Methods of fabricating semiconductor devices

    公开(公告)号:US10211210B2

    公开(公告)日:2019-02-19

    申请号:US15603668

    申请日:2017-05-24

    Abstract: A method of fabricating a semiconductor device includes forming an interlayer insulating structure on a substrate, forming a contact hole that penetrates the interlayer insulating structure to expose the substrate, forming an amorphous silicon layer including a first portion and a second portion, the first portion covering a top surface of the substrate exposed by the contact hole, the second portion covering a sidewall of the contact hole, providing hydrogen atoms into the amorphous silicon layer, and crystallizing the first portion using the substrate as a seed.

    Method of manufacturing a semiconductor device

    公开(公告)号:US09996658B2

    公开(公告)日:2018-06-12

    申请号:US15433835

    申请日:2017-02-15

    CPC classification number: G06F17/5081 G03F1/36

    Abstract: A method for manufacturing a semiconductor device includes obtaining a design layout for a target layer of an optical proximity correction process, the design layout including a first block and a second block being a repetition block of the first block, dividing the design layout into a plurality of patches, performing the optical proximity correction process on the patches of the first block, applying corrected patches of the first block to the patches of the second block, respectively, forming a correction layout by performing the optical proximity correction process on boundary patches of the second block, fabricating a photomask corresponding to the correction layout, and forming patterns on a substrate corresponding to the photomask. Each of the patches is a standard unit on which the optical proximity correction process is performed.

    METHOD FOR MONITORING PROCESS VARIATION INDEX

    公开(公告)号:US20220397829A1

    公开(公告)日:2022-12-15

    申请号:US17719576

    申请日:2022-04-13

    Abstract: A method for monitoring a process variation index includes operations of: obtaining a target parameter to be monitored and a reference parameter used to increase goodness of fit among structural parameters predicted by measuring a structure in a specific location of a wafer; obtaining a reference parameter set in a reference model; and calculating a process variation index capable of confirming a structural change of the structure according to a change in process conditions using the structural parameter and the reference parameter.

    Near field communication (NFC) device and method of detecting resonance frequency of the same

    公开(公告)号:US11411610B2

    公开(公告)日:2022-08-09

    申请号:US16991666

    申请日:2020-08-12

    Abstract: A near field communication (NFC) device includes a resonator including an antenna and a matching circuit, a transmitter and a frequency detector. The transmitter generates a sensing voltage signal at the resonator. With respect to a plurality of measurement periods where each measurement period includes a turn-on period and a turn-off period, the transmitter is enabled to output a radio frequency (RF) signal to the resonator during the turn-on period and disabled during the turn-off period. The frequency detector detects a resonance frequency of the resonator based on the sensing voltage signal. The resonance frequency is accurately detected by measuring the resonance frequency during the plurality of measurement periods. In addition, the resonance frequency is efficiently detected by generating the sensing voltage signal using the transmitter established in the NFC device.

    METHODS OF FABRICATING SEMICONDUCTOR DEVICES

    公开(公告)号:US20200119021A1

    公开(公告)日:2020-04-16

    申请号:US16711833

    申请日:2019-12-12

    Abstract: A method of fabricating a semiconductor device includes forming an interlayer insulating structure on a substrate, forming a contact hole that penetrates the interlayer insulating structure to expose the substrate, forming an amorphous silicon layer including a first portion and a second portion, the first portion covering a top surface of the substrate exposed by the contact hole, the second portion covering a sidewall of the contact hole, providing hydrogen atoms into the amorphous silicon layer, and crystallizing the first portion using the substrate as a seed.

    Input output memory management unit and electronic device having the same

    公开(公告)号:US12032489B2

    公开(公告)日:2024-07-09

    申请号:US18101352

    申请日:2023-01-25

    CPC classification number: G06F12/1027 G06F12/1009

    Abstract: Disclosed is an input output memory management unit (IOMMU) including a first memory device including a translation lookaside buffer (TLB), a second memory device including a translation group table, a plurality of translation request controllers, each of which is configured to perform an address translation operation, and an allocation controller. The allocation controller may be configured to receive a first request including a first page table identifier (ID), a first virtual page number, and a first page offset, looks up the TLB by using the first page table ID and the first virtual page number, look up the translation group table by using the first page table ID and the first virtual page number when a TLB miss for the first request occurs, and allocate a first translation request controller among the plurality of translation request controllers based on a translation group table miss for the first request.

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