Removal of metal veils from via holes
    4.
    发明授权
    Removal of metal veils from via holes 有权
    从通孔去除金属面纱

    公开(公告)号:US06610599B1

    公开(公告)日:2003-08-26

    申请号:US10175459

    申请日:2002-06-19

    IPC分类号: H01L2144

    摘要: A method for making an ICD or MEOD structure includes dry etching a structure to produce one or more via holes in an upper layer of the structure. The dry etching step stops on a metal layer that underlies the upper layer in the structure. The method also includes cleaning the dry etched structure with an aqueous solution that includes hydrogen peroxide and either an ammonium salt or an amine salt.

    摘要翻译: 制造ICD或MEOD结构的方法包括干式蚀刻结构以在该结构的上层中产生一个或多个通孔。 干蚀刻步骤停止在结构中的上层下方的金属层上。 该方法还包括用包含过氧化氢和铵盐或胺盐的水溶液清洗干蚀刻结构。