ,  B60K17/046 ,  B60K7/0007 ,  B60L1/003 ,  B60L15/2054 ,  F16H57/0441 ,  F16H57/0476 ,  B60K17/16 ,  B60K2001/006 ,  B60K2007/0038 ,  B60K2007/0092 ,  B60Y2306/03 ,  F16H2200/0021 ,  Y02T10/645 ,  Y02T10/72 ,  Y02T10/7275

摘要： An electric vehicle includes a drive motor for generating a output drive torque, a torque transmission train for transmitting the output torque to the drive wheels of the electric vehicle and an oil circulating circuit for feeding oil to the drive motor and the torque transmission train. The oil circulating circuit includes: a mechanical drive unit driven by the torque transmission train and adapted to be driven by the rotation of the running motor; and an electric prime mover separate from and in addition to the drive motor.

摘要翻译： 电动车辆包括用于产生输出驱动转矩的驱动电动机，用于将输出转矩传递到电动车辆的驱动轮的转矩传递系，以及用于将油输送到驱动电动机和转矩传递系的油循环回路。 油循环回路包括：由转矩传递系驱动的机械驱动单元，其适于由行进马达的旋转驱动; 以及与驱动马达分开并且与驱动马达相除的电动机。

公开(公告)号：US5903061A

公开(公告)日：1999-05-11

申请号：US695773

申请日：1996-08-08

申请人： Shigeo Tsuzuki ,  Satoru Tanaka ,  Takeshi Hara ,  Manabu Watanabe ,  Kenji Omote

发明人： Shigeo Tsuzuki ,  Satoru Tanaka ,  Takeshi Hara ,  Manabu Watanabe ,  Kenji Omote

IPC分类号： B60K1/00 ,  B60K6/20 ,  B60K6/365 ,  B60K6/48 ,  B60K6/547 ,  B60K17/04 ,  B60L11/12 ,  B60L11/14 ,  B60W10/00 ,  B60W10/02 ,  B60W10/04 ,  B60W10/06 ,  B60W10/08 ,  B60W10/10 ,  B60W10/12 ,  B60W10/26 ,  B60W20/00 ,  F02D29/06 ,  F16H61/02 ,  F16H63/50 ,  F02N11/06

CPC分类号： B60W20/11 ,  B60K6/365 ,  B60K6/48 ,  B60K6/547 ,  B60L11/12 ,  B60W10/02 ,  B60W10/06 ,  B60W10/08 ,  B60W10/10 ,  B60W10/26 ,  B60W20/00 ,  B60L2240/423 ,  B60W2510/244 ,  B60W2710/0666 ,  B60W2710/083 ,  F16H2200/0043 ,  F16H61/0213 ,  Y02T10/6221 ,  Y02T10/6286 ,  Y02T10/642 ,  Y02T10/7005 ,  Y02T10/7077 ,  Y10S903/903 ,  Y10S903/91 ,  Y10S903/919 ,  Y10S903/945 ,  Y10S903/946 ,  Y10T477/23 ,  Y10T477/333 ,  Y10T477/347

摘要： A control system for a vehicular drive unit having an engine, a motor-generator for acting as a motor and a generator, a planetary gear including at least three rotary elements, a battery for storing electric power as generated by the motor-generator and for feeding electric power to drive the motor-generator, an engine controller for causing the engine to output a target output value on a best mileage curve; and a motor-generator controller for controlling the motor-generator. When the output of the motor-generator corresponding to a target output value of the engine is within an outputtable region of the motor-generator, the motor-generator controller causes the motor-generator to output a reaction torque corresponding to the output torque of the engine. When the output of the motor-generator is outside of the outputtable region, the motor-generator controller changes the target output value of the engine so that the output of the motor-generator is within the outputtable region, to thereby change the output of the motor-generator in accordance with the changed target output value of said engine.

摘要翻译： 一种用于具有发动机的车辆驱动单元的控制系统，用作电动机的电动发电机和发电机，包括至少三个旋转元件的行星齿轮，用于存储由电动发电机产生的电力的电池， 馈送电力来驱动电动发电机，发动机控制器，用于使发动机在最佳里程曲线上输出目标输出值; 以及用于控制电动发电机的电动发电机控制器。 当与发动机的目标输出值相对应的电动发电机的输出在电动发电机的输出区域内时，电动发电机控制器使电动发电机输出对应于发电机的输出转矩的反作用转矩 发动机。 当电动发电机的输出在输出区域之外时，电动发电机控制器改变发动机的目标输出值，使得电动发电机的输出在可输出区域内，从而改变发动机的输出 根据所述发动机的目标输出值的变化，电动发电机。

公开(公告)号：US5846155A

公开(公告)日：1998-12-08

申请号：US684934

申请日：1996-07-19

申请人： Takao Taniguchi ,  Shoichi Miyagawa ,  Kazumasa Tsukamoto ,  Shigeo Tsuzuki ,  Satoru Tanaka ,  Takeshi Inuzuka ,  Masashi Hattori ,  Takeshi Hara

发明人： Takao Taniguchi ,  Shoichi Miyagawa ,  Kazumasa Tsukamoto ,  Shigeo Tsuzuki ,  Satoru Tanaka ,  Takeshi Inuzuka ,  Masashi Hattori ,  Takeshi Hara

IPC分类号： F02D29/02 ,  B60K6/20 ,  B60K6/365 ,  B60K6/48 ,  B60K6/485 ,  B60K6/543 ,  B60K17/04 ,  B60L11/12 ,  B60L11/14 ,  B60W10/02 ,  B60W10/04 ,  B60W10/06 ,  B60W10/08 ,  B60W10/10 ,  B60W10/101 ,  B60W10/105 ,  B60W10/109 ,  B60W10/26 ,  B60W20/00 ,  F16H3/72 ,  F16H61/02 ,  F16H61/66 ,  F16H63/50 ,  B60K6/00

CPC分类号： B60W20/30 ,  B60K6/365 ,  B60K6/48 ,  B60K6/543 ,  B60L11/14 ,  B60L11/1862 ,  B60W10/02 ,  B60W10/06 ,  B60W10/08 ,  B60W10/10 ,  B60W10/26 ,  B60W20/00 ,  B60W2510/244 ,  B60W2520/10 ,  F16H61/66 ,  Y02T10/6221 ,  Y02T10/6286 ,  Y02T10/70 ,  Y02T10/7005 ,  Y02T10/7044 ,  Y02T10/705 ,  Y02T10/7077 ,  Y10S903/903 ,  Y10S903/91 ,  Y10S903/918 ,  Y10S903/945 ,  Y10S903/946 ,  Y10T477/20

摘要： A vehicular drive unit having a combustion engine, a motor-generator for converting electric energy coming from a battery into mechanical energy to output the converted mechanical energy or for converting mechanical energy into electrical energy to store the converted electrical energy in the battery, and a planetary gear including at least three rotary elements. The vehicular drive unit further includes a continuously variable transmission for changing the revolution of an input member continuously variably to output the changed revolution to the drive wheels of the vehicle. The planetary gear has a first rotary element connected to the output shaft of the combustion engine, a secondary element acting in reaction against the first rotary element and connected to the motor-generator, and a third rotary element connected to the input member of the continuously variable transmission.

摘要翻译： 一种具有内燃机的车辆驱动单元，用于将来自电池的电能转换为机械能的电动发电机，以输出转换的机械能或将机械能转换为电能以将转换的电能存储在电池中，以及 包括至少三个旋转元件的行星齿轮。 车辆驱动单元还包括无级变速器，用于连续地变化地改变输入构件的转动，以将改变的转速输出到车辆的驱动轮。 行星齿轮具有连接到内燃机的输出轴的第一旋转元件，与第一旋转元件反作用并连接到电动发电机的次要元件，以及连接到连续的输入构件的第三旋转元件 变速传动。

公开(公告)号：US5713814A

公开(公告)日：1998-02-03

申请号：US690806

申请日：1996-08-01

申请人： Takeshi Hara ,  Shigeo Tsuzuki ,  Satoru Tanaka ,  Manabu Watanabe ,  Kenji Omote

发明人： Takeshi Hara ,  Shigeo Tsuzuki ,  Satoru Tanaka ,  Manabu Watanabe ,  Kenji Omote

IPC分类号： B60K17/04 ,  B60K6/20 ,  B60K6/365 ,  B60K6/48 ,  B60K6/547 ,  B60L11/12 ,  B60L11/14 ,  B60W10/02 ,  B60W10/04 ,  B60W10/06 ,  B60W10/08 ,  B60W10/10 ,  B60W10/12 ,  B60W10/26 ,  B60W20/00 ,  F02D29/06 ,  F16H3/72 ,  F16H61/00 ,  F16H61/02 ,  B60K6/00 ,  B60K8/00

CPC分类号： B60W20/13 ,  B60K6/365 ,  B60K6/48 ,  B60K6/547 ,  B60L11/12 ,  B60L11/14 ,  B60L11/1862 ,  B60L11/1872 ,  B60L15/20 ,  B60W10/02 ,  B60W10/06 ,  B60W10/08 ,  B60W10/10 ,  B60W10/26 ,  B60W20/00 ,  B60L2240/421 ,  B60L2240/441 ,  B60W2510/0638 ,  B60W2510/081 ,  B60W2510/244 ,  F16H2200/0043 ,  Y02T10/6221 ,  Y02T10/6286 ,  Y02T10/645 ,  Y02T10/7005 ,  Y02T10/7044 ,  Y02T10/705 ,  Y02T10/7077 ,  Y02T10/72 ,  Y02T10/7275 ,  Y10S903/903 ,  Y10S903/91 ,  Y10S903/919 ,  Y10S903/945 ,  Y10S903/946 ,  Y10T477/26

摘要： A control system for a vehicular drive unit having an engine, a motor-generator for acting as a motor and a generator; a power transmission including a planetary gear composed of at least three rotary elements and a mechanism for selectively connecting/releasing the rotary elements; a battery for storing electric power generated by the motor-generator and for supplying a driving electric power; a residue detector for detecting the state of charge of the battery; and a controller for controlling the engine, the motor-generator and the connecting/releasing mechanism in accordance with an output signal from the residue detector. The first rotary element of the planetary gear is connected to the output shaft of the engine; the second rotary element, as acting a reaction against the first rotary element, is connected to the motor-generator; and the third rotary element is connected to an output member for transmitting the drive power to wheels. The controller includes mode switching capability for switching the mode when the battery is in an ordinary state or in a low charge state, to a power split mode, in which the motor-generator outputs a reaction torque against the output torque of the engine so that the connecting/releasing mechanism can rotate the first, second and third rotary elements individually and, when the battery is in a full charge state, to a parallel hybrid mode, in which the motor-generator adds a torque to the output torque of the engine so that the connecting/releasing mechanism can rotate the first and second rotary elements together.

摘要翻译： 一种用于具有发动机的车辆驱动单元的控制系统，用作电动机的电动发电机和发电机; 包括由至少三个旋转元件构成的行星齿轮的动力传递装置和用于选择性地连接/释放旋转元件的机构; 用于存储由所述电动发电机产生的电力并用于提供驱动电力的电池; 残留检测器，用于检测电池的充电状态; 以及根据来自残留检测器的输出信号控制发动机，电动发电机和连接/释放机构的控制器。 行星齿轮的第一旋转元件连接到发动机的输出轴; 作为对第一旋转元件的反作用的第二旋转元件连接到电动发电机; 并且第三旋转元件连接到用于将驱动力传递到车轮的输出构件。 控制器包括用于在电池处于普通状态或处于低充电状态时切换模式的模式切换功能，其中电动发电机输出相对于发动机的输出转矩的反作用转矩的功率分配模式，使得 连接/释放机构可以单独地旋转第一，第二和第三旋转元件，并且当电池处于满充电状态时，电动发电机向发动机的输出转矩增加转矩的并联混合模式 使得连接/释放机构可以将第一和第二旋转元件旋转在一起。

公开(公告)号：US06269895B1

公开(公告)日：2001-08-07

申请号：US09166958

申请日：1998-10-06

申请人： Takao Tanuguchi ,  Shoichi Miyagawa ,  Kazumasa Tsukamoto ,  Shigeo Tsuzuki ,  Kenji Omote ,  Seiji Suzuki ,  Takeshi Hara

发明人： Takao Tanuguchi ,  Shoichi Miyagawa ,  Kazumasa Tsukamoto ,  Shigeo Tsuzuki ,  Kenji Omote ,  Seiji Suzuki ,  Takeshi Hara

IPC分类号： B60K100

CPC分类号： B60W20/10 ,  B60K6/365 ,  B60K6/383 ,  B60K6/40 ,  B60K6/46 ,  B60K6/48 ,  B60K6/543 ,  B60W10/02 ,  B60W10/06 ,  B60W10/08 ,  B60W10/101 ,  B60W10/107 ,  B60W10/30 ,  B60W20/00 ,  F16H37/0846 ,  F16H61/0025 ,  F16H61/0028 ,  F16H61/66 ,  F16H61/662 ,  Y02T10/6221 ,  Y02T10/6286 ,  Y10S903/903 ,  Y10S903/91 ,  Y10S903/918 ,  Y10S903/945 ,  Y10S903/946 ,  Y10S903/951

摘要： In a state a vehicle is stopped at an intersection, an infinitely variable transmission is in a neutral position, a motor/generator rotates with a low speed, an oil pump and an auxiliary equipment are in rotating state. At that time, an input clutch is disengaged, and the internal engine is stopped. When the vehicle is started, a continuously variable transmission performs continuous shift control from the neutral position using hydraulic pressure from an oil pump, and the rotation of the motor/generator is transmitted to drive wheels via a ring gear of a planetary gear. After the vehicle has started driving, the input clutch is engaged and the internal engine is started. The vehicle is driven while the motor/generator assists driving or the motor/generator charges batteries based on operation of the internal engine.

摘要翻译： 在车辆停在交叉点的状态下，无级变速器处于中立位置，电动机/发电机以低速旋转，油泵和辅助设备处于旋转状态。 此时，输入离合器分离，内部发动机停止。 当车辆启动时，无级变速器使用来自油泵的液压从中立位置进行连续变速控制，并且电动机/发电机的旋转通过行星齿轮的齿圈传递到驱动轮。 在车辆开始行驶之后，接合输入离合器并启动内部发动机。 在电机/发电机协助驾驶或电机/发电机根据内部发动机的操作对电池充电时，车辆被驱动。

公开(公告)号：US5801499A

公开(公告)日：1998-09-01

申请号：US676807

申请日：1996-07-08

申请人： Shigeo Tsuzuki ,  Takeshi Hara ,  Manabu Watanabe ,  Kenji Omote ,  Satoru Tanaka

发明人： Shigeo Tsuzuki ,  Takeshi Hara ,  Manabu Watanabe ,  Kenji Omote ,  Satoru Tanaka

IPC分类号： B60K6/365 ,  B60K6/387 ,  B60K6/48 ,  B60K6/54 ,  B60L11/12 ,  B60L15/20 ,  B60W10/06 ,  B60W10/08 ,  B60W10/10 ,  B60W10/18 ,  B60W10/26 ,  B60W20/00 ,  F02D29/06 ,  H02P5/20

CPC分类号： B60W20/10 ,  B60K6/22 ,  B60K6/34 ,  B60K6/365 ,  B60K6/387 ,  B60K6/48 ,  B60K6/54 ,  B60L11/12 ,  B60L15/20 ,  B60W10/06 ,  B60W10/08 ,  B60W10/10 ,  B60W10/18 ,  B60W10/26 ,  B60W20/00 ,  F02D29/06 ,  B60L2240/24 ,  B60L2240/445 ,  B60W2510/068 ,  B60W2510/244 ,  Y02T10/6221 ,  Y02T10/6286 ,  Y02T10/645 ,  Y02T10/7005 ,  Y02T10/7077 ,  Y02T10/7275 ,  Y10S903/91 ,  Y10S903/914 ,  Y10S903/917 ,  Y10S903/945 ,  Y10S903/946 ,  Y10S903/947

摘要： A control system for a vehicular drive unit that includes an engine, a motor-generator connected to the output shaft of the engine and which acts as both a motor and a generator, a battery for storing the energy recovered by the motor-generator as electric power and for feeding electric power to drive the motor-generator, a first clutch for connecting the motor-generator and the wheels, a stop state detector for detecting the stopped state of the vehicle, and a controller for controlling the engine, the motor-generator and the first clutch. When the stopped state is detected by the stop state detector, the controller releases the first clutch, interrupts the feed of fuel to the engine, and feeds electric power to the motor-generator to drive the motor-generator to thereby hold the rotation of the engine substantially at an idling RPM.

摘要翻译： 一种用于车辆驱动单元的控制系统，其包括发动机，连接到发动机的输出轴并且用作电动机和发电机的电动发电机，用于将由电动发电机回收的能量存储为电的电池 用于驱动电动发电机的电力和用于驱动电动发电机的第一离合器，用于连接电动发电机和车轮的第一离合器，用于检测车辆的停止状态的停止状态检测器和用于控制发动机的控制器， 发电机和第一离合器。 当由停止状态检测器检测到停止状态时，控制器释放第一离合器，中断向发动机的燃料供给，并向电动发电机供电以驱动电动发电机从而保持 发动机基本上处于空转RPM。

公开(公告)号：US5720690A

公开(公告)日：1998-02-24

申请号：US662259

申请日：1996-06-14

申请人： Takeshi Hara ,  Shigeo Tsuzuki ,  Satoru Tanaka ,  Manabu Watanabe ,  Kenji Omote

发明人： Takeshi Hara ,  Shigeo Tsuzuki ,  Satoru Tanaka ,  Manabu Watanabe ,  Kenji Omote

IPC分类号： B60K6/48 ,  B60K6/547 ,  B60L15/20 ,  B60W10/08 ,  B60W10/10 ,  B60W10/18 ,  B60W20/00 ,  B60W30/18 ,  F16D61/00 ,  F16H59/24 ,  F16H59/44 ,  F16H59/54 ,  F16H59/58 ,  F16H61/00 ,  F16H61/02 ,  B60K6/04

CPC分类号： B60W20/13 ,  B60K6/22 ,  B60K6/48 ,  B60K6/547 ,  B60L15/2054 ,  B60W10/08 ,  B60W10/10 ,  B60W10/18 ,  B60W30/18127 ,  F16D61/00 ,  B60L2240/24 ,  B60L2260/26 ,  B60T2270/602 ,  B60W20/00 ,  B60W2520/10 ,  B60W2710/0644 ,  B60W2710/065 ,  F16H2061/0015 ,  F16H59/24 ,  F16H59/44 ,  F16H59/54 ,  F16H59/58 ,  F16H61/0213 ,  Y02T10/6221 ,  Y02T10/645 ,  Y02T10/7275 ,  Y10S903/919 ,  Y10S903/945 ,  Y10S903/947 ,  Y10T477/23 ,  Y10T477/333 ,  Y10T477/347

摘要： A control system for a vehicular drive unit including an engine; a transmission connected to the output shaft of the engine and having a plurality of gear stages for transmitting the power to wheels; a motor generator connected to the output shaft of the engine for recovering the braking energy of the wheels through the transmission by generating electricity; a battery for storing the braking energy, which is recovered by the motor generator, as an electric power; a running status detector for detecting the running status of the vehicle; and controller for controlling the transmission and the motor generator in accordance with the output signal coming from the running status detector. The control means includes a motor generator controller for causing the motor generator to generate the electricity, when the running status detecting means detects a deceleration state of the vehicle, thereby to recover the braking energy; and a shift controller for shifting the transmission to such a gear stage between the present gear stage and a gear stage having a gear ratio higher than that of the present gear stage as maximizes the recoverable braking energy.

摘要翻译： 一种用于包括发动机的车辆驱动单元的控制系统; 连接到发动机的输出轴的变速器，并具有用于将动力传递到车轮的多个齿轮级; 连接到发动机的输出轴的电动发电机，用于通过发电来恢复车轮通过变速器的制动能量; 用于存储由电动发电机回收的制动能量的电池作为电力; 运行状态检测器，用于检测车辆的运行状态; 以及根据来自运行状态检测器的输出信号控制变速器和电动发电机的控制器。 控制装置包括：电机发生器控制器，用于当运行状态检测装置检测到车辆的减速状态时使电动发电机产生电力，从而恢复制动能量; 以及变速控制器，用于将变速器换档到当前齿轮级与齿轮比高于当前齿轮级的齿轮级之间的齿轮级，以使可恢复的制动能量最大化。

公开(公告)号：US09024311B2

公开(公告)日：2015-05-05

申请号：US13379670

申请日：2010-04-06

申请人： Takeshi Hara ,  Hirohiko Nishiki ,  Yoshimasa Chikama ,  Kazuo Nakagawa ,  Yoshifumi Ohta ,  Tetsuya Aita ,  Masahiko Suzuki ,  Okifumi Nakagawa ,  Yoshiyuki Miyajima ,  Michiko Takei ,  Yoshiyuki Harumoto ,  Hinae Mizuno

发明人： Takeshi Hara ,  Hirohiko Nishiki ,  Yoshimasa Chikama ,  Kazuo Nakagawa ,  Yoshifumi Ohta ,  Tetsuya Aita ,  Masahiko Suzuki ,  Okifumi Nakagawa ,  Yoshiyuki Miyajima ,  Yuuji Mizuno ,  Michiko Takei ,  Yoshiyuki Harumoto

IPC分类号： H01L29/786 ,  H01L21/336 ,  H01L27/12

CPC分类号： H01L27/1288 ,  H01L27/1225 ,  H01L29/7869

摘要： The present invention provides a thin film transistor including an oxide semiconductor layer (4) for electrically connecting a signal electrode (6a) and a drain electrode (7a), the an oxide semiconductor layer being made from an oxide semiconductor; and a barrier layer (6b) made from at least one selected from the group consisting of Ti, Mo, W, Nb, Ta, Cr, nitrides thereof, and alloys thereof, the barrier layer (6b) being in touch with the signal electrode (6a) and the oxide semiconductor layer (4) and separating the signal electrode (6a) from the oxide semiconductor layer (4). Because of this configuration, the thin film transistor can form and maintain an ohmic contact between the first electrode and the channel layer, thereby being a thin film transistor with good properties.

摘要翻译： 本发明提供了一种薄膜晶体管，其包括用于电连接信号电极（6a）和漏电极（7a）的氧化物半导体层（4），所述氧化物半导体层由氧化物半导体制成; 以及由选自Ti，Mo，W，Nb，Ta，Cr，氮化物中的至少一种及其合金制成的阻挡层（6b），阻挡层（6b）与信号电极 （6a）和氧化物半导体层（4），并且将信号电极（6a）与氧化物半导体层（4）分离。 由于这种结构，薄膜晶体管可以在第一电极和沟道层之间形成并保持欧姆接触，从而成为具有良好性能的薄膜晶体管。

公开(公告)号：US08582072B2

公开(公告)日：2013-11-12

申请号：US12933763

申请日：2009-03-03

申请人： Tohru Okabe ,  Takeshi Hara ,  Tetsuya Aita ,  Tsuyoshi Inoue

发明人： Tohru Okabe ,  Takeshi Hara ,  Tetsuya Aita ,  Tsuyoshi Inoue

IPC分类号： G02F1/1333

CPC分类号： B29D11/0073 ,  B32B37/0015 ,  B32B37/12 ,  B32B37/144 ,  B32B37/28 ,  B32B38/0008 ,  B32B43/006 ,  B32B2037/1253 ,  B32B2307/538 ,  B32B2307/734 ,  B32B2309/02 ,  B32B2309/027 ,  B32B2309/10 ,  B32B2310/0831 ,  B32B2310/0843 ,  B32B2315/08 ,  B32B2457/20 ,  G02F1/1303 ,  G02F1/133305 ,  G02F2201/54

摘要： A method for manufacturing a display device 10 includes a substrate supporting step for supporting a plastic substrate 19 on a support substrate 50, with the plastic substrate 19 curved, and a thin film lamination step for laminating a plurality of thin films on the plastic substrate 19 supported on the support substrate 50.

摘要翻译： 制造显示装置10的方法包括：基板支撑步骤，用于将塑料基板19支撑在支撑基板50上，塑料基板19弯曲;以及薄膜层叠步骤，用于在塑料基板19上层叠多个薄膜 支撑在支撑基板50上。

公开(公告)号：US08283218B2

公开(公告)日：2012-10-09

申请号：US12917078

申请日：2010-11-01

申请人： Yuichi Saito ,  Takeshi Hara

发明人： Yuichi Saito ,  Takeshi Hara

IPC分类号： H01L21/77 ,  H01L21/8234

CPC分类号： H01L27/1285 ,  H01L27/1288 ,  H01L27/1292

摘要： A production method of a semiconductor element having a channel includes forming a resist pattern film on a thin film formed on a substrate, and pattering the thin film by etching. The production method also includes forming a second resist pattern film by applying a fluid resist material inside a channel groove after channel etching or inside a resist groove formed above a channel region before channel etching. The production method may also include forming a gate electrode, a gate insulating film, a semiconductor film, and a conductive film on an insulating substrate. The method may include applying the fluid resist material inside the channel groove, thereby forming the second resist pattern film, and patterning the semiconductor film using at least the second resist pattern film.

摘要翻译： 具有通道的半导体元件的制造方法包括在形成于基板上的薄膜上形成抗蚀剂图案膜，并通过蚀刻对薄膜进行图案化。 该制造方法还包括通过在沟道蚀刻之后在沟道槽内部施加流动抗蚀剂材料或在通道蚀刻之前形成在通道区域上方的抗蚀剂槽内部形成第二抗蚀剂图案膜。 制造方法还可以包括在绝缘基板上形成栅电极，栅绝缘膜，半导体膜和导电膜。 该方法可以包括将流体抗蚀剂材料施加在沟道槽内，从而形成第二抗蚀剂图案膜，并使用至少第二抗蚀剂图案膜来图案化半导体膜。