公开(公告)号：US06166684A

公开(公告)日：2000-12-26

申请号：US268129

申请日：1999-03-15

申请人： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Hiroshi Koyama ,  Jun Tsukui

发明人： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Hiroshi Koyama ,  Jun Tsukui

IPC分类号： G01C21/20 ,  B64G1/10 ,  B64G1/24 ,  G01S5/00 ,  G01S19/25 ,  G01S19/28 ,  G01S19/51 ,  G05D1/08 ,  H04B7/185

CPC分类号： G01S19/14 ,  B64G1/242 ,  G01S5/0072 ,  G01S19/42

摘要： An artificial satellite navigation system and method. The artificial satellite navigation system includes a global positioning system (GPS) receiver, local satellite, and remote satellite absolute navigation units estimating the position and velocity of a local satellite or a remote satellite and bias and drift of a clock in the receiver. A difference calculation unit calculates differences in position and velocity from the local satellite and remote satellite absolute navigation units. A relative navigation unit estimates the relative position and velocity of the local satellite with respect to the remote satellite. The relative navigation unit navigates the local satellite relative to the remote satellite.

摘要翻译： 人造卫星导航系统及方法。 人造卫星导航系统包括估计本地卫星或远程卫星的位置和速度的全球定位系统（GPS）接收机，本地卫星和远程卫星绝对导航单元以及接收机中时钟的偏置和漂移。 差分计算单元从本地卫星和远程卫星绝对导航单元计算位置和速度的差异。 相对导航单元估计本地卫星相对于远程卫星的相对位置和速度。 相对导航单元相对于远程卫星导航本地卫星。

公开(公告)号：US06480787B2

公开(公告)日：2002-11-12

申请号：US09903744

申请日：2001-07-13

申请人： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Jun Tsukui

发明人： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Jun Tsukui

IPC分类号： G01C2100

CPC分类号： G01S19/51 ,  B64G1/36 ,  G01S5/0072 ,  G01S19/23 ,  G01S19/52

摘要： A global positioning system (GPS) receiving system which achieves an equivalent synchronization in time measurement of GPS signals utilizing software without requiring highly accurate synchronization for receiver clocks with time information embedded in the GPS signals. The GPS receiving system performs a relative navigation process after correcting a pseudorange with a time tag error which is attributable to inaccuracy of receiver clocks of first and second moving objects. A relative navigation process correcting an absolute error of a time tag with a clock bias is also described. A differential computation unit calculates a difference between the first pseudorange and the second pseudorange commonized by the time tag commonizing unit. Correction in a time tag error correction unit is performed for the selected GPS data with a common GPS satellite identification number.

摘要翻译： 一种全球定位系统（GPS）接收系统，其利用软件实现GPS信号的时间测量中的等效同步，而不需要在GPS信号中嵌入时间信息的接收机时钟的高精度同步。 GPS接收系统在利用可归因于第一和第二移动物体的接收器时钟的不准确的时间标签误差校正伪距之后执行相对导航处理。 还描述了用时钟偏差校正时间标签的绝对误差的相对导航处理。 差分计算单元计算第一伪距和由时间标签公用化单元公共的第二伪距之差。 对于具有公共GPS卫星识别号码的所选择的GPS数据执行时间标签误差校正单元的校正。

公开(公告)号：US06227496B1

公开(公告)日：2001-05-08

申请号：US09610603

申请日：2000-07-05

申请人： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Hiroshi Sakashita ,  Hiroo Yonechi

发明人： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Hiroshi Sakashita ,  Hiroo Yonechi

IPC分类号： B64G136

CPC分类号： G05D1/0883 ,  B64G1/24 ,  B64G1/288 ,  B64G1/36 ,  B64G1/361 ,  G01C21/025

摘要： An attitude determination system for an artificial satellite capable of performing star identification without need for the aid of ground station includes an image processing module (17) for processing star images observed at predetermined time points by a star sensor (16) mounted on the artificial satellite (1) for arithmetically determining direction vectors of the observed stars, a rotation estimating module (18) for estimating a rotational motion of the artificial satellite (1) between an attitude of the artificial satellite at a predetermined time point and an attitude of the artificial satellite at another time point, an elongation estimating module (19) for estimating elongations between the direction vectors of plural stars the images of which are picked up at a same time point by the star sensor and estimating the elongations between the direction vectors of plural stars the images of which are picked up at different time points by the star sensor on the basis of the estimated rotational motion, a star identifying module (20) for establishing correspondences between a plurality of the stars for which relation of the elongation has been determined and stars on a star catalog for identifying the stars, and an attitude angle estimating module (21) for estimating an attitude angle of the artificial satellite on the basis of result of identification of the stars.

摘要翻译： 能够在不需要地面站的帮助下进行星型识别的人造卫星的姿势确定系统包括：图像处理模块（17），用于处理在预定时间点由安装在人造卫星上的星形传感器（16）观察到的星形图像 （1），用于对所述观测星的方向矢量进行算术确定;旋转估计模块，用于估计所述人造卫星在预定时间点的姿态与人造卫星的姿态之间的旋转运动; 卫星在另一个时间点，延伸率估计模块（19），用于估计多个恒星的方向向量之间的延伸，其中图像由星形传感器在同一时间点被拾取并且估计多个恒星的方向向量之间的伸长 其基于估计的星形传感器在不同时间点拾取图像 旋转运动的星形识别模块（20），用于在已经确定了伸长关系的多个星星之间建立对应关系，并且用于识别恒星的星形目录上的恒星;以及姿态角估计模块（21），用于估计 人造卫星的姿态角基于星星识别的结果。

公开(公告)号：US07305149B2

公开(公告)日：2007-12-04

申请号：US10230251

申请日：2002-08-29

申请人： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Masafumi Yamaguchi ,  Akito Takeya

发明人： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Masafumi Yamaguchi ,  Akito Takeya

IPC分类号： G06K9/54 ,  G06K9/60

CPC分类号： G06T19/006 ,  G01C21/26 ,  G06T7/74 ,  G06T17/05 ,  G06T2200/16

摘要： An image collating center has a communication unit, a processing unit, and a memory unit. The processing unit accesses a geographic information database through a communication network, extracts appropriate geographic information from the geographic information database based on a picked-up image and additional information transmitted from an image provider, and generates a simulated image assumed to be viewed from the image provider. Further, the image collating center estimates the image pickup position and the image pickup attitude of the image provider through collating the simulated image with the picked-up image and returns the estimated image pickup position and image pickup attitude of the image provider to the image provider through the communication network.

摘要翻译： 图像对照中心具有通信单元，处理单元和存储单元。 处理单元通过通信网络访问地理信息数据库，基于拍摄的图像和从图像提供者发送的附加信息从地理信息数据库中提取适当的地理信息，并且生成假设从图像中观看的模拟图像 提供者 此外，图像对照中心通过将模拟图像与拾取图像进行核对来估计图像提供者的图像拾取位置和图像拾取姿势，并将图像提供者的估计图像拾取位置和图像拾取姿态返回给图像提供者 通过通信网络。

公开(公告)号：US06523786B2

公开(公告)日：2003-02-25

申请号：US09879918

申请日：2001-06-14

申请人： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Haruhiko Shimoji ,  Masao Inoue ,  Norimasa Yoshida ,  Katsumasa Miyatake

发明人： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Haruhiko Shimoji ,  Masao Inoue ,  Norimasa Yoshida ,  Katsumasa Miyatake

IPC分类号： B64G136

CPC分类号： B64G1/361 ,  B64G2001/245

摘要： An apparatus for determining the attitude of an artificial satellite by narrowing attitude candidates to a correct one in a short time. The apparatus has star sensors, a star catalog data base, star identification sections in each of which star images output from the star sensors are collated with a star catalog with respect to each star sensor to output a group of corresponding candidates, attitude computation sections for computing a value of an attitude candidate of the artificial satellite with respect to each corresponding candidate, an attitude updating section for updating the value of the attitude candidate on the basis of the star images output from the star sensor and the star catalog, and an attitude propagation section for computing the value of the attitude candidate at the present sampling time from the value of the attitude candidate at the preceding sampling time and the artificial satellite's angular velocity. An attitude candidate unification section for comparing and combining the values of attitude candidates into one candidate is provided in a loop including the attitude updating section and the attitude propagation section.

摘要翻译： 一种用于通过在短时间内将姿态候选缩小到正确的姿态来确定人造卫星的姿态的装置。 该装置具有星形传感器，星型目录数据库，星型识别部分，其中从星形传感器输出的星形图像与星形传感器相关的星形目录进行整理，以输出一组相应的候选者，姿态计算部分用于 计算人造卫星相对于每个相应候选人的姿态候选的值，姿态更新部分，用于基于从星形传感器和星形目录输出的星形图像来更新姿态候选者的值，以及姿态 传播部分，用于根据前一采样时间的姿态候选值和人造卫星的角速度计算当前采样时间的姿态候选值。 在姿态更新部和姿态传播部的回路中设置用于将姿态候选的值进行比较和组合成一个候选的姿态候补统一部。

公开(公告)号：US6102338A

公开(公告)日：2000-08-15

申请号：US919193

申请日：1997-08-28

申请人： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Hiroshi Sakashita ,  Hiroo Yonechi

发明人： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Hiroshi Sakashita ,  Hiroo Yonechi

IPC分类号： G01C21/24 ,  B64G1/24 ,  B64G1/28 ,  B64G1/36 ,  G01C21/02 ,  G05D1/08

CPC分类号： G05D1/0883 ,  B64G1/24 ,  B64G1/288 ,  B64G1/361 ,  G01C21/025 ,  B64G1/36

摘要： An attitude determination system for an artificial satellite capable of performing star identification without need for the aid of ground station includes an image processing module (17) for processing star images observed at predetermined time points by a star sensor (16) mounted on the artificial satellite (1) for arithmetically determining direction vectors of the observed stars, a rotation estimating module (18) for estimating a rotational motion of the artificial satellite (1) between an attitude of the artificial satellite at a predetermined time point and an attitude of the artificial satellite at another time point, an elongation estimating module (19) for estimating elongations between the direction vectors of plural stars the images of which are picked up at a same time point by the star sensor and estimating the elongations between the direction vectors of plural stars the images of which are picked up at different time points by the star sensor on the basis of the estimated rotational motion, a star identifying module (20) for establishing correspondences between a plurality of the stars for which relation of the elongation has been determined and stars on a star catalog for identifying the stars, and an attitude angle estimating module (21) for estimating an attitude angle of the artificial satellite on the basis of result of identification of the stars.

摘要翻译： 能够在不需要地面站的帮助下进行星型识别的人造卫星的姿势确定系统包括：图像处理模块（17），用于处理在预定时间点由安装在人造卫星上的星形传感器（16）观察到的星形图像 （1），用于对所述观测星的方向矢量进行算术确定;旋转估计模块，用于估计所述人造卫星在预定时间点的姿态与人造卫星的姿态之间的旋转运动; 卫星在另一个时间点，延伸率估计模块（19），用于估计多个恒星的方向向量之间的延伸，其中图像由星形传感器在同一时间点被拾取并且估计多个恒星的方向向量之间的伸长 其基于估计的星形传感器在不同时间点拾取图像 旋转运动的星形识别模块（20），用于在已经确定了伸长关系的多个星星之间建立对应关系，并且用于识别恒星的星形目录上的恒星;以及姿态角估计模块（21），用于估计 人造卫星的姿态角基于星星识别的结果。

公开(公告)号：US20130228684A1

公开(公告)日：2013-09-05

申请号：US13853418

申请日：2013-03-29

申请人： Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Kenichi Suematsu ,  Tsutomu Karimata ,  Nobuharu Noji

发明人： Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Kenichi Suematsu ,  Tsutomu Karimata ,  Nobuharu Noji

IPC分类号： H01J37/26

CPC分类号： H01J37/261 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2441 ,  H01J2237/2446

摘要： An inspecting apparatus for reducing a time loss associated with a work for changing a detector is characterized by comprising a plurality of detectors 11, 12 for receiving an electron beam emitted from a sample W to capture image data representative of the sample W, and a switching mechanism M for causing the electron beam to be incident on one of the plurality of detectors 11, 12, where the plurality of detectors 11, 12 are disposed in the same chamber MC. The plurality of detectors 11, 12 can be an arbitrary combination of a detector comprising an electron sensor for converting an electron beam into an electric signal with a detector comprising an optical sensor for converting an electron beam into light and converting the light into an electric signal. The switching mechanism M may be a mechanical moving mechanism or an electron beam deflector.

公开(公告)号：US20120235036A1

公开(公告)日：2012-09-20

申请号：US13420731

申请日：2012-03-15

申请人： Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Yoshihiko Naito ,  Yasushi Toma ,  Tsutomu Karimata ,  Takehide Hayashi ,  Kiwamu Tsukamoto ,  Tatsuya Kohama ,  Noboru Kobayashi

发明人： Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Yoshihiko Naito ,  Yasushi Toma ,  Tsutomu Karimata ,  Takehide Hayashi ,  Kiwamu Tsukamoto ,  Tatsuya Kohama ,  Noboru Kobayashi

IPC分类号： G01N23/225

CPC分类号： H01J37/073 ,  G01N23/22 ,  G01N23/223 ,  G01N23/2251 ,  G01N2223/611 ,  H01J1/34 ,  H01J37/09 ,  H01J37/10 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J37/29 ,  H01J2237/0048 ,  H01J2237/022 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/045 ,  H01J2237/0458 ,  H01J2237/0473 ,  H01J2237/0492 ,  H01J2237/061 ,  H01J2237/06333 ,  H01J2237/166 ,  H01J2237/186 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/2448 ,  H01J2237/2482 ,  H01J2237/2485 ,  H01J2237/2817 ,  H01J2237/2855 ,  H01J2237/2857

摘要： An inspection device for inspecting a surface of an inspection object using a beam includes a beam generator capable of generating one of either charge particles or an electromagnetic wave as a beam, a primary optical system capable of guiding and irradiating the beam to the inspection object supported within a working chamber, a secondary optical system capable of including a first movable numerical aperture and a first detector which detects secondary charge particles generated from the inspection object, the secondary charge particles passing through the first movable numerical aperture, an image processing system capable of forming an image based on the secondary charge particles detected by the first detector; and a second detector arranged between the first movable numerical aperture and the first detector and which detects a location and shape at a cross over location of the secondary charge particles generated from the inspection object.

摘要翻译： 用于使用光束检查检查对象的表面的检查装置包括能够产生电荷粒子或电磁波之一作为光束的光束发生器，能够将所述光束引导并照射到被检查对象的主光学系统 在工作室内，能够包括第一可移动数值孔径的二次光学系统和检测从检查对象产生的二次电荷粒子的第一检测器，通过第一可移动数值孔径的二次电荷粒子，能够 基于由所述第一检测器检测到的次级电荷粒子形成图像; 以及第二检测器，其布置在第一可移动数值孔径和第一检测器之间，并且检测在从检查对象生成的次级充电颗粒的交叉位置处的位置和形状。

公开(公告)号：US08053726B2

公开(公告)日：2011-11-08

申请号：US12216233

申请日：2008-07-01

申请人： Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Toshifumi Kimba ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Tsutomu Karimata ,  Shin Oowada ,  Mutsumi Saito ,  Yuichiro Yamazaki ,  Takamitsu Nagai ,  Ichirota Nagahama

发明人： Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Toshifumi Kimba ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Tsutomu Karimata ,  Shin Oowada ,  Mutsumi Saito ,  Yuichiro Yamazaki ,  Takamitsu Nagai ,  Ichirota Nagahama

IPC分类号： H01J37/28

CPC分类号： H01J29/70 ,  G01N23/225 ,  G01N23/2251 ,  G01N23/227 ,  H01J37/06 ,  H01J37/073 ,  H01J37/141 ,  H01J37/185 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/266 ,  H01J37/28 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L21/6719 ,  H01L21/67213

摘要： An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical system; a stage system 50 for holding and moving the object relative to the electron-optical system; a mini-environment chamber 20 for supplying a clean gas to the object to prevent dust from contacting to the object; a working chamber 31 for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambers 41, 42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; and a loader 60 for transferring the object to the stage system through the loading chambers.

摘要翻译： 电子束检查装置包括：电子光学装置70，具有用于从电子束源向一个电子束照射物体的电子 - 光学系统;以及用于检测由电子束投射的二次电子图像的检测器， 光学系统; 用于相对于电子 - 光学系统保持和移动物体的平台系统50; 微型环境室20，用于向物体供应清洁气体，以防止灰尘与物体接触; 用于容纳平台装置的工作室31，工作室可控制为具有真空气氛; 设置在迷你环境室和工作室之间的至少两个装载室41,42适于独立控制以具有真空气氛; 以及用于通过装载室将物体传送到舞台系统的装载器60。

公开(公告)号：US07741601B2

公开(公告)日：2010-06-22

申请号：US12073892

申请日：2008-03-11

申请人： Nobuharu Noji ,  Tohru Satake ,  Hirosi Sobukawa ,  Toshifumi Kimba ,  Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Tsutomu Karimata ,  Kenichi Suematsu ,  Yutaka Tabe ,  Ryo Tajima ,  Keiichi Tohyama

发明人： Nobuharu Noji ,  Tohru Satake ,  Hirosi Sobukawa ,  Toshifumi Kimba ,  Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Tsutomu Karimata ,  Kenichi Suematsu ,  Yutaka Tabe ,  Ryo Tajima ,  Keiichi Tohyama

IPC分类号： G01N23/225 ,  G01N23/00 ,  A61N5/00

CPC分类号： H01J37/20 ,  G01N23/2204 ,  G01N23/225 ,  H01J37/05 ,  H01J37/28 ,  H01J2237/202 ,  H01J2237/2441 ,  H01J2237/2446 ,  H01J2237/2801 ,  H01J2237/2817 ,  H01L21/6833 ,  H01L2223/54466

摘要： A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover from electrons emitted from an electron beam source 25•1, then forms an image under a desired magnification in the direction of a sample W to produce a crossover. When the crossover is passed, electrons as noises are removed from the crossover with an aperture, an adjustment is made so that the crossover becomes a parallel electron beam to irradiate the substrate in a desired sectional form. The electron beam is produced such that the unevenness of illuminance is 10% or less. Electrons emitted from the sample W are detected by a detector 25•11.

摘要翻译： 提供了一种用于进一步提高速度的系统，即提高SEM型检查装置中的生产量。 用于检查基板的表面的检查装置产生从电子束源25·1发射的电子的交叉，然后在样品W的方向上以期望的倍率形成图像以产生交叉。 当交叉通过时，作为噪声的电子从具有孔的交叉点移除，进行调整，使得交叉成为平行电子束以以期望的分段形式照射基板。 产生电子束，使照度不均匀为10％以下。 从样品W发射的电子被检测器25·11检测。