摘要:
A field-effect transistor includes a semi-insulating substrate, a semiconductor layer consisting of successive layers of GaAs compound semiconductor formed on the substrate, a gate electrode forming a Schottky contact with the semiconductor layer, and source and drain electrodes each forming an ohmic contact to the semiconductor layer. A semiconductor layer includes a buffer layer, an active layer, and a contact layer, where the impurity concentration in the contact layer is substantially equal to that in the active layer at the interface therewith. The impurity concentration in the contact layer increases continuously from the interface toward the upper surface of the contact layer. The field-effect transistor achieves a reduction in the ON resistance and an increase in the gate breakdown voltage at the same time, and to reduce power loss and increase efficiency.
摘要:
A compound semiconductor device comprises a substrate formed from a single crystal of silicon, a layer of an insulator formed on a portion of a surface of the substrate, at least one layer of a high resistance compound semiconductor formed on the insulator layer, and at least one layer of a single crystal of a compound semiconductor formed on a different portion of the substrate surface from the insulator layer. The device can be manufactured by forming an insulator layer on one portion of a surface of a single crystal silicon substrate, and growing a compound semiconductor by epitaxy on the insulator layer and on the different portion from the insulator layer. One of useful applications is a hybrid semiconductor device having a compound semiconductor formed from e.g. GaAs on a silicon substrate.
摘要:
A reactive-species supply device is configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object. The reactive-species supply device includes (a) at least one pair of electrodes configured to form the electric discharge space and (b) an electrode protection device configured to protect the electrodes from the treatment gas. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.
摘要:
A radical generator includes a supply tube, a plasma-generating tube, a coil winding about an outer circumference of the plasma-generating tube, for generating an inductively coupled plasma in the plasma-generating tube, an electrode for generating a capacitively coupled plasma in the plasma-generating tube and adding the capacitively coupled plasma to the inductively coupled plasma, and a parasitic-plasma-preventing tube including a dielectric material which extends from a bottom of the plasma-generating tube to an opening of the supply tube in a space between the bottom and the opening, and a tip part thereof is inserted into the supply tube to cover an inner wall of the supply tube for preventing a generation of a parasitic plasma between the electrode and the inner wall of the supply tube.
摘要:
A noise reduction device, including a microphone for detecting noise, a noise controller for reversing the phase of noise detected by the microphone based on information outputted from the microphone, and a speaker for outputting sound based on information outputted from the noise controller, is arranged at a seat surrounded by a shell portion having a cavity, wherein a speaker is disposed in the cavity of the shell portion.
摘要:
A reactive-species supply device is configured to supply a treatment gas to an electric discharge space that is formed by at least one pair of electrodes, for thereby supplying at least a reactive species formed in a plasma, to an object through a reactive-species output port. The reactive-species supply device includes (a) a reactive-species outlet passage disposed between the electric discharge space and the reactive-species output port and (b) an earth ground member disposed in a portion of the reactive-species outlet passage. The portion of the reactive-species outlet passage is distant, by a given distance, from the reactive-species output port. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.
摘要:
A noise control device eliminates a possibility that a noise arriving at a control point is increased as compared to a case where noise control is not performed and has a reduced circuit scale. The device includes a controlling noise detector for detecting a given noise to output a controlling noise signal, a controlling filter section for signal-processing the controlling noise signal, by using a preset fixed filter coefficient, to output a control signal, and a control speaker for reducing the given noise, by emitting toward the control point a control sound based on the control signal. The device also includes a noise determination section for determining whether the given noise is a noise corresponding to the fixed filter coefficient, and an output control section for stopping output of the control signal from the controlling filter section when the given noise does not correspond.
摘要:
A diffracted sound reduction device includes: a reproduction speaker that outputs reproduced sound having properties indicated by an input signal; control speakers each of which reproduces corresponding one of control signals, the diffracted sound being a part of the reproduced sound and arriving at corresponding one of the control points except the control point at the listener's position; and control filters each of which filters the input signal to generate corresponding one of the control signals. Each of the control points faces a corresponding speaker from among the reproduction speaker and the control speakers. Each of the control filters generates the corresponding one of the control signals so that a sound pressure of the diffracted sound at corresponding one of the control points is lower than a sound pressure of direct sound that is a part of the reproduced sound which arrives at the control point of the listener's position.
摘要:
In a noise reduction apparatus for controlling noise up to a predetermined upper limited frequency, a distance from a noise source to control point X is made larger than a distance obtained by subtracting a one-half wavelength from a distance, obtained by adding up a distance from the noise source to a noise detecting microphone, a distance corresponding to time as a sum of respective delay time of the noise detecting microphone, a noise controller, and a control speaker, and a distance from the control speaker to control point X, where one wavelength is a period corresponding to the upper limited frequency.
摘要:
Disclosed is a particle density measuring probe for measuring the density of atoms or molecules in a plasma atmosphere by absorption spectroscopy. The probe has a cylindrical light guiding member provided in the plasma atmosphere. At the front end of the light guiding member, there is provided a reflection plate for reflecting light that has propagated through the cylindrical light guiding member. Behind the reflection plate, in a cross section perpendicular to the longitudinal direction of the light guiding member, a part devoid of a portion of wall surface is provided by a predetermined length in the longitudinal direction. A plasma introducing portion allows mutual contact between light passing through this part devoid of a portion of wall surface and atoms or molecules in the plasma atmosphere. The probe has a main body that guides light in an axial direction by total reflection by a side wall, and that is located behind the plasma introducing portion.