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27 条记录 (耗时 0.017 秒)

    Secure permanent integrated circuit personalization
    1.
    发明授权
    Secure permanent integrated circuit personalization 有权

    公开(公告)号：US10341108B1

    公开(公告)日：2019-07-02

    申请号：US15293090

    申请日：2016-10-13

    申请人： Multibeam Corporation

    发明人： Michael C. Smayling ,  David K. Lam ,  Theodore A. Prescop ,  Kevin M. Monahan

    IPC分类号： H04L29/06 ,  H04L9/32 ,  G06F21/60 ,  G06F3/06 ,  H04L9/08 ,  H04L9/14 ,  H04L9/30

    摘要： Methods, systems and devices for using charged particle beams (CPBs) to write different die-specific, non-volatile, electronically readable data to different dies on a substrate. CPBs can fully write die-specific data within the chip interconnect structure during the device fabrication process, at high resolution and within a small area, allowing one or multiple usefully-sized values to be securely written to service device functions. CPBs can write die-specific data in areas readable or unreadable through a (or any) communications bus. Die-specific data can be used for, e.g.: encryption keys; communications addresses; manufacturing information (including die identification numbers); random number generator improvements; or single, nested, or compartmentalized security codes. Die-specific data and locations for writing die-specific data can be kept in encrypted form when not being written to the substrate to conditionally or permanently prevent any knowledge of said data and locations.

    Secure permanent integrated circuit personalization
    5.
    发明授权
    Secure permanent integrated circuit personalization 有权

    公开(公告)号：US10978303B1

    公开(公告)日：2021-04-13

    申请号：US16400788

    申请日：2019-05-01

    申请人： Multibeam Corporation

    发明人： Michael C. Smayling ,  David K. Lam

    IPC分类号： H01L21/263 ,  H04L9/30 ,  H01L23/00 ,  H01L21/3065 ,  G06F21/60 ,  H01L23/544

    摘要： Methods, systems and devices for using charged particle beams (CPBs) to write different die-specific, non-volatile, electronically readable data to different dies on a substrate. CPBs can fully write die-specific data within the chip interconnect structure during the device fabrication process, at high resolution and within a small area, allowing one or multiple usefully-sized values to be securely written to service device functions. CPBs can write die-specific data in areas readable or unreadable through a (or any) communications bus. Die-specific data can be used for, e.g.: encryption keys; communications addresses; manufacturing information (including die identification numbers); random number generator improvements; or single, nested, or compartmentalized security codes. Die-specific data and locations for writing die-specific data can be kept in encrypted form when not being written to the substrate to conditionally or permanently prevent any knowledge of said data and locations.

    Alignment and registration targets for charged particle beam substrate patterning and inspection
    10.
    发明授权
    Alignment and registration targets for charged particle beam substrate patterning and inspection 有权

    公开(公告)号：US10026589B1

    公开(公告)日：2018-07-17

    申请号：US15454872

    申请日：2017-03-09

    申请人： Multibeam Corporation

    发明人： Kevin M. Monahan ,  Michael C. Smayling ,  Theodore A. Prescop ,  David K. Lam

    IPC分类号： H01J37/22 ,  H01J37/304 ,  H01J37/317 ,  H01J37/30 ,  H01J37/20

    摘要： The present application discloses methods, systems and devices for using charged particle beam tools to pattern and inspect a substrate. The inventors have discovered that it is highly advantageous to use patterns generated using the Hadamard transform as alignment and registration marks (Hadamard targets) for multiple-column charged particle beam substrate processing and inspection tools. Hadamard targets can be written to a substrate using charged particle beams performing, for example, resist-based lithography or resist-less direct processing. High-order Hadamard targets can also be patterned and imaged to obtain superior column performance metrics for applications such as super-rapid beam calibration DOE, column matching, and column performance tracking. Hadamard target blocks can be written highly locally to electrically functional pattern portions, or integrated into said pattern portions, thereby enabling re-registration local and contemporaneous to writing and improving beam targeting accuracy following re-registration. Superior alignment and registration, and column parameter optimization, allow significant yield gains.