POLING TREATMENT METHOD, MAGNETIC FIELD POLING DEVICE, AND PIEZOELECTRIC FILM
    2.
    发明申请
    POLING TREATMENT METHOD, MAGNETIC FIELD POLING DEVICE, AND PIEZOELECTRIC FILM 有权
    抛光处理方法,磁场检测装置和压电膜

    公开(公告)号:US20140319405A1

    公开(公告)日:2014-10-30

    申请号:US14350864

    申请日:2011-10-14

    IPC分类号: H01L41/187 H01L41/257

    摘要: To perform poling treatment in a simple procedure by dry process. An aspect of the invention is a magnetic field poling device including: a first holding part configured to hold a film-to-be-poled 2; a second holding part configured to hold a magnet generating a magnetic field B to the film-to-be-poled 2; and a moving mechanism configured to move the first holding part or the second holding part in a direction perpendicular to the direction of the magnetic field B.

    摘要翻译: 通过干法在简单的程序中进行极化处理。 本发明的一个方面是一种磁场极化装置,包括:第一保持部分,被配置成保持被膜极2; 第二保持部构造成将产生磁场B的磁体保持在被膜极2上; 以及移动机构,被配置为沿着与磁场B的方向垂直的方向移动第一保持部或第二保持部。

    FERROELECTRIC FILM AND METHOD FOR MANUFACTURING THE SAME
    3.
    发明申请
    FERROELECTRIC FILM AND METHOD FOR MANUFACTURING THE SAME 有权
    电磁膜及其制造方法

    公开(公告)号:US20140242379A1

    公开(公告)日:2014-08-28

    申请号:US14235626

    申请日:2011-07-29

    IPC分类号: B05D5/00

    摘要: To produce a ferroelectric film formed of a lead-free material. The ferroelectric film according to an aspect of the present invention includes a (K1-XNaX)NbO3 film or a BiFeO3 film having a perovskite structure and a crystalline oxide preferentially oriented to (001) formed on at least one of the upper side and lower side of the (K1-XNaX)NbO3 film or BiFeO3 film, and X satisfies the formula below 0.3≦X≦0.7.

    摘要翻译: 制造由无铅材料形成的铁电体膜。 根据本发明的一个方面的铁电体膜包括(K1-XNaX)NbO3膜或具有钙钛矿结构的BiFeO 3膜和优先取向成(001)的结晶氧化物,其形成在上侧和下侧的至少一个上 的(K1-XNaX)NbO3膜或BiFeO3膜,X满足下式0.3≤nlE; X< l1; 0.7。

    SUBSTRATE TREATMENT APPARATUS AND METHOD FOR MANUFACTURING THIN FILM
    4.
    发明申请
    SUBSTRATE TREATMENT APPARATUS AND METHOD FOR MANUFACTURING THIN FILM 有权
    基板处理装置和制造薄膜的方法

    公开(公告)号:US20130059076A1

    公开(公告)日:2013-03-07

    申请号:US13643873

    申请日:2010-04-28

    IPC分类号: B05C11/08 B05D3/12

    摘要: To provide a substrate treatment apparatus capable of suppressing adherence of dust to a film coated on a substrate. As an aspect of the present invention is a substrate treatment apparatus provided with a spin-coating treatment chamber 4a for coating a film on the substrate by spin-coating, a first air-conditioning mechanism that regulates an amount of dust in the air in the spin-coating treatment chamber, an annealing treatment chamber 7a for performing lamp annealing treatment on the film coated on the substrate, a conveying chamber 2a that is connected to each of the spin-coating treatment chamber and the annealing treatment chamber and is for conveying the substrate between the spin-coating treatment chamber and the annealing treatment chamber each other, and a second air-conditioning mechanism that regulate an amount of dust in the air in the conveying chamber.

    摘要翻译: 提供能够抑制灰尘对涂布在基材上的膜的粘附性的基板处理装置。 作为本发明的一个方面,提供一种基板处理装置,该基板处理装置具有旋转涂布处理室4a,用于通过旋转涂布在基板上涂覆膜;第一空调机构,其调节空气中的灰尘量 旋涂处理室,对涂布在基板上的膜进行灯退火处理的退火处理室7a,与旋涂处理室和退火处理室连接的输送室2a, 旋转涂布处理室和退火处理室之间的基板,以及调节输送室中的空气中的灰尘量的第二空调机构。