Apparatus for fabrication semiconductor device
    1.
    发明授权
    Apparatus for fabrication semiconductor device 失效
    制造半导体器件的设备

    公开(公告)号:US5104023A

    公开(公告)日:1992-04-14

    申请号:US681670

    申请日:1991-04-08

    IPC分类号: B28D5/00

    摘要: An apparatus for making a semiconductor device comprises a flexible mat, support shafts for supporting the flexible mat in a substantially horizontal position, a pressing plate having a generally convex body and supported for movement up and down, and a drive mechanism for driving one of the pressing plate and the wafer relative to the other of the pressing plate and the wafer so as to move up and down. The wafer having the first and second surfaces opposite to each other with the chips formed on the first surface thereof is placed on the mat with the chips confronting the flexible mat. The convex body of the pressing plate is pressed against the second surface of the wafer to separate the chips on the wafer individually.

    Surface grinding machine
    4.
    发明授权
    Surface grinding machine 失效
    平面磨床

    公开(公告)号:US5035087A

    公开(公告)日:1991-07-30

    申请号:US129487

    申请日:1987-12-07

    IPC分类号: B24B7/16 B24B49/16

    CPC分类号: B24B7/16 B24B49/16

    摘要: A surface grinding machine comprises a wheel head vertically movably supported; a cup-shaped diamond wheel supported by a rotatable wheel shaft at one end of the wheel head and having an abrasive grain layer of Young's modulus (10-15).times.10.sup.4 kgf/cm.sup.2 at the lower end of the wheel; a wheel shaft driving motor for rotating the cup-shaped diamond wheel supported by the wheel head; a servomotor for vertically moving the wheel head; a suitable number of chuck tables for fixing the surface of a III-V group compound semiconductor wafer on which elements have been fabricated; an index table for rotatably supporting the chuck tables; a chuck table driving motor for turning the chuck tables; a main shaft motor current analysis circuit for detecting the current value of the wheel shaft driving motor; a main shaft rotation number analysis circuit for detecting the number of rotations of the wheel shaft driving motor, and a feed speed control circuit for controlling the serevomotor in such a manner as to decrease the feed speed when the grinding resistance is greater than a predetermined resistance value, and increase the feed speed when the grinding resistance is smaller than the predetermined resistance value.

    Suction device
    5.
    发明授权
    Suction device 失效
    抽吸装置

    公开(公告)号:US4904012A

    公开(公告)日:1990-02-27

    申请号:US293614

    申请日:1989-01-05

    CPC分类号: H01L21/6838 Y10T29/53191

    摘要: Suction device for handling a semiconductor wafer comprises a handling section having a plurality of suction ports opened in the same plane as the surface of the wafer and located within an area smaller than that of the surface of the wafer, a pressure reduction device connected to the suction port, an opening acts to release negative pressure produced by the pressure reduction device when a finger is released therefrom, and a grip integrally coupled to the handling section.

    摘要翻译: 用于处理半导体晶片的抽吸装置包括处理部分,该处理部分具有在与晶片表面相同的平面内开口并且位于比晶片表面小的区域内的多个吸入口;压力降低装置, 抽吸口,当手指被释放时,开口用于释放由减压装置产生的负压,以及一体地联接到处理部的手柄。

    SYSTEM FOR TRANSPORTING RED-HOT COKE
    8.
    发明申请
    SYSTEM FOR TRANSPORTING RED-HOT COKE 审中-公开
    运输红辣椒的系统

    公开(公告)号:US20120261251A1

    公开(公告)日:2012-10-18

    申请号:US13531949

    申请日:2012-06-25

    IPC分类号: C10B33/08

    CPC分类号: C10B39/02 C10B33/00 C10B39/12

    摘要: A system for transporting red-hot coke including a non-rotary coke receiving car which travels on a first rail for receiving coke from at least one coke oven chamber; at least two rotary coke buckets, the at least two rotary coke buckets being mounted on a turntable, wherein the turntable is operable to orbit the at least two rotary coke buckets around its center, and the turntable travels along a second rail; one or two sets of discharge devices, each containing a discharge chute and a dust collector hood, which is operable to discharge the coke from the non-rotary coke receiving car to the at least two rotary coke buckets; and a hoist for hoisting and transporting the at least two rotary coke buckets to a coke dry quenching unit.

    摘要翻译: 一种用于运输红热焦炭的系统,包括在第一轨道上运行的非旋转焦炭接收轿厢,用于从至少一个焦炉室接收焦炭; 至少两个旋转焦炭桶,所述至少两个旋转焦炭桶安装在转台上,其中所述转盘可操作以使所述至少两个旋转焦炭桶围绕其中心轨道,并且所述转盘沿着第二轨道行进; 一组或两组排放装置,每个排放装置包括排放槽和集尘罩,其可操作以将焦炭从非旋转焦炭接收轿厢排放到至少两个旋转焦炭桶中; 以及用于将至少两个旋转焦炭桶提升并运送到焦炭干燥淬火单元的提升机。

    AIR SUPPLY APPARATUS AND COOLING FACILITY FOR HOT GRAIN/LUMP MATERIAL PROVIDED WITH THE AIR SUPPLY APPARATUS
    9.
    发明申请
    AIR SUPPLY APPARATUS AND COOLING FACILITY FOR HOT GRAIN/LUMP MATERIAL PROVIDED WITH THE AIR SUPPLY APPARATUS 审中-公开
    空气供应装置的空气供应装置和冷却装置

    公开(公告)号:US20110168352A1

    公开(公告)日:2011-07-14

    申请号:US12996898

    申请日:2009-06-09

    IPC分类号: F28F9/00

    摘要: An air supply apparatus includes a plurality of movable carriages arranged along a circular carriage path; a movable circular duct arranged along the carriage path and connected to each of the carriages through a connection air duct; a water sealing device including a circular water seal chamber arranged along the carriage path and a water sealing plate having a lower end part thereof sunk in sealing water in the circular water seal chamber; a stationary circular duct arranged along the carriage path and fitted into the movable circular duct through the water sealing device to be freely movable, wherein the movable circular duct and the stationary circular duct form a circular air path; and an atmospheric zone that stops leakage of air in the carriage being provided in a predetermined position of the carriage path, wherein an upper space of the circular water seal chamber on a circular air path side communicates with the circular air path on a movable circular duct side, the circular air path on the movable circular duct side communicates in a circumferential direction, and a connection air duct closing mechanism that closes the connection air duct is provided in the atmospheric zone.

    摘要翻译: 空气供给装置包括沿圆形滑架路径布置的多个可移动滑架; 可移动的圆形管道,沿着所述滑架路径布置并通过连接空气管道连接到每个所述托架; 一个水封装置,包括一个沿着滑架路径布置的圆形水封室,一个水封板,其下端部分沉入环形水封室内的水中; 一个固定的圆形管道,沿着滑架路径布置,并通过水封装置装配到可移动的圆形管道中,以便可自由移动,其中可移动的圆形管道和固定的圆形管道形成一个圆形的空气通道; 以及大气区域,其阻止滑架中的空气泄漏设置在所述滑架路径的预定位置,所述圆形空气通道侧上的所述圆形水封室的上部空间与所述圆形空气路径在可移动的圆形管道 在可动圆形管道侧的圆形空气路径沿圆周方向连通,并且在大气区域中设置有关闭连接风道的连接风道关闭机构。