LED MODULE, METHOD OF MANUFACTURING THE SAME, AND LED DISPLAY APPARATUS

    公开(公告)号:US20240021751A1

    公开(公告)日:2024-01-18

    申请号:US18222296

    申请日:2023-07-14

    CPC classification number: H01L33/0093 H01L33/06 H01L33/08 H01L33/325

    Abstract: A method of manufacturing an LED module includes forming a first conductivity-type semiconductor base layer on a growth substrate; forming a mask pattern having first to third openings on the first conductivity-type semiconductor base layer, wherein the mask pattern the first to the third openings having different widths and arranged with a same pitch; simultaneously forming first to third light emitting laminates in the first to third openings, respectively; removing the mask pattern from the first conductivity-type semiconductor base layer; and removing an edge region of each of the first to third light emitting laminates, wherein first to third light emitting laminates include a first to third active layers configured to emit light of different wavelengths, respectively.

    PHOTOMASKS AND METHODS OF FABRICATING SEMICONDUCTOR DEVICES USING THE SAME
    3.
    发明申请
    PHOTOMASKS AND METHODS OF FABRICATING SEMICONDUCTOR DEVICES USING THE SAME 审中-公开
    使用该方法制造半导体器件的照片和方法

    公开(公告)号:US20140220481A1

    公开(公告)日:2014-08-07

    申请号:US14136560

    申请日:2013-12-20

    CPC classification number: G03F1/48

    Abstract: The present inventive concept provides a photomask including a substrate, patterns disposed on the substrate, and an anti-contamination layer disposed on the patterns. The anti-contamination layer includes at least one graphene layer. Methods of fabricating a semiconductor device including the same are also provided.

    Abstract translation: 本发明构思提供了一种光掩模,其包括基板,设置在基板上的图案,以及设置在图案上的抗污染层。 抗污染层包括至少一个石墨烯层。 还提供了制造包括该半导体器件的半导体器件的方法。

    NITRIDE SEMICONDUCTOR LIGHT EMITTING DEVICE
    5.
    发明公开

    公开(公告)号:US20240021756A1

    公开(公告)日:2024-01-18

    申请号:US18222223

    申请日:2023-07-14

    CPC classification number: H01L33/325 H01L33/12 H01L33/06

    Abstract: A nitride semiconductor light emitting device includes an active layer provided between P-type and N-type nitride semiconductor layers, a first strain reducing layer including first InGaN films and first GaN films alternately stacked between the N-type nitride semiconductor layer and the active layer, and a second strain reducing layer including a second InGaN film and a second GaN film alternately stacked between the first strain reducing layer and the active layer. The active layer includes an InGaN well layer, a barrier layer, an AlGaN layer between the InGaN well layer and the barrier layer, and an intermediate lattice layer between the InGaN well layer and the AlGaN layer The intermediate lattice layer including a nitride single crystal having a lattice larger than a first lattice of the InGaN well layer and smaller than a second lattice of the AlGaN layer.

    DISPLAY APPARATUS
    6.
    发明公开
    DISPLAY APPARATUS 审中-公开

    公开(公告)号:US20240021145A1

    公开(公告)日:2024-01-18

    申请号:US18222155

    申请日:2023-07-14

    Abstract: A display apparatus includes a display panel including a plurality of pixels each having red, green, and blue LEDs; a display panel driver applying a current to each of the LEDs; a memory storing current intensity information according to target luminance of each of the LEDs; and a processor controlling the display panel driver to apply a current to each of the LEDs based on the current intensity information, wherein the processor is configured to control the display panel driver to apply an additional current to the green LED when a target luminance of the red LED is smaller than a predetermined luminance.

    System of measuring image of pattern in high NA scanning-type EUV mask

    公开(公告)号:US11747289B2

    公开(公告)日:2023-09-05

    申请号:US17509862

    申请日:2021-10-25

    Inventor: Donggun Lee

    CPC classification number: G01N23/22 G03F1/84

    Abstract: A system of measuring an image of a pattern in a high NA scanning-type extreme ultra-violet (EUV) mask is disclosed. The system may include a light source generating an EUV light; an toroidal mirror; an flat mirror allowing light, which is reflected by the toroidal mirror, to be incident into the mask; an beam splitter; a light detection part; an anamorphic zone-plate lens focusing a transmitted portion of a light emitted from the beam splitter on the mask; a stage; and an anamorphic photo sensor, which is configured to measure an energy of a reflected portion of the coherent EUV light, is composed of a detector array, and has different sizes from each other in horizontal and vertical directions of an incidence surface of the detector array.

    SEMICONDUCTOR MEASUREMENT APPARATUS
    8.
    发明公开

    公开(公告)号:US20240125709A1

    公开(公告)日:2024-04-18

    申请号:US18317387

    申请日:2023-05-15

    Abstract: A semiconductor measurement apparatus includes an illuminator configured to output light having a first wavelength band and light having a second wavelength band, different from the first wavelength band, a stage on which a test object is positioned, a camera configured to receive light reflected or scattered from the test object or transmitted through the test object, and a controller configured to control the illuminator and the camera, and to measure, based on information indicated by the light received by the camera, a plurality of structures included in the test object. The controller is configured to set an exposure time of the camera to a first exposure time while the illuminator outputs the light having the first wavelength band, and to set the exposure time of the camera to a second exposure time, different from the first exposure time, while the illuminator outputs the light having the second wavelength band.

    System of measuring image of pattern in scanning type EUV mask

    公开(公告)号:US11914282B2

    公开(公告)日:2024-02-27

    申请号:US17509454

    申请日:2021-10-25

    Inventor: Donggun Lee

    Abstract: A system of measuring an image of a pattern in a scanning type EUV mask may include a high-power laser output unit including a flat mirror and a spherical mirror, which are used to focus a high-power femto-second laser on a gas cell; a coherent EUV light generating portion generating a coherent EUV light; a pin-hole, a graphene filter, and a zirconium (Zr) filter; a stage; an x-ray spherical mirror configured to focus a coherent EUV light; a zone-plate lens placed between the stage and the x-ray spherical mirror; an x-ray flat mirror placed between the zone-plate lens and the x-ray spherical mirror; an order sorting aperture (OSA) placed on the stage and configured to transmit only a first-order diffraction light of the focused coherent EUV light; and a detector portion placed on the stage.

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